11/5/2011	9:43:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	9:43:20 AM	Recipe started at 9:43 AM
11/5/2011	9:43:20 AM	Helium valve closed
11/5/2011	9:43:20 AM	H2 valve closed
11/5/2011	9:43:20 AM	BCl3 valve closed
11/5/2011	9:43:20 AM	PH3 valve closed
11/5/2011	9:43:20 AM	SiCl4 pre valve closed
11/5/2011	9:43:20 AM	SiCl4 post valve closed
11/5/2011	9:43:20 AM	Main Vac valve closed
11/5/2011	9:43:20 AM	Bubbler valve closed
11/5/2011	9:43:20 AM	Bypass valve opened
11/5/2011	9:43:20 AM	Helium MFC set to  0.000000
11/5/2011	9:43:21 AM	H2 MFC set to  0.000000
11/5/2011	9:43:21 AM	BCl3 MFC set to  0.000000
11/5/2011	9:43:21 AM	PHl3 MFC set to  0.000000
11/5/2011	9:43:21 AM	SiCl4 MFC set to  0.000000
11/5/2011	9:43:21 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	9:43:21 AM	Tube furnace set to 0
11/5/2011	9:43:21 AM	Helium valve closed
11/5/2011	9:43:21 AM	H2 valve closed
11/5/2011	9:43:21 AM	BCl3 valve closed
11/5/2011	9:43:21 AM	PH3 valve closed
11/5/2011	9:43:21 AM	SiCl4 pre valve closed
11/5/2011	9:43:21 AM	SiCl4 post valve closed
11/5/2011	9:43:21 AM	Main Vac valve closed
11/5/2011	9:43:21 AM	Bubbler valve closed
11/5/2011	9:43:21 AM	Bypass valve opened
11/5/2011	9:43:21 AM	Helium MFC set to  0.000000
11/5/2011	9:43:21 AM	H2 MFC set to  0.000000
11/5/2011	9:43:21 AM	BCl3 MFC set to  0.000000
11/5/2011	9:43:21 AM	PHl3 MFC set to  0.000000
11/5/2011	9:43:21 AM	SiCl4 MFC set to  0.000000
11/5/2011	9:43:21 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	9:43:21 AM	Tube furnace set to 0
11/5/2011	9:43:37 AM	Helium valve closed
11/5/2011	9:43:37 AM	H2 valve closed
11/5/2011	9:43:37 AM	BCl3 valve closed
11/5/2011	9:43:37 AM	PH3 valve closed
11/5/2011	9:43:37 AM	SiCl4 pre valve closed
11/5/2011	9:43:37 AM	SiCl4 post valve closed
11/5/2011	9:43:37 AM	Bypass valve closed
11/5/2011	9:43:37 AM	Bubbler valve closed
11/5/2011	9:43:37 AM	Main Vac valve opened
11/5/2011	9:43:37 AM	Helium MFC set to  0.000000
11/5/2011	9:43:37 AM	H2 MFC set to  0.000000
11/5/2011	9:43:37 AM	BCl3 MFC set to  0.000000
11/5/2011	9:43:37 AM	PHl3 MFC set to  0.000000
11/5/2011	9:43:37 AM	SiCl4 MFC set to  0.000000
11/5/2011	9:43:37 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	9:43:37 AM	Tube furnace set to 0
11/5/2011	9:43:38 AM	Run finished at 9:43 AM
11/5/2011	9:43:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	9:43:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	9:43:44 AM	Recipe started at 9:43 AM
11/5/2011	9:43:44 AM	Helium valve closed
11/5/2011	9:43:44 AM	H2 valve closed
11/5/2011	9:43:44 AM	BCl3 valve closed
11/5/2011	9:43:44 AM	PH3 valve closed
11/5/2011	9:43:44 AM	SiCl4 pre valve closed
11/5/2011	9:43:44 AM	SiCl4 post valve closed
11/5/2011	9:43:44 AM	Main Vac valve closed
11/5/2011	9:43:44 AM	Bypass valve closed
11/5/2011	9:43:44 AM	Bubbler valve closed
11/5/2011	9:43:44 AM	Helium MFC set to  0.000000
11/5/2011	9:43:44 AM	H2 MFC set to  0.000000
11/5/2011	9:43:44 AM	BCl3 MFC set to  0.000000
11/5/2011	9:43:44 AM	PHl3 MFC set to  0.000000
11/5/2011	9:43:44 AM	SiCl4 MFC set to  0.000000
11/5/2011	9:43:44 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	9:43:44 AM	Tube furnace set to 0
11/5/2011	9:43:47 AM	H2 valve closed
11/5/2011	9:43:47 AM	BCl3 valve closed
11/5/2011	9:43:47 AM	PH3 valve closed
11/5/2011	9:43:47 AM	SiCl4 pre valve closed
11/5/2011	9:43:47 AM	SiCl4 post valve closed
11/5/2011	9:43:47 AM	Main Vac valve closed
11/5/2011	9:43:47 AM	Bypass valve closed
11/5/2011	9:43:47 AM	Bubbler valve closed
11/5/2011	9:43:47 AM	Helium valve opened
11/5/2011	9:43:47 AM	Helium MFC set to  500.000000
11/5/2011	9:43:47 AM	H2 MFC set to  0.000000
11/5/2011	9:43:47 AM	BCl3 MFC set to  0.000000
11/5/2011	9:43:47 AM	PHl3 MFC set to  0.000000
11/5/2011	9:43:47 AM	SiCl4 MFC set to  0.000000
11/5/2011	9:43:47 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	9:43:47 AM	Tube furnace set to 0
11/5/2011	9:44:52 AM	Helium valve closed
11/5/2011	9:44:52 AM	H2 valve closed
11/5/2011	9:44:52 AM	BCl3 valve closed
11/5/2011	9:44:52 AM	PH3 valve closed
11/5/2011	9:44:52 AM	SiCl4 pre valve closed
11/5/2011	9:44:52 AM	SiCl4 post valve closed
11/5/2011	9:44:52 AM	Main Vac valve closed
11/5/2011	9:44:52 AM	Bypass valve closed
11/5/2011	9:44:52 AM	Bubbler valve closed
11/5/2011	9:44:52 AM	Helium MFC set to  0.000000
11/5/2011	9:44:52 AM	H2 MFC set to  0.000000
11/5/2011	9:44:52 AM	BCl3 MFC set to  0.000000
11/5/2011	9:44:52 AM	PHl3 MFC set to  0.000000
11/5/2011	9:44:52 AM	SiCl4 MFC set to  0.000000
11/5/2011	9:44:52 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	9:44:53 AM	Tube furnace set to 0
11/5/2011	9:44:54 AM	Run finished at 9:44 AM
11/5/2011	9:44:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	10:06:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	10:06:58 AM	Recipe started at 10:06 AM
11/5/2011	10:06:58 AM	Helium valve closed
11/5/2011	10:06:58 AM	H2 valve closed
11/5/2011	10:06:58 AM	BCl3 valve closed
11/5/2011	10:06:58 AM	PH3 valve closed
11/5/2011	10:06:58 AM	SiCl4 pre valve closed
11/5/2011	10:06:58 AM	SiCl4 post valve closed
11/5/2011	10:06:58 AM	Main Vac valve closed
11/5/2011	10:06:58 AM	Bubbler valve closed
11/5/2011	10:06:58 AM	Bypass valve opened
11/5/2011	10:06:58 AM	Helium MFC set to  0.000000
11/5/2011	10:06:58 AM	H2 MFC set to  0.000000
11/5/2011	10:06:58 AM	BCl3 MFC set to  0.000000
11/5/2011	10:06:58 AM	PHl3 MFC set to  0.000000
11/5/2011	10:06:58 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:06:58 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:06:58 AM	Tube furnace set to 0
11/5/2011	10:08:14 AM	Helium valve closed
11/5/2011	10:08:14 AM	H2 valve closed
11/5/2011	10:08:14 AM	BCl3 valve closed
11/5/2011	10:08:14 AM	PH3 valve closed
11/5/2011	10:08:14 AM	SiCl4 pre valve closed
11/5/2011	10:08:14 AM	SiCl4 post valve closed
11/5/2011	10:08:14 AM	Main Vac valve closed
11/5/2011	10:08:14 AM	Bubbler valve closed
11/5/2011	10:08:14 AM	Bypass valve opened
11/5/2011	10:08:14 AM	Helium MFC set to  0.000000
11/5/2011	10:08:14 AM	H2 MFC set to  0.000000
11/5/2011	10:08:14 AM	BCl3 MFC set to  0.000000
11/5/2011	10:08:14 AM	PHl3 MFC set to  0.000000
11/5/2011	10:08:14 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:08:14 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:08:14 AM	Tube furnace set to 0
11/5/2011	10:09:14 AM	Helium valve closed
11/5/2011	10:09:14 AM	H2 valve closed
11/5/2011	10:09:14 AM	BCl3 valve closed
11/5/2011	10:09:14 AM	PH3 valve closed
11/5/2011	10:09:14 AM	SiCl4 pre valve closed
11/5/2011	10:09:14 AM	SiCl4 post valve closed
11/5/2011	10:09:14 AM	Bypass valve closed
11/5/2011	10:09:14 AM	Bubbler valve closed
11/5/2011	10:09:14 AM	Main Vac valve opened
11/5/2011	10:09:14 AM	Helium MFC set to  0.000000
11/5/2011	10:09:14 AM	H2 MFC set to  0.000000
11/5/2011	10:09:14 AM	BCl3 MFC set to  0.000000
11/5/2011	10:09:14 AM	PHl3 MFC set to  0.000000
11/5/2011	10:09:14 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:09:14 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:09:14 AM	Tube furnace set to 0
11/5/2011	10:09:15 AM	Run finished at 10:09 AM
11/5/2011	10:09:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	10:13:35 AM	Recipe started at 10:13 AM
11/5/2011	10:13:35 AM	Helium valve closed
11/5/2011	10:13:35 AM	H2 valve closed
11/5/2011	10:13:35 AM	BCl3 valve closed
11/5/2011	10:13:35 AM	PH3 valve closed
11/5/2011	10:13:35 AM	SiCl4 pre valve closed
11/5/2011	10:13:35 AM	SiCl4 post valve closed
11/5/2011	10:13:35 AM	Main Vac valve closed
11/5/2011	10:13:35 AM	Bubbler valve closed
11/5/2011	10:13:35 AM	Bypass valve opened
11/5/2011	10:13:35 AM	Helium MFC set to  0.000000
11/5/2011	10:13:35 AM	H2 MFC set to  0.000000
11/5/2011	10:13:35 AM	BCl3 MFC set to  0.000000
11/5/2011	10:13:35 AM	PHl3 MFC set to  0.000000
11/5/2011	10:13:35 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:13:35 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:13:35 AM	Tube furnace set to 150
11/5/2011	10:13:35 AM	Helium valve closed
11/5/2011	10:13:35 AM	H2 valve closed
11/5/2011	10:13:35 AM	BCl3 valve closed
11/5/2011	10:13:35 AM	PH3 valve closed
11/5/2011	10:13:35 AM	SiCl4 pre valve closed
11/5/2011	10:13:35 AM	SiCl4 post valve closed
11/5/2011	10:13:35 AM	Main Vac valve closed
11/5/2011	10:13:35 AM	Bubbler valve closed
11/5/2011	10:13:35 AM	Bypass valve opened
11/5/2011	10:13:35 AM	Helium MFC set to  0.000000
11/5/2011	10:13:35 AM	H2 MFC set to  0.000000
11/5/2011	10:13:35 AM	BCl3 MFC set to  0.000000
11/5/2011	10:13:35 AM	PHl3 MFC set to  0.000000
11/5/2011	10:13:35 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:13:35 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:13:35 AM	Tube furnace set to 150
11/5/2011	10:13:46 AM	Helium valve closed
11/5/2011	10:13:46 AM	H2 valve closed
11/5/2011	10:13:46 AM	BCl3 valve closed
11/5/2011	10:13:46 AM	PH3 valve closed
11/5/2011	10:13:46 AM	SiCl4 pre valve closed
11/5/2011	10:13:46 AM	SiCl4 post valve closed
11/5/2011	10:13:46 AM	Bypass valve closed
11/5/2011	10:13:46 AM	Bubbler valve closed
11/5/2011	10:13:46 AM	Main Vac valve opened
11/5/2011	10:13:46 AM	Helium MFC set to  0.000000
11/5/2011	10:13:46 AM	H2 MFC set to  0.000000
11/5/2011	10:13:46 AM	BCl3 MFC set to  0.000000
11/5/2011	10:13:46 AM	PHl3 MFC set to  0.000000
11/5/2011	10:13:46 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:13:46 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:13:46 AM	Tube furnace set to 150
11/5/2011	10:14:16 AM	H2 valve closed
11/5/2011	10:14:16 AM	BCl3 valve closed
11/5/2011	10:14:16 AM	PH3 valve closed
11/5/2011	10:14:16 AM	SiCl4 pre valve closed
11/5/2011	10:14:16 AM	SiCl4 post valve closed
11/5/2011	10:14:16 AM	Bypass valve closed
11/5/2011	10:14:16 AM	Bubbler valve closed
11/5/2011	10:14:16 AM	Helium valve opened
11/5/2011	10:14:16 AM	Main Vac valve opened
11/5/2011	10:14:16 AM	Helium MFC set to  20.000000
11/5/2011	10:14:16 AM	H2 MFC set to  0.000000
11/5/2011	10:14:16 AM	BCl3 MFC set to  0.000000
11/5/2011	10:14:16 AM	PHl3 MFC set to  0.000000
11/5/2011	10:14:16 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:14:16 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:14:16 AM	Tube furnace set to 150
11/5/2011	10:14:46 AM	Helium valve closed
11/5/2011	10:14:46 AM	H2 valve closed
11/5/2011	10:14:46 AM	BCl3 valve closed
11/5/2011	10:14:46 AM	PH3 valve closed
11/5/2011	10:14:46 AM	SiCl4 pre valve closed
11/5/2011	10:14:46 AM	SiCl4 post valve closed
11/5/2011	10:14:46 AM	Bypass valve closed
11/5/2011	10:14:46 AM	Bubbler valve closed
11/5/2011	10:14:46 AM	Main Vac valve opened
11/5/2011	10:14:46 AM	Helium MFC set to  0.000000
11/5/2011	10:14:46 AM	H2 MFC set to  0.000000
11/5/2011	10:14:46 AM	BCl3 MFC set to  0.000000
11/5/2011	10:14:46 AM	PHl3 MFC set to  0.000000
11/5/2011	10:14:46 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:14:46 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:14:46 AM	Tube furnace set to 150
11/5/2011	10:15:16 AM	H2 valve closed
11/5/2011	10:15:16 AM	BCl3 valve closed
11/5/2011	10:15:16 AM	PH3 valve closed
11/5/2011	10:15:16 AM	SiCl4 pre valve closed
11/5/2011	10:15:16 AM	SiCl4 post valve closed
11/5/2011	10:15:16 AM	Bypass valve closed
11/5/2011	10:15:16 AM	Bubbler valve closed
11/5/2011	10:15:16 AM	Helium valve opened
11/5/2011	10:15:16 AM	Main Vac valve opened
11/5/2011	10:15:16 AM	Helium MFC set to  20.000000
11/5/2011	10:15:16 AM	H2 MFC set to  0.000000
11/5/2011	10:15:16 AM	BCl3 MFC set to  0.000000
11/5/2011	10:15:16 AM	PHl3 MFC set to  0.000000
11/5/2011	10:15:16 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:15:16 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:15:16 AM	Tube furnace set to 150
11/5/2011	10:15:46 AM	Helium valve closed
11/5/2011	10:15:46 AM	H2 valve closed
11/5/2011	10:15:46 AM	BCl3 valve closed
11/5/2011	10:15:46 AM	PH3 valve closed
11/5/2011	10:15:46 AM	SiCl4 pre valve closed
11/5/2011	10:15:46 AM	SiCl4 post valve closed
11/5/2011	10:15:46 AM	Bypass valve closed
11/5/2011	10:15:46 AM	Bubbler valve closed
11/5/2011	10:15:46 AM	Main Vac valve opened
11/5/2011	10:15:46 AM	Helium MFC set to  0.000000
11/5/2011	10:15:46 AM	H2 MFC set to  0.000000
11/5/2011	10:15:46 AM	BCl3 MFC set to  0.000000
11/5/2011	10:15:46 AM	PHl3 MFC set to  0.000000
11/5/2011	10:15:46 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:15:46 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:15:47 AM	Tube furnace set to 150
11/5/2011	10:16:17 AM	H2 valve closed
11/5/2011	10:16:17 AM	BCl3 valve closed
11/5/2011	10:16:17 AM	PH3 valve closed
11/5/2011	10:16:17 AM	SiCl4 pre valve closed
11/5/2011	10:16:17 AM	SiCl4 post valve closed
11/5/2011	10:16:17 AM	Bypass valve closed
11/5/2011	10:16:17 AM	Bubbler valve closed
11/5/2011	10:16:17 AM	Helium valve opened
11/5/2011	10:16:17 AM	Main Vac valve opened
11/5/2011	10:16:17 AM	Helium MFC set to  20.000000
11/5/2011	10:16:17 AM	H2 MFC set to  0.000000
11/5/2011	10:16:17 AM	BCl3 MFC set to  0.000000
11/5/2011	10:16:17 AM	PHl3 MFC set to  0.000000
11/5/2011	10:16:17 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:16:17 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:16:17 AM	Tube furnace set to 150
11/5/2011	10:16:47 AM	Helium valve closed
11/5/2011	10:16:47 AM	H2 valve closed
11/5/2011	10:16:47 AM	BCl3 valve closed
11/5/2011	10:16:47 AM	PH3 valve closed
11/5/2011	10:16:47 AM	SiCl4 pre valve closed
11/5/2011	10:16:47 AM	SiCl4 post valve closed
11/5/2011	10:16:47 AM	Bypass valve closed
11/5/2011	10:16:47 AM	Bubbler valve closed
11/5/2011	10:16:47 AM	Main Vac valve opened
11/5/2011	10:16:47 AM	Helium MFC set to  0.000000
11/5/2011	10:16:47 AM	H2 MFC set to  0.000000
11/5/2011	10:16:47 AM	BCl3 MFC set to  0.000000
11/5/2011	10:16:47 AM	PHl3 MFC set to  0.000000
11/5/2011	10:16:47 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:16:47 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:16:47 AM	Tube furnace set to 150
11/5/2011	10:17:17 AM	H2 valve closed
11/5/2011	10:17:17 AM	BCl3 valve closed
11/5/2011	10:17:17 AM	PH3 valve closed
11/5/2011	10:17:17 AM	SiCl4 pre valve closed
11/5/2011	10:17:17 AM	SiCl4 post valve closed
11/5/2011	10:17:17 AM	Bypass valve closed
11/5/2011	10:17:17 AM	Bubbler valve closed
11/5/2011	10:17:17 AM	Helium valve opened
11/5/2011	10:17:17 AM	Main Vac valve opened
11/5/2011	10:17:17 AM	Helium MFC set to  20.000000
11/5/2011	10:17:17 AM	H2 MFC set to  0.000000
11/5/2011	10:17:17 AM	BCl3 MFC set to  0.000000
11/5/2011	10:17:17 AM	PHl3 MFC set to  0.000000
11/5/2011	10:17:17 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:17:17 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:17:17 AM	Tube furnace set to 150
11/5/2011	10:17:47 AM	Helium valve closed
11/5/2011	10:17:47 AM	H2 valve closed
11/5/2011	10:17:47 AM	BCl3 valve closed
11/5/2011	10:17:47 AM	PH3 valve closed
11/5/2011	10:17:47 AM	SiCl4 pre valve closed
11/5/2011	10:17:47 AM	SiCl4 post valve closed
11/5/2011	10:17:47 AM	Bypass valve closed
11/5/2011	10:17:47 AM	Bubbler valve closed
11/5/2011	10:17:47 AM	Main Vac valve opened
11/5/2011	10:17:47 AM	Helium MFC set to  0.000000
11/5/2011	10:17:47 AM	H2 MFC set to  0.000000
11/5/2011	10:17:47 AM	BCl3 MFC set to  0.000000
11/5/2011	10:17:47 AM	PHl3 MFC set to  0.000000
11/5/2011	10:17:47 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:17:47 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:17:47 AM	Tube furnace set to 150
11/5/2011	10:18:17 AM	H2 valve closed
11/5/2011	10:18:17 AM	BCl3 valve closed
11/5/2011	10:18:17 AM	PH3 valve closed
11/5/2011	10:18:17 AM	SiCl4 pre valve closed
11/5/2011	10:18:17 AM	SiCl4 post valve closed
11/5/2011	10:18:17 AM	Bypass valve closed
11/5/2011	10:18:17 AM	Bubbler valve closed
11/5/2011	10:18:17 AM	Helium valve opened
11/5/2011	10:18:17 AM	Main Vac valve opened
11/5/2011	10:18:17 AM	Helium MFC set to  20.000000
11/5/2011	10:18:17 AM	H2 MFC set to  0.000000
11/5/2011	10:18:17 AM	BCl3 MFC set to  0.000000
11/5/2011	10:18:17 AM	PHl3 MFC set to  0.000000
11/5/2011	10:18:17 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:18:17 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:18:18 AM	Tube furnace set to 150
11/5/2011	10:18:48 AM	Helium valve closed
11/5/2011	10:18:48 AM	H2 valve closed
11/5/2011	10:18:48 AM	BCl3 valve closed
11/5/2011	10:18:48 AM	PH3 valve closed
11/5/2011	10:18:48 AM	SiCl4 pre valve closed
11/5/2011	10:18:48 AM	SiCl4 post valve closed
11/5/2011	10:18:48 AM	Bypass valve closed
11/5/2011	10:18:48 AM	Bubbler valve closed
11/5/2011	10:18:48 AM	Main Vac valve opened
11/5/2011	10:18:48 AM	Helium MFC set to  0.000000
11/5/2011	10:18:48 AM	H2 MFC set to  0.000000
11/5/2011	10:18:48 AM	BCl3 MFC set to  0.000000
11/5/2011	10:18:48 AM	PHl3 MFC set to  0.000000
11/5/2011	10:18:48 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:18:48 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:18:48 AM	Tube furnace set to 150
11/5/2011	10:19:18 AM	H2 valve closed
11/5/2011	10:19:18 AM	BCl3 valve closed
11/5/2011	10:19:18 AM	PH3 valve closed
11/5/2011	10:19:18 AM	SiCl4 pre valve closed
11/5/2011	10:19:18 AM	SiCl4 post valve closed
11/5/2011	10:19:18 AM	Bypass valve closed
11/5/2011	10:19:18 AM	Bubbler valve closed
11/5/2011	10:19:18 AM	Helium valve opened
11/5/2011	10:19:18 AM	Main Vac valve opened
11/5/2011	10:19:18 AM	Helium MFC set to  20.000000
11/5/2011	10:19:18 AM	H2 MFC set to  0.000000
11/5/2011	10:19:18 AM	BCl3 MFC set to  0.000000
11/5/2011	10:19:18 AM	PHl3 MFC set to  0.000000
11/5/2011	10:19:18 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:19:18 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:19:18 AM	Tube furnace set to 150
11/5/2011	10:19:48 AM	Helium valve closed
11/5/2011	10:19:48 AM	H2 valve closed
11/5/2011	10:19:48 AM	BCl3 valve closed
11/5/2011	10:19:48 AM	PH3 valve closed
11/5/2011	10:19:48 AM	SiCl4 pre valve closed
11/5/2011	10:19:48 AM	SiCl4 post valve closed
11/5/2011	10:19:48 AM	Bypass valve closed
11/5/2011	10:19:48 AM	Bubbler valve closed
11/5/2011	10:19:48 AM	Main Vac valve opened
11/5/2011	10:19:48 AM	Helium MFC set to  0.000000
11/5/2011	10:19:48 AM	H2 MFC set to  0.000000
11/5/2011	10:19:48 AM	BCl3 MFC set to  0.000000
11/5/2011	10:19:48 AM	PHl3 MFC set to  0.000000
11/5/2011	10:19:48 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:19:48 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:19:48 AM	Tube furnace set to 150
11/5/2011	10:20:18 AM	H2 valve closed
11/5/2011	10:20:18 AM	BCl3 valve closed
11/5/2011	10:20:18 AM	PH3 valve closed
11/5/2011	10:20:18 AM	SiCl4 pre valve closed
11/5/2011	10:20:18 AM	SiCl4 post valve closed
11/5/2011	10:20:18 AM	Bypass valve closed
11/5/2011	10:20:18 AM	Bubbler valve closed
11/5/2011	10:20:18 AM	Helium valve opened
11/5/2011	10:20:18 AM	Main Vac valve opened
11/5/2011	10:20:18 AM	Helium MFC set to  20.000000
11/5/2011	10:20:18 AM	H2 MFC set to  0.000000
11/5/2011	10:20:18 AM	BCl3 MFC set to  0.000000
11/5/2011	10:20:18 AM	PHl3 MFC set to  0.000000
11/5/2011	10:20:18 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:20:18 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:20:18 AM	Tube furnace set to 150
11/5/2011	10:20:48 AM	Helium valve closed
11/5/2011	10:20:48 AM	H2 valve closed
11/5/2011	10:20:48 AM	BCl3 valve closed
11/5/2011	10:20:48 AM	PH3 valve closed
11/5/2011	10:20:48 AM	SiCl4 pre valve closed
11/5/2011	10:20:48 AM	SiCl4 post valve closed
11/5/2011	10:20:48 AM	Bypass valve closed
11/5/2011	10:20:48 AM	Bubbler valve closed
11/5/2011	10:20:48 AM	Main Vac valve opened
11/5/2011	10:20:48 AM	Helium MFC set to  0.000000
11/5/2011	10:20:48 AM	H2 MFC set to  0.000000
11/5/2011	10:20:48 AM	BCl3 MFC set to  0.000000
11/5/2011	10:20:48 AM	PHl3 MFC set to  0.000000
11/5/2011	10:20:48 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:20:48 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:20:48 AM	Tube furnace set to 150
11/5/2011	10:21:19 AM	H2 valve closed
11/5/2011	10:21:19 AM	BCl3 valve closed
11/5/2011	10:21:19 AM	PH3 valve closed
11/5/2011	10:21:19 AM	SiCl4 pre valve closed
11/5/2011	10:21:19 AM	SiCl4 post valve closed
11/5/2011	10:21:19 AM	Bypass valve closed
11/5/2011	10:21:19 AM	Bubbler valve closed
11/5/2011	10:21:19 AM	Helium valve opened
11/5/2011	10:21:19 AM	Main Vac valve opened
11/5/2011	10:21:19 AM	Helium MFC set to  20.000000
11/5/2011	10:21:19 AM	H2 MFC set to  0.000000
11/5/2011	10:21:19 AM	BCl3 MFC set to  0.000000
11/5/2011	10:21:19 AM	PHl3 MFC set to  0.000000
11/5/2011	10:21:19 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:21:19 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:21:19 AM	Tube furnace set to 150
11/5/2011	10:21:49 AM	Helium valve closed
11/5/2011	10:21:49 AM	H2 valve closed
11/5/2011	10:21:49 AM	BCl3 valve closed
11/5/2011	10:21:49 AM	PH3 valve closed
11/5/2011	10:21:49 AM	SiCl4 pre valve closed
11/5/2011	10:21:49 AM	SiCl4 post valve closed
11/5/2011	10:21:49 AM	Bypass valve closed
11/5/2011	10:21:49 AM	Bubbler valve closed
11/5/2011	10:21:49 AM	Main Vac valve opened
11/5/2011	10:21:49 AM	Helium MFC set to  0.000000
11/5/2011	10:21:49 AM	H2 MFC set to  0.000000
11/5/2011	10:21:49 AM	BCl3 MFC set to  0.000000
11/5/2011	10:21:49 AM	PHl3 MFC set to  0.000000
11/5/2011	10:21:49 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:21:49 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:21:49 AM	Tube furnace set to 150
11/5/2011	10:22:19 AM	H2 valve closed
11/5/2011	10:22:19 AM	BCl3 valve closed
11/5/2011	10:22:19 AM	PH3 valve closed
11/5/2011	10:22:19 AM	SiCl4 pre valve closed
11/5/2011	10:22:19 AM	SiCl4 post valve closed
11/5/2011	10:22:19 AM	Bypass valve closed
11/5/2011	10:22:19 AM	Bubbler valve closed
11/5/2011	10:22:19 AM	Helium valve opened
11/5/2011	10:22:19 AM	Main Vac valve opened
11/5/2011	10:22:19 AM	Helium MFC set to  20.000000
11/5/2011	10:22:19 AM	H2 MFC set to  0.000000
11/5/2011	10:22:19 AM	BCl3 MFC set to  0.000000
11/5/2011	10:22:19 AM	PHl3 MFC set to  0.000000
11/5/2011	10:22:19 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:22:19 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:22:19 AM	Tube furnace set to 150
11/5/2011	10:22:49 AM	Helium valve closed
11/5/2011	10:22:49 AM	H2 valve closed
11/5/2011	10:22:49 AM	BCl3 valve closed
11/5/2011	10:22:49 AM	PH3 valve closed
11/5/2011	10:22:49 AM	SiCl4 pre valve closed
11/5/2011	10:22:49 AM	SiCl4 post valve closed
11/5/2011	10:22:49 AM	Bypass valve closed
11/5/2011	10:22:49 AM	Bubbler valve closed
11/5/2011	10:22:49 AM	Main Vac valve opened
11/5/2011	10:22:49 AM	Helium MFC set to  0.000000
11/5/2011	10:22:49 AM	H2 MFC set to  0.000000
11/5/2011	10:22:49 AM	BCl3 MFC set to  0.000000
11/5/2011	10:22:49 AM	PHl3 MFC set to  0.000000
11/5/2011	10:22:49 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:22:49 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:22:49 AM	Tube furnace set to 150
11/5/2011	10:23:19 AM	H2 valve closed
11/5/2011	10:23:19 AM	BCl3 valve closed
11/5/2011	10:23:19 AM	PH3 valve closed
11/5/2011	10:23:19 AM	SiCl4 pre valve closed
11/5/2011	10:23:19 AM	SiCl4 post valve closed
11/5/2011	10:23:19 AM	Bypass valve closed
11/5/2011	10:23:19 AM	Bubbler valve closed
11/5/2011	10:23:19 AM	Helium valve opened
11/5/2011	10:23:19 AM	Main Vac valve opened
11/5/2011	10:23:19 AM	Helium MFC set to  20.000000
11/5/2011	10:23:19 AM	H2 MFC set to  0.000000
11/5/2011	10:23:19 AM	BCl3 MFC set to  0.000000
11/5/2011	10:23:19 AM	PHl3 MFC set to  0.000000
11/5/2011	10:23:19 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:23:19 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:23:19 AM	Tube furnace set to 150
11/5/2011	10:23:50 AM	Helium valve closed
11/5/2011	10:23:50 AM	H2 valve closed
11/5/2011	10:23:50 AM	BCl3 valve closed
11/5/2011	10:23:50 AM	PH3 valve closed
11/5/2011	10:23:50 AM	SiCl4 pre valve closed
11/5/2011	10:23:50 AM	SiCl4 post valve closed
11/5/2011	10:23:50 AM	Bypass valve closed
11/5/2011	10:23:50 AM	Bubbler valve closed
11/5/2011	10:23:50 AM	Main Vac valve opened
11/5/2011	10:23:50 AM	Helium MFC set to  0.000000
11/5/2011	10:23:50 AM	H2 MFC set to  0.000000
11/5/2011	10:23:50 AM	BCl3 MFC set to  0.000000
11/5/2011	10:23:50 AM	PHl3 MFC set to  0.000000
11/5/2011	10:23:50 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:23:50 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:23:50 AM	Tube furnace set to 150
11/5/2011	10:24:20 AM	H2 valve closed
11/5/2011	10:24:20 AM	BCl3 valve closed
11/5/2011	10:24:20 AM	PH3 valve closed
11/5/2011	10:24:20 AM	SiCl4 pre valve closed
11/5/2011	10:24:20 AM	SiCl4 post valve closed
11/5/2011	10:24:20 AM	Bypass valve closed
11/5/2011	10:24:20 AM	Bubbler valve closed
11/5/2011	10:24:20 AM	Helium valve opened
11/5/2011	10:24:20 AM	Main Vac valve opened
11/5/2011	10:24:20 AM	Helium MFC set to  20.000000
11/5/2011	10:24:20 AM	H2 MFC set to  0.000000
11/5/2011	10:24:20 AM	BCl3 MFC set to  0.000000
11/5/2011	10:24:20 AM	PHl3 MFC set to  0.000000
11/5/2011	10:24:20 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:24:20 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:24:20 AM	Tube furnace set to 150
11/5/2011	10:24:50 AM	Helium valve closed
11/5/2011	10:24:50 AM	H2 valve closed
11/5/2011	10:24:50 AM	BCl3 valve closed
11/5/2011	10:24:50 AM	PH3 valve closed
11/5/2011	10:24:50 AM	SiCl4 pre valve closed
11/5/2011	10:24:50 AM	SiCl4 post valve closed
11/5/2011	10:24:50 AM	Bypass valve closed
11/5/2011	10:24:50 AM	Bubbler valve closed
11/5/2011	10:24:50 AM	Main Vac valve opened
11/5/2011	10:24:50 AM	Helium MFC set to  0.000000
11/5/2011	10:24:50 AM	H2 MFC set to  0.000000
11/5/2011	10:24:50 AM	BCl3 MFC set to  0.000000
11/5/2011	10:24:50 AM	PHl3 MFC set to  0.000000
11/5/2011	10:24:50 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:24:50 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:24:50 AM	Tube furnace set to 150
11/5/2011	10:25:20 AM	H2 valve closed
11/5/2011	10:25:20 AM	BCl3 valve closed
11/5/2011	10:25:20 AM	PH3 valve closed
11/5/2011	10:25:20 AM	SiCl4 pre valve closed
11/5/2011	10:25:20 AM	SiCl4 post valve closed
11/5/2011	10:25:20 AM	Bypass valve closed
11/5/2011	10:25:20 AM	Bubbler valve closed
11/5/2011	10:25:20 AM	Helium valve opened
11/5/2011	10:25:20 AM	Main Vac valve opened
11/5/2011	10:25:20 AM	Helium MFC set to  20.000000
11/5/2011	10:25:20 AM	H2 MFC set to  0.000000
11/5/2011	10:25:20 AM	BCl3 MFC set to  0.000000
11/5/2011	10:25:20 AM	PHl3 MFC set to  0.000000
11/5/2011	10:25:20 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:25:20 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:25:20 AM	Tube furnace set to 150
11/5/2011	10:25:50 AM	Helium valve closed
11/5/2011	10:25:50 AM	H2 valve closed
11/5/2011	10:25:50 AM	BCl3 valve closed
11/5/2011	10:25:50 AM	PH3 valve closed
11/5/2011	10:25:50 AM	SiCl4 pre valve closed
11/5/2011	10:25:50 AM	SiCl4 post valve closed
11/5/2011	10:25:50 AM	Bypass valve closed
11/5/2011	10:25:50 AM	Bubbler valve closed
11/5/2011	10:25:50 AM	Main Vac valve opened
11/5/2011	10:25:50 AM	Helium MFC set to  0.000000
11/5/2011	10:25:50 AM	H2 MFC set to  0.000000
11/5/2011	10:25:50 AM	BCl3 MFC set to  0.000000
11/5/2011	10:25:50 AM	PHl3 MFC set to  0.000000
11/5/2011	10:25:50 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:25:50 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:25:51 AM	Tube furnace set to 150
11/5/2011	10:26:21 AM	H2 valve closed
11/5/2011	10:26:21 AM	BCl3 valve closed
11/5/2011	10:26:21 AM	PH3 valve closed
11/5/2011	10:26:21 AM	SiCl4 pre valve closed
11/5/2011	10:26:21 AM	SiCl4 post valve closed
11/5/2011	10:26:21 AM	Bypass valve closed
11/5/2011	10:26:21 AM	Bubbler valve closed
11/5/2011	10:26:21 AM	Helium valve opened
11/5/2011	10:26:21 AM	Main Vac valve opened
11/5/2011	10:26:21 AM	Helium MFC set to  20.000000
11/5/2011	10:26:21 AM	H2 MFC set to  0.000000
11/5/2011	10:26:21 AM	BCl3 MFC set to  0.000000
11/5/2011	10:26:21 AM	PHl3 MFC set to  0.000000
11/5/2011	10:26:21 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:26:21 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:26:21 AM	Tube furnace set to 150
11/5/2011	10:26:51 AM	Helium valve closed
11/5/2011	10:26:51 AM	H2 valve closed
11/5/2011	10:26:51 AM	BCl3 valve closed
11/5/2011	10:26:51 AM	PH3 valve closed
11/5/2011	10:26:51 AM	SiCl4 pre valve closed
11/5/2011	10:26:51 AM	SiCl4 post valve closed
11/5/2011	10:26:51 AM	Bypass valve closed
11/5/2011	10:26:51 AM	Bubbler valve closed
11/5/2011	10:26:51 AM	Main Vac valve opened
11/5/2011	10:26:51 AM	Helium MFC set to  0.000000
11/5/2011	10:26:51 AM	H2 MFC set to  0.000000
11/5/2011	10:26:51 AM	BCl3 MFC set to  0.000000
11/5/2011	10:26:51 AM	PHl3 MFC set to  0.000000
11/5/2011	10:26:51 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:26:51 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:26:51 AM	Tube furnace set to 150
11/5/2011	10:27:21 AM	H2 valve closed
11/5/2011	10:27:21 AM	BCl3 valve closed
11/5/2011	10:27:21 AM	PH3 valve closed
11/5/2011	10:27:21 AM	SiCl4 pre valve closed
11/5/2011	10:27:21 AM	SiCl4 post valve closed
11/5/2011	10:27:21 AM	Bypass valve closed
11/5/2011	10:27:21 AM	Bubbler valve closed
11/5/2011	10:27:21 AM	Helium valve opened
11/5/2011	10:27:21 AM	Main Vac valve opened
11/5/2011	10:27:21 AM	Helium MFC set to  20.000000
11/5/2011	10:27:21 AM	H2 MFC set to  0.000000
11/5/2011	10:27:21 AM	BCl3 MFC set to  0.000000
11/5/2011	10:27:21 AM	PHl3 MFC set to  0.000000
11/5/2011	10:27:21 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:27:21 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:27:21 AM	Tube furnace set to 150
11/5/2011	10:27:51 AM	Helium valve closed
11/5/2011	10:27:51 AM	H2 valve closed
11/5/2011	10:27:51 AM	BCl3 valve closed
11/5/2011	10:27:51 AM	PH3 valve closed
11/5/2011	10:27:51 AM	SiCl4 pre valve closed
11/5/2011	10:27:51 AM	SiCl4 post valve closed
11/5/2011	10:27:51 AM	Bypass valve closed
11/5/2011	10:27:51 AM	Bubbler valve closed
11/5/2011	10:27:51 AM	Main Vac valve opened
11/5/2011	10:27:51 AM	Helium MFC set to  0.000000
11/5/2011	10:27:51 AM	H2 MFC set to  0.000000
11/5/2011	10:27:51 AM	BCl3 MFC set to  0.000000
11/5/2011	10:27:51 AM	PHl3 MFC set to  0.000000
11/5/2011	10:27:51 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:27:51 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:27:51 AM	Tube furnace set to 150
11/5/2011	10:28:21 AM	H2 valve closed
11/5/2011	10:28:21 AM	BCl3 valve closed
11/5/2011	10:28:21 AM	PH3 valve closed
11/5/2011	10:28:21 AM	SiCl4 pre valve closed
11/5/2011	10:28:21 AM	SiCl4 post valve closed
11/5/2011	10:28:21 AM	Bypass valve closed
11/5/2011	10:28:21 AM	Bubbler valve closed
11/5/2011	10:28:21 AM	Helium valve opened
11/5/2011	10:28:21 AM	Main Vac valve opened
11/5/2011	10:28:21 AM	Helium MFC set to  20.000000
11/5/2011	10:28:21 AM	H2 MFC set to  0.000000
11/5/2011	10:28:21 AM	BCl3 MFC set to  0.000000
11/5/2011	10:28:21 AM	PHl3 MFC set to  0.000000
11/5/2011	10:28:21 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:28:21 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:28:22 AM	Tube furnace set to 150
11/5/2011	10:28:52 AM	Helium valve closed
11/5/2011	10:28:52 AM	H2 valve closed
11/5/2011	10:28:52 AM	BCl3 valve closed
11/5/2011	10:28:52 AM	PH3 valve closed
11/5/2011	10:28:52 AM	SiCl4 pre valve closed
11/5/2011	10:28:52 AM	SiCl4 post valve closed
11/5/2011	10:28:52 AM	Bypass valve closed
11/5/2011	10:28:52 AM	Bubbler valve closed
11/5/2011	10:28:52 AM	Main Vac valve opened
11/5/2011	10:28:52 AM	Helium MFC set to  0.000000
11/5/2011	10:28:52 AM	H2 MFC set to  0.000000
11/5/2011	10:28:52 AM	BCl3 MFC set to  0.000000
11/5/2011	10:28:52 AM	PHl3 MFC set to  0.000000
11/5/2011	10:28:52 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:28:52 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:28:52 AM	Tube furnace set to 150
11/5/2011	10:29:22 AM	H2 valve closed
11/5/2011	10:29:22 AM	BCl3 valve closed
11/5/2011	10:29:22 AM	PH3 valve closed
11/5/2011	10:29:22 AM	SiCl4 pre valve closed
11/5/2011	10:29:22 AM	SiCl4 post valve closed
11/5/2011	10:29:22 AM	Bypass valve closed
11/5/2011	10:29:22 AM	Bubbler valve closed
11/5/2011	10:29:22 AM	Helium valve opened
11/5/2011	10:29:22 AM	Main Vac valve opened
11/5/2011	10:29:22 AM	Helium MFC set to  20.000000
11/5/2011	10:29:22 AM	H2 MFC set to  0.000000
11/5/2011	10:29:22 AM	BCl3 MFC set to  0.000000
11/5/2011	10:29:22 AM	PHl3 MFC set to  0.000000
11/5/2011	10:29:22 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:29:22 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:29:22 AM	Tube furnace set to 150
11/5/2011	10:29:52 AM	Helium valve closed
11/5/2011	10:29:52 AM	H2 valve closed
11/5/2011	10:29:52 AM	BCl3 valve closed
11/5/2011	10:29:52 AM	PH3 valve closed
11/5/2011	10:29:52 AM	SiCl4 pre valve closed
11/5/2011	10:29:52 AM	SiCl4 post valve closed
11/5/2011	10:29:52 AM	Bypass valve closed
11/5/2011	10:29:52 AM	Bubbler valve closed
11/5/2011	10:29:52 AM	Main Vac valve opened
11/5/2011	10:29:52 AM	Helium MFC set to  0.000000
11/5/2011	10:29:52 AM	H2 MFC set to  0.000000
11/5/2011	10:29:52 AM	BCl3 MFC set to  0.000000
11/5/2011	10:29:52 AM	PHl3 MFC set to  0.000000
11/5/2011	10:29:52 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:29:52 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:29:52 AM	Tube furnace set to 150
11/5/2011	10:30:22 AM	H2 valve closed
11/5/2011	10:30:22 AM	BCl3 valve closed
11/5/2011	10:30:22 AM	PH3 valve closed
11/5/2011	10:30:22 AM	SiCl4 pre valve closed
11/5/2011	10:30:22 AM	SiCl4 post valve closed
11/5/2011	10:30:22 AM	Bypass valve closed
11/5/2011	10:30:22 AM	Bubbler valve closed
11/5/2011	10:30:22 AM	Helium valve opened
11/5/2011	10:30:22 AM	Main Vac valve opened
11/5/2011	10:30:22 AM	Helium MFC set to  20.000000
11/5/2011	10:30:22 AM	H2 MFC set to  0.000000
11/5/2011	10:30:22 AM	BCl3 MFC set to  0.000000
11/5/2011	10:30:22 AM	PHl3 MFC set to  0.000000
11/5/2011	10:30:22 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:30:22 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:30:22 AM	Tube furnace set to 150
11/5/2011	10:30:53 AM	Helium valve closed
11/5/2011	10:30:53 AM	H2 valve closed
11/5/2011	10:30:53 AM	BCl3 valve closed
11/5/2011	10:30:53 AM	PH3 valve closed
11/5/2011	10:30:53 AM	SiCl4 pre valve closed
11/5/2011	10:30:53 AM	SiCl4 post valve closed
11/5/2011	10:30:53 AM	Bypass valve closed
11/5/2011	10:30:53 AM	Bubbler valve closed
11/5/2011	10:30:53 AM	Main Vac valve opened
11/5/2011	10:30:53 AM	Helium MFC set to  0.000000
11/5/2011	10:30:53 AM	H2 MFC set to  0.000000
11/5/2011	10:30:53 AM	BCl3 MFC set to  0.000000
11/5/2011	10:30:53 AM	PHl3 MFC set to  0.000000
11/5/2011	10:30:53 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:30:53 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:30:53 AM	Tube furnace set to 150
11/5/2011	10:31:23 AM	H2 valve closed
11/5/2011	10:31:23 AM	BCl3 valve closed
11/5/2011	10:31:23 AM	PH3 valve closed
11/5/2011	10:31:23 AM	SiCl4 pre valve closed
11/5/2011	10:31:23 AM	SiCl4 post valve closed
11/5/2011	10:31:23 AM	Bypass valve closed
11/5/2011	10:31:23 AM	Bubbler valve closed
11/5/2011	10:31:23 AM	Helium valve opened
11/5/2011	10:31:23 AM	Main Vac valve opened
11/5/2011	10:31:23 AM	Helium MFC set to  20.000000
11/5/2011	10:31:23 AM	H2 MFC set to  0.000000
11/5/2011	10:31:23 AM	BCl3 MFC set to  0.000000
11/5/2011	10:31:23 AM	PHl3 MFC set to  0.000000
11/5/2011	10:31:23 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:31:23 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:31:23 AM	Tube furnace set to 150
11/5/2011	10:31:53 AM	Helium valve closed
11/5/2011	10:31:53 AM	H2 valve closed
11/5/2011	10:31:53 AM	BCl3 valve closed
11/5/2011	10:31:53 AM	PH3 valve closed
11/5/2011	10:31:53 AM	SiCl4 pre valve closed
11/5/2011	10:31:53 AM	SiCl4 post valve closed
11/5/2011	10:31:53 AM	Bypass valve closed
11/5/2011	10:31:53 AM	Bubbler valve closed
11/5/2011	10:31:53 AM	Main Vac valve opened
11/5/2011	10:31:53 AM	Helium MFC set to  0.000000
11/5/2011	10:31:53 AM	H2 MFC set to  0.000000
11/5/2011	10:31:53 AM	BCl3 MFC set to  0.000000
11/5/2011	10:31:53 AM	PHl3 MFC set to  0.000000
11/5/2011	10:31:53 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:31:53 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:31:53 AM	Tube furnace set to 150
11/5/2011	10:32:23 AM	H2 valve closed
11/5/2011	10:32:23 AM	BCl3 valve closed
11/5/2011	10:32:23 AM	PH3 valve closed
11/5/2011	10:32:23 AM	SiCl4 pre valve closed
11/5/2011	10:32:23 AM	SiCl4 post valve closed
11/5/2011	10:32:23 AM	Bypass valve closed
11/5/2011	10:32:23 AM	Bubbler valve closed
11/5/2011	10:32:23 AM	Helium valve opened
11/5/2011	10:32:23 AM	Main Vac valve opened
11/5/2011	10:32:23 AM	Helium MFC set to  20.000000
11/5/2011	10:32:23 AM	H2 MFC set to  0.000000
11/5/2011	10:32:23 AM	BCl3 MFC set to  0.000000
11/5/2011	10:32:23 AM	PHl3 MFC set to  0.000000
11/5/2011	10:32:23 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:32:23 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:32:23 AM	Tube furnace set to 150
11/5/2011	10:32:53 AM	Helium valve closed
11/5/2011	10:32:53 AM	H2 valve closed
11/5/2011	10:32:53 AM	BCl3 valve closed
11/5/2011	10:32:53 AM	PH3 valve closed
11/5/2011	10:32:53 AM	SiCl4 pre valve closed
11/5/2011	10:32:53 AM	SiCl4 post valve closed
11/5/2011	10:32:53 AM	Bypass valve closed
11/5/2011	10:32:53 AM	Bubbler valve closed
11/5/2011	10:32:53 AM	Main Vac valve opened
11/5/2011	10:32:53 AM	Helium MFC set to  0.000000
11/5/2011	10:32:53 AM	H2 MFC set to  0.000000
11/5/2011	10:32:53 AM	BCl3 MFC set to  0.000000
11/5/2011	10:32:53 AM	PHl3 MFC set to  0.000000
11/5/2011	10:32:53 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:32:53 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:32:54 AM	Tube furnace set to 150
11/5/2011	10:33:24 AM	H2 valve closed
11/5/2011	10:33:24 AM	BCl3 valve closed
11/5/2011	10:33:24 AM	PH3 valve closed
11/5/2011	10:33:24 AM	SiCl4 pre valve closed
11/5/2011	10:33:24 AM	SiCl4 post valve closed
11/5/2011	10:33:24 AM	Bypass valve closed
11/5/2011	10:33:24 AM	Bubbler valve closed
11/5/2011	10:33:24 AM	Helium valve opened
11/5/2011	10:33:24 AM	Main Vac valve opened
11/5/2011	10:33:24 AM	Helium MFC set to  20.000000
11/5/2011	10:33:24 AM	H2 MFC set to  0.000000
11/5/2011	10:33:24 AM	BCl3 MFC set to  0.000000
11/5/2011	10:33:24 AM	PHl3 MFC set to  0.000000
11/5/2011	10:33:24 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:33:24 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:33:24 AM	Tube furnace set to 150
11/5/2011	10:33:54 AM	Helium valve closed
11/5/2011	10:33:54 AM	H2 valve closed
11/5/2011	10:33:54 AM	BCl3 valve closed
11/5/2011	10:33:54 AM	PH3 valve closed
11/5/2011	10:33:54 AM	SiCl4 pre valve closed
11/5/2011	10:33:54 AM	SiCl4 post valve closed
11/5/2011	10:33:54 AM	Bypass valve closed
11/5/2011	10:33:54 AM	Bubbler valve closed
11/5/2011	10:33:54 AM	Main Vac valve opened
11/5/2011	10:33:54 AM	Helium MFC set to  0.000000
11/5/2011	10:33:54 AM	H2 MFC set to  0.000000
11/5/2011	10:33:54 AM	BCl3 MFC set to  0.000000
11/5/2011	10:33:54 AM	PHl3 MFC set to  0.000000
11/5/2011	10:33:54 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:33:54 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:33:54 AM	Tube furnace set to 180
11/5/2011	10:33:59 AM	Run finished at 10:33 AM
11/5/2011	10:34:45 AM	Recipe started at 10:34 AM
11/5/2011	10:34:45 AM	Helium valve closed
11/5/2011	10:34:45 AM	H2 valve closed
11/5/2011	10:34:45 AM	BCl3 valve closed
11/5/2011	10:34:45 AM	PH3 valve closed
11/5/2011	10:34:45 AM	SiCl4 pre valve closed
11/5/2011	10:34:45 AM	SiCl4 post valve closed
11/5/2011	10:34:45 AM	Main Vac valve closed
11/5/2011	10:34:45 AM	Bubbler valve closed
11/5/2011	10:34:45 AM	Bypass valve opened
11/5/2011	10:34:45 AM	Helium MFC set to  0.000000
11/5/2011	10:34:45 AM	H2 MFC set to  0.000000
11/5/2011	10:34:45 AM	BCl3 MFC set to  0.000000
11/5/2011	10:34:45 AM	PHl3 MFC set to  0.000000
11/5/2011	10:34:45 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:34:45 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:34:46 AM	Tube furnace set to 150
11/5/2011	10:34:46 AM	Helium valve closed
11/5/2011	10:34:46 AM	H2 valve closed
11/5/2011	10:34:46 AM	BCl3 valve closed
11/5/2011	10:34:46 AM	PH3 valve closed
11/5/2011	10:34:46 AM	SiCl4 pre valve closed
11/5/2011	10:34:46 AM	SiCl4 post valve closed
11/5/2011	10:34:46 AM	Main Vac valve closed
11/5/2011	10:34:46 AM	Bubbler valve closed
11/5/2011	10:34:46 AM	Bypass valve opened
11/5/2011	10:34:46 AM	Helium MFC set to  0.000000
11/5/2011	10:34:46 AM	H2 MFC set to  0.000000
11/5/2011	10:34:46 AM	BCl3 MFC set to  0.000000
11/5/2011	10:34:46 AM	PHl3 MFC set to  0.000000
11/5/2011	10:34:46 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:34:46 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:34:46 AM	Tube furnace set to 150
11/5/2011	10:35:16 AM	Helium valve closed
11/5/2011	10:35:16 AM	H2 valve closed
11/5/2011	10:35:16 AM	BCl3 valve closed
11/5/2011	10:35:16 AM	PH3 valve closed
11/5/2011	10:35:16 AM	SiCl4 pre valve closed
11/5/2011	10:35:16 AM	SiCl4 post valve closed
11/5/2011	10:35:16 AM	Bypass valve closed
11/5/2011	10:35:16 AM	Bubbler valve closed
11/5/2011	10:35:16 AM	Main Vac valve opened
11/5/2011	10:35:16 AM	Helium MFC set to  0.000000
11/5/2011	10:35:16 AM	H2 MFC set to  0.000000
11/5/2011	10:35:16 AM	BCl3 MFC set to  0.000000
11/5/2011	10:35:16 AM	PHl3 MFC set to  0.000000
11/5/2011	10:35:16 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:35:16 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:35:16 AM	Tube furnace set to 150
11/5/2011	10:35:46 AM	H2 valve closed
11/5/2011	10:35:46 AM	BCl3 valve closed
11/5/2011	10:35:46 AM	PH3 valve closed
11/5/2011	10:35:46 AM	SiCl4 pre valve closed
11/5/2011	10:35:46 AM	SiCl4 post valve closed
11/5/2011	10:35:46 AM	Bypass valve closed
11/5/2011	10:35:46 AM	Bubbler valve closed
11/5/2011	10:35:46 AM	Helium valve opened
11/5/2011	10:35:46 AM	Main Vac valve opened
11/5/2011	10:35:46 AM	Helium MFC set to  20.000000
11/5/2011	10:35:46 AM	H2 MFC set to  0.000000
11/5/2011	10:35:46 AM	BCl3 MFC set to  0.000000
11/5/2011	10:35:46 AM	PHl3 MFC set to  0.000000
11/5/2011	10:35:46 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:35:46 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:35:46 AM	Tube furnace set to 150
11/5/2011	10:36:16 AM	Helium valve closed
11/5/2011	10:36:16 AM	H2 valve closed
11/5/2011	10:36:16 AM	BCl3 valve closed
11/5/2011	10:36:17 AM	PH3 valve closed
11/5/2011	10:36:17 AM	SiCl4 pre valve closed
11/5/2011	10:36:17 AM	SiCl4 post valve closed
11/5/2011	10:36:17 AM	Bypass valve closed
11/5/2011	10:36:17 AM	Bubbler valve closed
11/5/2011	10:36:17 AM	Main Vac valve opened
11/5/2011	10:36:17 AM	Helium MFC set to  0.000000
11/5/2011	10:36:17 AM	H2 MFC set to  0.000000
11/5/2011	10:36:17 AM	BCl3 MFC set to  0.000000
11/5/2011	10:36:17 AM	PHl3 MFC set to  0.000000
11/5/2011	10:36:17 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:36:17 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:36:17 AM	Tube furnace set to 150
11/5/2011	10:36:47 AM	H2 valve closed
11/5/2011	10:36:47 AM	BCl3 valve closed
11/5/2011	10:36:47 AM	PH3 valve closed
11/5/2011	10:36:47 AM	SiCl4 pre valve closed
11/5/2011	10:36:47 AM	SiCl4 post valve closed
11/5/2011	10:36:47 AM	Bypass valve closed
11/5/2011	10:36:47 AM	Bubbler valve closed
11/5/2011	10:36:47 AM	Helium valve opened
11/5/2011	10:36:47 AM	Main Vac valve opened
11/5/2011	10:36:47 AM	Helium MFC set to  20.000000
11/5/2011	10:36:47 AM	H2 MFC set to  0.000000
11/5/2011	10:36:47 AM	BCl3 MFC set to  0.000000
11/5/2011	10:36:47 AM	PHl3 MFC set to  0.000000
11/5/2011	10:36:47 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:36:47 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:36:47 AM	Tube furnace set to 150
11/5/2011	10:37:17 AM	Helium valve closed
11/5/2011	10:37:17 AM	H2 valve closed
11/5/2011	10:37:17 AM	BCl3 valve closed
11/5/2011	10:37:17 AM	PH3 valve closed
11/5/2011	10:37:17 AM	SiCl4 pre valve closed
11/5/2011	10:37:17 AM	SiCl4 post valve closed
11/5/2011	10:37:17 AM	Bypass valve closed
11/5/2011	10:37:17 AM	Bubbler valve closed
11/5/2011	10:37:17 AM	Main Vac valve opened
11/5/2011	10:37:17 AM	Helium MFC set to  0.000000
11/5/2011	10:37:17 AM	H2 MFC set to  0.000000
11/5/2011	10:37:17 AM	BCl3 MFC set to  0.000000
11/5/2011	10:37:17 AM	PHl3 MFC set to  0.000000
11/5/2011	10:37:17 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:37:17 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:37:17 AM	Tube furnace set to 150
11/5/2011	10:37:47 AM	H2 valve closed
11/5/2011	10:37:47 AM	BCl3 valve closed
11/5/2011	10:37:47 AM	PH3 valve closed
11/5/2011	10:37:47 AM	SiCl4 pre valve closed
11/5/2011	10:37:47 AM	SiCl4 post valve closed
11/5/2011	10:37:47 AM	Bypass valve closed
11/5/2011	10:37:47 AM	Bubbler valve closed
11/5/2011	10:37:47 AM	Helium valve opened
11/5/2011	10:37:47 AM	Main Vac valve opened
11/5/2011	10:37:47 AM	Helium MFC set to  20.000000
11/5/2011	10:37:47 AM	H2 MFC set to  0.000000
11/5/2011	10:37:47 AM	BCl3 MFC set to  0.000000
11/5/2011	10:37:47 AM	PHl3 MFC set to  0.000000
11/5/2011	10:37:47 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:37:47 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:37:47 AM	Tube furnace set to 150
11/5/2011	10:38:17 AM	Helium valve closed
11/5/2011	10:38:17 AM	H2 valve closed
11/5/2011	10:38:17 AM	BCl3 valve closed
11/5/2011	10:38:17 AM	PH3 valve closed
11/5/2011	10:38:17 AM	SiCl4 pre valve closed
11/5/2011	10:38:17 AM	SiCl4 post valve closed
11/5/2011	10:38:17 AM	Bypass valve closed
11/5/2011	10:38:17 AM	Bubbler valve closed
11/5/2011	10:38:17 AM	Main Vac valve opened
11/5/2011	10:38:17 AM	Helium MFC set to  0.000000
11/5/2011	10:38:17 AM	H2 MFC set to  0.000000
11/5/2011	10:38:17 AM	BCl3 MFC set to  0.000000
11/5/2011	10:38:17 AM	PHl3 MFC set to  0.000000
11/5/2011	10:38:17 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:38:17 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:38:18 AM	Tube furnace set to 150
11/5/2011	10:38:48 AM	H2 valve closed
11/5/2011	10:38:48 AM	BCl3 valve closed
11/5/2011	10:38:48 AM	PH3 valve closed
11/5/2011	10:38:48 AM	SiCl4 pre valve closed
11/5/2011	10:38:48 AM	SiCl4 post valve closed
11/5/2011	10:38:48 AM	Bypass valve closed
11/5/2011	10:38:48 AM	Bubbler valve closed
11/5/2011	10:38:48 AM	Helium valve opened
11/5/2011	10:38:48 AM	Main Vac valve opened
11/5/2011	10:38:48 AM	Helium MFC set to  20.000000
11/5/2011	10:38:48 AM	H2 MFC set to  0.000000
11/5/2011	10:38:48 AM	BCl3 MFC set to  0.000000
11/5/2011	10:38:48 AM	PHl3 MFC set to  0.000000
11/5/2011	10:38:48 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:38:48 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:38:48 AM	Tube furnace set to 150
11/5/2011	10:39:18 AM	Helium valve closed
11/5/2011	10:39:18 AM	H2 valve closed
11/5/2011	10:39:18 AM	BCl3 valve closed
11/5/2011	10:39:18 AM	PH3 valve closed
11/5/2011	10:39:18 AM	SiCl4 pre valve closed
11/5/2011	10:39:18 AM	SiCl4 post valve closed
11/5/2011	10:39:18 AM	Bypass valve closed
11/5/2011	10:39:18 AM	Bubbler valve closed
11/5/2011	10:39:18 AM	Main Vac valve opened
11/5/2011	10:39:18 AM	Helium MFC set to  0.000000
11/5/2011	10:39:18 AM	H2 MFC set to  0.000000
11/5/2011	10:39:18 AM	BCl3 MFC set to  0.000000
11/5/2011	10:39:18 AM	PHl3 MFC set to  0.000000
11/5/2011	10:39:18 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:39:18 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:39:18 AM	Tube furnace set to 150
11/5/2011	10:39:48 AM	H2 valve closed
11/5/2011	10:39:48 AM	BCl3 valve closed
11/5/2011	10:39:48 AM	PH3 valve closed
11/5/2011	10:39:48 AM	SiCl4 pre valve closed
11/5/2011	10:39:48 AM	SiCl4 post valve closed
11/5/2011	10:39:48 AM	Bypass valve closed
11/5/2011	10:39:48 AM	Bubbler valve closed
11/5/2011	10:39:48 AM	Helium valve opened
11/5/2011	10:39:48 AM	Main Vac valve opened
11/5/2011	10:39:48 AM	Helium MFC set to  20.000000
11/5/2011	10:39:48 AM	H2 MFC set to  0.000000
11/5/2011	10:39:48 AM	BCl3 MFC set to  0.000000
11/5/2011	10:39:48 AM	PHl3 MFC set to  0.000000
11/5/2011	10:39:48 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:39:48 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:39:48 AM	Tube furnace set to 150
11/5/2011	10:40:18 AM	Helium valve closed
11/5/2011	10:40:18 AM	H2 valve closed
11/5/2011	10:40:18 AM	BCl3 valve closed
11/5/2011	10:40:18 AM	PH3 valve closed
11/5/2011	10:40:18 AM	SiCl4 pre valve closed
11/5/2011	10:40:18 AM	SiCl4 post valve closed
11/5/2011	10:40:18 AM	Bypass valve closed
11/5/2011	10:40:18 AM	Bubbler valve closed
11/5/2011	10:40:18 AM	Main Vac valve opened
11/5/2011	10:40:18 AM	Helium MFC set to  0.000000
11/5/2011	10:40:18 AM	H2 MFC set to  0.000000
11/5/2011	10:40:18 AM	BCl3 MFC set to  0.000000
11/5/2011	10:40:18 AM	PHl3 MFC set to  0.000000
11/5/2011	10:40:18 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:40:18 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:40:18 AM	Tube furnace set to 150
11/5/2011	10:40:48 AM	H2 valve closed
11/5/2011	10:40:48 AM	BCl3 valve closed
11/5/2011	10:40:48 AM	PH3 valve closed
11/5/2011	10:40:48 AM	SiCl4 pre valve closed
11/5/2011	10:40:48 AM	SiCl4 post valve closed
11/5/2011	10:40:48 AM	Bypass valve closed
11/5/2011	10:40:48 AM	Bubbler valve closed
11/5/2011	10:40:48 AM	Helium valve opened
11/5/2011	10:40:48 AM	Main Vac valve opened
11/5/2011	10:40:48 AM	Helium MFC set to  20.000000
11/5/2011	10:40:48 AM	H2 MFC set to  0.000000
11/5/2011	10:40:48 AM	BCl3 MFC set to  0.000000
11/5/2011	10:40:48 AM	PHl3 MFC set to  0.000000
11/5/2011	10:40:48 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:40:48 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:40:49 AM	Tube furnace set to 150
11/5/2011	10:41:19 AM	Helium valve closed
11/5/2011	10:41:19 AM	H2 valve closed
11/5/2011	10:41:19 AM	BCl3 valve closed
11/5/2011	10:41:19 AM	PH3 valve closed
11/5/2011	10:41:19 AM	SiCl4 pre valve closed
11/5/2011	10:41:19 AM	SiCl4 post valve closed
11/5/2011	10:41:19 AM	Bypass valve closed
11/5/2011	10:41:19 AM	Bubbler valve closed
11/5/2011	10:41:19 AM	Main Vac valve opened
11/5/2011	10:41:19 AM	Helium MFC set to  0.000000
11/5/2011	10:41:19 AM	H2 MFC set to  0.000000
11/5/2011	10:41:19 AM	BCl3 MFC set to  0.000000
11/5/2011	10:41:19 AM	PHl3 MFC set to  0.000000
11/5/2011	10:41:19 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:41:19 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:41:19 AM	Tube furnace set to 150
11/5/2011	10:41:49 AM	H2 valve closed
11/5/2011	10:41:49 AM	BCl3 valve closed
11/5/2011	10:41:49 AM	PH3 valve closed
11/5/2011	10:41:49 AM	SiCl4 pre valve closed
11/5/2011	10:41:49 AM	SiCl4 post valve closed
11/5/2011	10:41:49 AM	Bypass valve closed
11/5/2011	10:41:49 AM	Bubbler valve closed
11/5/2011	10:41:49 AM	Helium valve opened
11/5/2011	10:41:49 AM	Main Vac valve opened
11/5/2011	10:41:49 AM	Helium MFC set to  20.000000
11/5/2011	10:41:49 AM	H2 MFC set to  0.000000
11/5/2011	10:41:49 AM	BCl3 MFC set to  0.000000
11/5/2011	10:41:49 AM	PHl3 MFC set to  0.000000
11/5/2011	10:41:49 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:41:49 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:41:49 AM	Tube furnace set to 150
11/5/2011	10:42:19 AM	Helium valve closed
11/5/2011	10:42:19 AM	H2 valve closed
11/5/2011	10:42:19 AM	BCl3 valve closed
11/5/2011	10:42:19 AM	PH3 valve closed
11/5/2011	10:42:19 AM	SiCl4 pre valve closed
11/5/2011	10:42:19 AM	SiCl4 post valve closed
11/5/2011	10:42:19 AM	Bypass valve closed
11/5/2011	10:42:19 AM	Bubbler valve closed
11/5/2011	10:42:19 AM	Main Vac valve opened
11/5/2011	10:42:19 AM	Helium MFC set to  0.000000
11/5/2011	10:42:19 AM	H2 MFC set to  0.000000
11/5/2011	10:42:19 AM	BCl3 MFC set to  0.000000
11/5/2011	10:42:19 AM	PHl3 MFC set to  0.000000
11/5/2011	10:42:19 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:42:19 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:42:19 AM	Tube furnace set to 150
11/5/2011	10:42:49 AM	H2 valve closed
11/5/2011	10:42:49 AM	BCl3 valve closed
11/5/2011	10:42:49 AM	PH3 valve closed
11/5/2011	10:42:49 AM	SiCl4 pre valve closed
11/5/2011	10:42:49 AM	SiCl4 post valve closed
11/5/2011	10:42:49 AM	Bypass valve closed
11/5/2011	10:42:49 AM	Bubbler valve closed
11/5/2011	10:42:49 AM	Helium valve opened
11/5/2011	10:42:49 AM	Main Vac valve opened
11/5/2011	10:42:49 AM	Helium MFC set to  20.000000
11/5/2011	10:42:49 AM	H2 MFC set to  0.000000
11/5/2011	10:42:49 AM	BCl3 MFC set to  0.000000
11/5/2011	10:42:49 AM	PHl3 MFC set to  0.000000
11/5/2011	10:42:49 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:42:49 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:42:49 AM	Tube furnace set to 150
11/5/2011	10:43:19 AM	Helium valve closed
11/5/2011	10:43:19 AM	H2 valve closed
11/5/2011	10:43:19 AM	BCl3 valve closed
11/5/2011	10:43:19 AM	PH3 valve closed
11/5/2011	10:43:19 AM	SiCl4 pre valve closed
11/5/2011	10:43:19 AM	SiCl4 post valve closed
11/5/2011	10:43:19 AM	Bypass valve closed
11/5/2011	10:43:19 AM	Bubbler valve closed
11/5/2011	10:43:19 AM	Main Vac valve opened
11/5/2011	10:43:19 AM	Helium MFC set to  0.000000
11/5/2011	10:43:20 AM	H2 MFC set to  0.000000
11/5/2011	10:43:20 AM	BCl3 MFC set to  0.000000
11/5/2011	10:43:20 AM	PHl3 MFC set to  0.000000
11/5/2011	10:43:20 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:43:20 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:43:20 AM	Tube furnace set to 150
11/5/2011	10:43:50 AM	H2 valve closed
11/5/2011	10:43:50 AM	BCl3 valve closed
11/5/2011	10:43:50 AM	PH3 valve closed
11/5/2011	10:43:50 AM	SiCl4 pre valve closed
11/5/2011	10:43:50 AM	SiCl4 post valve closed
11/5/2011	10:43:50 AM	Bypass valve closed
11/5/2011	10:43:50 AM	Bubbler valve closed
11/5/2011	10:43:50 AM	Helium valve opened
11/5/2011	10:43:50 AM	Main Vac valve opened
11/5/2011	10:43:50 AM	Helium MFC set to  20.000000
11/5/2011	10:43:50 AM	H2 MFC set to  0.000000
11/5/2011	10:43:50 AM	BCl3 MFC set to  0.000000
11/5/2011	10:43:50 AM	PHl3 MFC set to  0.000000
11/5/2011	10:43:50 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:43:50 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:43:50 AM	Tube furnace set to 150
11/5/2011	10:44:20 AM	Helium valve closed
11/5/2011	10:44:20 AM	H2 valve closed
11/5/2011	10:44:20 AM	BCl3 valve closed
11/5/2011	10:44:20 AM	PH3 valve closed
11/5/2011	10:44:20 AM	SiCl4 pre valve closed
11/5/2011	10:44:20 AM	SiCl4 post valve closed
11/5/2011	10:44:20 AM	Bypass valve closed
11/5/2011	10:44:20 AM	Bubbler valve closed
11/5/2011	10:44:20 AM	Main Vac valve opened
11/5/2011	10:44:20 AM	Helium MFC set to  0.000000
11/5/2011	10:44:20 AM	H2 MFC set to  0.000000
11/5/2011	10:44:20 AM	BCl3 MFC set to  0.000000
11/5/2011	10:44:20 AM	PHl3 MFC set to  0.000000
11/5/2011	10:44:20 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:44:20 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:44:20 AM	Tube furnace set to 150
11/5/2011	10:44:50 AM	H2 valve closed
11/5/2011	10:44:50 AM	BCl3 valve closed
11/5/2011	10:44:50 AM	PH3 valve closed
11/5/2011	10:44:50 AM	SiCl4 pre valve closed
11/5/2011	10:44:50 AM	SiCl4 post valve closed
11/5/2011	10:44:50 AM	Bypass valve closed
11/5/2011	10:44:50 AM	Bubbler valve closed
11/5/2011	10:44:50 AM	Helium valve opened
11/5/2011	10:44:50 AM	Main Vac valve opened
11/5/2011	10:44:50 AM	Helium MFC set to  20.000000
11/5/2011	10:44:50 AM	H2 MFC set to  0.000000
11/5/2011	10:44:50 AM	BCl3 MFC set to  0.000000
11/5/2011	10:44:50 AM	PHl3 MFC set to  0.000000
11/5/2011	10:44:50 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:44:50 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:44:50 AM	Tube furnace set to 150
11/5/2011	10:45:20 AM	Helium valve closed
11/5/2011	10:45:20 AM	H2 valve closed
11/5/2011	10:45:20 AM	BCl3 valve closed
11/5/2011	10:45:20 AM	PH3 valve closed
11/5/2011	10:45:20 AM	SiCl4 pre valve closed
11/5/2011	10:45:20 AM	SiCl4 post valve closed
11/5/2011	10:45:20 AM	Bypass valve closed
11/5/2011	10:45:20 AM	Bubbler valve closed
11/5/2011	10:45:20 AM	Main Vac valve opened
11/5/2011	10:45:20 AM	Helium MFC set to  0.000000
11/5/2011	10:45:20 AM	H2 MFC set to  0.000000
11/5/2011	10:45:20 AM	BCl3 MFC set to  0.000000
11/5/2011	10:45:20 AM	PHl3 MFC set to  0.000000
11/5/2011	10:45:20 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:45:20 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:45:21 AM	Tube furnace set to 150
11/5/2011	10:45:51 AM	H2 valve closed
11/5/2011	10:45:51 AM	BCl3 valve closed
11/5/2011	10:45:51 AM	PH3 valve closed
11/5/2011	10:45:51 AM	SiCl4 pre valve closed
11/5/2011	10:45:51 AM	SiCl4 post valve closed
11/5/2011	10:45:51 AM	Bypass valve closed
11/5/2011	10:45:51 AM	Bubbler valve closed
11/5/2011	10:45:51 AM	Helium valve opened
11/5/2011	10:45:51 AM	Main Vac valve opened
11/5/2011	10:45:51 AM	Helium MFC set to  20.000000
11/5/2011	10:45:51 AM	H2 MFC set to  0.000000
11/5/2011	10:45:51 AM	BCl3 MFC set to  0.000000
11/5/2011	10:45:51 AM	PHl3 MFC set to  0.000000
11/5/2011	10:45:51 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:45:51 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:45:51 AM	Tube furnace set to 150
11/5/2011	10:46:21 AM	Helium valve closed
11/5/2011	10:46:21 AM	H2 valve closed
11/5/2011	10:46:21 AM	BCl3 valve closed
11/5/2011	10:46:21 AM	PH3 valve closed
11/5/2011	10:46:21 AM	SiCl4 pre valve closed
11/5/2011	10:46:21 AM	SiCl4 post valve closed
11/5/2011	10:46:21 AM	Bypass valve closed
11/5/2011	10:46:21 AM	Bubbler valve closed
11/5/2011	10:46:21 AM	Main Vac valve opened
11/5/2011	10:46:21 AM	Helium MFC set to  0.000000
11/5/2011	10:46:21 AM	H2 MFC set to  0.000000
11/5/2011	10:46:21 AM	BCl3 MFC set to  0.000000
11/5/2011	10:46:21 AM	PHl3 MFC set to  0.000000
11/5/2011	10:46:21 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:46:21 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:46:21 AM	Tube furnace set to 150
11/5/2011	10:46:51 AM	H2 valve closed
11/5/2011	10:46:51 AM	BCl3 valve closed
11/5/2011	10:46:51 AM	PH3 valve closed
11/5/2011	10:46:51 AM	SiCl4 pre valve closed
11/5/2011	10:46:51 AM	SiCl4 post valve closed
11/5/2011	10:46:51 AM	Bypass valve closed
11/5/2011	10:46:51 AM	Bubbler valve closed
11/5/2011	10:46:51 AM	Helium valve opened
11/5/2011	10:46:51 AM	Main Vac valve opened
11/5/2011	10:46:51 AM	Helium MFC set to  20.000000
11/5/2011	10:46:51 AM	H2 MFC set to  0.000000
11/5/2011	10:46:51 AM	BCl3 MFC set to  0.000000
11/5/2011	10:46:51 AM	PHl3 MFC set to  0.000000
11/5/2011	10:46:51 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:46:51 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:46:51 AM	Tube furnace set to 150
11/5/2011	10:47:21 AM	Helium valve closed
11/5/2011	10:47:21 AM	H2 valve closed
11/5/2011	10:47:21 AM	BCl3 valve closed
11/5/2011	10:47:21 AM	PH3 valve closed
11/5/2011	10:47:21 AM	SiCl4 pre valve closed
11/5/2011	10:47:21 AM	SiCl4 post valve closed
11/5/2011	10:47:21 AM	Bypass valve closed
11/5/2011	10:47:21 AM	Bubbler valve closed
11/5/2011	10:47:21 AM	Main Vac valve opened
11/5/2011	10:47:21 AM	Helium MFC set to  0.000000
11/5/2011	10:47:21 AM	H2 MFC set to  0.000000
11/5/2011	10:47:21 AM	BCl3 MFC set to  0.000000
11/5/2011	10:47:21 AM	PHl3 MFC set to  0.000000
11/5/2011	10:47:21 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:47:21 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:47:21 AM	Tube furnace set to 150
11/5/2011	10:47:51 AM	H2 valve closed
11/5/2011	10:47:51 AM	BCl3 valve closed
11/5/2011	10:47:51 AM	PH3 valve closed
11/5/2011	10:47:51 AM	SiCl4 pre valve closed
11/5/2011	10:47:51 AM	SiCl4 post valve closed
11/5/2011	10:47:51 AM	Bypass valve closed
11/5/2011	10:47:51 AM	Bubbler valve closed
11/5/2011	10:47:51 AM	Helium valve opened
11/5/2011	10:47:51 AM	Main Vac valve opened
11/5/2011	10:47:51 AM	Helium MFC set to  20.000000
11/5/2011	10:47:51 AM	H2 MFC set to  0.000000
11/5/2011	10:47:51 AM	BCl3 MFC set to  0.000000
11/5/2011	10:47:51 AM	PHl3 MFC set to  0.000000
11/5/2011	10:47:51 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:47:51 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:47:52 AM	Tube furnace set to 150
11/5/2011	10:48:22 AM	Helium valve closed
11/5/2011	10:48:22 AM	H2 valve closed
11/5/2011	10:48:22 AM	BCl3 valve closed
11/5/2011	10:48:22 AM	PH3 valve closed
11/5/2011	10:48:22 AM	SiCl4 pre valve closed
11/5/2011	10:48:22 AM	SiCl4 post valve closed
11/5/2011	10:48:22 AM	Bypass valve closed
11/5/2011	10:48:22 AM	Bubbler valve closed
11/5/2011	10:48:22 AM	Main Vac valve opened
11/5/2011	10:48:22 AM	Helium MFC set to  0.000000
11/5/2011	10:48:22 AM	H2 MFC set to  0.000000
11/5/2011	10:48:22 AM	BCl3 MFC set to  0.000000
11/5/2011	10:48:22 AM	PHl3 MFC set to  0.000000
11/5/2011	10:48:22 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:48:22 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:48:22 AM	Tube furnace set to 150
11/5/2011	10:48:52 AM	H2 valve closed
11/5/2011	10:48:52 AM	BCl3 valve closed
11/5/2011	10:48:52 AM	PH3 valve closed
11/5/2011	10:48:52 AM	SiCl4 pre valve closed
11/5/2011	10:48:52 AM	SiCl4 post valve closed
11/5/2011	10:48:52 AM	Bypass valve closed
11/5/2011	10:48:52 AM	Bubbler valve closed
11/5/2011	10:48:52 AM	Helium valve opened
11/5/2011	10:48:52 AM	Main Vac valve opened
11/5/2011	10:48:52 AM	Helium MFC set to  20.000000
11/5/2011	10:48:52 AM	H2 MFC set to  0.000000
11/5/2011	10:48:52 AM	BCl3 MFC set to  0.000000
11/5/2011	10:48:52 AM	PHl3 MFC set to  0.000000
11/5/2011	10:48:52 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:48:52 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:48:52 AM	Tube furnace set to 150
11/5/2011	10:49:22 AM	Helium valve closed
11/5/2011	10:49:22 AM	H2 valve closed
11/5/2011	10:49:22 AM	BCl3 valve closed
11/5/2011	10:49:22 AM	PH3 valve closed
11/5/2011	10:49:22 AM	SiCl4 pre valve closed
11/5/2011	10:49:22 AM	SiCl4 post valve closed
11/5/2011	10:49:22 AM	Bypass valve closed
11/5/2011	10:49:22 AM	Bubbler valve closed
11/5/2011	10:49:22 AM	Main Vac valve opened
11/5/2011	10:49:22 AM	Helium MFC set to  0.000000
11/5/2011	10:49:22 AM	H2 MFC set to  0.000000
11/5/2011	10:49:22 AM	BCl3 MFC set to  0.000000
11/5/2011	10:49:22 AM	PHl3 MFC set to  0.000000
11/5/2011	10:49:22 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:49:22 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:49:22 AM	Tube furnace set to 150
11/5/2011	10:49:52 AM	H2 valve closed
11/5/2011	10:49:52 AM	BCl3 valve closed
11/5/2011	10:49:52 AM	PH3 valve closed
11/5/2011	10:49:52 AM	SiCl4 pre valve closed
11/5/2011	10:49:52 AM	SiCl4 post valve closed
11/5/2011	10:49:52 AM	Bypass valve closed
11/5/2011	10:49:52 AM	Bubbler valve closed
11/5/2011	10:49:52 AM	Helium valve opened
11/5/2011	10:49:52 AM	Main Vac valve opened
11/5/2011	10:49:52 AM	Helium MFC set to  20.000000
11/5/2011	10:49:52 AM	H2 MFC set to  0.000000
11/5/2011	10:49:52 AM	BCl3 MFC set to  0.000000
11/5/2011	10:49:52 AM	PHl3 MFC set to  0.000000
11/5/2011	10:49:52 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:49:52 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:49:52 AM	Tube furnace set to 150
11/5/2011	10:50:22 AM	Helium valve closed
11/5/2011	10:50:22 AM	H2 valve closed
11/5/2011	10:50:22 AM	BCl3 valve closed
11/5/2011	10:50:22 AM	PH3 valve closed
11/5/2011	10:50:22 AM	SiCl4 pre valve closed
11/5/2011	10:50:22 AM	SiCl4 post valve closed
11/5/2011	10:50:22 AM	Bypass valve closed
11/5/2011	10:50:23 AM	Bubbler valve closed
11/5/2011	10:50:23 AM	Main Vac valve opened
11/5/2011	10:50:23 AM	Helium MFC set to  0.000000
11/5/2011	10:50:23 AM	H2 MFC set to  0.000000
11/5/2011	10:50:23 AM	BCl3 MFC set to  0.000000
11/5/2011	10:50:23 AM	PHl3 MFC set to  0.000000
11/5/2011	10:50:23 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:50:23 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:50:23 AM	Tube furnace set to 150
11/5/2011	10:50:53 AM	H2 valve closed
11/5/2011	10:50:53 AM	BCl3 valve closed
11/5/2011	10:50:53 AM	PH3 valve closed
11/5/2011	10:50:53 AM	SiCl4 pre valve closed
11/5/2011	10:50:53 AM	SiCl4 post valve closed
11/5/2011	10:50:53 AM	Bypass valve closed
11/5/2011	10:50:53 AM	Bubbler valve closed
11/5/2011	10:50:53 AM	Helium valve opened
11/5/2011	10:50:53 AM	Main Vac valve opened
11/5/2011	10:50:53 AM	Helium MFC set to  20.000000
11/5/2011	10:50:53 AM	H2 MFC set to  0.000000
11/5/2011	10:50:53 AM	BCl3 MFC set to  0.000000
11/5/2011	10:50:53 AM	PHl3 MFC set to  0.000000
11/5/2011	10:50:53 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:50:53 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:50:53 AM	Tube furnace set to 150
11/5/2011	10:51:23 AM	Helium valve closed
11/5/2011	10:51:23 AM	H2 valve closed
11/5/2011	10:51:23 AM	BCl3 valve closed
11/5/2011	10:51:23 AM	PH3 valve closed
11/5/2011	10:51:23 AM	SiCl4 pre valve closed
11/5/2011	10:51:23 AM	SiCl4 post valve closed
11/5/2011	10:51:23 AM	Bypass valve closed
11/5/2011	10:51:23 AM	Bubbler valve closed
11/5/2011	10:51:23 AM	Main Vac valve opened
11/5/2011	10:51:23 AM	Helium MFC set to  0.000000
11/5/2011	10:51:23 AM	H2 MFC set to  0.000000
11/5/2011	10:51:23 AM	BCl3 MFC set to  0.000000
11/5/2011	10:51:23 AM	PHl3 MFC set to  0.000000
11/5/2011	10:51:23 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:51:23 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:51:23 AM	Tube furnace set to 150
11/5/2011	10:51:53 AM	H2 valve closed
11/5/2011	10:51:53 AM	BCl3 valve closed
11/5/2011	10:51:53 AM	PH3 valve closed
11/5/2011	10:51:53 AM	SiCl4 pre valve closed
11/5/2011	10:51:53 AM	SiCl4 post valve closed
11/5/2011	10:51:53 AM	Bypass valve closed
11/5/2011	10:51:53 AM	Bubbler valve closed
11/5/2011	10:51:53 AM	Helium valve opened
11/5/2011	10:51:53 AM	Main Vac valve opened
11/5/2011	10:51:53 AM	Helium MFC set to  20.000000
11/5/2011	10:51:53 AM	H2 MFC set to  0.000000
11/5/2011	10:51:53 AM	BCl3 MFC set to  0.000000
11/5/2011	10:51:53 AM	PHl3 MFC set to  0.000000
11/5/2011	10:51:53 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:51:53 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:51:53 AM	Tube furnace set to 150
11/5/2011	10:52:23 AM	Helium valve closed
11/5/2011	10:52:23 AM	H2 valve closed
11/5/2011	10:52:23 AM	BCl3 valve closed
11/5/2011	10:52:23 AM	PH3 valve closed
11/5/2011	10:52:23 AM	SiCl4 pre valve closed
11/5/2011	10:52:23 AM	SiCl4 post valve closed
11/5/2011	10:52:23 AM	Bypass valve closed
11/5/2011	10:52:23 AM	Bubbler valve closed
11/5/2011	10:52:23 AM	Main Vac valve opened
11/5/2011	10:52:23 AM	Helium MFC set to  0.000000
11/5/2011	10:52:23 AM	H2 MFC set to  0.000000
11/5/2011	10:52:23 AM	BCl3 MFC set to  0.000000
11/5/2011	10:52:23 AM	PHl3 MFC set to  0.000000
11/5/2011	10:52:23 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:52:23 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:52:24 AM	Tube furnace set to 150
11/5/2011	10:52:54 AM	H2 valve closed
11/5/2011	10:52:54 AM	BCl3 valve closed
11/5/2011	10:52:54 AM	PH3 valve closed
11/5/2011	10:52:54 AM	SiCl4 pre valve closed
11/5/2011	10:52:54 AM	SiCl4 post valve closed
11/5/2011	10:52:54 AM	Bypass valve closed
11/5/2011	10:52:54 AM	Bubbler valve closed
11/5/2011	10:52:54 AM	Helium valve opened
11/5/2011	10:52:54 AM	Main Vac valve opened
11/5/2011	10:52:54 AM	Helium MFC set to  20.000000
11/5/2011	10:52:54 AM	H2 MFC set to  0.000000
11/5/2011	10:52:54 AM	BCl3 MFC set to  0.000000
11/5/2011	10:52:54 AM	PHl3 MFC set to  0.000000
11/5/2011	10:52:54 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:52:54 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:52:54 AM	Tube furnace set to 150
11/5/2011	10:53:24 AM	Helium valve closed
11/5/2011	10:53:24 AM	H2 valve closed
11/5/2011	10:53:24 AM	BCl3 valve closed
11/5/2011	10:53:24 AM	PH3 valve closed
11/5/2011	10:53:24 AM	SiCl4 pre valve closed
11/5/2011	10:53:24 AM	SiCl4 post valve closed
11/5/2011	10:53:24 AM	Bypass valve closed
11/5/2011	10:53:24 AM	Bubbler valve closed
11/5/2011	10:53:24 AM	Main Vac valve opened
11/5/2011	10:53:24 AM	Helium MFC set to  0.000000
11/5/2011	10:53:24 AM	H2 MFC set to  0.000000
11/5/2011	10:53:24 AM	BCl3 MFC set to  0.000000
11/5/2011	10:53:24 AM	PHl3 MFC set to  0.000000
11/5/2011	10:53:24 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:53:24 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:53:24 AM	Tube furnace set to 150
11/5/2011	10:53:54 AM	H2 valve closed
11/5/2011	10:53:54 AM	BCl3 valve closed
11/5/2011	10:53:54 AM	PH3 valve closed
11/5/2011	10:53:54 AM	SiCl4 pre valve closed
11/5/2011	10:53:54 AM	SiCl4 post valve closed
11/5/2011	10:53:54 AM	Bypass valve closed
11/5/2011	10:53:54 AM	Bubbler valve closed
11/5/2011	10:53:54 AM	Helium valve opened
11/5/2011	10:53:54 AM	Main Vac valve opened
11/5/2011	10:53:54 AM	Helium MFC set to  20.000000
11/5/2011	10:53:54 AM	H2 MFC set to  0.000000
11/5/2011	10:53:54 AM	BCl3 MFC set to  0.000000
11/5/2011	10:53:54 AM	PHl3 MFC set to  0.000000
11/5/2011	10:53:54 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:53:54 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:53:54 AM	Tube furnace set to 150
11/5/2011	10:54:24 AM	Helium valve closed
11/5/2011	10:54:24 AM	H2 valve closed
11/5/2011	10:54:24 AM	BCl3 valve closed
11/5/2011	10:54:24 AM	PH3 valve closed
11/5/2011	10:54:24 AM	SiCl4 pre valve closed
11/5/2011	10:54:24 AM	SiCl4 post valve closed
11/5/2011	10:54:24 AM	Bypass valve closed
11/5/2011	10:54:24 AM	Bubbler valve closed
11/5/2011	10:54:24 AM	Main Vac valve opened
11/5/2011	10:54:24 AM	Helium MFC set to  0.000000
11/5/2011	10:54:24 AM	H2 MFC set to  0.000000
11/5/2011	10:54:24 AM	BCl3 MFC set to  0.000000
11/5/2011	10:54:24 AM	PHl3 MFC set to  0.000000
11/5/2011	10:54:24 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:54:24 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:54:24 AM	Tube furnace set to 150
11/5/2011	10:54:54 AM	H2 valve closed
11/5/2011	10:54:54 AM	BCl3 valve closed
11/5/2011	10:54:54 AM	PH3 valve closed
11/5/2011	10:54:54 AM	SiCl4 pre valve closed
11/5/2011	10:54:54 AM	SiCl4 post valve closed
11/5/2011	10:54:54 AM	Bypass valve closed
11/5/2011	10:54:54 AM	Bubbler valve closed
11/5/2011	10:54:54 AM	Helium valve opened
11/5/2011	10:54:54 AM	Main Vac valve opened
11/5/2011	10:54:54 AM	Helium MFC set to  20.000000
11/5/2011	10:54:54 AM	H2 MFC set to  0.000000
11/5/2011	10:54:54 AM	BCl3 MFC set to  0.000000
11/5/2011	10:54:54 AM	PHl3 MFC set to  0.000000
11/5/2011	10:54:54 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:54:54 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:54:55 AM	Tube furnace set to 150
11/5/2011	10:55:25 AM	Helium valve closed
11/5/2011	10:55:25 AM	H2 valve closed
11/5/2011	10:55:25 AM	BCl3 valve closed
11/5/2011	10:55:25 AM	PH3 valve closed
11/5/2011	10:55:25 AM	SiCl4 pre valve closed
11/5/2011	10:55:25 AM	SiCl4 post valve closed
11/5/2011	10:55:25 AM	Bypass valve closed
11/5/2011	10:55:25 AM	Bubbler valve closed
11/5/2011	10:55:25 AM	Main Vac valve opened
11/5/2011	10:55:25 AM	Helium MFC set to  0.000000
11/5/2011	10:55:25 AM	H2 MFC set to  0.000000
11/5/2011	10:55:25 AM	BCl3 MFC set to  0.000000
11/5/2011	10:55:25 AM	PHl3 MFC set to  0.000000
11/5/2011	10:55:25 AM	SiCl4 MFC set to  0.000000
11/5/2011	10:55:25 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:55:25 AM	Tube furnace set to 180
11/5/2011	10:55:30 AM	Run finished at 10:55 AM
11/5/2011	11:02:46 AM	Main Vac valve closed
11/5/2011	11:03:01 AM	Main Vac valve opened
11/5/2011	11:10:04 AM	Recipe started at 11:10 AM
11/5/2011	11:10:04 AM	H2 valve closed
11/5/2011	11:10:04 AM	BCl3 valve closed
11/5/2011	11:10:04 AM	PH3 valve closed
11/5/2011	11:10:04 AM	SiCl4 pre valve closed
11/5/2011	11:10:04 AM	SiCl4 post valve closed
11/5/2011	11:10:04 AM	Main Vac valve closed
11/5/2011	11:10:04 AM	Bypass valve closed
11/5/2011	11:10:04 AM	Bubbler valve closed
11/5/2011	11:10:04 AM	Helium valve opened
11/5/2011	11:10:04 AM	Helium MFC set to  0.000000
11/5/2011	11:10:04 AM	H2 MFC set to  0.000000
11/5/2011	11:10:04 AM	BCl3 MFC set to  0.000000
11/5/2011	11:10:04 AM	PHl3 MFC set to  0.000000
11/5/2011	11:10:04 AM	SiCl4 MFC set to  0.000000
11/5/2011	11:10:04 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:10:04 AM	Tube furnace set to 0
11/5/2011	11:10:07 AM	Helium valve closed
11/5/2011	11:10:07 AM	BCl3 valve closed
11/5/2011	11:10:07 AM	PH3 valve closed
11/5/2011	11:10:07 AM	SiCl4 pre valve closed
11/5/2011	11:10:07 AM	SiCl4 post valve closed
11/5/2011	11:10:07 AM	Main Vac valve closed
11/5/2011	11:10:07 AM	Bypass valve closed
11/5/2011	11:10:07 AM	Bubbler valve closed
11/5/2011	11:10:07 AM	H2 valve opened
11/5/2011	11:10:07 AM	Helium MFC set to  0.000000
11/5/2011	11:10:07 AM	H2 MFC set to  500.000000
11/5/2011	11:10:07 AM	BCl3 MFC set to  0.000000
11/5/2011	11:10:07 AM	PHl3 MFC set to  0.000000
11/5/2011	11:10:07 AM	SiCl4 MFC set to  0.000000
11/5/2011	11:10:07 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:10:08 AM	Tube furnace set to 100
11/5/2011	11:11:12 AM	Helium valve closed
11/5/2011	11:11:12 AM	BCl3 valve closed
11/5/2011	11:11:12 AM	PH3 valve closed
11/5/2011	11:11:12 AM	SiCl4 pre valve closed
11/5/2011	11:11:12 AM	SiCl4 post valve closed
11/5/2011	11:11:12 AM	Main Vac valve closed
11/5/2011	11:11:12 AM	Bypass valve closed
11/5/2011	11:11:12 AM	H2 valve opened
11/5/2011	11:11:12 AM	Bubbler valve opened
11/5/2011	11:11:12 AM	Helium MFC set to  0.000000
11/5/2011	11:11:12 AM	H2 MFC set to  500.000000
11/5/2011	11:11:12 AM	BCl3 MFC set to  0.000000
11/5/2011	11:11:12 AM	PHl3 MFC set to  0.000000
11/5/2011	11:11:12 AM	SiCl4 MFC set to  0.000000
11/5/2011	11:11:12 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:11:12 AM	Tube furnace set to 1000
11/5/2011	11:11:13 AM	Helium valve closed
11/5/2011	11:11:13 AM	BCl3 valve closed
11/5/2011	11:11:13 AM	PH3 valve closed
11/5/2011	11:11:13 AM	SiCl4 pre valve closed
11/5/2011	11:11:13 AM	SiCl4 post valve closed
11/5/2011	11:11:13 AM	Main Vac valve closed
11/5/2011	11:11:13 AM	Bypass valve closed
11/5/2011	11:11:13 AM	H2 valve opened
11/5/2011	11:11:13 AM	Bubbler valve opened
11/5/2011	11:11:13 AM	Helium MFC set to  0.000000
11/5/2011	11:11:13 AM	H2 MFC set to  500.000000
11/5/2011	11:11:13 AM	BCl3 MFC set to  0.000000
11/5/2011	11:11:13 AM	PHl3 MFC set to  0.000000
11/5/2011	11:11:13 AM	SiCl4 MFC set to  0.000000
11/5/2011	11:11:13 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:11:13 AM	Tube furnace set to 1000
11/5/2011	11:35:13 AM	Helium valve closed
11/5/2011	11:35:13 AM	BCl3 valve closed
11/5/2011	11:35:13 AM	PH3 valve closed
11/5/2011	11:35:13 AM	Main Vac valve closed
11/5/2011	11:35:13 AM	Bypass valve closed
11/5/2011	11:35:13 AM	H2 valve opened
11/5/2011	11:35:13 AM	SiCl4 pre valve opened
11/5/2011	11:35:13 AM	SiCl4 post valve opened
11/5/2011	11:35:13 AM	Bubbler valve opened
11/5/2011	11:35:13 AM	Helium MFC set to  0.000000
11/5/2011	11:35:13 AM	H2 MFC set to  500.000000
11/5/2011	11:35:13 AM	BCl3 MFC set to  0.000000
11/5/2011	11:35:13 AM	PHl3 MFC set to  0.000000
11/5/2011	11:35:13 AM	SiCl4 MFC set to  20.000000
11/5/2011	11:35:13 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:35:13 AM	Tube furnace set to 1000
11/5/2011	11:45:13 AM	Helium valve closed
11/5/2011	11:45:13 AM	BCl3 valve closed
11/5/2011	11:45:13 AM	PH3 valve closed
11/5/2011	11:45:13 AM	SiCl4 pre valve closed
11/5/2011	11:45:13 AM	SiCl4 post valve closed
11/5/2011	11:45:13 AM	Main Vac valve closed
11/5/2011	11:45:13 AM	Bypass valve closed
11/5/2011	11:45:13 AM	H2 valve opened
11/5/2011	11:45:13 AM	Bubbler valve opened
11/5/2011	11:45:13 AM	Helium MFC set to  0.000000
11/5/2011	11:45:13 AM	H2 MFC set to  500.000000
11/5/2011	11:45:13 AM	BCl3 MFC set to  0.000000
11/5/2011	11:45:13 AM	PHl3 MFC set to  0.000000
11/5/2011	11:45:13 AM	SiCl4 MFC set to  0.000000
11/5/2011	11:45:13 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:45:13 AM	Tube furnace set to 1000
11/5/2011	11:55:13 AM	H2 valve closed
11/5/2011	11:55:13 AM	BCl3 valve closed
11/5/2011	11:55:13 AM	PH3 valve closed
11/5/2011	11:55:13 AM	SiCl4 pre valve closed
11/5/2011	11:55:13 AM	SiCl4 post valve closed
11/5/2011	11:55:13 AM	Main Vac valve closed
11/5/2011	11:55:13 AM	Bypass valve closed
11/5/2011	11:55:13 AM	Helium valve opened
11/5/2011	11:55:13 AM	Bubbler valve opened
11/5/2011	11:55:13 AM	Helium MFC set to  400.000000
11/5/2011	11:55:13 AM	H2 MFC set to  0.000000
11/5/2011	11:55:13 AM	BCl3 MFC set to  0.000000
11/5/2011	11:55:13 AM	PHl3 MFC set to  0.000000
11/5/2011	11:55:13 AM	SiCl4 MFC set to  0.000000
11/5/2011	11:55:13 AM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:55:13 AM	Tube furnace set to 0
11/5/2011	12:03:49 PM	Run aborted at 12:03 PM
11/5/2011	12:03:49 PM	Helium valve closed
11/5/2011	12:03:49 PM	H2 valve closed
11/5/2011	12:03:49 PM	BCl3 valve closed
11/5/2011	12:03:49 PM	PH3 valve closed
11/5/2011	12:03:49 PM	SiCl4 pre valve closed
11/5/2011	12:03:49 PM	SiCl4 post valve closed
11/5/2011	12:03:49 PM	Bypass valve closed
11/5/2011	12:03:49 PM	Main Vac valve closed
11/5/2011	12:03:49 PM	Bubbler valve closed
11/5/2011	12:03:49 PM	Helium MFC set to  0.000000
11/5/2011	12:03:49 PM	H2 MFC set to  0.000000
11/5/2011	12:03:49 PM	BCl3 MFC set to  0.000000
11/5/2011	12:03:49 PM	PHl3 MFC set to  0.000000
11/5/2011	12:03:49 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:03:49 PM	Tube furnace set to 0
11/5/2011	12:03:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	12:03:56 PM	Recipe started at 12:03 PM
11/5/2011	12:03:56 PM	Helium valve closed
11/5/2011	12:03:56 PM	H2 valve closed
11/5/2011	12:03:56 PM	BCl3 valve closed
11/5/2011	12:03:56 PM	PH3 valve closed
11/5/2011	12:03:56 PM	SiCl4 pre valve closed
11/5/2011	12:03:56 PM	SiCl4 post valve closed
11/5/2011	12:03:56 PM	Main Vac valve closed
11/5/2011	12:03:56 PM	Bypass valve closed
11/5/2011	12:03:56 PM	Bubbler valve closed
11/5/2011	12:03:56 PM	Helium MFC set to  0.000000
11/5/2011	12:03:56 PM	H2 MFC set to  0.000000
11/5/2011	12:03:56 PM	BCl3 MFC set to  0.000000
11/5/2011	12:03:56 PM	PHl3 MFC set to  0.000000
11/5/2011	12:03:56 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:03:56 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:03:56 PM	Tube furnace set to 0
11/5/2011	12:03:59 PM	H2 valve closed
11/5/2011	12:03:59 PM	BCl3 valve closed
11/5/2011	12:03:59 PM	PH3 valve closed
11/5/2011	12:03:59 PM	SiCl4 pre valve closed
11/5/2011	12:03:59 PM	SiCl4 post valve closed
11/5/2011	12:03:59 PM	Main Vac valve closed
11/5/2011	12:03:59 PM	Bypass valve closed
11/5/2011	12:03:59 PM	Bubbler valve closed
11/5/2011	12:03:59 PM	Helium valve opened
11/5/2011	12:03:59 PM	Helium MFC set to  500.000000
11/5/2011	12:03:59 PM	H2 MFC set to  0.000000
11/5/2011	12:03:59 PM	BCl3 MFC set to  0.000000
11/5/2011	12:03:59 PM	PHl3 MFC set to  0.000000
11/5/2011	12:03:59 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:03:59 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:04:00 PM	Tube furnace set to 0
11/5/2011	12:04:00 PM	Helium valve closed
11/5/2011	12:04:00 PM	H2 valve closed
11/5/2011	12:04:00 PM	BCl3 valve closed
11/5/2011	12:04:00 PM	PH3 valve closed
11/5/2011	12:04:00 PM	SiCl4 pre valve closed
11/5/2011	12:04:00 PM	SiCl4 post valve closed
11/5/2011	12:04:00 PM	Main Vac valve closed
11/5/2011	12:04:00 PM	Bypass valve closed
11/5/2011	12:04:00 PM	Bubbler valve closed
11/5/2011	12:04:00 PM	Helium MFC set to  0.000000
11/5/2011	12:04:00 PM	H2 MFC set to  0.000000
11/5/2011	12:04:00 PM	BCl3 MFC set to  0.000000
11/5/2011	12:04:00 PM	PHl3 MFC set to  0.000000
11/5/2011	12:04:00 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:04:00 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:04:00 PM	Tube furnace set to 0
11/5/2011	12:04:01 PM	Run finished at 12:04 PM
11/5/2011	12:04:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	12:08:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	12:08:33 PM	Recipe started at 12:08 PM
11/5/2011	12:08:33 PM	Helium valve closed
11/5/2011	12:08:33 PM	H2 valve closed
11/5/2011	12:08:33 PM	BCl3 valve closed
11/5/2011	12:08:33 PM	PH3 valve closed
11/5/2011	12:08:33 PM	SiCl4 pre valve closed
11/5/2011	12:08:33 PM	SiCl4 post valve closed
11/5/2011	12:08:33 PM	Main Vac valve closed
11/5/2011	12:08:33 PM	Bubbler valve closed
11/5/2011	12:08:33 PM	Bypass valve opened
11/5/2011	12:08:33 PM	Helium MFC set to  0.000000
11/5/2011	12:08:33 PM	H2 MFC set to  0.000000
11/5/2011	12:08:33 PM	BCl3 MFC set to  0.000000
11/5/2011	12:08:33 PM	PHl3 MFC set to  0.000000
11/5/2011	12:08:33 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:08:33 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:08:33 PM	Tube furnace set to 0
11/5/2011	12:09:35 PM	Helium valve closed
11/5/2011	12:09:35 PM	H2 valve closed
11/5/2011	12:09:35 PM	BCl3 valve closed
11/5/2011	12:09:35 PM	PH3 valve closed
11/5/2011	12:09:35 PM	SiCl4 pre valve closed
11/5/2011	12:09:35 PM	SiCl4 post valve closed
11/5/2011	12:09:35 PM	Main Vac valve closed
11/5/2011	12:09:35 PM	Bubbler valve closed
11/5/2011	12:09:35 PM	Bypass valve opened
11/5/2011	12:09:35 PM	Helium MFC set to  0.000000
11/5/2011	12:09:35 PM	H2 MFC set to  0.000000
11/5/2011	12:09:35 PM	BCl3 MFC set to  0.000000
11/5/2011	12:09:35 PM	PHl3 MFC set to  0.000000
11/5/2011	12:09:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:09:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:09:35 PM	Tube furnace set to 0
11/5/2011	12:10:35 PM	Helium valve closed
11/5/2011	12:10:35 PM	H2 valve closed
11/5/2011	12:10:35 PM	BCl3 valve closed
11/5/2011	12:10:35 PM	PH3 valve closed
11/5/2011	12:10:35 PM	SiCl4 pre valve closed
11/5/2011	12:10:35 PM	SiCl4 post valve closed
11/5/2011	12:10:35 PM	Bypass valve closed
11/5/2011	12:10:35 PM	Bubbler valve closed
11/5/2011	12:10:35 PM	Main Vac valve opened
11/5/2011	12:10:35 PM	Helium MFC set to  0.000000
11/5/2011	12:10:35 PM	H2 MFC set to  0.000000
11/5/2011	12:10:35 PM	BCl3 MFC set to  0.000000
11/5/2011	12:10:35 PM	PHl3 MFC set to  0.000000
11/5/2011	12:10:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:10:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:10:35 PM	Tube furnace set to 0
11/5/2011	12:10:36 PM	Run finished at 12:10 PM
11/5/2011	12:10:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	12:25:43 PM	Recipe started at 12:25 PM
11/5/2011	12:25:43 PM	Helium valve closed
11/5/2011	12:25:43 PM	H2 valve closed
11/5/2011	12:25:43 PM	BCl3 valve closed
11/5/2011	12:25:43 PM	PH3 valve closed
11/5/2011	12:25:43 PM	SiCl4 pre valve closed
11/5/2011	12:25:43 PM	SiCl4 post valve closed
11/5/2011	12:25:43 PM	Main Vac valve closed
11/5/2011	12:25:43 PM	Bubbler valve closed
11/5/2011	12:25:43 PM	Bypass valve opened
11/5/2011	12:25:43 PM	Helium MFC set to  0.000000
11/5/2011	12:25:43 PM	H2 MFC set to  0.000000
11/5/2011	12:25:43 PM	BCl3 MFC set to  0.000000
11/5/2011	12:25:43 PM	PHl3 MFC set to  0.000000
11/5/2011	12:25:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:25:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:25:43 PM	Tube furnace set to 180
11/5/2011	12:25:43 PM	Helium valve closed
11/5/2011	12:25:43 PM	H2 valve closed
11/5/2011	12:25:43 PM	BCl3 valve closed
11/5/2011	12:25:43 PM	PH3 valve closed
11/5/2011	12:25:43 PM	SiCl4 pre valve closed
11/5/2011	12:25:43 PM	SiCl4 post valve closed
11/5/2011	12:25:43 PM	Main Vac valve closed
11/5/2011	12:25:43 PM	Bubbler valve closed
11/5/2011	12:25:43 PM	Bypass valve opened
11/5/2011	12:25:43 PM	Helium MFC set to  0.000000
11/5/2011	12:25:43 PM	H2 MFC set to  0.000000
11/5/2011	12:25:43 PM	BCl3 MFC set to  0.000000
11/5/2011	12:25:43 PM	PHl3 MFC set to  0.000000
11/5/2011	12:25:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:25:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:25:43 PM	Tube furnace set to 150
11/5/2011	12:25:45 PM	Helium valve closed
11/5/2011	12:25:45 PM	H2 valve closed
11/5/2011	12:25:45 PM	BCl3 valve closed
11/5/2011	12:25:45 PM	PH3 valve closed
11/5/2011	12:25:45 PM	SiCl4 pre valve closed
11/5/2011	12:25:45 PM	SiCl4 post valve closed
11/5/2011	12:25:45 PM	Bypass valve closed
11/5/2011	12:25:45 PM	Bubbler valve closed
11/5/2011	12:25:45 PM	Main Vac valve opened
11/5/2011	12:25:45 PM	Helium MFC set to  0.000000
11/5/2011	12:25:45 PM	H2 MFC set to  0.000000
11/5/2011	12:25:45 PM	BCl3 MFC set to  0.000000
11/5/2011	12:25:45 PM	PHl3 MFC set to  0.000000
11/5/2011	12:25:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:25:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:25:45 PM	Tube furnace set to 180
11/5/2011	12:26:15 PM	H2 valve closed
11/5/2011	12:26:15 PM	BCl3 valve closed
11/5/2011	12:26:15 PM	PH3 valve closed
11/5/2011	12:26:15 PM	SiCl4 pre valve closed
11/5/2011	12:26:15 PM	SiCl4 post valve closed
11/5/2011	12:26:15 PM	Bypass valve closed
11/5/2011	12:26:15 PM	Bubbler valve closed
11/5/2011	12:26:15 PM	Helium valve opened
11/5/2011	12:26:15 PM	Main Vac valve opened
11/5/2011	12:26:15 PM	Helium MFC set to  20.000000
11/5/2011	12:26:15 PM	H2 MFC set to  0.000000
11/5/2011	12:26:15 PM	BCl3 MFC set to  0.000000
11/5/2011	12:26:15 PM	PHl3 MFC set to  0.000000
11/5/2011	12:26:15 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:26:15 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:26:15 PM	Tube furnace set to 180
11/5/2011	12:26:45 PM	Helium valve closed
11/5/2011	12:26:45 PM	H2 valve closed
11/5/2011	12:26:45 PM	BCl3 valve closed
11/5/2011	12:26:45 PM	PH3 valve closed
11/5/2011	12:26:45 PM	SiCl4 pre valve closed
11/5/2011	12:26:45 PM	SiCl4 post valve closed
11/5/2011	12:26:45 PM	Bypass valve closed
11/5/2011	12:26:45 PM	Bubbler valve closed
11/5/2011	12:26:45 PM	Main Vac valve opened
11/5/2011	12:26:45 PM	Helium MFC set to  0.000000
11/5/2011	12:26:45 PM	H2 MFC set to  0.000000
11/5/2011	12:26:45 PM	BCl3 MFC set to  0.000000
11/5/2011	12:26:45 PM	PHl3 MFC set to  0.000000
11/5/2011	12:26:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:26:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:26:46 PM	Tube furnace set to 150
11/5/2011	12:27:16 PM	H2 valve closed
11/5/2011	12:27:16 PM	BCl3 valve closed
11/5/2011	12:27:16 PM	PH3 valve closed
11/5/2011	12:27:16 PM	SiCl4 pre valve closed
11/5/2011	12:27:16 PM	SiCl4 post valve closed
11/5/2011	12:27:16 PM	Bypass valve closed
11/5/2011	12:27:16 PM	Bubbler valve closed
11/5/2011	12:27:16 PM	Helium valve opened
11/5/2011	12:27:16 PM	Main Vac valve opened
11/5/2011	12:27:16 PM	Helium MFC set to  20.000000
11/5/2011	12:27:16 PM	H2 MFC set to  0.000000
11/5/2011	12:27:16 PM	BCl3 MFC set to  0.000000
11/5/2011	12:27:16 PM	PHl3 MFC set to  0.000000
11/5/2011	12:27:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:27:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:27:16 PM	Tube furnace set to 180
11/5/2011	12:27:46 PM	Helium valve closed
11/5/2011	12:27:46 PM	H2 valve closed
11/5/2011	12:27:46 PM	BCl3 valve closed
11/5/2011	12:27:46 PM	PH3 valve closed
11/5/2011	12:27:46 PM	SiCl4 pre valve closed
11/5/2011	12:27:46 PM	SiCl4 post valve closed
11/5/2011	12:27:46 PM	Bypass valve closed
11/5/2011	12:27:46 PM	Bubbler valve closed
11/5/2011	12:27:46 PM	Main Vac valve opened
11/5/2011	12:27:46 PM	Helium MFC set to  0.000000
11/5/2011	12:27:46 PM	H2 MFC set to  0.000000
11/5/2011	12:27:46 PM	BCl3 MFC set to  0.000000
11/5/2011	12:27:46 PM	PHl3 MFC set to  0.000000
11/5/2011	12:27:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:27:46 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:27:46 PM	Tube furnace set to 150
11/5/2011	12:28:16 PM	H2 valve closed
11/5/2011	12:28:16 PM	BCl3 valve closed
11/5/2011	12:28:16 PM	PH3 valve closed
11/5/2011	12:28:16 PM	SiCl4 pre valve closed
11/5/2011	12:28:16 PM	SiCl4 post valve closed
11/5/2011	12:28:16 PM	Bypass valve closed
11/5/2011	12:28:16 PM	Bubbler valve closed
11/5/2011	12:28:16 PM	Helium valve opened
11/5/2011	12:28:16 PM	Main Vac valve opened
11/5/2011	12:28:16 PM	Helium MFC set to  20.000000
11/5/2011	12:28:16 PM	H2 MFC set to  0.000000
11/5/2011	12:28:16 PM	BCl3 MFC set to  0.000000
11/5/2011	12:28:16 PM	PHl3 MFC set to  0.000000
11/5/2011	12:28:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:28:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:28:16 PM	Tube furnace set to 150
11/5/2011	12:28:46 PM	Helium valve closed
11/5/2011	12:28:46 PM	H2 valve closed
11/5/2011	12:28:46 PM	BCl3 valve closed
11/5/2011	12:28:46 PM	PH3 valve closed
11/5/2011	12:28:46 PM	SiCl4 pre valve closed
11/5/2011	12:28:46 PM	SiCl4 post valve closed
11/5/2011	12:28:46 PM	Bypass valve closed
11/5/2011	12:28:46 PM	Bubbler valve closed
11/5/2011	12:28:46 PM	Main Vac valve opened
11/5/2011	12:28:46 PM	Helium MFC set to  0.000000
11/5/2011	12:28:46 PM	H2 MFC set to  0.000000
11/5/2011	12:28:46 PM	BCl3 MFC set to  0.000000
11/5/2011	12:28:46 PM	PHl3 MFC set to  0.000000
11/5/2011	12:28:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:28:46 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:28:46 PM	Tube furnace set to 150
11/5/2011	12:29:16 PM	H2 valve closed
11/5/2011	12:29:16 PM	BCl3 valve closed
11/5/2011	12:29:16 PM	PH3 valve closed
11/5/2011	12:29:16 PM	SiCl4 pre valve closed
11/5/2011	12:29:16 PM	SiCl4 post valve closed
11/5/2011	12:29:16 PM	Bypass valve closed
11/5/2011	12:29:16 PM	Bubbler valve closed
11/5/2011	12:29:16 PM	Helium valve opened
11/5/2011	12:29:16 PM	Main Vac valve opened
11/5/2011	12:29:16 PM	Helium MFC set to  20.000000
11/5/2011	12:29:16 PM	H2 MFC set to  0.000000
11/5/2011	12:29:16 PM	BCl3 MFC set to  0.000000
11/5/2011	12:29:16 PM	PHl3 MFC set to  0.000000
11/5/2011	12:29:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:29:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:29:17 PM	Tube furnace set to 180
11/5/2011	12:29:47 PM	Helium valve closed
11/5/2011	12:29:47 PM	H2 valve closed
11/5/2011	12:29:47 PM	BCl3 valve closed
11/5/2011	12:29:47 PM	PH3 valve closed
11/5/2011	12:29:47 PM	SiCl4 pre valve closed
11/5/2011	12:29:47 PM	SiCl4 post valve closed
11/5/2011	12:29:47 PM	Bypass valve closed
11/5/2011	12:29:47 PM	Bubbler valve closed
11/5/2011	12:29:47 PM	Main Vac valve opened
11/5/2011	12:29:47 PM	Helium MFC set to  0.000000
11/5/2011	12:29:47 PM	H2 MFC set to  0.000000
11/5/2011	12:29:47 PM	BCl3 MFC set to  0.000000
11/5/2011	12:29:47 PM	PHl3 MFC set to  0.000000
11/5/2011	12:29:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:29:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:29:47 PM	Tube furnace set to 150
11/5/2011	12:30:17 PM	H2 valve closed
11/5/2011	12:30:17 PM	BCl3 valve closed
11/5/2011	12:30:17 PM	PH3 valve closed
11/5/2011	12:30:17 PM	SiCl4 pre valve closed
11/5/2011	12:30:17 PM	SiCl4 post valve closed
11/5/2011	12:30:17 PM	Bypass valve closed
11/5/2011	12:30:17 PM	Bubbler valve closed
11/5/2011	12:30:17 PM	Helium valve opened
11/5/2011	12:30:17 PM	Main Vac valve opened
11/5/2011	12:30:17 PM	Helium MFC set to  20.000000
11/5/2011	12:30:17 PM	H2 MFC set to  0.000000
11/5/2011	12:30:17 PM	BCl3 MFC set to  0.000000
11/5/2011	12:30:17 PM	PHl3 MFC set to  0.000000
11/5/2011	12:30:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:30:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:30:17 PM	Tube furnace set to 150
11/5/2011	12:30:47 PM	Helium valve closed
11/5/2011	12:30:47 PM	H2 valve closed
11/5/2011	12:30:47 PM	BCl3 valve closed
11/5/2011	12:30:47 PM	PH3 valve closed
11/5/2011	12:30:47 PM	SiCl4 pre valve closed
11/5/2011	12:30:47 PM	SiCl4 post valve closed
11/5/2011	12:30:47 PM	Bypass valve closed
11/5/2011	12:30:47 PM	Bubbler valve closed
11/5/2011	12:30:47 PM	Main Vac valve opened
11/5/2011	12:30:47 PM	Helium MFC set to  0.000000
11/5/2011	12:30:47 PM	H2 MFC set to  0.000000
11/5/2011	12:30:47 PM	BCl3 MFC set to  0.000000
11/5/2011	12:30:47 PM	PHl3 MFC set to  0.000000
11/5/2011	12:30:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:30:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:30:47 PM	Tube furnace set to 150
11/5/2011	12:31:17 PM	H2 valve closed
11/5/2011	12:31:17 PM	BCl3 valve closed
11/5/2011	12:31:17 PM	PH3 valve closed
11/5/2011	12:31:17 PM	SiCl4 pre valve closed
11/5/2011	12:31:17 PM	SiCl4 post valve closed
11/5/2011	12:31:17 PM	Bypass valve closed
11/5/2011	12:31:17 PM	Bubbler valve closed
11/5/2011	12:31:17 PM	Helium valve opened
11/5/2011	12:31:17 PM	Main Vac valve opened
11/5/2011	12:31:17 PM	Helium MFC set to  20.000000
11/5/2011	12:31:17 PM	H2 MFC set to  0.000000
11/5/2011	12:31:17 PM	BCl3 MFC set to  0.000000
11/5/2011	12:31:17 PM	PHl3 MFC set to  0.000000
11/5/2011	12:31:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:31:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:31:17 PM	Tube furnace set to 150
11/5/2011	12:31:47 PM	Helium valve closed
11/5/2011	12:31:47 PM	H2 valve closed
11/5/2011	12:31:47 PM	BCl3 valve closed
11/5/2011	12:31:47 PM	PH3 valve closed
11/5/2011	12:31:47 PM	SiCl4 pre valve closed
11/5/2011	12:31:47 PM	SiCl4 post valve closed
11/5/2011	12:31:47 PM	Bypass valve closed
11/5/2011	12:31:47 PM	Bubbler valve closed
11/5/2011	12:31:47 PM	Main Vac valve opened
11/5/2011	12:31:47 PM	Helium MFC set to  0.000000
11/5/2011	12:31:47 PM	H2 MFC set to  0.000000
11/5/2011	12:31:47 PM	BCl3 MFC set to  0.000000
11/5/2011	12:31:47 PM	PHl3 MFC set to  0.000000
11/5/2011	12:31:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:31:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:31:48 PM	Tube furnace set to 150
11/5/2011	12:32:18 PM	H2 valve closed
11/5/2011	12:32:18 PM	BCl3 valve closed
11/5/2011	12:32:18 PM	PH3 valve closed
11/5/2011	12:32:18 PM	SiCl4 pre valve closed
11/5/2011	12:32:18 PM	SiCl4 post valve closed
11/5/2011	12:32:18 PM	Bypass valve closed
11/5/2011	12:32:18 PM	Bubbler valve closed
11/5/2011	12:32:18 PM	Helium valve opened
11/5/2011	12:32:18 PM	Main Vac valve opened
11/5/2011	12:32:18 PM	Helium MFC set to  20.000000
11/5/2011	12:32:18 PM	H2 MFC set to  0.000000
11/5/2011	12:32:18 PM	BCl3 MFC set to  0.000000
11/5/2011	12:32:18 PM	PHl3 MFC set to  0.000000
11/5/2011	12:32:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:32:18 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:32:18 PM	Tube furnace set to 150
11/5/2011	12:32:48 PM	Helium valve closed
11/5/2011	12:32:48 PM	H2 valve closed
11/5/2011	12:32:48 PM	BCl3 valve closed
11/5/2011	12:32:48 PM	PH3 valve closed
11/5/2011	12:32:48 PM	SiCl4 pre valve closed
11/5/2011	12:32:48 PM	SiCl4 post valve closed
11/5/2011	12:32:48 PM	Bypass valve closed
11/5/2011	12:32:48 PM	Bubbler valve closed
11/5/2011	12:32:48 PM	Main Vac valve opened
11/5/2011	12:32:48 PM	Helium MFC set to  0.000000
11/5/2011	12:32:48 PM	H2 MFC set to  0.000000
11/5/2011	12:32:48 PM	BCl3 MFC set to  0.000000
11/5/2011	12:32:48 PM	PHl3 MFC set to  0.000000
11/5/2011	12:32:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:32:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:32:48 PM	Tube furnace set to 150
11/5/2011	12:33:18 PM	H2 valve closed
11/5/2011	12:33:18 PM	BCl3 valve closed
11/5/2011	12:33:18 PM	PH3 valve closed
11/5/2011	12:33:18 PM	SiCl4 pre valve closed
11/5/2011	12:33:18 PM	SiCl4 post valve closed
11/5/2011	12:33:18 PM	Bypass valve closed
11/5/2011	12:33:18 PM	Bubbler valve closed
11/5/2011	12:33:18 PM	Helium valve opened
11/5/2011	12:33:18 PM	Main Vac valve opened
11/5/2011	12:33:18 PM	Helium MFC set to  20.000000
11/5/2011	12:33:18 PM	H2 MFC set to  0.000000
11/5/2011	12:33:18 PM	BCl3 MFC set to  0.000000
11/5/2011	12:33:18 PM	PHl3 MFC set to  0.000000
11/5/2011	12:33:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:33:18 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:33:18 PM	Tube furnace set to 150
11/5/2011	12:33:48 PM	Helium valve closed
11/5/2011	12:33:48 PM	H2 valve closed
11/5/2011	12:33:48 PM	BCl3 valve closed
11/5/2011	12:33:48 PM	PH3 valve closed
11/5/2011	12:33:48 PM	SiCl4 pre valve closed
11/5/2011	12:33:48 PM	SiCl4 post valve closed
11/5/2011	12:33:48 PM	Bypass valve closed
11/5/2011	12:33:48 PM	Bubbler valve closed
11/5/2011	12:33:48 PM	Main Vac valve opened
11/5/2011	12:33:48 PM	Helium MFC set to  0.000000
11/5/2011	12:33:48 PM	H2 MFC set to  0.000000
11/5/2011	12:33:48 PM	BCl3 MFC set to  0.000000
11/5/2011	12:33:48 PM	PHl3 MFC set to  0.000000
11/5/2011	12:33:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:33:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:33:48 PM	Tube furnace set to 150
11/5/2011	12:34:18 PM	H2 valve closed
11/5/2011	12:34:18 PM	BCl3 valve closed
11/5/2011	12:34:18 PM	PH3 valve closed
11/5/2011	12:34:18 PM	SiCl4 pre valve closed
11/5/2011	12:34:18 PM	SiCl4 post valve closed
11/5/2011	12:34:18 PM	Bypass valve closed
11/5/2011	12:34:18 PM	Bubbler valve closed
11/5/2011	12:34:18 PM	Helium valve opened
11/5/2011	12:34:18 PM	Main Vac valve opened
11/5/2011	12:34:18 PM	Helium MFC set to  20.000000
11/5/2011	12:34:18 PM	H2 MFC set to  0.000000
11/5/2011	12:34:18 PM	BCl3 MFC set to  0.000000
11/5/2011	12:34:18 PM	PHl3 MFC set to  0.000000
11/5/2011	12:34:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:34:18 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:34:19 PM	Tube furnace set to 150
11/5/2011	12:34:49 PM	Helium valve closed
11/5/2011	12:34:49 PM	H2 valve closed
11/5/2011	12:34:49 PM	BCl3 valve closed
11/5/2011	12:34:49 PM	PH3 valve closed
11/5/2011	12:34:49 PM	SiCl4 pre valve closed
11/5/2011	12:34:49 PM	SiCl4 post valve closed
11/5/2011	12:34:49 PM	Bypass valve closed
11/5/2011	12:34:49 PM	Bubbler valve closed
11/5/2011	12:34:49 PM	Main Vac valve opened
11/5/2011	12:34:49 PM	Helium MFC set to  0.000000
11/5/2011	12:34:49 PM	H2 MFC set to  0.000000
11/5/2011	12:34:49 PM	BCl3 MFC set to  0.000000
11/5/2011	12:34:49 PM	PHl3 MFC set to  0.000000
11/5/2011	12:34:49 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:34:49 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:34:49 PM	Tube furnace set to 150
11/5/2011	12:35:19 PM	H2 valve closed
11/5/2011	12:35:19 PM	BCl3 valve closed
11/5/2011	12:35:19 PM	PH3 valve closed
11/5/2011	12:35:19 PM	SiCl4 pre valve closed
11/5/2011	12:35:19 PM	SiCl4 post valve closed
11/5/2011	12:35:19 PM	Bypass valve closed
11/5/2011	12:35:19 PM	Bubbler valve closed
11/5/2011	12:35:19 PM	Helium valve opened
11/5/2011	12:35:19 PM	Main Vac valve opened
11/5/2011	12:35:19 PM	Helium MFC set to  20.000000
11/5/2011	12:35:19 PM	H2 MFC set to  0.000000
11/5/2011	12:35:19 PM	BCl3 MFC set to  0.000000
11/5/2011	12:35:19 PM	PHl3 MFC set to  0.000000
11/5/2011	12:35:19 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:35:19 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:35:19 PM	Tube furnace set to 150
11/5/2011	12:35:49 PM	Helium valve closed
11/5/2011	12:35:49 PM	H2 valve closed
11/5/2011	12:35:49 PM	BCl3 valve closed
11/5/2011	12:35:49 PM	PH3 valve closed
11/5/2011	12:35:49 PM	SiCl4 pre valve closed
11/5/2011	12:35:49 PM	SiCl4 post valve closed
11/5/2011	12:35:49 PM	Bypass valve closed
11/5/2011	12:35:49 PM	Bubbler valve closed
11/5/2011	12:35:49 PM	Main Vac valve opened
11/5/2011	12:35:49 PM	Helium MFC set to  0.000000
11/5/2011	12:35:49 PM	H2 MFC set to  0.000000
11/5/2011	12:35:49 PM	BCl3 MFC set to  0.000000
11/5/2011	12:35:49 PM	PHl3 MFC set to  0.000000
11/5/2011	12:35:49 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:35:49 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:35:49 PM	Tube furnace set to 150
11/5/2011	12:36:19 PM	H2 valve closed
11/5/2011	12:36:19 PM	BCl3 valve closed
11/5/2011	12:36:19 PM	PH3 valve closed
11/5/2011	12:36:19 PM	SiCl4 pre valve closed
11/5/2011	12:36:19 PM	SiCl4 post valve closed
11/5/2011	12:36:19 PM	Bypass valve closed
11/5/2011	12:36:19 PM	Bubbler valve closed
11/5/2011	12:36:19 PM	Helium valve opened
11/5/2011	12:36:19 PM	Main Vac valve opened
11/5/2011	12:36:19 PM	Helium MFC set to  20.000000
11/5/2011	12:36:19 PM	H2 MFC set to  0.000000
11/5/2011	12:36:19 PM	BCl3 MFC set to  0.000000
11/5/2011	12:36:19 PM	PHl3 MFC set to  0.000000
11/5/2011	12:36:19 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:36:19 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:36:19 PM	Tube furnace set to 150
11/5/2011	12:36:49 PM	Helium valve closed
11/5/2011	12:36:49 PM	H2 valve closed
11/5/2011	12:36:49 PM	BCl3 valve closed
11/5/2011	12:36:49 PM	PH3 valve closed
11/5/2011	12:36:49 PM	SiCl4 pre valve closed
11/5/2011	12:36:49 PM	SiCl4 post valve closed
11/5/2011	12:36:49 PM	Bypass valve closed
11/5/2011	12:36:49 PM	Bubbler valve closed
11/5/2011	12:36:49 PM	Main Vac valve opened
11/5/2011	12:36:49 PM	Helium MFC set to  0.000000
11/5/2011	12:36:49 PM	H2 MFC set to  0.000000
11/5/2011	12:36:49 PM	BCl3 MFC set to  0.000000
11/5/2011	12:36:49 PM	PHl3 MFC set to  0.000000
11/5/2011	12:36:49 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:36:49 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:36:50 PM	Tube furnace set to 150
11/5/2011	12:37:20 PM	H2 valve closed
11/5/2011	12:37:20 PM	BCl3 valve closed
11/5/2011	12:37:20 PM	PH3 valve closed
11/5/2011	12:37:20 PM	SiCl4 pre valve closed
11/5/2011	12:37:20 PM	SiCl4 post valve closed
11/5/2011	12:37:20 PM	Bypass valve closed
11/5/2011	12:37:20 PM	Bubbler valve closed
11/5/2011	12:37:20 PM	Helium valve opened
11/5/2011	12:37:20 PM	Main Vac valve opened
11/5/2011	12:37:20 PM	Helium MFC set to  20.000000
11/5/2011	12:37:20 PM	H2 MFC set to  0.000000
11/5/2011	12:37:20 PM	BCl3 MFC set to  0.000000
11/5/2011	12:37:20 PM	PHl3 MFC set to  0.000000
11/5/2011	12:37:20 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:37:20 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:37:20 PM	Tube furnace set to 150
11/5/2011	12:37:50 PM	Helium valve closed
11/5/2011	12:37:50 PM	H2 valve closed
11/5/2011	12:37:50 PM	BCl3 valve closed
11/5/2011	12:37:50 PM	PH3 valve closed
11/5/2011	12:37:50 PM	SiCl4 pre valve closed
11/5/2011	12:37:50 PM	SiCl4 post valve closed
11/5/2011	12:37:50 PM	Bypass valve closed
11/5/2011	12:37:50 PM	Bubbler valve closed
11/5/2011	12:37:50 PM	Main Vac valve opened
11/5/2011	12:37:50 PM	Helium MFC set to  0.000000
11/5/2011	12:37:50 PM	H2 MFC set to  0.000000
11/5/2011	12:37:50 PM	BCl3 MFC set to  0.000000
11/5/2011	12:37:50 PM	PHl3 MFC set to  0.000000
11/5/2011	12:37:50 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:37:50 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:37:50 PM	Tube furnace set to 150
11/5/2011	12:38:20 PM	H2 valve closed
11/5/2011	12:38:20 PM	BCl3 valve closed
11/5/2011	12:38:20 PM	PH3 valve closed
11/5/2011	12:38:20 PM	SiCl4 pre valve closed
11/5/2011	12:38:20 PM	SiCl4 post valve closed
11/5/2011	12:38:20 PM	Bypass valve closed
11/5/2011	12:38:20 PM	Bubbler valve closed
11/5/2011	12:38:20 PM	Helium valve opened
11/5/2011	12:38:20 PM	Main Vac valve opened
11/5/2011	12:38:20 PM	Helium MFC set to  20.000000
11/5/2011	12:38:20 PM	H2 MFC set to  0.000000
11/5/2011	12:38:20 PM	BCl3 MFC set to  0.000000
11/5/2011	12:38:20 PM	PHl3 MFC set to  0.000000
11/5/2011	12:38:20 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:38:20 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:38:20 PM	Tube furnace set to 150
11/5/2011	12:38:50 PM	Helium valve closed
11/5/2011	12:38:50 PM	H2 valve closed
11/5/2011	12:38:50 PM	BCl3 valve closed
11/5/2011	12:38:50 PM	PH3 valve closed
11/5/2011	12:38:50 PM	SiCl4 pre valve closed
11/5/2011	12:38:50 PM	SiCl4 post valve closed
11/5/2011	12:38:50 PM	Bypass valve closed
11/5/2011	12:38:50 PM	Bubbler valve closed
11/5/2011	12:38:50 PM	Main Vac valve opened
11/5/2011	12:38:50 PM	Helium MFC set to  0.000000
11/5/2011	12:38:50 PM	H2 MFC set to  0.000000
11/5/2011	12:38:50 PM	BCl3 MFC set to  0.000000
11/5/2011	12:38:50 PM	PHl3 MFC set to  0.000000
11/5/2011	12:38:50 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:38:50 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:38:50 PM	Tube furnace set to 150
11/5/2011	12:39:20 PM	H2 valve closed
11/5/2011	12:39:20 PM	BCl3 valve closed
11/5/2011	12:39:20 PM	PH3 valve closed
11/5/2011	12:39:20 PM	SiCl4 pre valve closed
11/5/2011	12:39:20 PM	SiCl4 post valve closed
11/5/2011	12:39:20 PM	Bypass valve closed
11/5/2011	12:39:20 PM	Bubbler valve closed
11/5/2011	12:39:20 PM	Helium valve opened
11/5/2011	12:39:20 PM	Main Vac valve opened
11/5/2011	12:39:20 PM	Helium MFC set to  20.000000
11/5/2011	12:39:20 PM	H2 MFC set to  0.000000
11/5/2011	12:39:20 PM	BCl3 MFC set to  0.000000
11/5/2011	12:39:20 PM	PHl3 MFC set to  0.000000
11/5/2011	12:39:20 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:39:20 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:39:21 PM	Tube furnace set to 150
11/5/2011	12:39:51 PM	Helium valve closed
11/5/2011	12:39:51 PM	H2 valve closed
11/5/2011	12:39:51 PM	BCl3 valve closed
11/5/2011	12:39:51 PM	PH3 valve closed
11/5/2011	12:39:51 PM	SiCl4 pre valve closed
11/5/2011	12:39:51 PM	SiCl4 post valve closed
11/5/2011	12:39:51 PM	Bypass valve closed
11/5/2011	12:39:51 PM	Bubbler valve closed
11/5/2011	12:39:51 PM	Main Vac valve opened
11/5/2011	12:39:51 PM	Helium MFC set to  0.000000
11/5/2011	12:39:51 PM	H2 MFC set to  0.000000
11/5/2011	12:39:51 PM	BCl3 MFC set to  0.000000
11/5/2011	12:39:51 PM	PHl3 MFC set to  0.000000
11/5/2011	12:39:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:39:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:39:51 PM	Tube furnace set to 150
11/5/2011	12:40:21 PM	H2 valve closed
11/5/2011	12:40:21 PM	BCl3 valve closed
11/5/2011	12:40:21 PM	PH3 valve closed
11/5/2011	12:40:21 PM	SiCl4 pre valve closed
11/5/2011	12:40:21 PM	SiCl4 post valve closed
11/5/2011	12:40:21 PM	Bypass valve closed
11/5/2011	12:40:21 PM	Bubbler valve closed
11/5/2011	12:40:21 PM	Helium valve opened
11/5/2011	12:40:21 PM	Main Vac valve opened
11/5/2011	12:40:21 PM	Helium MFC set to  20.000000
11/5/2011	12:40:21 PM	H2 MFC set to  0.000000
11/5/2011	12:40:21 PM	BCl3 MFC set to  0.000000
11/5/2011	12:40:21 PM	PHl3 MFC set to  0.000000
11/5/2011	12:40:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:40:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:40:21 PM	Tube furnace set to 150
11/5/2011	12:40:51 PM	Helium valve closed
11/5/2011	12:40:51 PM	H2 valve closed
11/5/2011	12:40:51 PM	BCl3 valve closed
11/5/2011	12:40:51 PM	PH3 valve closed
11/5/2011	12:40:51 PM	SiCl4 pre valve closed
11/5/2011	12:40:51 PM	SiCl4 post valve closed
11/5/2011	12:40:51 PM	Bypass valve closed
11/5/2011	12:40:51 PM	Bubbler valve closed
11/5/2011	12:40:51 PM	Main Vac valve opened
11/5/2011	12:40:51 PM	Helium MFC set to  0.000000
11/5/2011	12:40:51 PM	H2 MFC set to  0.000000
11/5/2011	12:40:51 PM	BCl3 MFC set to  0.000000
11/5/2011	12:40:51 PM	PHl3 MFC set to  0.000000
11/5/2011	12:40:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:40:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:40:51 PM	Tube furnace set to 150
11/5/2011	12:41:21 PM	H2 valve closed
11/5/2011	12:41:21 PM	BCl3 valve closed
11/5/2011	12:41:21 PM	PH3 valve closed
11/5/2011	12:41:21 PM	SiCl4 pre valve closed
11/5/2011	12:41:21 PM	SiCl4 post valve closed
11/5/2011	12:41:21 PM	Bypass valve closed
11/5/2011	12:41:21 PM	Bubbler valve closed
11/5/2011	12:41:21 PM	Helium valve opened
11/5/2011	12:41:21 PM	Main Vac valve opened
11/5/2011	12:41:21 PM	Helium MFC set to  20.000000
11/5/2011	12:41:21 PM	H2 MFC set to  0.000000
11/5/2011	12:41:21 PM	BCl3 MFC set to  0.000000
11/5/2011	12:41:21 PM	PHl3 MFC set to  0.000000
11/5/2011	12:41:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:41:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:41:21 PM	Tube furnace set to 150
11/5/2011	12:41:51 PM	Helium valve closed
11/5/2011	12:41:51 PM	H2 valve closed
11/5/2011	12:41:51 PM	BCl3 valve closed
11/5/2011	12:41:51 PM	PH3 valve closed
11/5/2011	12:41:51 PM	SiCl4 pre valve closed
11/5/2011	12:41:51 PM	SiCl4 post valve closed
11/5/2011	12:41:51 PM	Bypass valve closed
11/5/2011	12:41:51 PM	Bubbler valve closed
11/5/2011	12:41:51 PM	Main Vac valve opened
11/5/2011	12:41:51 PM	Helium MFC set to  0.000000
11/5/2011	12:41:51 PM	H2 MFC set to  0.000000
11/5/2011	12:41:51 PM	BCl3 MFC set to  0.000000
11/5/2011	12:41:51 PM	PHl3 MFC set to  0.000000
11/5/2011	12:41:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:41:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:41:52 PM	Tube furnace set to 150
11/5/2011	12:42:22 PM	H2 valve closed
11/5/2011	12:42:22 PM	BCl3 valve closed
11/5/2011	12:42:22 PM	PH3 valve closed
11/5/2011	12:42:22 PM	SiCl4 pre valve closed
11/5/2011	12:42:22 PM	SiCl4 post valve closed
11/5/2011	12:42:22 PM	Bypass valve closed
11/5/2011	12:42:22 PM	Bubbler valve closed
11/5/2011	12:42:22 PM	Helium valve opened
11/5/2011	12:42:22 PM	Main Vac valve opened
11/5/2011	12:42:22 PM	Helium MFC set to  20.000000
11/5/2011	12:42:22 PM	H2 MFC set to  0.000000
11/5/2011	12:42:22 PM	BCl3 MFC set to  0.000000
11/5/2011	12:42:22 PM	PHl3 MFC set to  0.000000
11/5/2011	12:42:22 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:42:22 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:42:22 PM	Tube furnace set to 150
11/5/2011	12:42:52 PM	Helium valve closed
11/5/2011	12:42:52 PM	H2 valve closed
11/5/2011	12:42:52 PM	BCl3 valve closed
11/5/2011	12:42:52 PM	PH3 valve closed
11/5/2011	12:42:52 PM	SiCl4 pre valve closed
11/5/2011	12:42:52 PM	SiCl4 post valve closed
11/5/2011	12:42:52 PM	Bypass valve closed
11/5/2011	12:42:52 PM	Bubbler valve closed
11/5/2011	12:42:52 PM	Main Vac valve opened
11/5/2011	12:42:52 PM	Helium MFC set to  0.000000
11/5/2011	12:42:52 PM	H2 MFC set to  0.000000
11/5/2011	12:42:52 PM	BCl3 MFC set to  0.000000
11/5/2011	12:42:52 PM	PHl3 MFC set to  0.000000
11/5/2011	12:42:52 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:42:52 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:42:52 PM	Tube furnace set to 150
11/5/2011	12:43:22 PM	H2 valve closed
11/5/2011	12:43:22 PM	BCl3 valve closed
11/5/2011	12:43:22 PM	PH3 valve closed
11/5/2011	12:43:22 PM	SiCl4 pre valve closed
11/5/2011	12:43:22 PM	SiCl4 post valve closed
11/5/2011	12:43:22 PM	Bypass valve closed
11/5/2011	12:43:22 PM	Bubbler valve closed
11/5/2011	12:43:22 PM	Helium valve opened
11/5/2011	12:43:22 PM	Main Vac valve opened
11/5/2011	12:43:22 PM	Helium MFC set to  20.000000
11/5/2011	12:43:22 PM	H2 MFC set to  0.000000
11/5/2011	12:43:22 PM	BCl3 MFC set to  0.000000
11/5/2011	12:43:22 PM	PHl3 MFC set to  0.000000
11/5/2011	12:43:22 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:43:22 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:43:22 PM	Tube furnace set to 150
11/5/2011	12:43:52 PM	Helium valve closed
11/5/2011	12:43:52 PM	H2 valve closed
11/5/2011	12:43:52 PM	BCl3 valve closed
11/5/2011	12:43:52 PM	PH3 valve closed
11/5/2011	12:43:52 PM	SiCl4 pre valve closed
11/5/2011	12:43:52 PM	SiCl4 post valve closed
11/5/2011	12:43:52 PM	Bypass valve closed
11/5/2011	12:43:52 PM	Bubbler valve closed
11/5/2011	12:43:52 PM	Main Vac valve opened
11/5/2011	12:43:52 PM	Helium MFC set to  0.000000
11/5/2011	12:43:52 PM	H2 MFC set to  0.000000
11/5/2011	12:43:52 PM	BCl3 MFC set to  0.000000
11/5/2011	12:43:52 PM	PHl3 MFC set to  0.000000
11/5/2011	12:43:52 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:43:52 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:43:52 PM	Tube furnace set to 150
11/5/2011	12:44:23 PM	H2 valve closed
11/5/2011	12:44:23 PM	BCl3 valve closed
11/5/2011	12:44:23 PM	PH3 valve closed
11/5/2011	12:44:23 PM	SiCl4 pre valve closed
11/5/2011	12:44:23 PM	SiCl4 post valve closed
11/5/2011	12:44:23 PM	Bypass valve closed
11/5/2011	12:44:23 PM	Bubbler valve closed
11/5/2011	12:44:23 PM	Helium valve opened
11/5/2011	12:44:23 PM	Main Vac valve opened
11/5/2011	12:44:23 PM	Helium MFC set to  20.000000
11/5/2011	12:44:23 PM	H2 MFC set to  0.000000
11/5/2011	12:44:23 PM	BCl3 MFC set to  0.000000
11/5/2011	12:44:23 PM	PHl3 MFC set to  0.000000
11/5/2011	12:44:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:44:23 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:44:23 PM	Tube furnace set to 150
11/5/2011	12:44:53 PM	Helium valve closed
11/5/2011	12:44:53 PM	H2 valve closed
11/5/2011	12:44:53 PM	BCl3 valve closed
11/5/2011	12:44:53 PM	PH3 valve closed
11/5/2011	12:44:53 PM	SiCl4 pre valve closed
11/5/2011	12:44:53 PM	SiCl4 post valve closed
11/5/2011	12:44:53 PM	Bypass valve closed
11/5/2011	12:44:53 PM	Bubbler valve closed
11/5/2011	12:44:53 PM	Main Vac valve opened
11/5/2011	12:44:53 PM	Helium MFC set to  0.000000
11/5/2011	12:44:53 PM	H2 MFC set to  0.000000
11/5/2011	12:44:53 PM	BCl3 MFC set to  0.000000
11/5/2011	12:44:53 PM	PHl3 MFC set to  0.000000
11/5/2011	12:44:53 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:44:53 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:44:53 PM	Tube furnace set to 150
11/5/2011	12:45:23 PM	H2 valve closed
11/5/2011	12:45:23 PM	BCl3 valve closed
11/5/2011	12:45:23 PM	PH3 valve closed
11/5/2011	12:45:23 PM	SiCl4 pre valve closed
11/5/2011	12:45:23 PM	SiCl4 post valve closed
11/5/2011	12:45:23 PM	Bypass valve closed
11/5/2011	12:45:23 PM	Bubbler valve closed
11/5/2011	12:45:23 PM	Helium valve opened
11/5/2011	12:45:23 PM	Main Vac valve opened
11/5/2011	12:45:23 PM	Helium MFC set to  20.000000
11/5/2011	12:45:23 PM	H2 MFC set to  0.000000
11/5/2011	12:45:23 PM	BCl3 MFC set to  0.000000
11/5/2011	12:45:23 PM	PHl3 MFC set to  0.000000
11/5/2011	12:45:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:45:23 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:45:23 PM	Tube furnace set to 150
11/5/2011	12:45:45 PM	Helium valve closed
11/5/2011	12:45:45 PM	H2 valve closed
11/5/2011	12:45:45 PM	BCl3 valve closed
11/5/2011	12:45:45 PM	PH3 valve closed
11/5/2011	12:45:45 PM	SiCl4 pre valve closed
11/5/2011	12:45:45 PM	SiCl4 post valve closed
11/5/2011	12:45:45 PM	Bypass valve closed
11/5/2011	12:45:45 PM	Bubbler valve closed
11/5/2011	12:45:45 PM	Main Vac valve opened
11/5/2011	12:45:45 PM	Helium MFC set to  0.000000
11/5/2011	12:45:45 PM	H2 MFC set to  0.000000
11/5/2011	12:45:45 PM	BCl3 MFC set to  0.000000
11/5/2011	12:45:45 PM	PHl3 MFC set to  0.000000
11/5/2011	12:45:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:45:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:45:45 PM	Tube furnace set to 180
11/5/2011	12:45:50 PM	Run finished at 12:45 PM
11/5/2011	12:46:08 PM	Recipe started at 12:45 PM
11/5/2011	12:46:08 PM	Helium valve closed
11/5/2011	12:46:08 PM	H2 valve closed
11/5/2011	12:46:08 PM	BCl3 valve closed
11/5/2011	12:46:08 PM	PH3 valve closed
11/5/2011	12:46:08 PM	SiCl4 pre valve closed
11/5/2011	12:46:08 PM	SiCl4 post valve closed
11/5/2011	12:46:08 PM	Main Vac valve closed
11/5/2011	12:46:08 PM	Bubbler valve closed
11/5/2011	12:46:08 PM	Bypass valve opened
11/5/2011	12:46:08 PM	Helium MFC set to  0.000000
11/5/2011	12:46:08 PM	H2 MFC set to  0.000000
11/5/2011	12:46:08 PM	BCl3 MFC set to  0.000000
11/5/2011	12:46:08 PM	PHl3 MFC set to  0.000000
11/5/2011	12:46:08 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:46:08 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:46:08 PM	Tube furnace set to 180
11/5/2011	12:46:09 PM	Helium valve closed
11/5/2011	12:46:09 PM	H2 valve closed
11/5/2011	12:46:09 PM	BCl3 valve closed
11/5/2011	12:46:09 PM	PH3 valve closed
11/5/2011	12:46:09 PM	SiCl4 pre valve closed
11/5/2011	12:46:09 PM	SiCl4 post valve closed
11/5/2011	12:46:09 PM	Main Vac valve closed
11/5/2011	12:46:09 PM	Bubbler valve closed
11/5/2011	12:46:09 PM	Bypass valve opened
11/5/2011	12:46:09 PM	Helium MFC set to  0.000000
11/5/2011	12:46:09 PM	H2 MFC set to  0.000000
11/5/2011	12:46:09 PM	BCl3 MFC set to  0.000000
11/5/2011	12:46:09 PM	PHl3 MFC set to  0.000000
11/5/2011	12:46:09 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:46:09 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:46:09 PM	Tube furnace set to 150
11/5/2011	12:46:39 PM	Helium valve closed
11/5/2011	12:46:39 PM	H2 valve closed
11/5/2011	12:46:39 PM	BCl3 valve closed
11/5/2011	12:46:39 PM	PH3 valve closed
11/5/2011	12:46:39 PM	SiCl4 pre valve closed
11/5/2011	12:46:39 PM	SiCl4 post valve closed
11/5/2011	12:46:39 PM	Bypass valve closed
11/5/2011	12:46:39 PM	Bubbler valve closed
11/5/2011	12:46:39 PM	Main Vac valve opened
11/5/2011	12:46:39 PM	Helium MFC set to  0.000000
11/5/2011	12:46:39 PM	H2 MFC set to  0.000000
11/5/2011	12:46:39 PM	BCl3 MFC set to  0.000000
11/5/2011	12:46:39 PM	PHl3 MFC set to  0.000000
11/5/2011	12:46:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:46:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:46:39 PM	Tube furnace set to 180
11/5/2011	12:47:09 PM	H2 valve closed
11/5/2011	12:47:09 PM	BCl3 valve closed
11/5/2011	12:47:09 PM	PH3 valve closed
11/5/2011	12:47:09 PM	SiCl4 pre valve closed
11/5/2011	12:47:09 PM	SiCl4 post valve closed
11/5/2011	12:47:09 PM	Bypass valve closed
11/5/2011	12:47:09 PM	Bubbler valve closed
11/5/2011	12:47:09 PM	Helium valve opened
11/5/2011	12:47:09 PM	Main Vac valve opened
11/5/2011	12:47:09 PM	Helium MFC set to  20.000000
11/5/2011	12:47:09 PM	H2 MFC set to  0.000000
11/5/2011	12:47:09 PM	BCl3 MFC set to  0.000000
11/5/2011	12:47:09 PM	PHl3 MFC set to  0.000000
11/5/2011	12:47:09 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:47:09 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:47:09 PM	Tube furnace set to 180
11/5/2011	12:47:39 PM	Helium valve closed
11/5/2011	12:47:39 PM	H2 valve closed
11/5/2011	12:47:39 PM	BCl3 valve closed
11/5/2011	12:47:39 PM	PH3 valve closed
11/5/2011	12:47:39 PM	SiCl4 pre valve closed
11/5/2011	12:47:39 PM	SiCl4 post valve closed
11/5/2011	12:47:39 PM	Bypass valve closed
11/5/2011	12:47:39 PM	Bubbler valve closed
11/5/2011	12:47:39 PM	Main Vac valve opened
11/5/2011	12:47:39 PM	Helium MFC set to  0.000000
11/5/2011	12:47:39 PM	H2 MFC set to  0.000000
11/5/2011	12:47:39 PM	BCl3 MFC set to  0.000000
11/5/2011	12:47:39 PM	PHl3 MFC set to  0.000000
11/5/2011	12:47:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:47:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:47:40 PM	Tube furnace set to 150
11/5/2011	12:48:10 PM	H2 valve closed
11/5/2011	12:48:10 PM	BCl3 valve closed
11/5/2011	12:48:10 PM	PH3 valve closed
11/5/2011	12:48:10 PM	SiCl4 pre valve closed
11/5/2011	12:48:10 PM	SiCl4 post valve closed
11/5/2011	12:48:10 PM	Bypass valve closed
11/5/2011	12:48:10 PM	Bubbler valve closed
11/5/2011	12:48:10 PM	Helium valve opened
11/5/2011	12:48:10 PM	Main Vac valve opened
11/5/2011	12:48:10 PM	Helium MFC set to  20.000000
11/5/2011	12:48:10 PM	H2 MFC set to  0.000000
11/5/2011	12:48:10 PM	BCl3 MFC set to  0.000000
11/5/2011	12:48:10 PM	PHl3 MFC set to  0.000000
11/5/2011	12:48:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:48:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:48:10 PM	Tube furnace set to 180
11/5/2011	12:48:40 PM	Helium valve closed
11/5/2011	12:48:40 PM	H2 valve closed
11/5/2011	12:48:40 PM	BCl3 valve closed
11/5/2011	12:48:40 PM	PH3 valve closed
11/5/2011	12:48:40 PM	SiCl4 pre valve closed
11/5/2011	12:48:40 PM	SiCl4 post valve closed
11/5/2011	12:48:40 PM	Bypass valve closed
11/5/2011	12:48:40 PM	Bubbler valve closed
11/5/2011	12:48:40 PM	Main Vac valve opened
11/5/2011	12:48:40 PM	Helium MFC set to  0.000000
11/5/2011	12:48:40 PM	H2 MFC set to  0.000000
11/5/2011	12:48:40 PM	BCl3 MFC set to  0.000000
11/5/2011	12:48:40 PM	PHl3 MFC set to  0.000000
11/5/2011	12:48:40 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:48:40 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:48:40 PM	Tube furnace set to 150
11/5/2011	12:49:10 PM	H2 valve closed
11/5/2011	12:49:10 PM	BCl3 valve closed
11/5/2011	12:49:10 PM	PH3 valve closed
11/5/2011	12:49:10 PM	SiCl4 pre valve closed
11/5/2011	12:49:10 PM	SiCl4 post valve closed
11/5/2011	12:49:10 PM	Bypass valve closed
11/5/2011	12:49:10 PM	Bubbler valve closed
11/5/2011	12:49:10 PM	Helium valve opened
11/5/2011	12:49:10 PM	Main Vac valve opened
11/5/2011	12:49:10 PM	Helium MFC set to  20.000000
11/5/2011	12:49:10 PM	H2 MFC set to  0.000000
11/5/2011	12:49:10 PM	BCl3 MFC set to  0.000000
11/5/2011	12:49:10 PM	PHl3 MFC set to  0.000000
11/5/2011	12:49:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:49:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:49:10 PM	Tube furnace set to 150
11/5/2011	12:49:40 PM	Helium valve closed
11/5/2011	12:49:40 PM	H2 valve closed
11/5/2011	12:49:40 PM	BCl3 valve closed
11/5/2011	12:49:40 PM	PH3 valve closed
11/5/2011	12:49:40 PM	SiCl4 pre valve closed
11/5/2011	12:49:40 PM	SiCl4 post valve closed
11/5/2011	12:49:40 PM	Bypass valve closed
11/5/2011	12:49:40 PM	Bubbler valve closed
11/5/2011	12:49:40 PM	Main Vac valve opened
11/5/2011	12:49:40 PM	Helium MFC set to  0.000000
11/5/2011	12:49:40 PM	H2 MFC set to  0.000000
11/5/2011	12:49:40 PM	BCl3 MFC set to  0.000000
11/5/2011	12:49:40 PM	PHl3 MFC set to  0.000000
11/5/2011	12:49:40 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:49:40 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:49:40 PM	Tube furnace set to 150
11/5/2011	12:50:10 PM	H2 valve closed
11/5/2011	12:50:10 PM	BCl3 valve closed
11/5/2011	12:50:10 PM	PH3 valve closed
11/5/2011	12:50:10 PM	SiCl4 pre valve closed
11/5/2011	12:50:10 PM	SiCl4 post valve closed
11/5/2011	12:50:10 PM	Bypass valve closed
11/5/2011	12:50:10 PM	Bubbler valve closed
11/5/2011	12:50:10 PM	Helium valve opened
11/5/2011	12:50:10 PM	Main Vac valve opened
11/5/2011	12:50:10 PM	Helium MFC set to  20.000000
11/5/2011	12:50:10 PM	H2 MFC set to  0.000000
11/5/2011	12:50:10 PM	BCl3 MFC set to  0.000000
11/5/2011	12:50:10 PM	PHl3 MFC set to  0.000000
11/5/2011	12:50:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:50:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:50:11 PM	Tube furnace set to 180
11/5/2011	12:50:41 PM	Helium valve closed
11/5/2011	12:50:41 PM	H2 valve closed
11/5/2011	12:50:41 PM	BCl3 valve closed
11/5/2011	12:50:41 PM	PH3 valve closed
11/5/2011	12:50:41 PM	SiCl4 pre valve closed
11/5/2011	12:50:41 PM	SiCl4 post valve closed
11/5/2011	12:50:41 PM	Bypass valve closed
11/5/2011	12:50:41 PM	Bubbler valve closed
11/5/2011	12:50:41 PM	Main Vac valve opened
11/5/2011	12:50:41 PM	Helium MFC set to  0.000000
11/5/2011	12:50:41 PM	H2 MFC set to  0.000000
11/5/2011	12:50:41 PM	BCl3 MFC set to  0.000000
11/5/2011	12:50:41 PM	PHl3 MFC set to  0.000000
11/5/2011	12:50:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:50:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:50:41 PM	Tube furnace set to 150
11/5/2011	12:51:11 PM	H2 valve closed
11/5/2011	12:51:11 PM	BCl3 valve closed
11/5/2011	12:51:11 PM	PH3 valve closed
11/5/2011	12:51:11 PM	SiCl4 pre valve closed
11/5/2011	12:51:11 PM	SiCl4 post valve closed
11/5/2011	12:51:11 PM	Bypass valve closed
11/5/2011	12:51:11 PM	Bubbler valve closed
11/5/2011	12:51:11 PM	Helium valve opened
11/5/2011	12:51:11 PM	Main Vac valve opened
11/5/2011	12:51:11 PM	Helium MFC set to  20.000000
11/5/2011	12:51:11 PM	H2 MFC set to  0.000000
11/5/2011	12:51:11 PM	BCl3 MFC set to  0.000000
11/5/2011	12:51:11 PM	PHl3 MFC set to  0.000000
11/5/2011	12:51:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:51:11 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:51:11 PM	Tube furnace set to 150
11/5/2011	12:51:41 PM	Helium valve closed
11/5/2011	12:51:41 PM	H2 valve closed
11/5/2011	12:51:41 PM	BCl3 valve closed
11/5/2011	12:51:41 PM	PH3 valve closed
11/5/2011	12:51:41 PM	SiCl4 pre valve closed
11/5/2011	12:51:41 PM	SiCl4 post valve closed
11/5/2011	12:51:41 PM	Bypass valve closed
11/5/2011	12:51:41 PM	Bubbler valve closed
11/5/2011	12:51:41 PM	Main Vac valve opened
11/5/2011	12:51:41 PM	Helium MFC set to  0.000000
11/5/2011	12:51:41 PM	H2 MFC set to  0.000000
11/5/2011	12:51:41 PM	BCl3 MFC set to  0.000000
11/5/2011	12:51:41 PM	PHl3 MFC set to  0.000000
11/5/2011	12:51:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:51:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:51:41 PM	Tube furnace set to 150
11/5/2011	12:52:11 PM	H2 valve closed
11/5/2011	12:52:11 PM	BCl3 valve closed
11/5/2011	12:52:11 PM	PH3 valve closed
11/5/2011	12:52:11 PM	SiCl4 pre valve closed
11/5/2011	12:52:11 PM	SiCl4 post valve closed
11/5/2011	12:52:11 PM	Bypass valve closed
11/5/2011	12:52:11 PM	Bubbler valve closed
11/5/2011	12:52:11 PM	Helium valve opened
11/5/2011	12:52:11 PM	Main Vac valve opened
11/5/2011	12:52:11 PM	Helium MFC set to  20.000000
11/5/2011	12:52:11 PM	H2 MFC set to  0.000000
11/5/2011	12:52:11 PM	BCl3 MFC set to  0.000000
11/5/2011	12:52:11 PM	PHl3 MFC set to  0.000000
11/5/2011	12:52:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:52:11 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:52:11 PM	Tube furnace set to 150
11/5/2011	12:52:41 PM	Helium valve closed
11/5/2011	12:52:41 PM	H2 valve closed
11/5/2011	12:52:41 PM	BCl3 valve closed
11/5/2011	12:52:41 PM	PH3 valve closed
11/5/2011	12:52:41 PM	SiCl4 pre valve closed
11/5/2011	12:52:41 PM	SiCl4 post valve closed
11/5/2011	12:52:41 PM	Bypass valve closed
11/5/2011	12:52:41 PM	Bubbler valve closed
11/5/2011	12:52:41 PM	Main Vac valve opened
11/5/2011	12:52:41 PM	Helium MFC set to  0.000000
11/5/2011	12:52:41 PM	H2 MFC set to  0.000000
11/5/2011	12:52:41 PM	BCl3 MFC set to  0.000000
11/5/2011	12:52:41 PM	PHl3 MFC set to  0.000000
11/5/2011	12:52:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:52:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:52:42 PM	Tube furnace set to 150
11/5/2011	12:53:12 PM	H2 valve closed
11/5/2011	12:53:12 PM	BCl3 valve closed
11/5/2011	12:53:12 PM	PH3 valve closed
11/5/2011	12:53:12 PM	SiCl4 pre valve closed
11/5/2011	12:53:12 PM	SiCl4 post valve closed
11/5/2011	12:53:12 PM	Bypass valve closed
11/5/2011	12:53:12 PM	Bubbler valve closed
11/5/2011	12:53:12 PM	Helium valve opened
11/5/2011	12:53:12 PM	Main Vac valve opened
11/5/2011	12:53:12 PM	Helium MFC set to  20.000000
11/5/2011	12:53:12 PM	H2 MFC set to  0.000000
11/5/2011	12:53:12 PM	BCl3 MFC set to  0.000000
11/5/2011	12:53:12 PM	PHl3 MFC set to  0.000000
11/5/2011	12:53:12 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:53:12 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:53:12 PM	Tube furnace set to 150
11/5/2011	12:53:42 PM	Helium valve closed
11/5/2011	12:53:42 PM	H2 valve closed
11/5/2011	12:53:42 PM	BCl3 valve closed
11/5/2011	12:53:42 PM	PH3 valve closed
11/5/2011	12:53:42 PM	SiCl4 pre valve closed
11/5/2011	12:53:42 PM	SiCl4 post valve closed
11/5/2011	12:53:42 PM	Bypass valve closed
11/5/2011	12:53:42 PM	Bubbler valve closed
11/5/2011	12:53:42 PM	Main Vac valve opened
11/5/2011	12:53:42 PM	Helium MFC set to  0.000000
11/5/2011	12:53:42 PM	H2 MFC set to  0.000000
11/5/2011	12:53:42 PM	BCl3 MFC set to  0.000000
11/5/2011	12:53:42 PM	PHl3 MFC set to  0.000000
11/5/2011	12:53:42 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:53:42 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:53:42 PM	Tube furnace set to 150
11/5/2011	12:54:12 PM	H2 valve closed
11/5/2011	12:54:12 PM	BCl3 valve closed
11/5/2011	12:54:12 PM	PH3 valve closed
11/5/2011	12:54:12 PM	SiCl4 pre valve closed
11/5/2011	12:54:12 PM	SiCl4 post valve closed
11/5/2011	12:54:12 PM	Bypass valve closed
11/5/2011	12:54:12 PM	Bubbler valve closed
11/5/2011	12:54:12 PM	Helium valve opened
11/5/2011	12:54:12 PM	Main Vac valve opened
11/5/2011	12:54:12 PM	Helium MFC set to  20.000000
11/5/2011	12:54:12 PM	H2 MFC set to  0.000000
11/5/2011	12:54:12 PM	BCl3 MFC set to  0.000000
11/5/2011	12:54:12 PM	PHl3 MFC set to  0.000000
11/5/2011	12:54:12 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:54:12 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:54:12 PM	Tube furnace set to 150
11/5/2011	12:54:42 PM	Helium valve closed
11/5/2011	12:54:42 PM	H2 valve closed
11/5/2011	12:54:42 PM	BCl3 valve closed
11/5/2011	12:54:42 PM	PH3 valve closed
11/5/2011	12:54:42 PM	SiCl4 pre valve closed
11/5/2011	12:54:42 PM	SiCl4 post valve closed
11/5/2011	12:54:42 PM	Bypass valve closed
11/5/2011	12:54:42 PM	Bubbler valve closed
11/5/2011	12:54:42 PM	Main Vac valve opened
11/5/2011	12:54:42 PM	Helium MFC set to  0.000000
11/5/2011	12:54:42 PM	H2 MFC set to  0.000000
11/5/2011	12:54:42 PM	BCl3 MFC set to  0.000000
11/5/2011	12:54:42 PM	PHl3 MFC set to  0.000000
11/5/2011	12:54:42 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:54:42 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:54:42 PM	Tube furnace set to 150
11/5/2011	12:55:12 PM	H2 valve closed
11/5/2011	12:55:12 PM	BCl3 valve closed
11/5/2011	12:55:12 PM	PH3 valve closed
11/5/2011	12:55:12 PM	SiCl4 pre valve closed
11/5/2011	12:55:12 PM	SiCl4 post valve closed
11/5/2011	12:55:12 PM	Bypass valve closed
11/5/2011	12:55:12 PM	Bubbler valve closed
11/5/2011	12:55:12 PM	Helium valve opened
11/5/2011	12:55:12 PM	Main Vac valve opened
11/5/2011	12:55:12 PM	Helium MFC set to  20.000000
11/5/2011	12:55:12 PM	H2 MFC set to  0.000000
11/5/2011	12:55:12 PM	BCl3 MFC set to  0.000000
11/5/2011	12:55:12 PM	PHl3 MFC set to  0.000000
11/5/2011	12:55:12 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:55:12 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:55:13 PM	Tube furnace set to 150
11/5/2011	12:55:43 PM	Helium valve closed
11/5/2011	12:55:43 PM	H2 valve closed
11/5/2011	12:55:43 PM	BCl3 valve closed
11/5/2011	12:55:43 PM	PH3 valve closed
11/5/2011	12:55:43 PM	SiCl4 pre valve closed
11/5/2011	12:55:43 PM	SiCl4 post valve closed
11/5/2011	12:55:43 PM	Bypass valve closed
11/5/2011	12:55:43 PM	Bubbler valve closed
11/5/2011	12:55:43 PM	Main Vac valve opened
11/5/2011	12:55:43 PM	Helium MFC set to  0.000000
11/5/2011	12:55:43 PM	H2 MFC set to  0.000000
11/5/2011	12:55:43 PM	BCl3 MFC set to  0.000000
11/5/2011	12:55:43 PM	PHl3 MFC set to  0.000000
11/5/2011	12:55:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:55:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:55:43 PM	Tube furnace set to 150
11/5/2011	12:56:13 PM	H2 valve closed
11/5/2011	12:56:13 PM	BCl3 valve closed
11/5/2011	12:56:13 PM	PH3 valve closed
11/5/2011	12:56:13 PM	SiCl4 pre valve closed
11/5/2011	12:56:13 PM	SiCl4 post valve closed
11/5/2011	12:56:13 PM	Bypass valve closed
11/5/2011	12:56:13 PM	Bubbler valve closed
11/5/2011	12:56:13 PM	Helium valve opened
11/5/2011	12:56:13 PM	Main Vac valve opened
11/5/2011	12:56:13 PM	Helium MFC set to  20.000000
11/5/2011	12:56:13 PM	H2 MFC set to  0.000000
11/5/2011	12:56:13 PM	BCl3 MFC set to  0.000000
11/5/2011	12:56:13 PM	PHl3 MFC set to  0.000000
11/5/2011	12:56:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:56:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:56:13 PM	Tube furnace set to 150
11/5/2011	12:56:43 PM	Helium valve closed
11/5/2011	12:56:43 PM	H2 valve closed
11/5/2011	12:56:43 PM	BCl3 valve closed
11/5/2011	12:56:43 PM	PH3 valve closed
11/5/2011	12:56:43 PM	SiCl4 pre valve closed
11/5/2011	12:56:43 PM	SiCl4 post valve closed
11/5/2011	12:56:43 PM	Bypass valve closed
11/5/2011	12:56:43 PM	Bubbler valve closed
11/5/2011	12:56:43 PM	Main Vac valve opened
11/5/2011	12:56:43 PM	Helium MFC set to  0.000000
11/5/2011	12:56:43 PM	H2 MFC set to  0.000000
11/5/2011	12:56:43 PM	BCl3 MFC set to  0.000000
11/5/2011	12:56:43 PM	PHl3 MFC set to  0.000000
11/5/2011	12:56:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:56:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:56:43 PM	Tube furnace set to 150
11/5/2011	12:57:13 PM	H2 valve closed
11/5/2011	12:57:13 PM	BCl3 valve closed
11/5/2011	12:57:13 PM	PH3 valve closed
11/5/2011	12:57:13 PM	SiCl4 pre valve closed
11/5/2011	12:57:13 PM	SiCl4 post valve closed
11/5/2011	12:57:13 PM	Bypass valve closed
11/5/2011	12:57:13 PM	Bubbler valve closed
11/5/2011	12:57:13 PM	Helium valve opened
11/5/2011	12:57:13 PM	Main Vac valve opened
11/5/2011	12:57:13 PM	Helium MFC set to  20.000000
11/5/2011	12:57:13 PM	H2 MFC set to  0.000000
11/5/2011	12:57:13 PM	BCl3 MFC set to  0.000000
11/5/2011	12:57:13 PM	PHl3 MFC set to  0.000000
11/5/2011	12:57:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:57:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:57:13 PM	Tube furnace set to 150
11/5/2011	12:57:43 PM	Helium valve closed
11/5/2011	12:57:43 PM	H2 valve closed
11/5/2011	12:57:43 PM	BCl3 valve closed
11/5/2011	12:57:43 PM	PH3 valve closed
11/5/2011	12:57:43 PM	SiCl4 pre valve closed
11/5/2011	12:57:43 PM	SiCl4 post valve closed
11/5/2011	12:57:43 PM	Bypass valve closed
11/5/2011	12:57:43 PM	Bubbler valve closed
11/5/2011	12:57:43 PM	Main Vac valve opened
11/5/2011	12:57:43 PM	Helium MFC set to  0.000000
11/5/2011	12:57:43 PM	H2 MFC set to  0.000000
11/5/2011	12:57:43 PM	BCl3 MFC set to  0.000000
11/5/2011	12:57:43 PM	PHl3 MFC set to  0.000000
11/5/2011	12:57:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:57:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:57:44 PM	Tube furnace set to 150
11/5/2011	12:58:14 PM	H2 valve closed
11/5/2011	12:58:14 PM	BCl3 valve closed
11/5/2011	12:58:14 PM	PH3 valve closed
11/5/2011	12:58:14 PM	SiCl4 pre valve closed
11/5/2011	12:58:14 PM	SiCl4 post valve closed
11/5/2011	12:58:14 PM	Bypass valve closed
11/5/2011	12:58:14 PM	Bubbler valve closed
11/5/2011	12:58:14 PM	Helium valve opened
11/5/2011	12:58:14 PM	Main Vac valve opened
11/5/2011	12:58:14 PM	Helium MFC set to  20.000000
11/5/2011	12:58:14 PM	H2 MFC set to  0.000000
11/5/2011	12:58:14 PM	BCl3 MFC set to  0.000000
11/5/2011	12:58:14 PM	PHl3 MFC set to  0.000000
11/5/2011	12:58:14 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:58:14 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:58:14 PM	Tube furnace set to 150
11/5/2011	12:58:44 PM	Helium valve closed
11/5/2011	12:58:44 PM	H2 valve closed
11/5/2011	12:58:44 PM	BCl3 valve closed
11/5/2011	12:58:44 PM	PH3 valve closed
11/5/2011	12:58:44 PM	SiCl4 pre valve closed
11/5/2011	12:58:44 PM	SiCl4 post valve closed
11/5/2011	12:58:44 PM	Bypass valve closed
11/5/2011	12:58:44 PM	Bubbler valve closed
11/5/2011	12:58:44 PM	Main Vac valve opened
11/5/2011	12:58:44 PM	Helium MFC set to  0.000000
11/5/2011	12:58:44 PM	H2 MFC set to  0.000000
11/5/2011	12:58:44 PM	BCl3 MFC set to  0.000000
11/5/2011	12:58:44 PM	PHl3 MFC set to  0.000000
11/5/2011	12:58:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:58:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:58:44 PM	Tube furnace set to 150
11/5/2011	12:59:14 PM	H2 valve closed
11/5/2011	12:59:14 PM	BCl3 valve closed
11/5/2011	12:59:14 PM	PH3 valve closed
11/5/2011	12:59:14 PM	SiCl4 pre valve closed
11/5/2011	12:59:14 PM	SiCl4 post valve closed
11/5/2011	12:59:14 PM	Bypass valve closed
11/5/2011	12:59:14 PM	Bubbler valve closed
11/5/2011	12:59:14 PM	Helium valve opened
11/5/2011	12:59:14 PM	Main Vac valve opened
11/5/2011	12:59:14 PM	Helium MFC set to  20.000000
11/5/2011	12:59:14 PM	H2 MFC set to  0.000000
11/5/2011	12:59:14 PM	BCl3 MFC set to  0.000000
11/5/2011	12:59:14 PM	PHl3 MFC set to  0.000000
11/5/2011	12:59:14 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:59:14 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:59:14 PM	Tube furnace set to 150
11/5/2011	12:59:44 PM	Helium valve closed
11/5/2011	12:59:44 PM	H2 valve closed
11/5/2011	12:59:44 PM	BCl3 valve closed
11/5/2011	12:59:44 PM	PH3 valve closed
11/5/2011	12:59:44 PM	SiCl4 pre valve closed
11/5/2011	12:59:44 PM	SiCl4 post valve closed
11/5/2011	12:59:44 PM	Bypass valve closed
11/5/2011	12:59:44 PM	Bubbler valve closed
11/5/2011	12:59:44 PM	Main Vac valve opened
11/5/2011	12:59:44 PM	Helium MFC set to  0.000000
11/5/2011	12:59:44 PM	H2 MFC set to  0.000000
11/5/2011	12:59:44 PM	BCl3 MFC set to  0.000000
11/5/2011	12:59:44 PM	PHl3 MFC set to  0.000000
11/5/2011	12:59:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	12:59:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	12:59:45 PM	Tube furnace set to 150
11/5/2011	1:00:15 PM	H2 valve closed
11/5/2011	1:00:15 PM	BCl3 valve closed
11/5/2011	1:00:15 PM	PH3 valve closed
11/5/2011	1:00:15 PM	SiCl4 pre valve closed
11/5/2011	1:00:15 PM	SiCl4 post valve closed
11/5/2011	1:00:15 PM	Bypass valve closed
11/5/2011	1:00:15 PM	Bubbler valve closed
11/5/2011	1:00:15 PM	Helium valve opened
11/5/2011	1:00:15 PM	Main Vac valve opened
11/5/2011	1:00:15 PM	Helium MFC set to  20.000000
11/5/2011	1:00:15 PM	H2 MFC set to  0.000000
11/5/2011	1:00:15 PM	BCl3 MFC set to  0.000000
11/5/2011	1:00:15 PM	PHl3 MFC set to  0.000000
11/5/2011	1:00:15 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:00:15 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:00:15 PM	Tube furnace set to 150
11/5/2011	1:00:45 PM	Helium valve closed
11/5/2011	1:00:45 PM	H2 valve closed
11/5/2011	1:00:45 PM	BCl3 valve closed
11/5/2011	1:00:45 PM	PH3 valve closed
11/5/2011	1:00:45 PM	SiCl4 pre valve closed
11/5/2011	1:00:45 PM	SiCl4 post valve closed
11/5/2011	1:00:45 PM	Bypass valve closed
11/5/2011	1:00:45 PM	Bubbler valve closed
11/5/2011	1:00:45 PM	Main Vac valve opened
11/5/2011	1:00:45 PM	Helium MFC set to  0.000000
11/5/2011	1:00:45 PM	H2 MFC set to  0.000000
11/5/2011	1:00:45 PM	BCl3 MFC set to  0.000000
11/5/2011	1:00:45 PM	PHl3 MFC set to  0.000000
11/5/2011	1:00:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:00:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:00:45 PM	Tube furnace set to 150
11/5/2011	1:01:15 PM	H2 valve closed
11/5/2011	1:01:15 PM	BCl3 valve closed
11/5/2011	1:01:15 PM	PH3 valve closed
11/5/2011	1:01:15 PM	SiCl4 pre valve closed
11/5/2011	1:01:15 PM	SiCl4 post valve closed
11/5/2011	1:01:15 PM	Bypass valve closed
11/5/2011	1:01:15 PM	Bubbler valve closed
11/5/2011	1:01:15 PM	Helium valve opened
11/5/2011	1:01:15 PM	Main Vac valve opened
11/5/2011	1:01:15 PM	Helium MFC set to  20.000000
11/5/2011	1:01:15 PM	H2 MFC set to  0.000000
11/5/2011	1:01:15 PM	BCl3 MFC set to  0.000000
11/5/2011	1:01:15 PM	PHl3 MFC set to  0.000000
11/5/2011	1:01:15 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:01:15 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:01:15 PM	Tube furnace set to 150
11/5/2011	1:01:45 PM	Helium valve closed
11/5/2011	1:01:45 PM	H2 valve closed
11/5/2011	1:01:45 PM	BCl3 valve closed
11/5/2011	1:01:45 PM	PH3 valve closed
11/5/2011	1:01:45 PM	SiCl4 pre valve closed
11/5/2011	1:01:45 PM	SiCl4 post valve closed
11/5/2011	1:01:45 PM	Bypass valve closed
11/5/2011	1:01:45 PM	Bubbler valve closed
11/5/2011	1:01:45 PM	Main Vac valve opened
11/5/2011	1:01:45 PM	Helium MFC set to  0.000000
11/5/2011	1:01:45 PM	H2 MFC set to  0.000000
11/5/2011	1:01:45 PM	BCl3 MFC set to  0.000000
11/5/2011	1:01:45 PM	PHl3 MFC set to  0.000000
11/5/2011	1:01:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:01:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:01:45 PM	Tube furnace set to 150
11/5/2011	1:02:15 PM	H2 valve closed
11/5/2011	1:02:15 PM	BCl3 valve closed
11/5/2011	1:02:15 PM	PH3 valve closed
11/5/2011	1:02:15 PM	SiCl4 pre valve closed
11/5/2011	1:02:15 PM	SiCl4 post valve closed
11/5/2011	1:02:15 PM	Bypass valve closed
11/5/2011	1:02:15 PM	Bubbler valve closed
11/5/2011	1:02:15 PM	Helium valve opened
11/5/2011	1:02:15 PM	Main Vac valve opened
11/5/2011	1:02:15 PM	Helium MFC set to  20.000000
11/5/2011	1:02:15 PM	H2 MFC set to  0.000000
11/5/2011	1:02:15 PM	BCl3 MFC set to  0.000000
11/5/2011	1:02:15 PM	PHl3 MFC set to  0.000000
11/5/2011	1:02:15 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:02:15 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:02:16 PM	Tube furnace set to 150
11/5/2011	1:02:46 PM	Helium valve closed
11/5/2011	1:02:46 PM	H2 valve closed
11/5/2011	1:02:46 PM	BCl3 valve closed
11/5/2011	1:02:46 PM	PH3 valve closed
11/5/2011	1:02:46 PM	SiCl4 pre valve closed
11/5/2011	1:02:46 PM	SiCl4 post valve closed
11/5/2011	1:02:46 PM	Bypass valve closed
11/5/2011	1:02:46 PM	Bubbler valve closed
11/5/2011	1:02:46 PM	Main Vac valve opened
11/5/2011	1:02:46 PM	Helium MFC set to  0.000000
11/5/2011	1:02:46 PM	H2 MFC set to  0.000000
11/5/2011	1:02:46 PM	BCl3 MFC set to  0.000000
11/5/2011	1:02:46 PM	PHl3 MFC set to  0.000000
11/5/2011	1:02:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:02:46 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:02:46 PM	Tube furnace set to 150
11/5/2011	1:03:16 PM	H2 valve closed
11/5/2011	1:03:16 PM	BCl3 valve closed
11/5/2011	1:03:16 PM	PH3 valve closed
11/5/2011	1:03:16 PM	SiCl4 pre valve closed
11/5/2011	1:03:16 PM	SiCl4 post valve closed
11/5/2011	1:03:16 PM	Bypass valve closed
11/5/2011	1:03:16 PM	Bubbler valve closed
11/5/2011	1:03:16 PM	Helium valve opened
11/5/2011	1:03:16 PM	Main Vac valve opened
11/5/2011	1:03:16 PM	Helium MFC set to  20.000000
11/5/2011	1:03:16 PM	H2 MFC set to  0.000000
11/5/2011	1:03:16 PM	BCl3 MFC set to  0.000000
11/5/2011	1:03:16 PM	PHl3 MFC set to  0.000000
11/5/2011	1:03:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:03:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:03:16 PM	Tube furnace set to 150
11/5/2011	1:03:46 PM	Helium valve closed
11/5/2011	1:03:46 PM	H2 valve closed
11/5/2011	1:03:46 PM	BCl3 valve closed
11/5/2011	1:03:46 PM	PH3 valve closed
11/5/2011	1:03:46 PM	SiCl4 pre valve closed
11/5/2011	1:03:46 PM	SiCl4 post valve closed
11/5/2011	1:03:46 PM	Bypass valve closed
11/5/2011	1:03:46 PM	Bubbler valve closed
11/5/2011	1:03:46 PM	Main Vac valve opened
11/5/2011	1:03:46 PM	Helium MFC set to  0.000000
11/5/2011	1:03:46 PM	H2 MFC set to  0.000000
11/5/2011	1:03:46 PM	BCl3 MFC set to  0.000000
11/5/2011	1:03:46 PM	PHl3 MFC set to  0.000000
11/5/2011	1:03:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:03:46 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:03:46 PM	Tube furnace set to 150
11/5/2011	1:04:16 PM	H2 valve closed
11/5/2011	1:04:16 PM	BCl3 valve closed
11/5/2011	1:04:16 PM	PH3 valve closed
11/5/2011	1:04:16 PM	SiCl4 pre valve closed
11/5/2011	1:04:16 PM	SiCl4 post valve closed
11/5/2011	1:04:16 PM	Bypass valve closed
11/5/2011	1:04:16 PM	Bubbler valve closed
11/5/2011	1:04:16 PM	Helium valve opened
11/5/2011	1:04:16 PM	Main Vac valve opened
11/5/2011	1:04:16 PM	Helium MFC set to  20.000000
11/5/2011	1:04:16 PM	H2 MFC set to  0.000000
11/5/2011	1:04:16 PM	BCl3 MFC set to  0.000000
11/5/2011	1:04:16 PM	PHl3 MFC set to  0.000000
11/5/2011	1:04:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:04:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:04:16 PM	Tube furnace set to 150
11/5/2011	1:04:46 PM	Helium valve closed
11/5/2011	1:04:46 PM	H2 valve closed
11/5/2011	1:04:46 PM	BCl3 valve closed
11/5/2011	1:04:46 PM	PH3 valve closed
11/5/2011	1:04:46 PM	SiCl4 pre valve closed
11/5/2011	1:04:46 PM	SiCl4 post valve closed
11/5/2011	1:04:46 PM	Bypass valve closed
11/5/2011	1:04:46 PM	Bubbler valve closed
11/5/2011	1:04:46 PM	Main Vac valve opened
11/5/2011	1:04:46 PM	Helium MFC set to  0.000000
11/5/2011	1:04:46 PM	H2 MFC set to  0.000000
11/5/2011	1:04:46 PM	BCl3 MFC set to  0.000000
11/5/2011	1:04:46 PM	PHl3 MFC set to  0.000000
11/5/2011	1:04:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:04:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:04:47 PM	Tube furnace set to 150
11/5/2011	1:05:17 PM	H2 valve closed
11/5/2011	1:05:17 PM	BCl3 valve closed
11/5/2011	1:05:17 PM	PH3 valve closed
11/5/2011	1:05:17 PM	SiCl4 pre valve closed
11/5/2011	1:05:17 PM	SiCl4 post valve closed
11/5/2011	1:05:17 PM	Bypass valve closed
11/5/2011	1:05:17 PM	Bubbler valve closed
11/5/2011	1:05:17 PM	Helium valve opened
11/5/2011	1:05:17 PM	Main Vac valve opened
11/5/2011	1:05:17 PM	Helium MFC set to  20.000000
11/5/2011	1:05:17 PM	H2 MFC set to  0.000000
11/5/2011	1:05:17 PM	BCl3 MFC set to  0.000000
11/5/2011	1:05:17 PM	PHl3 MFC set to  0.000000
11/5/2011	1:05:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:05:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:05:17 PM	Tube furnace set to 150
11/5/2011	1:05:47 PM	Helium valve closed
11/5/2011	1:05:47 PM	H2 valve closed
11/5/2011	1:05:47 PM	BCl3 valve closed
11/5/2011	1:05:47 PM	PH3 valve closed
11/5/2011	1:05:47 PM	SiCl4 pre valve closed
11/5/2011	1:05:47 PM	SiCl4 post valve closed
11/5/2011	1:05:47 PM	Bypass valve closed
11/5/2011	1:05:47 PM	Bubbler valve closed
11/5/2011	1:05:47 PM	Main Vac valve opened
11/5/2011	1:05:47 PM	Helium MFC set to  0.000000
11/5/2011	1:05:47 PM	H2 MFC set to  0.000000
11/5/2011	1:05:47 PM	BCl3 MFC set to  0.000000
11/5/2011	1:05:47 PM	PHl3 MFC set to  0.000000
11/5/2011	1:05:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:05:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:05:47 PM	Tube furnace set to 150
11/5/2011	1:06:17 PM	H2 valve closed
11/5/2011	1:06:17 PM	BCl3 valve closed
11/5/2011	1:06:17 PM	PH3 valve closed
11/5/2011	1:06:17 PM	SiCl4 pre valve closed
11/5/2011	1:06:17 PM	SiCl4 post valve closed
11/5/2011	1:06:17 PM	Bypass valve closed
11/5/2011	1:06:17 PM	Bubbler valve closed
11/5/2011	1:06:17 PM	Helium valve opened
11/5/2011	1:06:17 PM	Main Vac valve opened
11/5/2011	1:06:17 PM	Helium MFC set to  20.000000
11/5/2011	1:06:17 PM	H2 MFC set to  0.000000
11/5/2011	1:06:17 PM	BCl3 MFC set to  0.000000
11/5/2011	1:06:17 PM	PHl3 MFC set to  0.000000
11/5/2011	1:06:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:06:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:06:17 PM	Tube furnace set to 150
11/5/2011	1:06:47 PM	Helium valve closed
11/5/2011	1:06:47 PM	H2 valve closed
11/5/2011	1:06:47 PM	BCl3 valve closed
11/5/2011	1:06:47 PM	PH3 valve closed
11/5/2011	1:06:47 PM	SiCl4 pre valve closed
11/5/2011	1:06:47 PM	SiCl4 post valve closed
11/5/2011	1:06:47 PM	Bypass valve closed
11/5/2011	1:06:47 PM	Bubbler valve closed
11/5/2011	1:06:47 PM	Main Vac valve opened
11/5/2011	1:06:47 PM	Helium MFC set to  0.000000
11/5/2011	1:06:47 PM	H2 MFC set to  0.000000
11/5/2011	1:06:47 PM	BCl3 MFC set to  0.000000
11/5/2011	1:06:47 PM	PHl3 MFC set to  0.000000
11/5/2011	1:06:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:06:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:06:48 PM	Tube furnace set to 180
11/5/2011	1:06:53 PM	Run finished at 1:06 PM
11/5/2011	1:09:13 PM	Main Vac valve closed
11/5/2011	1:09:26 PM	Main Vac valve opened
11/5/2011	1:10:48 PM	Recipe started at 1:10 PM
11/5/2011	1:10:48 PM	H2 valve closed
11/5/2011	1:10:48 PM	BCl3 valve closed
11/5/2011	1:10:48 PM	PH3 valve closed
11/5/2011	1:10:48 PM	SiCl4 pre valve closed
11/5/2011	1:10:48 PM	SiCl4 post valve closed
11/5/2011	1:10:48 PM	Main Vac valve closed
11/5/2011	1:10:48 PM	Bypass valve closed
11/5/2011	1:10:48 PM	Bubbler valve closed
11/5/2011	1:10:48 PM	Helium valve opened
11/5/2011	1:10:48 PM	Helium MFC set to  0.000000
11/5/2011	1:10:48 PM	H2 MFC set to  0.000000
11/5/2011	1:10:48 PM	BCl3 MFC set to  0.000000
11/5/2011	1:10:48 PM	PHl3 MFC set to  0.000000
11/5/2011	1:10:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:10:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:10:48 PM	Tube furnace set to 0
11/5/2011	1:10:51 PM	Helium valve closed
11/5/2011	1:10:51 PM	BCl3 valve closed
11/5/2011	1:10:51 PM	PH3 valve closed
11/5/2011	1:10:51 PM	SiCl4 pre valve closed
11/5/2011	1:10:51 PM	SiCl4 post valve closed
11/5/2011	1:10:51 PM	Main Vac valve closed
11/5/2011	1:10:51 PM	Bypass valve closed
11/5/2011	1:10:51 PM	Bubbler valve closed
11/5/2011	1:10:51 PM	H2 valve opened
11/5/2011	1:10:51 PM	Helium MFC set to  0.000000
11/5/2011	1:10:51 PM	H2 MFC set to  500.000000
11/5/2011	1:10:51 PM	BCl3 MFC set to  0.000000
11/5/2011	1:10:51 PM	PHl3 MFC set to  0.000000
11/5/2011	1:10:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:10:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:10:51 PM	Tube furnace set to 100
11/5/2011	1:11:55 PM	Helium valve closed
11/5/2011	1:11:55 PM	BCl3 valve closed
11/5/2011	1:11:55 PM	PH3 valve closed
11/5/2011	1:11:55 PM	SiCl4 pre valve closed
11/5/2011	1:11:55 PM	SiCl4 post valve closed
11/5/2011	1:11:55 PM	Main Vac valve closed
11/5/2011	1:11:55 PM	Bypass valve closed
11/5/2011	1:11:55 PM	H2 valve opened
11/5/2011	1:11:55 PM	Bubbler valve opened
11/5/2011	1:11:55 PM	Helium MFC set to  0.000000
11/5/2011	1:11:55 PM	H2 MFC set to  500.000000
11/5/2011	1:11:55 PM	BCl3 MFC set to  0.000000
11/5/2011	1:11:55 PM	PHl3 MFC set to  0.000000
11/5/2011	1:11:55 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:11:55 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:11:55 PM	Tube furnace set to 1000
11/5/2011	1:11:56 PM	Helium valve closed
11/5/2011	1:11:56 PM	BCl3 valve closed
11/5/2011	1:11:56 PM	PH3 valve closed
11/5/2011	1:11:56 PM	SiCl4 pre valve closed
11/5/2011	1:11:56 PM	SiCl4 post valve closed
11/5/2011	1:11:56 PM	Main Vac valve closed
11/5/2011	1:11:56 PM	Bypass valve closed
11/5/2011	1:11:56 PM	H2 valve opened
11/5/2011	1:11:56 PM	Bubbler valve opened
11/5/2011	1:11:56 PM	Helium MFC set to  0.000000
11/5/2011	1:11:56 PM	H2 MFC set to  500.000000
11/5/2011	1:11:56 PM	BCl3 MFC set to  0.000000
11/5/2011	1:11:56 PM	PHl3 MFC set to  0.000000
11/5/2011	1:11:56 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:11:56 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:11:56 PM	Tube furnace set to 1000
11/5/2011	1:31:56 PM	Helium valve closed
11/5/2011	1:31:56 PM	BCl3 valve closed
11/5/2011	1:31:56 PM	PH3 valve closed
11/5/2011	1:31:56 PM	Main Vac valve closed
11/5/2011	1:31:56 PM	Bypass valve closed
11/5/2011	1:31:56 PM	H2 valve opened
11/5/2011	1:31:56 PM	SiCl4 pre valve opened
11/5/2011	1:31:56 PM	SiCl4 post valve opened
11/5/2011	1:31:56 PM	Bubbler valve opened
11/5/2011	1:31:56 PM	Helium MFC set to  0.000000
11/5/2011	1:31:56 PM	H2 MFC set to  500.000000
11/5/2011	1:31:56 PM	BCl3 MFC set to  0.000000
11/5/2011	1:31:56 PM	PHl3 MFC set to  0.000000
11/5/2011	1:31:56 PM	SiCl4 MFC set to  22.000000
11/5/2011	1:31:56 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:31:56 PM	Tube furnace set to 1000
11/5/2011	1:56:56 PM	Helium valve closed
11/5/2011	1:56:56 PM	BCl3 valve closed
11/5/2011	1:56:56 PM	PH3 valve closed
11/5/2011	1:56:56 PM	SiCl4 pre valve closed
11/5/2011	1:56:56 PM	SiCl4 post valve closed
11/5/2011	1:56:56 PM	Main Vac valve closed
11/5/2011	1:56:56 PM	Bypass valve closed
11/5/2011	1:56:56 PM	H2 valve opened
11/5/2011	1:56:56 PM	Bubbler valve opened
11/5/2011	1:56:56 PM	Helium MFC set to  0.000000
11/5/2011	1:56:56 PM	H2 MFC set to  500.000000
11/5/2011	1:56:56 PM	BCl3 MFC set to  0.000000
11/5/2011	1:56:56 PM	PHl3 MFC set to  0.000000
11/5/2011	1:56:56 PM	SiCl4 MFC set to  0.000000
11/5/2011	1:56:56 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	1:56:56 PM	Tube furnace set to 1000
11/5/2011	2:02:05 PM	H2 valve closed
11/5/2011	2:02:05 PM	BCl3 valve closed
11/5/2011	2:02:05 PM	PH3 valve closed
11/5/2011	2:02:05 PM	SiCl4 pre valve closed
11/5/2011	2:02:05 PM	SiCl4 post valve closed
11/5/2011	2:02:05 PM	Main Vac valve closed
11/5/2011	2:02:05 PM	Bypass valve closed
11/5/2011	2:02:05 PM	Helium valve opened
11/5/2011	2:02:05 PM	Bubbler valve opened
11/5/2011	2:02:05 PM	Helium MFC set to  400.000000
11/5/2011	2:02:05 PM	H2 MFC set to  0.000000
11/5/2011	2:02:05 PM	BCl3 MFC set to  0.000000
11/5/2011	2:02:05 PM	PHl3 MFC set to  0.000000
11/5/2011	2:02:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:02:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:02:05 PM	Tube furnace set to 0
11/5/2011	2:12:14 PM	Run aborted at 2:12 PM
11/5/2011	2:12:14 PM	Helium valve closed
11/5/2011	2:12:14 PM	H2 valve closed
11/5/2011	2:12:14 PM	BCl3 valve closed
11/5/2011	2:12:14 PM	PH3 valve closed
11/5/2011	2:12:14 PM	SiCl4 pre valve closed
11/5/2011	2:12:14 PM	SiCl4 post valve closed
11/5/2011	2:12:14 PM	Bypass valve closed
11/5/2011	2:12:14 PM	Main Vac valve closed
11/5/2011	2:12:14 PM	Bubbler valve closed
11/5/2011	2:12:14 PM	Helium MFC set to  0.000000
11/5/2011	2:12:14 PM	H2 MFC set to  0.000000
11/5/2011	2:12:14 PM	BCl3 MFC set to  0.000000
11/5/2011	2:12:14 PM	PHl3 MFC set to  0.000000
11/5/2011	2:12:14 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:12:14 PM	Tube furnace set to 0
11/5/2011	2:12:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	2:12:17 PM	Recipe started at 2:12 PM
11/5/2011	2:12:17 PM	Helium valve closed
11/5/2011	2:12:17 PM	H2 valve closed
11/5/2011	2:12:17 PM	BCl3 valve closed
11/5/2011	2:12:17 PM	PH3 valve closed
11/5/2011	2:12:17 PM	SiCl4 pre valve closed
11/5/2011	2:12:17 PM	SiCl4 post valve closed
11/5/2011	2:12:17 PM	Main Vac valve closed
11/5/2011	2:12:17 PM	Bypass valve closed
11/5/2011	2:12:17 PM	Bubbler valve closed
11/5/2011	2:12:17 PM	Helium MFC set to  0.000000
11/5/2011	2:12:17 PM	H2 MFC set to  0.000000
11/5/2011	2:12:17 PM	BCl3 MFC set to  0.000000
11/5/2011	2:12:17 PM	PHl3 MFC set to  0.000000
11/5/2011	2:12:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:12:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:12:17 PM	Tube furnace set to 0
11/5/2011	2:12:20 PM	H2 valve closed
11/5/2011	2:12:20 PM	BCl3 valve closed
11/5/2011	2:12:20 PM	PH3 valve closed
11/5/2011	2:12:20 PM	SiCl4 pre valve closed
11/5/2011	2:12:20 PM	SiCl4 post valve closed
11/5/2011	2:12:20 PM	Main Vac valve closed
11/5/2011	2:12:20 PM	Bypass valve closed
11/5/2011	2:12:20 PM	Bubbler valve closed
11/5/2011	2:12:20 PM	Helium valve opened
11/5/2011	2:12:20 PM	Helium MFC set to  500.000000
11/5/2011	2:12:20 PM	H2 MFC set to  0.000000
11/5/2011	2:12:20 PM	BCl3 MFC set to  0.000000
11/5/2011	2:12:20 PM	PHl3 MFC set to  0.000000
11/5/2011	2:12:20 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:12:20 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:12:21 PM	Tube furnace set to 0
11/5/2011	2:12:21 PM	Helium valve closed
11/5/2011	2:12:21 PM	H2 valve closed
11/5/2011	2:12:21 PM	BCl3 valve closed
11/5/2011	2:12:21 PM	PH3 valve closed
11/5/2011	2:12:21 PM	SiCl4 pre valve closed
11/5/2011	2:12:21 PM	SiCl4 post valve closed
11/5/2011	2:12:21 PM	Main Vac valve closed
11/5/2011	2:12:21 PM	Bypass valve closed
11/5/2011	2:12:21 PM	Bubbler valve closed
11/5/2011	2:12:21 PM	Helium MFC set to  0.000000
11/5/2011	2:12:21 PM	H2 MFC set to  0.000000
11/5/2011	2:12:21 PM	BCl3 MFC set to  0.000000
11/5/2011	2:12:21 PM	PHl3 MFC set to  0.000000
11/5/2011	2:12:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:12:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:12:21 PM	Tube furnace set to 0
11/5/2011	2:12:22 PM	Run finished at 2:12 PM
11/5/2011	2:12:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	2:17:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	2:17:59 PM	Recipe started at 2:17 PM
11/5/2011	2:17:59 PM	Helium valve closed
11/5/2011	2:17:59 PM	H2 valve closed
11/5/2011	2:17:59 PM	BCl3 valve closed
11/5/2011	2:17:59 PM	PH3 valve closed
11/5/2011	2:17:59 PM	SiCl4 pre valve closed
11/5/2011	2:17:59 PM	SiCl4 post valve closed
11/5/2011	2:17:59 PM	Main Vac valve closed
11/5/2011	2:17:59 PM	Bubbler valve closed
11/5/2011	2:17:59 PM	Bypass valve opened
11/5/2011	2:17:59 PM	Helium MFC set to  0.000000
11/5/2011	2:17:59 PM	H2 MFC set to  0.000000
11/5/2011	2:17:59 PM	BCl3 MFC set to  0.000000
11/5/2011	2:17:59 PM	PHl3 MFC set to  0.000000
11/5/2011	2:17:59 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:17:59 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:17:59 PM	Tube furnace set to 0
11/5/2011	2:19:04 PM	Helium valve closed
11/5/2011	2:19:04 PM	H2 valve closed
11/5/2011	2:19:04 PM	BCl3 valve closed
11/5/2011	2:19:04 PM	PH3 valve closed
11/5/2011	2:19:04 PM	SiCl4 pre valve closed
11/5/2011	2:19:04 PM	SiCl4 post valve closed
11/5/2011	2:19:04 PM	Main Vac valve closed
11/5/2011	2:19:04 PM	Bubbler valve closed
11/5/2011	2:19:04 PM	Bypass valve opened
11/5/2011	2:19:04 PM	Helium MFC set to  0.000000
11/5/2011	2:19:04 PM	H2 MFC set to  0.000000
11/5/2011	2:19:04 PM	BCl3 MFC set to  0.000000
11/5/2011	2:19:04 PM	PHl3 MFC set to  0.000000
11/5/2011	2:19:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:19:04 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:19:04 PM	Tube furnace set to 0
11/5/2011	2:20:04 PM	Helium valve closed
11/5/2011	2:20:04 PM	H2 valve closed
11/5/2011	2:20:04 PM	BCl3 valve closed
11/5/2011	2:20:04 PM	PH3 valve closed
11/5/2011	2:20:04 PM	SiCl4 pre valve closed
11/5/2011	2:20:04 PM	SiCl4 post valve closed
11/5/2011	2:20:04 PM	Bypass valve closed
11/5/2011	2:20:04 PM	Bubbler valve closed
11/5/2011	2:20:04 PM	Main Vac valve opened
11/5/2011	2:20:04 PM	Helium MFC set to  0.000000
11/5/2011	2:20:04 PM	H2 MFC set to  0.000000
11/5/2011	2:20:04 PM	BCl3 MFC set to  0.000000
11/5/2011	2:20:04 PM	PHl3 MFC set to  0.000000
11/5/2011	2:20:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:20:04 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:20:04 PM	Tube furnace set to 0
11/5/2011	2:20:05 PM	Run finished at 2:20 PM
11/5/2011	2:20:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	2:26:44 PM	Recipe started at 2:26 PM
11/5/2011	2:26:44 PM	Helium valve closed
11/5/2011	2:26:44 PM	H2 valve closed
11/5/2011	2:26:44 PM	BCl3 valve closed
11/5/2011	2:26:44 PM	PH3 valve closed
11/5/2011	2:26:44 PM	SiCl4 pre valve closed
11/5/2011	2:26:44 PM	SiCl4 post valve closed
11/5/2011	2:26:44 PM	Main Vac valve closed
11/5/2011	2:26:44 PM	Bubbler valve closed
11/5/2011	2:26:44 PM	Bypass valve opened
11/5/2011	2:26:44 PM	Helium MFC set to  0.000000
11/5/2011	2:26:44 PM	H2 MFC set to  0.000000
11/5/2011	2:26:44 PM	BCl3 MFC set to  0.000000
11/5/2011	2:26:44 PM	PHl3 MFC set to  0.000000
11/5/2011	2:26:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:26:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:26:44 PM	Tube furnace set to 180
11/5/2011	2:26:45 PM	Helium valve closed
11/5/2011	2:26:45 PM	H2 valve closed
11/5/2011	2:26:45 PM	BCl3 valve closed
11/5/2011	2:26:45 PM	PH3 valve closed
11/5/2011	2:26:45 PM	SiCl4 pre valve closed
11/5/2011	2:26:45 PM	SiCl4 post valve closed
11/5/2011	2:26:45 PM	Main Vac valve closed
11/5/2011	2:26:45 PM	Bubbler valve closed
11/5/2011	2:26:45 PM	Bypass valve opened
11/5/2011	2:26:45 PM	Helium MFC set to  0.000000
11/5/2011	2:26:45 PM	H2 MFC set to  0.000000
11/5/2011	2:26:45 PM	BCl3 MFC set to  0.000000
11/5/2011	2:26:45 PM	PHl3 MFC set to  0.000000
11/5/2011	2:26:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:26:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:26:45 PM	Tube furnace set to 150
11/5/2011	2:26:46 PM	Helium valve closed
11/5/2011	2:26:46 PM	H2 valve closed
11/5/2011	2:26:46 PM	BCl3 valve closed
11/5/2011	2:26:46 PM	PH3 valve closed
11/5/2011	2:26:46 PM	SiCl4 pre valve closed
11/5/2011	2:26:46 PM	SiCl4 post valve closed
11/5/2011	2:26:46 PM	Bypass valve closed
11/5/2011	2:26:46 PM	Bubbler valve closed
11/5/2011	2:26:46 PM	Main Vac valve opened
11/5/2011	2:26:46 PM	Helium MFC set to  0.000000
11/5/2011	2:26:46 PM	H2 MFC set to  0.000000
11/5/2011	2:26:46 PM	BCl3 MFC set to  0.000000
11/5/2011	2:26:46 PM	PHl3 MFC set to  0.000000
11/5/2011	2:26:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:26:46 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:26:46 PM	Tube furnace set to 180
11/5/2011	2:27:16 PM	H2 valve closed
11/5/2011	2:27:16 PM	BCl3 valve closed
11/5/2011	2:27:16 PM	PH3 valve closed
11/5/2011	2:27:16 PM	SiCl4 pre valve closed
11/5/2011	2:27:16 PM	SiCl4 post valve closed
11/5/2011	2:27:16 PM	Bypass valve closed
11/5/2011	2:27:16 PM	Bubbler valve closed
11/5/2011	2:27:16 PM	Helium valve opened
11/5/2011	2:27:16 PM	Main Vac valve opened
11/5/2011	2:27:16 PM	Helium MFC set to  20.000000
11/5/2011	2:27:16 PM	H2 MFC set to  0.000000
11/5/2011	2:27:16 PM	BCl3 MFC set to  0.000000
11/5/2011	2:27:16 PM	PHl3 MFC set to  0.000000
11/5/2011	2:27:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:27:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:27:17 PM	Tube furnace set to 180
11/5/2011	2:27:47 PM	Helium valve closed
11/5/2011	2:27:47 PM	H2 valve closed
11/5/2011	2:27:47 PM	BCl3 valve closed
11/5/2011	2:27:47 PM	PH3 valve closed
11/5/2011	2:27:47 PM	SiCl4 pre valve closed
11/5/2011	2:27:47 PM	SiCl4 post valve closed
11/5/2011	2:27:47 PM	Bypass valve closed
11/5/2011	2:27:47 PM	Bubbler valve closed
11/5/2011	2:27:47 PM	Main Vac valve opened
11/5/2011	2:27:47 PM	Helium MFC set to  0.000000
11/5/2011	2:27:47 PM	H2 MFC set to  0.000000
11/5/2011	2:27:47 PM	BCl3 MFC set to  0.000000
11/5/2011	2:27:47 PM	PHl3 MFC set to  0.000000
11/5/2011	2:27:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:27:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:27:47 PM	Tube furnace set to 150
11/5/2011	2:28:17 PM	H2 valve closed
11/5/2011	2:28:17 PM	BCl3 valve closed
11/5/2011	2:28:17 PM	PH3 valve closed
11/5/2011	2:28:17 PM	SiCl4 pre valve closed
11/5/2011	2:28:17 PM	SiCl4 post valve closed
11/5/2011	2:28:17 PM	Bypass valve closed
11/5/2011	2:28:17 PM	Bubbler valve closed
11/5/2011	2:28:17 PM	Helium valve opened
11/5/2011	2:28:17 PM	Main Vac valve opened
11/5/2011	2:28:17 PM	Helium MFC set to  20.000000
11/5/2011	2:28:17 PM	H2 MFC set to  0.000000
11/5/2011	2:28:17 PM	BCl3 MFC set to  0.000000
11/5/2011	2:28:17 PM	PHl3 MFC set to  0.000000
11/5/2011	2:28:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:28:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:28:17 PM	Tube furnace set to 180
11/5/2011	2:28:47 PM	Helium valve closed
11/5/2011	2:28:47 PM	H2 valve closed
11/5/2011	2:28:47 PM	BCl3 valve closed
11/5/2011	2:28:47 PM	PH3 valve closed
11/5/2011	2:28:47 PM	SiCl4 pre valve closed
11/5/2011	2:28:47 PM	SiCl4 post valve closed
11/5/2011	2:28:47 PM	Bypass valve closed
11/5/2011	2:28:47 PM	Bubbler valve closed
11/5/2011	2:28:47 PM	Main Vac valve opened
11/5/2011	2:28:47 PM	Helium MFC set to  0.000000
11/5/2011	2:28:47 PM	H2 MFC set to  0.000000
11/5/2011	2:28:47 PM	BCl3 MFC set to  0.000000
11/5/2011	2:28:47 PM	PHl3 MFC set to  0.000000
11/5/2011	2:28:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:28:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:28:47 PM	Tube furnace set to 150
11/5/2011	2:29:17 PM	H2 valve closed
11/5/2011	2:29:17 PM	BCl3 valve closed
11/5/2011	2:29:17 PM	PH3 valve closed
11/5/2011	2:29:17 PM	SiCl4 pre valve closed
11/5/2011	2:29:17 PM	SiCl4 post valve closed
11/5/2011	2:29:17 PM	Bypass valve closed
11/5/2011	2:29:17 PM	Bubbler valve closed
11/5/2011	2:29:17 PM	Helium valve opened
11/5/2011	2:29:17 PM	Main Vac valve opened
11/5/2011	2:29:17 PM	Helium MFC set to  20.000000
11/5/2011	2:29:17 PM	H2 MFC set to  0.000000
11/5/2011	2:29:17 PM	BCl3 MFC set to  0.000000
11/5/2011	2:29:17 PM	PHl3 MFC set to  0.000000
11/5/2011	2:29:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:29:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:29:17 PM	Tube furnace set to 150
11/5/2011	2:29:47 PM	Helium valve closed
11/5/2011	2:29:47 PM	H2 valve closed
11/5/2011	2:29:47 PM	BCl3 valve closed
11/5/2011	2:29:47 PM	PH3 valve closed
11/5/2011	2:29:47 PM	SiCl4 pre valve closed
11/5/2011	2:29:47 PM	SiCl4 post valve closed
11/5/2011	2:29:47 PM	Bypass valve closed
11/5/2011	2:29:47 PM	Bubbler valve closed
11/5/2011	2:29:47 PM	Main Vac valve opened
11/5/2011	2:29:47 PM	Helium MFC set to  0.000000
11/5/2011	2:29:47 PM	H2 MFC set to  0.000000
11/5/2011	2:29:47 PM	BCl3 MFC set to  0.000000
11/5/2011	2:29:47 PM	PHl3 MFC set to  0.000000
11/5/2011	2:29:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:29:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:29:48 PM	Tube furnace set to 150
11/5/2011	2:30:18 PM	H2 valve closed
11/5/2011	2:30:18 PM	BCl3 valve closed
11/5/2011	2:30:18 PM	PH3 valve closed
11/5/2011	2:30:18 PM	SiCl4 pre valve closed
11/5/2011	2:30:18 PM	SiCl4 post valve closed
11/5/2011	2:30:18 PM	Bypass valve closed
11/5/2011	2:30:18 PM	Bubbler valve closed
11/5/2011	2:30:18 PM	Helium valve opened
11/5/2011	2:30:18 PM	Main Vac valve opened
11/5/2011	2:30:18 PM	Helium MFC set to  20.000000
11/5/2011	2:30:18 PM	H2 MFC set to  0.000000
11/5/2011	2:30:18 PM	BCl3 MFC set to  0.000000
11/5/2011	2:30:18 PM	PHl3 MFC set to  0.000000
11/5/2011	2:30:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:30:18 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:30:18 PM	Tube furnace set to 180
11/5/2011	2:30:48 PM	Helium valve closed
11/5/2011	2:30:48 PM	H2 valve closed
11/5/2011	2:30:48 PM	BCl3 valve closed
11/5/2011	2:30:48 PM	PH3 valve closed
11/5/2011	2:30:48 PM	SiCl4 pre valve closed
11/5/2011	2:30:48 PM	SiCl4 post valve closed
11/5/2011	2:30:48 PM	Bypass valve closed
11/5/2011	2:30:48 PM	Bubbler valve closed
11/5/2011	2:30:48 PM	Main Vac valve opened
11/5/2011	2:30:48 PM	Helium MFC set to  0.000000
11/5/2011	2:30:48 PM	H2 MFC set to  0.000000
11/5/2011	2:30:48 PM	BCl3 MFC set to  0.000000
11/5/2011	2:30:48 PM	PHl3 MFC set to  0.000000
11/5/2011	2:30:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:30:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:30:48 PM	Tube furnace set to 150
11/5/2011	2:31:18 PM	H2 valve closed
11/5/2011	2:31:18 PM	BCl3 valve closed
11/5/2011	2:31:18 PM	PH3 valve closed
11/5/2011	2:31:18 PM	SiCl4 pre valve closed
11/5/2011	2:31:18 PM	SiCl4 post valve closed
11/5/2011	2:31:18 PM	Bypass valve closed
11/5/2011	2:31:18 PM	Bubbler valve closed
11/5/2011	2:31:18 PM	Helium valve opened
11/5/2011	2:31:18 PM	Main Vac valve opened
11/5/2011	2:31:18 PM	Helium MFC set to  20.000000
11/5/2011	2:31:18 PM	H2 MFC set to  0.000000
11/5/2011	2:31:18 PM	BCl3 MFC set to  0.000000
11/5/2011	2:31:18 PM	PHl3 MFC set to  0.000000
11/5/2011	2:31:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:31:18 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:31:18 PM	Tube furnace set to 150
11/5/2011	2:31:48 PM	Helium valve closed
11/5/2011	2:31:48 PM	H2 valve closed
11/5/2011	2:31:48 PM	BCl3 valve closed
11/5/2011	2:31:48 PM	PH3 valve closed
11/5/2011	2:31:48 PM	SiCl4 pre valve closed
11/5/2011	2:31:48 PM	SiCl4 post valve closed
11/5/2011	2:31:48 PM	Bypass valve closed
11/5/2011	2:31:48 PM	Bubbler valve closed
11/5/2011	2:31:48 PM	Main Vac valve opened
11/5/2011	2:31:48 PM	Helium MFC set to  0.000000
11/5/2011	2:31:48 PM	H2 MFC set to  0.000000
11/5/2011	2:31:48 PM	BCl3 MFC set to  0.000000
11/5/2011	2:31:48 PM	PHl3 MFC set to  0.000000
11/5/2011	2:31:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:31:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:31:48 PM	Tube furnace set to 150
11/5/2011	2:32:18 PM	H2 valve closed
11/5/2011	2:32:18 PM	BCl3 valve closed
11/5/2011	2:32:18 PM	PH3 valve closed
11/5/2011	2:32:18 PM	SiCl4 pre valve closed
11/5/2011	2:32:18 PM	SiCl4 post valve closed
11/5/2011	2:32:18 PM	Bypass valve closed
11/5/2011	2:32:18 PM	Bubbler valve closed
11/5/2011	2:32:18 PM	Helium valve opened
11/5/2011	2:32:18 PM	Main Vac valve opened
11/5/2011	2:32:18 PM	Helium MFC set to  20.000000
11/5/2011	2:32:18 PM	H2 MFC set to  0.000000
11/5/2011	2:32:19 PM	BCl3 MFC set to  0.000000
11/5/2011	2:32:19 PM	PHl3 MFC set to  0.000000
11/5/2011	2:32:19 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:32:19 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:32:19 PM	Tube furnace set to 150
11/5/2011	2:32:49 PM	Helium valve closed
11/5/2011	2:32:49 PM	H2 valve closed
11/5/2011	2:32:49 PM	BCl3 valve closed
11/5/2011	2:32:49 PM	PH3 valve closed
11/5/2011	2:32:49 PM	SiCl4 pre valve closed
11/5/2011	2:32:49 PM	SiCl4 post valve closed
11/5/2011	2:32:49 PM	Bypass valve closed
11/5/2011	2:32:49 PM	Bubbler valve closed
11/5/2011	2:32:49 PM	Main Vac valve opened
11/5/2011	2:32:49 PM	Helium MFC set to  0.000000
11/5/2011	2:32:49 PM	H2 MFC set to  0.000000
11/5/2011	2:32:49 PM	BCl3 MFC set to  0.000000
11/5/2011	2:32:49 PM	PHl3 MFC set to  0.000000
11/5/2011	2:32:49 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:32:49 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:32:49 PM	Tube furnace set to 150
11/5/2011	2:33:19 PM	H2 valve closed
11/5/2011	2:33:19 PM	BCl3 valve closed
11/5/2011	2:33:19 PM	PH3 valve closed
11/5/2011	2:33:19 PM	SiCl4 pre valve closed
11/5/2011	2:33:19 PM	SiCl4 post valve closed
11/5/2011	2:33:19 PM	Bypass valve closed
11/5/2011	2:33:19 PM	Bubbler valve closed
11/5/2011	2:33:19 PM	Helium valve opened
11/5/2011	2:33:19 PM	Main Vac valve opened
11/5/2011	2:33:19 PM	Helium MFC set to  20.000000
11/5/2011	2:33:19 PM	H2 MFC set to  0.000000
11/5/2011	2:33:19 PM	BCl3 MFC set to  0.000000
11/5/2011	2:33:19 PM	PHl3 MFC set to  0.000000
11/5/2011	2:33:19 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:33:19 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:33:19 PM	Tube furnace set to 150
11/5/2011	2:33:49 PM	Helium valve closed
11/5/2011	2:33:49 PM	H2 valve closed
11/5/2011	2:33:49 PM	BCl3 valve closed
11/5/2011	2:33:49 PM	PH3 valve closed
11/5/2011	2:33:49 PM	SiCl4 pre valve closed
11/5/2011	2:33:49 PM	SiCl4 post valve closed
11/5/2011	2:33:49 PM	Bypass valve closed
11/5/2011	2:33:49 PM	Bubbler valve closed
11/5/2011	2:33:49 PM	Main Vac valve opened
11/5/2011	2:33:49 PM	Helium MFC set to  0.000000
11/5/2011	2:33:49 PM	H2 MFC set to  0.000000
11/5/2011	2:33:49 PM	BCl3 MFC set to  0.000000
11/5/2011	2:33:49 PM	PHl3 MFC set to  0.000000
11/5/2011	2:33:49 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:33:49 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:33:49 PM	Tube furnace set to 150
11/5/2011	2:34:19 PM	H2 valve closed
11/5/2011	2:34:19 PM	BCl3 valve closed
11/5/2011	2:34:19 PM	PH3 valve closed
11/5/2011	2:34:19 PM	SiCl4 pre valve closed
11/5/2011	2:34:19 PM	SiCl4 post valve closed
11/5/2011	2:34:19 PM	Bypass valve closed
11/5/2011	2:34:19 PM	Bubbler valve closed
11/5/2011	2:34:19 PM	Helium valve opened
11/5/2011	2:34:19 PM	Main Vac valve opened
11/5/2011	2:34:19 PM	Helium MFC set to  20.000000
11/5/2011	2:34:19 PM	H2 MFC set to  0.000000
11/5/2011	2:34:19 PM	BCl3 MFC set to  0.000000
11/5/2011	2:34:19 PM	PHl3 MFC set to  0.000000
11/5/2011	2:34:19 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:34:19 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:34:20 PM	Tube furnace set to 150
11/5/2011	2:34:50 PM	Helium valve closed
11/5/2011	2:34:50 PM	H2 valve closed
11/5/2011	2:34:50 PM	BCl3 valve closed
11/5/2011	2:34:50 PM	PH3 valve closed
11/5/2011	2:34:50 PM	SiCl4 pre valve closed
11/5/2011	2:34:50 PM	SiCl4 post valve closed
11/5/2011	2:34:50 PM	Bypass valve closed
11/5/2011	2:34:50 PM	Bubbler valve closed
11/5/2011	2:34:50 PM	Main Vac valve opened
11/5/2011	2:34:50 PM	Helium MFC set to  0.000000
11/5/2011	2:34:50 PM	H2 MFC set to  0.000000
11/5/2011	2:34:50 PM	BCl3 MFC set to  0.000000
11/5/2011	2:34:50 PM	PHl3 MFC set to  0.000000
11/5/2011	2:34:50 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:34:50 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:34:50 PM	Tube furnace set to 150
11/5/2011	2:35:20 PM	H2 valve closed
11/5/2011	2:35:20 PM	BCl3 valve closed
11/5/2011	2:35:20 PM	PH3 valve closed
11/5/2011	2:35:20 PM	SiCl4 pre valve closed
11/5/2011	2:35:20 PM	SiCl4 post valve closed
11/5/2011	2:35:20 PM	Bypass valve closed
11/5/2011	2:35:20 PM	Bubbler valve closed
11/5/2011	2:35:20 PM	Helium valve opened
11/5/2011	2:35:20 PM	Main Vac valve opened
11/5/2011	2:35:20 PM	Helium MFC set to  20.000000
11/5/2011	2:35:20 PM	H2 MFC set to  0.000000
11/5/2011	2:35:20 PM	BCl3 MFC set to  0.000000
11/5/2011	2:35:20 PM	PHl3 MFC set to  0.000000
11/5/2011	2:35:20 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:35:20 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:35:20 PM	Tube furnace set to 150
11/5/2011	2:35:50 PM	Helium valve closed
11/5/2011	2:35:50 PM	H2 valve closed
11/5/2011	2:35:50 PM	BCl3 valve closed
11/5/2011	2:35:50 PM	PH3 valve closed
11/5/2011	2:35:50 PM	SiCl4 pre valve closed
11/5/2011	2:35:50 PM	SiCl4 post valve closed
11/5/2011	2:35:50 PM	Bypass valve closed
11/5/2011	2:35:50 PM	Bubbler valve closed
11/5/2011	2:35:50 PM	Main Vac valve opened
11/5/2011	2:35:50 PM	Helium MFC set to  0.000000
11/5/2011	2:35:50 PM	H2 MFC set to  0.000000
11/5/2011	2:35:50 PM	BCl3 MFC set to  0.000000
11/5/2011	2:35:50 PM	PHl3 MFC set to  0.000000
11/5/2011	2:35:50 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:35:50 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:35:50 PM	Tube furnace set to 150
11/5/2011	2:36:20 PM	H2 valve closed
11/5/2011	2:36:20 PM	BCl3 valve closed
11/5/2011	2:36:20 PM	PH3 valve closed
11/5/2011	2:36:20 PM	SiCl4 pre valve closed
11/5/2011	2:36:20 PM	SiCl4 post valve closed
11/5/2011	2:36:20 PM	Bypass valve closed
11/5/2011	2:36:20 PM	Bubbler valve closed
11/5/2011	2:36:20 PM	Helium valve opened
11/5/2011	2:36:20 PM	Main Vac valve opened
11/5/2011	2:36:20 PM	Helium MFC set to  20.000000
11/5/2011	2:36:20 PM	H2 MFC set to  0.000000
11/5/2011	2:36:20 PM	BCl3 MFC set to  0.000000
11/5/2011	2:36:20 PM	PHl3 MFC set to  0.000000
11/5/2011	2:36:20 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:36:20 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:36:20 PM	Tube furnace set to 150
11/5/2011	2:36:50 PM	Helium valve closed
11/5/2011	2:36:50 PM	H2 valve closed
11/5/2011	2:36:50 PM	BCl3 valve closed
11/5/2011	2:36:50 PM	PH3 valve closed
11/5/2011	2:36:50 PM	SiCl4 pre valve closed
11/5/2011	2:36:50 PM	SiCl4 post valve closed
11/5/2011	2:36:50 PM	Bypass valve closed
11/5/2011	2:36:50 PM	Bubbler valve closed
11/5/2011	2:36:50 PM	Main Vac valve opened
11/5/2011	2:36:50 PM	Helium MFC set to  0.000000
11/5/2011	2:36:50 PM	H2 MFC set to  0.000000
11/5/2011	2:36:50 PM	BCl3 MFC set to  0.000000
11/5/2011	2:36:50 PM	PHl3 MFC set to  0.000000
11/5/2011	2:36:50 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:36:50 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:36:51 PM	Tube furnace set to 150
11/5/2011	2:37:21 PM	H2 valve closed
11/5/2011	2:37:21 PM	BCl3 valve closed
11/5/2011	2:37:21 PM	PH3 valve closed
11/5/2011	2:37:21 PM	SiCl4 pre valve closed
11/5/2011	2:37:21 PM	SiCl4 post valve closed
11/5/2011	2:37:21 PM	Bypass valve closed
11/5/2011	2:37:21 PM	Bubbler valve closed
11/5/2011	2:37:21 PM	Helium valve opened
11/5/2011	2:37:21 PM	Main Vac valve opened
11/5/2011	2:37:21 PM	Helium MFC set to  20.000000
11/5/2011	2:37:21 PM	H2 MFC set to  0.000000
11/5/2011	2:37:21 PM	BCl3 MFC set to  0.000000
11/5/2011	2:37:21 PM	PHl3 MFC set to  0.000000
11/5/2011	2:37:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:37:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:37:21 PM	Tube furnace set to 150
11/5/2011	2:37:51 PM	Helium valve closed
11/5/2011	2:37:51 PM	H2 valve closed
11/5/2011	2:37:51 PM	BCl3 valve closed
11/5/2011	2:37:51 PM	PH3 valve closed
11/5/2011	2:37:51 PM	SiCl4 pre valve closed
11/5/2011	2:37:51 PM	SiCl4 post valve closed
11/5/2011	2:37:51 PM	Bypass valve closed
11/5/2011	2:37:51 PM	Bubbler valve closed
11/5/2011	2:37:51 PM	Main Vac valve opened
11/5/2011	2:37:51 PM	Helium MFC set to  0.000000
11/5/2011	2:37:51 PM	H2 MFC set to  0.000000
11/5/2011	2:37:51 PM	BCl3 MFC set to  0.000000
11/5/2011	2:37:51 PM	PHl3 MFC set to  0.000000
11/5/2011	2:37:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:37:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:37:51 PM	Tube furnace set to 150
11/5/2011	2:38:21 PM	H2 valve closed
11/5/2011	2:38:21 PM	BCl3 valve closed
11/5/2011	2:38:21 PM	PH3 valve closed
11/5/2011	2:38:21 PM	SiCl4 pre valve closed
11/5/2011	2:38:21 PM	SiCl4 post valve closed
11/5/2011	2:38:21 PM	Bypass valve closed
11/5/2011	2:38:21 PM	Bubbler valve closed
11/5/2011	2:38:21 PM	Helium valve opened
11/5/2011	2:38:21 PM	Main Vac valve opened
11/5/2011	2:38:21 PM	Helium MFC set to  20.000000
11/5/2011	2:38:21 PM	H2 MFC set to  0.000000
11/5/2011	2:38:21 PM	BCl3 MFC set to  0.000000
11/5/2011	2:38:21 PM	PHl3 MFC set to  0.000000
11/5/2011	2:38:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:38:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:38:21 PM	Tube furnace set to 150
11/5/2011	2:38:51 PM	Helium valve closed
11/5/2011	2:38:51 PM	H2 valve closed
11/5/2011	2:38:51 PM	BCl3 valve closed
11/5/2011	2:38:51 PM	PH3 valve closed
11/5/2011	2:38:51 PM	SiCl4 pre valve closed
11/5/2011	2:38:51 PM	SiCl4 post valve closed
11/5/2011	2:38:51 PM	Bypass valve closed
11/5/2011	2:38:51 PM	Bubbler valve closed
11/5/2011	2:38:51 PM	Main Vac valve opened
11/5/2011	2:38:51 PM	Helium MFC set to  0.000000
11/5/2011	2:38:51 PM	H2 MFC set to  0.000000
11/5/2011	2:38:51 PM	BCl3 MFC set to  0.000000
11/5/2011	2:38:51 PM	PHl3 MFC set to  0.000000
11/5/2011	2:38:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:38:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:38:51 PM	Tube furnace set to 150
11/5/2011	2:39:21 PM	H2 valve closed
11/5/2011	2:39:21 PM	BCl3 valve closed
11/5/2011	2:39:21 PM	PH3 valve closed
11/5/2011	2:39:21 PM	SiCl4 pre valve closed
11/5/2011	2:39:21 PM	SiCl4 post valve closed
11/5/2011	2:39:21 PM	Bypass valve closed
11/5/2011	2:39:22 PM	Bubbler valve closed
11/5/2011	2:39:22 PM	Helium valve opened
11/5/2011	2:39:22 PM	Main Vac valve opened
11/5/2011	2:39:22 PM	Helium MFC set to  20.000000
11/5/2011	2:39:22 PM	H2 MFC set to  0.000000
11/5/2011	2:39:22 PM	BCl3 MFC set to  0.000000
11/5/2011	2:39:22 PM	PHl3 MFC set to  0.000000
11/5/2011	2:39:22 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:39:22 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:39:22 PM	Tube furnace set to 150
11/5/2011	2:39:52 PM	Helium valve closed
11/5/2011	2:39:52 PM	H2 valve closed
11/5/2011	2:39:52 PM	BCl3 valve closed
11/5/2011	2:39:52 PM	PH3 valve closed
11/5/2011	2:39:52 PM	SiCl4 pre valve closed
11/5/2011	2:39:52 PM	SiCl4 post valve closed
11/5/2011	2:39:52 PM	Bypass valve closed
11/5/2011	2:39:52 PM	Bubbler valve closed
11/5/2011	2:39:52 PM	Main Vac valve opened
11/5/2011	2:39:52 PM	Helium MFC set to  0.000000
11/5/2011	2:39:52 PM	H2 MFC set to  0.000000
11/5/2011	2:39:52 PM	BCl3 MFC set to  0.000000
11/5/2011	2:39:52 PM	PHl3 MFC set to  0.000000
11/5/2011	2:39:52 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:39:52 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:39:52 PM	Tube furnace set to 150
11/5/2011	2:40:22 PM	H2 valve closed
11/5/2011	2:40:22 PM	BCl3 valve closed
11/5/2011	2:40:22 PM	PH3 valve closed
11/5/2011	2:40:22 PM	SiCl4 pre valve closed
11/5/2011	2:40:22 PM	SiCl4 post valve closed
11/5/2011	2:40:22 PM	Bypass valve closed
11/5/2011	2:40:22 PM	Bubbler valve closed
11/5/2011	2:40:22 PM	Helium valve opened
11/5/2011	2:40:22 PM	Main Vac valve opened
11/5/2011	2:40:22 PM	Helium MFC set to  20.000000
11/5/2011	2:40:22 PM	H2 MFC set to  0.000000
11/5/2011	2:40:22 PM	BCl3 MFC set to  0.000000
11/5/2011	2:40:22 PM	PHl3 MFC set to  0.000000
11/5/2011	2:40:22 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:40:22 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:40:22 PM	Tube furnace set to 150
11/5/2011	2:40:52 PM	Helium valve closed
11/5/2011	2:40:52 PM	H2 valve closed
11/5/2011	2:40:52 PM	BCl3 valve closed
11/5/2011	2:40:52 PM	PH3 valve closed
11/5/2011	2:40:52 PM	SiCl4 pre valve closed
11/5/2011	2:40:52 PM	SiCl4 post valve closed
11/5/2011	2:40:52 PM	Bypass valve closed
11/5/2011	2:40:52 PM	Bubbler valve closed
11/5/2011	2:40:52 PM	Main Vac valve opened
11/5/2011	2:40:52 PM	Helium MFC set to  0.000000
11/5/2011	2:40:52 PM	H2 MFC set to  0.000000
11/5/2011	2:40:52 PM	BCl3 MFC set to  0.000000
11/5/2011	2:40:52 PM	PHl3 MFC set to  0.000000
11/5/2011	2:40:52 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:40:52 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:40:52 PM	Tube furnace set to 150
11/5/2011	2:41:22 PM	H2 valve closed
11/5/2011	2:41:22 PM	BCl3 valve closed
11/5/2011	2:41:22 PM	PH3 valve closed
11/5/2011	2:41:22 PM	SiCl4 pre valve closed
11/5/2011	2:41:22 PM	SiCl4 post valve closed
11/5/2011	2:41:22 PM	Bypass valve closed
11/5/2011	2:41:22 PM	Bubbler valve closed
11/5/2011	2:41:22 PM	Helium valve opened
11/5/2011	2:41:22 PM	Main Vac valve opened
11/5/2011	2:41:22 PM	Helium MFC set to  20.000000
11/5/2011	2:41:22 PM	H2 MFC set to  0.000000
11/5/2011	2:41:22 PM	BCl3 MFC set to  0.000000
11/5/2011	2:41:22 PM	PHl3 MFC set to  0.000000
11/5/2011	2:41:22 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:41:22 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:41:23 PM	Tube furnace set to 150
11/5/2011	2:41:53 PM	Helium valve closed
11/5/2011	2:41:53 PM	H2 valve closed
11/5/2011	2:41:53 PM	BCl3 valve closed
11/5/2011	2:41:53 PM	PH3 valve closed
11/5/2011	2:41:53 PM	SiCl4 pre valve closed
11/5/2011	2:41:53 PM	SiCl4 post valve closed
11/5/2011	2:41:53 PM	Bypass valve closed
11/5/2011	2:41:53 PM	Bubbler valve closed
11/5/2011	2:41:53 PM	Main Vac valve opened
11/5/2011	2:41:53 PM	Helium MFC set to  0.000000
11/5/2011	2:41:53 PM	H2 MFC set to  0.000000
11/5/2011	2:41:53 PM	BCl3 MFC set to  0.000000
11/5/2011	2:41:53 PM	PHl3 MFC set to  0.000000
11/5/2011	2:41:53 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:41:53 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:41:53 PM	Tube furnace set to 150
11/5/2011	2:42:23 PM	H2 valve closed
11/5/2011	2:42:23 PM	BCl3 valve closed
11/5/2011	2:42:23 PM	PH3 valve closed
11/5/2011	2:42:23 PM	SiCl4 pre valve closed
11/5/2011	2:42:23 PM	SiCl4 post valve closed
11/5/2011	2:42:23 PM	Bypass valve closed
11/5/2011	2:42:23 PM	Bubbler valve closed
11/5/2011	2:42:23 PM	Helium valve opened
11/5/2011	2:42:23 PM	Main Vac valve opened
11/5/2011	2:42:23 PM	Helium MFC set to  20.000000
11/5/2011	2:42:23 PM	H2 MFC set to  0.000000
11/5/2011	2:42:23 PM	BCl3 MFC set to  0.000000
11/5/2011	2:42:23 PM	PHl3 MFC set to  0.000000
11/5/2011	2:42:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:42:23 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:42:23 PM	Tube furnace set to 150
11/5/2011	2:42:53 PM	Helium valve closed
11/5/2011	2:42:53 PM	H2 valve closed
11/5/2011	2:42:53 PM	BCl3 valve closed
11/5/2011	2:42:53 PM	PH3 valve closed
11/5/2011	2:42:53 PM	SiCl4 pre valve closed
11/5/2011	2:42:53 PM	SiCl4 post valve closed
11/5/2011	2:42:53 PM	Bypass valve closed
11/5/2011	2:42:53 PM	Bubbler valve closed
11/5/2011	2:42:53 PM	Main Vac valve opened
11/5/2011	2:42:53 PM	Helium MFC set to  0.000000
11/5/2011	2:42:53 PM	H2 MFC set to  0.000000
11/5/2011	2:42:53 PM	BCl3 MFC set to  0.000000
11/5/2011	2:42:53 PM	PHl3 MFC set to  0.000000
11/5/2011	2:42:53 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:42:53 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:42:53 PM	Tube furnace set to 150
11/5/2011	2:43:23 PM	H2 valve closed
11/5/2011	2:43:23 PM	BCl3 valve closed
11/5/2011	2:43:23 PM	PH3 valve closed
11/5/2011	2:43:23 PM	SiCl4 pre valve closed
11/5/2011	2:43:23 PM	SiCl4 post valve closed
11/5/2011	2:43:23 PM	Bypass valve closed
11/5/2011	2:43:23 PM	Bubbler valve closed
11/5/2011	2:43:23 PM	Helium valve opened
11/5/2011	2:43:23 PM	Main Vac valve opened
11/5/2011	2:43:23 PM	Helium MFC set to  20.000000
11/5/2011	2:43:23 PM	H2 MFC set to  0.000000
11/5/2011	2:43:23 PM	BCl3 MFC set to  0.000000
11/5/2011	2:43:23 PM	PHl3 MFC set to  0.000000
11/5/2011	2:43:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:43:23 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:43:23 PM	Tube furnace set to 150
11/5/2011	2:43:53 PM	Helium valve closed
11/5/2011	2:43:53 PM	H2 valve closed
11/5/2011	2:43:53 PM	BCl3 valve closed
11/5/2011	2:43:53 PM	PH3 valve closed
11/5/2011	2:43:53 PM	SiCl4 pre valve closed
11/5/2011	2:43:53 PM	SiCl4 post valve closed
11/5/2011	2:43:53 PM	Bypass valve closed
11/5/2011	2:43:53 PM	Bubbler valve closed
11/5/2011	2:43:53 PM	Main Vac valve opened
11/5/2011	2:43:53 PM	Helium MFC set to  0.000000
11/5/2011	2:43:53 PM	H2 MFC set to  0.000000
11/5/2011	2:43:53 PM	BCl3 MFC set to  0.000000
11/5/2011	2:43:53 PM	PHl3 MFC set to  0.000000
11/5/2011	2:43:53 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:43:53 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:43:54 PM	Tube furnace set to 150
11/5/2011	2:44:24 PM	H2 valve closed
11/5/2011	2:44:24 PM	BCl3 valve closed
11/5/2011	2:44:24 PM	PH3 valve closed
11/5/2011	2:44:24 PM	SiCl4 pre valve closed
11/5/2011	2:44:24 PM	SiCl4 post valve closed
11/5/2011	2:44:24 PM	Bypass valve closed
11/5/2011	2:44:24 PM	Bubbler valve closed
11/5/2011	2:44:24 PM	Helium valve opened
11/5/2011	2:44:24 PM	Main Vac valve opened
11/5/2011	2:44:24 PM	Helium MFC set to  20.000000
11/5/2011	2:44:24 PM	H2 MFC set to  0.000000
11/5/2011	2:44:24 PM	BCl3 MFC set to  0.000000
11/5/2011	2:44:24 PM	PHl3 MFC set to  0.000000
11/5/2011	2:44:24 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:44:24 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:44:24 PM	Tube furnace set to 150
11/5/2011	2:44:54 PM	Helium valve closed
11/5/2011	2:44:54 PM	H2 valve closed
11/5/2011	2:44:54 PM	BCl3 valve closed
11/5/2011	2:44:54 PM	PH3 valve closed
11/5/2011	2:44:54 PM	SiCl4 pre valve closed
11/5/2011	2:44:54 PM	SiCl4 post valve closed
11/5/2011	2:44:54 PM	Bypass valve closed
11/5/2011	2:44:54 PM	Bubbler valve closed
11/5/2011	2:44:54 PM	Main Vac valve opened
11/5/2011	2:44:54 PM	Helium MFC set to  0.000000
11/5/2011	2:44:54 PM	H2 MFC set to  0.000000
11/5/2011	2:44:54 PM	BCl3 MFC set to  0.000000
11/5/2011	2:44:54 PM	PHl3 MFC set to  0.000000
11/5/2011	2:44:54 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:44:54 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:44:54 PM	Tube furnace set to 150
11/5/2011	2:45:24 PM	H2 valve closed
11/5/2011	2:45:24 PM	BCl3 valve closed
11/5/2011	2:45:24 PM	PH3 valve closed
11/5/2011	2:45:24 PM	SiCl4 pre valve closed
11/5/2011	2:45:24 PM	SiCl4 post valve closed
11/5/2011	2:45:24 PM	Bypass valve closed
11/5/2011	2:45:24 PM	Bubbler valve closed
11/5/2011	2:45:24 PM	Helium valve opened
11/5/2011	2:45:24 PM	Main Vac valve opened
11/5/2011	2:45:24 PM	Helium MFC set to  20.000000
11/5/2011	2:45:24 PM	H2 MFC set to  0.000000
11/5/2011	2:45:24 PM	BCl3 MFC set to  0.000000
11/5/2011	2:45:24 PM	PHl3 MFC set to  0.000000
11/5/2011	2:45:24 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:45:24 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:45:24 PM	Tube furnace set to 150
11/5/2011	2:45:54 PM	Helium valve closed
11/5/2011	2:45:54 PM	H2 valve closed
11/5/2011	2:45:54 PM	BCl3 valve closed
11/5/2011	2:45:54 PM	PH3 valve closed
11/5/2011	2:45:54 PM	SiCl4 pre valve closed
11/5/2011	2:45:54 PM	SiCl4 post valve closed
11/5/2011	2:45:54 PM	Bypass valve closed
11/5/2011	2:45:54 PM	Bubbler valve closed
11/5/2011	2:45:54 PM	Main Vac valve opened
11/5/2011	2:45:54 PM	Helium MFC set to  0.000000
11/5/2011	2:45:54 PM	H2 MFC set to  0.000000
11/5/2011	2:45:54 PM	BCl3 MFC set to  0.000000
11/5/2011	2:45:54 PM	PHl3 MFC set to  0.000000
11/5/2011	2:45:54 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:45:54 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:45:54 PM	Tube furnace set to 150
11/5/2011	2:46:24 PM	H2 valve closed
11/5/2011	2:46:25 PM	BCl3 valve closed
11/5/2011	2:46:25 PM	PH3 valve closed
11/5/2011	2:46:25 PM	SiCl4 pre valve closed
11/5/2011	2:46:25 PM	SiCl4 post valve closed
11/5/2011	2:46:25 PM	Bypass valve closed
11/5/2011	2:46:25 PM	Bubbler valve closed
11/5/2011	2:46:25 PM	Helium valve opened
11/5/2011	2:46:25 PM	Main Vac valve opened
11/5/2011	2:46:25 PM	Helium MFC set to  20.000000
11/5/2011	2:46:25 PM	H2 MFC set to  0.000000
11/5/2011	2:46:25 PM	BCl3 MFC set to  0.000000
11/5/2011	2:46:25 PM	PHl3 MFC set to  0.000000
11/5/2011	2:46:25 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:46:25 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:46:25 PM	Tube furnace set to 150
11/5/2011	2:46:55 PM	Helium valve closed
11/5/2011	2:46:55 PM	H2 valve closed
11/5/2011	2:46:55 PM	BCl3 valve closed
11/5/2011	2:46:55 PM	PH3 valve closed
11/5/2011	2:46:55 PM	SiCl4 pre valve closed
11/5/2011	2:46:55 PM	SiCl4 post valve closed
11/5/2011	2:46:55 PM	Bypass valve closed
11/5/2011	2:46:55 PM	Bubbler valve closed
11/5/2011	2:46:55 PM	Main Vac valve opened
11/5/2011	2:46:55 PM	Helium MFC set to  0.000000
11/5/2011	2:46:55 PM	H2 MFC set to  0.000000
11/5/2011	2:46:55 PM	BCl3 MFC set to  0.000000
11/5/2011	2:46:55 PM	PHl3 MFC set to  0.000000
11/5/2011	2:46:55 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:46:55 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:46:55 PM	Tube furnace set to 180
11/5/2011	2:47:00 PM	Run finished at 2:47 PM
11/5/2011	2:48:31 PM	Recipe started at 2:48 PM
11/5/2011	2:48:31 PM	Helium valve closed
11/5/2011	2:48:31 PM	H2 valve closed
11/5/2011	2:48:31 PM	BCl3 valve closed
11/5/2011	2:48:31 PM	PH3 valve closed
11/5/2011	2:48:31 PM	SiCl4 pre valve closed
11/5/2011	2:48:31 PM	SiCl4 post valve closed
11/5/2011	2:48:31 PM	Main Vac valve closed
11/5/2011	2:48:31 PM	Bubbler valve closed
11/5/2011	2:48:31 PM	Bypass valve opened
11/5/2011	2:48:31 PM	Helium MFC set to  0.000000
11/5/2011	2:48:31 PM	H2 MFC set to  0.000000
11/5/2011	2:48:31 PM	BCl3 MFC set to  0.000000
11/5/2011	2:48:31 PM	PHl3 MFC set to  0.000000
11/5/2011	2:48:31 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:48:31 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:48:31 PM	Tube furnace set to 180
11/5/2011	2:48:31 PM	Helium valve closed
11/5/2011	2:48:31 PM	H2 valve closed
11/5/2011	2:48:31 PM	BCl3 valve closed
11/5/2011	2:48:31 PM	PH3 valve closed
11/5/2011	2:48:31 PM	SiCl4 pre valve closed
11/5/2011	2:48:32 PM	SiCl4 post valve closed
11/5/2011	2:48:32 PM	Main Vac valve closed
11/5/2011	2:48:32 PM	Bubbler valve closed
11/5/2011	2:48:32 PM	Bypass valve opened
11/5/2011	2:48:32 PM	Helium MFC set to  0.000000
11/5/2011	2:48:32 PM	H2 MFC set to  0.000000
11/5/2011	2:48:32 PM	BCl3 MFC set to  0.000000
11/5/2011	2:48:32 PM	PHl3 MFC set to  0.000000
11/5/2011	2:48:32 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:48:32 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:48:32 PM	Tube furnace set to 150
11/5/2011	2:49:02 PM	Helium valve closed
11/5/2011	2:49:02 PM	H2 valve closed
11/5/2011	2:49:02 PM	BCl3 valve closed
11/5/2011	2:49:02 PM	PH3 valve closed
11/5/2011	2:49:02 PM	SiCl4 pre valve closed
11/5/2011	2:49:02 PM	SiCl4 post valve closed
11/5/2011	2:49:02 PM	Bypass valve closed
11/5/2011	2:49:02 PM	Bubbler valve closed
11/5/2011	2:49:02 PM	Main Vac valve opened
11/5/2011	2:49:02 PM	Helium MFC set to  0.000000
11/5/2011	2:49:02 PM	H2 MFC set to  0.000000
11/5/2011	2:49:02 PM	BCl3 MFC set to  0.000000
11/5/2011	2:49:02 PM	PHl3 MFC set to  0.000000
11/5/2011	2:49:02 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:49:02 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:49:02 PM	Tube furnace set to 180
11/5/2011	2:49:32 PM	H2 valve closed
11/5/2011	2:49:32 PM	BCl3 valve closed
11/5/2011	2:49:32 PM	PH3 valve closed
11/5/2011	2:49:32 PM	SiCl4 pre valve closed
11/5/2011	2:49:32 PM	SiCl4 post valve closed
11/5/2011	2:49:32 PM	Bypass valve closed
11/5/2011	2:49:32 PM	Bubbler valve closed
11/5/2011	2:49:32 PM	Helium valve opened
11/5/2011	2:49:32 PM	Main Vac valve opened
11/5/2011	2:49:32 PM	Helium MFC set to  20.000000
11/5/2011	2:49:32 PM	H2 MFC set to  0.000000
11/5/2011	2:49:32 PM	BCl3 MFC set to  0.000000
11/5/2011	2:49:32 PM	PHl3 MFC set to  0.000000
11/5/2011	2:49:32 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:49:32 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:49:32 PM	Tube furnace set to 180
11/5/2011	2:50:02 PM	Helium valve closed
11/5/2011	2:50:02 PM	H2 valve closed
11/5/2011	2:50:02 PM	BCl3 valve closed
11/5/2011	2:50:02 PM	PH3 valve closed
11/5/2011	2:50:02 PM	SiCl4 pre valve closed
11/5/2011	2:50:02 PM	SiCl4 post valve closed
11/5/2011	2:50:02 PM	Bypass valve closed
11/5/2011	2:50:02 PM	Bubbler valve closed
11/5/2011	2:50:02 PM	Main Vac valve opened
11/5/2011	2:50:02 PM	Helium MFC set to  0.000000
11/5/2011	2:50:02 PM	H2 MFC set to  0.000000
11/5/2011	2:50:02 PM	BCl3 MFC set to  0.000000
11/5/2011	2:50:02 PM	PHl3 MFC set to  0.000000
11/5/2011	2:50:02 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:50:02 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:50:02 PM	Tube furnace set to 150
11/5/2011	2:50:32 PM	H2 valve closed
11/5/2011	2:50:32 PM	BCl3 valve closed
11/5/2011	2:50:32 PM	PH3 valve closed
11/5/2011	2:50:32 PM	SiCl4 pre valve closed
11/5/2011	2:50:32 PM	SiCl4 post valve closed
11/5/2011	2:50:32 PM	Bypass valve closed
11/5/2011	2:50:32 PM	Bubbler valve closed
11/5/2011	2:50:32 PM	Helium valve opened
11/5/2011	2:50:32 PM	Main Vac valve opened
11/5/2011	2:50:32 PM	Helium MFC set to  20.000000
11/5/2011	2:50:32 PM	H2 MFC set to  0.000000
11/5/2011	2:50:32 PM	BCl3 MFC set to  0.000000
11/5/2011	2:50:32 PM	PHl3 MFC set to  0.000000
11/5/2011	2:50:32 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:50:32 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:50:32 PM	Tube furnace set to 180
11/5/2011	2:51:02 PM	Helium valve closed
11/5/2011	2:51:02 PM	H2 valve closed
11/5/2011	2:51:02 PM	BCl3 valve closed
11/5/2011	2:51:02 PM	PH3 valve closed
11/5/2011	2:51:02 PM	SiCl4 pre valve closed
11/5/2011	2:51:02 PM	SiCl4 post valve closed
11/5/2011	2:51:02 PM	Bypass valve closed
11/5/2011	2:51:02 PM	Bubbler valve closed
11/5/2011	2:51:02 PM	Main Vac valve opened
11/5/2011	2:51:02 PM	Helium MFC set to  0.000000
11/5/2011	2:51:02 PM	H2 MFC set to  0.000000
11/5/2011	2:51:02 PM	BCl3 MFC set to  0.000000
11/5/2011	2:51:02 PM	PHl3 MFC set to  0.000000
11/5/2011	2:51:02 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:51:02 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:51:03 PM	Tube furnace set to 150
11/5/2011	2:51:33 PM	H2 valve closed
11/5/2011	2:51:33 PM	BCl3 valve closed
11/5/2011	2:51:33 PM	PH3 valve closed
11/5/2011	2:51:33 PM	SiCl4 pre valve closed
11/5/2011	2:51:33 PM	SiCl4 post valve closed
11/5/2011	2:51:33 PM	Bypass valve closed
11/5/2011	2:51:33 PM	Bubbler valve closed
11/5/2011	2:51:33 PM	Helium valve opened
11/5/2011	2:51:33 PM	Main Vac valve opened
11/5/2011	2:51:33 PM	Helium MFC set to  20.000000
11/5/2011	2:51:33 PM	H2 MFC set to  0.000000
11/5/2011	2:51:33 PM	BCl3 MFC set to  0.000000
11/5/2011	2:51:33 PM	PHl3 MFC set to  0.000000
11/5/2011	2:51:33 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:51:33 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:51:33 PM	Tube furnace set to 150
11/5/2011	2:52:03 PM	Helium valve closed
11/5/2011	2:52:03 PM	H2 valve closed
11/5/2011	2:52:03 PM	BCl3 valve closed
11/5/2011	2:52:03 PM	PH3 valve closed
11/5/2011	2:52:03 PM	SiCl4 pre valve closed
11/5/2011	2:52:03 PM	SiCl4 post valve closed
11/5/2011	2:52:03 PM	Bypass valve closed
11/5/2011	2:52:03 PM	Bubbler valve closed
11/5/2011	2:52:03 PM	Main Vac valve opened
11/5/2011	2:52:03 PM	Helium MFC set to  0.000000
11/5/2011	2:52:03 PM	H2 MFC set to  0.000000
11/5/2011	2:52:03 PM	BCl3 MFC set to  0.000000
11/5/2011	2:52:03 PM	PHl3 MFC set to  0.000000
11/5/2011	2:52:03 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:52:03 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:52:03 PM	Tube furnace set to 150
11/5/2011	2:52:33 PM	H2 valve closed
11/5/2011	2:52:33 PM	BCl3 valve closed
11/5/2011	2:52:33 PM	PH3 valve closed
11/5/2011	2:52:33 PM	SiCl4 pre valve closed
11/5/2011	2:52:33 PM	SiCl4 post valve closed
11/5/2011	2:52:33 PM	Bypass valve closed
11/5/2011	2:52:33 PM	Bubbler valve closed
11/5/2011	2:52:33 PM	Helium valve opened
11/5/2011	2:52:33 PM	Main Vac valve opened
11/5/2011	2:52:33 PM	Helium MFC set to  20.000000
11/5/2011	2:52:33 PM	H2 MFC set to  0.000000
11/5/2011	2:52:33 PM	BCl3 MFC set to  0.000000
11/5/2011	2:52:33 PM	PHl3 MFC set to  0.000000
11/5/2011	2:52:33 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:52:33 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:52:33 PM	Tube furnace set to 180
11/5/2011	2:53:03 PM	Helium valve closed
11/5/2011	2:53:03 PM	H2 valve closed
11/5/2011	2:53:03 PM	BCl3 valve closed
11/5/2011	2:53:03 PM	PH3 valve closed
11/5/2011	2:53:03 PM	SiCl4 pre valve closed
11/5/2011	2:53:03 PM	SiCl4 post valve closed
11/5/2011	2:53:03 PM	Bypass valve closed
11/5/2011	2:53:03 PM	Bubbler valve closed
11/5/2011	2:53:03 PM	Main Vac valve opened
11/5/2011	2:53:03 PM	Helium MFC set to  0.000000
11/5/2011	2:53:03 PM	H2 MFC set to  0.000000
11/5/2011	2:53:03 PM	BCl3 MFC set to  0.000000
11/5/2011	2:53:03 PM	PHl3 MFC set to  0.000000
11/5/2011	2:53:03 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:53:03 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:53:03 PM	Tube furnace set to 150
11/5/2011	2:53:33 PM	H2 valve closed
11/5/2011	2:53:33 PM	BCl3 valve closed
11/5/2011	2:53:33 PM	PH3 valve closed
11/5/2011	2:53:33 PM	SiCl4 pre valve closed
11/5/2011	2:53:33 PM	SiCl4 post valve closed
11/5/2011	2:53:33 PM	Bypass valve closed
11/5/2011	2:53:33 PM	Bubbler valve closed
11/5/2011	2:53:33 PM	Helium valve opened
11/5/2011	2:53:33 PM	Main Vac valve opened
11/5/2011	2:53:33 PM	Helium MFC set to  20.000000
11/5/2011	2:53:33 PM	H2 MFC set to  0.000000
11/5/2011	2:53:33 PM	BCl3 MFC set to  0.000000
11/5/2011	2:53:33 PM	PHl3 MFC set to  0.000000
11/5/2011	2:53:33 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:53:33 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:53:34 PM	Tube furnace set to 150
11/5/2011	2:54:04 PM	Helium valve closed
11/5/2011	2:54:04 PM	H2 valve closed
11/5/2011	2:54:04 PM	BCl3 valve closed
11/5/2011	2:54:04 PM	PH3 valve closed
11/5/2011	2:54:04 PM	SiCl4 pre valve closed
11/5/2011	2:54:04 PM	SiCl4 post valve closed
11/5/2011	2:54:04 PM	Bypass valve closed
11/5/2011	2:54:04 PM	Bubbler valve closed
11/5/2011	2:54:04 PM	Main Vac valve opened
11/5/2011	2:54:04 PM	Helium MFC set to  0.000000
11/5/2011	2:54:04 PM	H2 MFC set to  0.000000
11/5/2011	2:54:04 PM	BCl3 MFC set to  0.000000
11/5/2011	2:54:04 PM	PHl3 MFC set to  0.000000
11/5/2011	2:54:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:54:04 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:54:04 PM	Tube furnace set to 150
11/5/2011	2:54:34 PM	H2 valve closed
11/5/2011	2:54:34 PM	BCl3 valve closed
11/5/2011	2:54:34 PM	PH3 valve closed
11/5/2011	2:54:34 PM	SiCl4 pre valve closed
11/5/2011	2:54:34 PM	SiCl4 post valve closed
11/5/2011	2:54:34 PM	Bypass valve closed
11/5/2011	2:54:34 PM	Bubbler valve closed
11/5/2011	2:54:34 PM	Helium valve opened
11/5/2011	2:54:34 PM	Main Vac valve opened
11/5/2011	2:54:34 PM	Helium MFC set to  20.000000
11/5/2011	2:54:34 PM	H2 MFC set to  0.000000
11/5/2011	2:54:34 PM	BCl3 MFC set to  0.000000
11/5/2011	2:54:34 PM	PHl3 MFC set to  0.000000
11/5/2011	2:54:34 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:54:34 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:54:34 PM	Tube furnace set to 150
11/5/2011	2:55:04 PM	Helium valve closed
11/5/2011	2:55:04 PM	H2 valve closed
11/5/2011	2:55:04 PM	BCl3 valve closed
11/5/2011	2:55:04 PM	PH3 valve closed
11/5/2011	2:55:04 PM	SiCl4 pre valve closed
11/5/2011	2:55:04 PM	SiCl4 post valve closed
11/5/2011	2:55:04 PM	Bypass valve closed
11/5/2011	2:55:04 PM	Bubbler valve closed
11/5/2011	2:55:04 PM	Main Vac valve opened
11/5/2011	2:55:04 PM	Helium MFC set to  0.000000
11/5/2011	2:55:04 PM	H2 MFC set to  0.000000
11/5/2011	2:55:04 PM	BCl3 MFC set to  0.000000
11/5/2011	2:55:04 PM	PHl3 MFC set to  0.000000
11/5/2011	2:55:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:55:04 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:55:04 PM	Tube furnace set to 150
11/5/2011	2:55:34 PM	H2 valve closed
11/5/2011	2:55:34 PM	BCl3 valve closed
11/5/2011	2:55:34 PM	PH3 valve closed
11/5/2011	2:55:34 PM	SiCl4 pre valve closed
11/5/2011	2:55:34 PM	SiCl4 post valve closed
11/5/2011	2:55:34 PM	Bypass valve closed
11/5/2011	2:55:34 PM	Bubbler valve closed
11/5/2011	2:55:34 PM	Helium valve opened
11/5/2011	2:55:34 PM	Main Vac valve opened
11/5/2011	2:55:34 PM	Helium MFC set to  20.000000
11/5/2011	2:55:34 PM	H2 MFC set to  0.000000
11/5/2011	2:55:34 PM	BCl3 MFC set to  0.000000
11/5/2011	2:55:34 PM	PHl3 MFC set to  0.000000
11/5/2011	2:55:34 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:55:34 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:55:35 PM	Tube furnace set to 150
11/5/2011	2:56:05 PM	Helium valve closed
11/5/2011	2:56:05 PM	H2 valve closed
11/5/2011	2:56:05 PM	BCl3 valve closed
11/5/2011	2:56:05 PM	PH3 valve closed
11/5/2011	2:56:05 PM	SiCl4 pre valve closed
11/5/2011	2:56:05 PM	SiCl4 post valve closed
11/5/2011	2:56:05 PM	Bypass valve closed
11/5/2011	2:56:05 PM	Bubbler valve closed
11/5/2011	2:56:05 PM	Main Vac valve opened
11/5/2011	2:56:05 PM	Helium MFC set to  0.000000
11/5/2011	2:56:05 PM	H2 MFC set to  0.000000
11/5/2011	2:56:05 PM	BCl3 MFC set to  0.000000
11/5/2011	2:56:05 PM	PHl3 MFC set to  0.000000
11/5/2011	2:56:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:56:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:56:05 PM	Tube furnace set to 150
11/5/2011	2:56:35 PM	H2 valve closed
11/5/2011	2:56:35 PM	BCl3 valve closed
11/5/2011	2:56:35 PM	PH3 valve closed
11/5/2011	2:56:35 PM	SiCl4 pre valve closed
11/5/2011	2:56:35 PM	SiCl4 post valve closed
11/5/2011	2:56:35 PM	Bypass valve closed
11/5/2011	2:56:35 PM	Bubbler valve closed
11/5/2011	2:56:35 PM	Helium valve opened
11/5/2011	2:56:35 PM	Main Vac valve opened
11/5/2011	2:56:35 PM	Helium MFC set to  20.000000
11/5/2011	2:56:35 PM	H2 MFC set to  0.000000
11/5/2011	2:56:35 PM	BCl3 MFC set to  0.000000
11/5/2011	2:56:35 PM	PHl3 MFC set to  0.000000
11/5/2011	2:56:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:56:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:56:35 PM	Tube furnace set to 150
11/5/2011	2:57:05 PM	Helium valve closed
11/5/2011	2:57:05 PM	H2 valve closed
11/5/2011	2:57:05 PM	BCl3 valve closed
11/5/2011	2:57:05 PM	PH3 valve closed
11/5/2011	2:57:05 PM	SiCl4 pre valve closed
11/5/2011	2:57:05 PM	SiCl4 post valve closed
11/5/2011	2:57:05 PM	Bypass valve closed
11/5/2011	2:57:05 PM	Bubbler valve closed
11/5/2011	2:57:05 PM	Main Vac valve opened
11/5/2011	2:57:05 PM	Helium MFC set to  0.000000
11/5/2011	2:57:05 PM	H2 MFC set to  0.000000
11/5/2011	2:57:05 PM	BCl3 MFC set to  0.000000
11/5/2011	2:57:05 PM	PHl3 MFC set to  0.000000
11/5/2011	2:57:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:57:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:57:05 PM	Tube furnace set to 150
11/5/2011	2:57:35 PM	H2 valve closed
11/5/2011	2:57:35 PM	BCl3 valve closed
11/5/2011	2:57:35 PM	PH3 valve closed
11/5/2011	2:57:35 PM	SiCl4 pre valve closed
11/5/2011	2:57:35 PM	SiCl4 post valve closed
11/5/2011	2:57:35 PM	Bypass valve closed
11/5/2011	2:57:35 PM	Bubbler valve closed
11/5/2011	2:57:35 PM	Helium valve opened
11/5/2011	2:57:35 PM	Main Vac valve opened
11/5/2011	2:57:35 PM	Helium MFC set to  20.000000
11/5/2011	2:57:35 PM	H2 MFC set to  0.000000
11/5/2011	2:57:35 PM	BCl3 MFC set to  0.000000
11/5/2011	2:57:35 PM	PHl3 MFC set to  0.000000
11/5/2011	2:57:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:57:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:57:35 PM	Tube furnace set to 150
11/5/2011	2:58:05 PM	Helium valve closed
11/5/2011	2:58:05 PM	H2 valve closed
11/5/2011	2:58:05 PM	BCl3 valve closed
11/5/2011	2:58:05 PM	PH3 valve closed
11/5/2011	2:58:05 PM	SiCl4 pre valve closed
11/5/2011	2:58:05 PM	SiCl4 post valve closed
11/5/2011	2:58:05 PM	Bypass valve closed
11/5/2011	2:58:05 PM	Bubbler valve closed
11/5/2011	2:58:05 PM	Main Vac valve opened
11/5/2011	2:58:05 PM	Helium MFC set to  0.000000
11/5/2011	2:58:05 PM	H2 MFC set to  0.000000
11/5/2011	2:58:05 PM	BCl3 MFC set to  0.000000
11/5/2011	2:58:05 PM	PHl3 MFC set to  0.000000
11/5/2011	2:58:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:58:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:58:06 PM	Tube furnace set to 150
11/5/2011	2:58:36 PM	H2 valve closed
11/5/2011	2:58:36 PM	BCl3 valve closed
11/5/2011	2:58:36 PM	PH3 valve closed
11/5/2011	2:58:36 PM	SiCl4 pre valve closed
11/5/2011	2:58:36 PM	SiCl4 post valve closed
11/5/2011	2:58:36 PM	Bypass valve closed
11/5/2011	2:58:36 PM	Bubbler valve closed
11/5/2011	2:58:36 PM	Helium valve opened
11/5/2011	2:58:36 PM	Main Vac valve opened
11/5/2011	2:58:36 PM	Helium MFC set to  20.000000
11/5/2011	2:58:36 PM	H2 MFC set to  0.000000
11/5/2011	2:58:36 PM	BCl3 MFC set to  0.000000
11/5/2011	2:58:36 PM	PHl3 MFC set to  0.000000
11/5/2011	2:58:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:58:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:58:36 PM	Tube furnace set to 150
11/5/2011	2:59:06 PM	Helium valve closed
11/5/2011	2:59:06 PM	H2 valve closed
11/5/2011	2:59:06 PM	BCl3 valve closed
11/5/2011	2:59:06 PM	PH3 valve closed
11/5/2011	2:59:06 PM	SiCl4 pre valve closed
11/5/2011	2:59:06 PM	SiCl4 post valve closed
11/5/2011	2:59:06 PM	Bypass valve closed
11/5/2011	2:59:06 PM	Bubbler valve closed
11/5/2011	2:59:06 PM	Main Vac valve opened
11/5/2011	2:59:06 PM	Helium MFC set to  0.000000
11/5/2011	2:59:06 PM	H2 MFC set to  0.000000
11/5/2011	2:59:06 PM	BCl3 MFC set to  0.000000
11/5/2011	2:59:06 PM	PHl3 MFC set to  0.000000
11/5/2011	2:59:06 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:59:06 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:59:06 PM	Tube furnace set to 150
11/5/2011	2:59:36 PM	H2 valve closed
11/5/2011	2:59:36 PM	BCl3 valve closed
11/5/2011	2:59:36 PM	PH3 valve closed
11/5/2011	2:59:36 PM	SiCl4 pre valve closed
11/5/2011	2:59:36 PM	SiCl4 post valve closed
11/5/2011	2:59:36 PM	Bypass valve closed
11/5/2011	2:59:36 PM	Bubbler valve closed
11/5/2011	2:59:36 PM	Helium valve opened
11/5/2011	2:59:36 PM	Main Vac valve opened
11/5/2011	2:59:36 PM	Helium MFC set to  20.000000
11/5/2011	2:59:36 PM	H2 MFC set to  0.000000
11/5/2011	2:59:36 PM	BCl3 MFC set to  0.000000
11/5/2011	2:59:36 PM	PHl3 MFC set to  0.000000
11/5/2011	2:59:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	2:59:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	2:59:36 PM	Tube furnace set to 150
11/5/2011	3:00:06 PM	Helium valve closed
11/5/2011	3:00:06 PM	H2 valve closed
11/5/2011	3:00:06 PM	BCl3 valve closed
11/5/2011	3:00:06 PM	PH3 valve closed
11/5/2011	3:00:06 PM	SiCl4 pre valve closed
11/5/2011	3:00:06 PM	SiCl4 post valve closed
11/5/2011	3:00:06 PM	Bypass valve closed
11/5/2011	3:00:06 PM	Bubbler valve closed
11/5/2011	3:00:06 PM	Main Vac valve opened
11/5/2011	3:00:06 PM	Helium MFC set to  0.000000
11/5/2011	3:00:06 PM	H2 MFC set to  0.000000
11/5/2011	3:00:06 PM	BCl3 MFC set to  0.000000
11/5/2011	3:00:06 PM	PHl3 MFC set to  0.000000
11/5/2011	3:00:06 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:00:06 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:00:06 PM	Tube furnace set to 150
11/5/2011	3:00:36 PM	H2 valve closed
11/5/2011	3:00:36 PM	BCl3 valve closed
11/5/2011	3:00:36 PM	PH3 valve closed
11/5/2011	3:00:36 PM	SiCl4 pre valve closed
11/5/2011	3:00:36 PM	SiCl4 post valve closed
11/5/2011	3:00:36 PM	Bypass valve closed
11/5/2011	3:00:36 PM	Bubbler valve closed
11/5/2011	3:00:36 PM	Helium valve opened
11/5/2011	3:00:36 PM	Main Vac valve opened
11/5/2011	3:00:36 PM	Helium MFC set to  20.000000
11/5/2011	3:00:36 PM	H2 MFC set to  0.000000
11/5/2011	3:00:36 PM	BCl3 MFC set to  0.000000
11/5/2011	3:00:36 PM	PHl3 MFC set to  0.000000
11/5/2011	3:00:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:00:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:00:37 PM	Tube furnace set to 150
11/5/2011	3:01:07 PM	Helium valve closed
11/5/2011	3:01:07 PM	H2 valve closed
11/5/2011	3:01:07 PM	BCl3 valve closed
11/5/2011	3:01:07 PM	PH3 valve closed
11/5/2011	3:01:07 PM	SiCl4 pre valve closed
11/5/2011	3:01:07 PM	SiCl4 post valve closed
11/5/2011	3:01:07 PM	Bypass valve closed
11/5/2011	3:01:07 PM	Bubbler valve closed
11/5/2011	3:01:07 PM	Main Vac valve opened
11/5/2011	3:01:07 PM	Helium MFC set to  0.000000
11/5/2011	3:01:07 PM	H2 MFC set to  0.000000
11/5/2011	3:01:07 PM	BCl3 MFC set to  0.000000
11/5/2011	3:01:07 PM	PHl3 MFC set to  0.000000
11/5/2011	3:01:07 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:01:07 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:01:07 PM	Tube furnace set to 150
11/5/2011	3:01:37 PM	H2 valve closed
11/5/2011	3:01:37 PM	BCl3 valve closed
11/5/2011	3:01:37 PM	PH3 valve closed
11/5/2011	3:01:37 PM	SiCl4 pre valve closed
11/5/2011	3:01:37 PM	SiCl4 post valve closed
11/5/2011	3:01:37 PM	Bypass valve closed
11/5/2011	3:01:37 PM	Bubbler valve closed
11/5/2011	3:01:37 PM	Helium valve opened
11/5/2011	3:01:37 PM	Main Vac valve opened
11/5/2011	3:01:37 PM	Helium MFC set to  20.000000
11/5/2011	3:01:37 PM	H2 MFC set to  0.000000
11/5/2011	3:01:37 PM	BCl3 MFC set to  0.000000
11/5/2011	3:01:37 PM	PHl3 MFC set to  0.000000
11/5/2011	3:01:37 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:01:37 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:01:37 PM	Tube furnace set to 150
11/5/2011	3:02:07 PM	Helium valve closed
11/5/2011	3:02:07 PM	H2 valve closed
11/5/2011	3:02:07 PM	BCl3 valve closed
11/5/2011	3:02:07 PM	PH3 valve closed
11/5/2011	3:02:07 PM	SiCl4 pre valve closed
11/5/2011	3:02:07 PM	SiCl4 post valve closed
11/5/2011	3:02:07 PM	Bypass valve closed
11/5/2011	3:02:07 PM	Bubbler valve closed
11/5/2011	3:02:07 PM	Main Vac valve opened
11/5/2011	3:02:07 PM	Helium MFC set to  0.000000
11/5/2011	3:02:07 PM	H2 MFC set to  0.000000
11/5/2011	3:02:07 PM	BCl3 MFC set to  0.000000
11/5/2011	3:02:07 PM	PHl3 MFC set to  0.000000
11/5/2011	3:02:07 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:02:07 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:02:07 PM	Tube furnace set to 150
11/5/2011	3:02:37 PM	H2 valve closed
11/5/2011	3:02:37 PM	BCl3 valve closed
11/5/2011	3:02:37 PM	PH3 valve closed
11/5/2011	3:02:37 PM	SiCl4 pre valve closed
11/5/2011	3:02:37 PM	SiCl4 post valve closed
11/5/2011	3:02:37 PM	Bypass valve closed
11/5/2011	3:02:37 PM	Bubbler valve closed
11/5/2011	3:02:37 PM	Helium valve opened
11/5/2011	3:02:37 PM	Main Vac valve opened
11/5/2011	3:02:37 PM	Helium MFC set to  20.000000
11/5/2011	3:02:37 PM	H2 MFC set to  0.000000
11/5/2011	3:02:37 PM	BCl3 MFC set to  0.000000
11/5/2011	3:02:37 PM	PHl3 MFC set to  0.000000
11/5/2011	3:02:37 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:02:37 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:02:38 PM	Tube furnace set to 150
11/5/2011	3:03:08 PM	Helium valve closed
11/5/2011	3:03:08 PM	H2 valve closed
11/5/2011	3:03:08 PM	BCl3 valve closed
11/5/2011	3:03:08 PM	PH3 valve closed
11/5/2011	3:03:08 PM	SiCl4 pre valve closed
11/5/2011	3:03:08 PM	SiCl4 post valve closed
11/5/2011	3:03:08 PM	Bypass valve closed
11/5/2011	3:03:08 PM	Bubbler valve closed
11/5/2011	3:03:08 PM	Main Vac valve opened
11/5/2011	3:03:08 PM	Helium MFC set to  0.000000
11/5/2011	3:03:08 PM	H2 MFC set to  0.000000
11/5/2011	3:03:08 PM	BCl3 MFC set to  0.000000
11/5/2011	3:03:08 PM	PHl3 MFC set to  0.000000
11/5/2011	3:03:08 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:03:08 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:03:08 PM	Tube furnace set to 150
11/5/2011	3:03:38 PM	H2 valve closed
11/5/2011	3:03:38 PM	BCl3 valve closed
11/5/2011	3:03:38 PM	PH3 valve closed
11/5/2011	3:03:38 PM	SiCl4 pre valve closed
11/5/2011	3:03:38 PM	SiCl4 post valve closed
11/5/2011	3:03:38 PM	Bypass valve closed
11/5/2011	3:03:38 PM	Bubbler valve closed
11/5/2011	3:03:38 PM	Helium valve opened
11/5/2011	3:03:38 PM	Main Vac valve opened
11/5/2011	3:03:38 PM	Helium MFC set to  20.000000
11/5/2011	3:03:38 PM	H2 MFC set to  0.000000
11/5/2011	3:03:38 PM	BCl3 MFC set to  0.000000
11/5/2011	3:03:38 PM	PHl3 MFC set to  0.000000
11/5/2011	3:03:38 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:03:38 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:03:38 PM	Tube furnace set to 150
11/5/2011	3:04:08 PM	Helium valve closed
11/5/2011	3:04:08 PM	H2 valve closed
11/5/2011	3:04:08 PM	BCl3 valve closed
11/5/2011	3:04:08 PM	PH3 valve closed
11/5/2011	3:04:08 PM	SiCl4 pre valve closed
11/5/2011	3:04:08 PM	SiCl4 post valve closed
11/5/2011	3:04:08 PM	Bypass valve closed
11/5/2011	3:04:08 PM	Bubbler valve closed
11/5/2011	3:04:08 PM	Main Vac valve opened
11/5/2011	3:04:08 PM	Helium MFC set to  0.000000
11/5/2011	3:04:08 PM	H2 MFC set to  0.000000
11/5/2011	3:04:08 PM	BCl3 MFC set to  0.000000
11/5/2011	3:04:08 PM	PHl3 MFC set to  0.000000
11/5/2011	3:04:08 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:04:08 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:04:08 PM	Tube furnace set to 150
11/5/2011	3:04:38 PM	H2 valve closed
11/5/2011	3:04:38 PM	BCl3 valve closed
11/5/2011	3:04:38 PM	PH3 valve closed
11/5/2011	3:04:38 PM	SiCl4 pre valve closed
11/5/2011	3:04:38 PM	SiCl4 post valve closed
11/5/2011	3:04:38 PM	Bypass valve closed
11/5/2011	3:04:38 PM	Bubbler valve closed
11/5/2011	3:04:38 PM	Helium valve opened
11/5/2011	3:04:38 PM	Main Vac valve opened
11/5/2011	3:04:38 PM	Helium MFC set to  20.000000
11/5/2011	3:04:38 PM	H2 MFC set to  0.000000
11/5/2011	3:04:38 PM	BCl3 MFC set to  0.000000
11/5/2011	3:04:38 PM	PHl3 MFC set to  0.000000
11/5/2011	3:04:38 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:04:38 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:04:38 PM	Tube furnace set to 150
11/5/2011	3:05:08 PM	Helium valve closed
11/5/2011	3:05:08 PM	H2 valve closed
11/5/2011	3:05:08 PM	BCl3 valve closed
11/5/2011	3:05:08 PM	PH3 valve closed
11/5/2011	3:05:08 PM	SiCl4 pre valve closed
11/5/2011	3:05:08 PM	SiCl4 post valve closed
11/5/2011	3:05:08 PM	Bypass valve closed
11/5/2011	3:05:08 PM	Bubbler valve closed
11/5/2011	3:05:08 PM	Main Vac valve opened
11/5/2011	3:05:08 PM	Helium MFC set to  0.000000
11/5/2011	3:05:08 PM	H2 MFC set to  0.000000
11/5/2011	3:05:08 PM	BCl3 MFC set to  0.000000
11/5/2011	3:05:08 PM	PHl3 MFC set to  0.000000
11/5/2011	3:05:08 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:05:08 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:05:09 PM	Tube furnace set to 150
11/5/2011	3:05:23 PM	Run aborted at 3:05 PM
11/5/2011	3:05:23 PM	Helium valve closed
11/5/2011	3:05:23 PM	H2 valve closed
11/5/2011	3:05:23 PM	BCl3 valve closed
11/5/2011	3:05:23 PM	PH3 valve closed
11/5/2011	3:05:23 PM	SiCl4 pre valve closed
11/5/2011	3:05:23 PM	SiCl4 post valve closed
11/5/2011	3:05:23 PM	Bypass valve closed
11/5/2011	3:05:23 PM	Main Vac valve closed
11/5/2011	3:05:23 PM	Bubbler valve closed
11/5/2011	3:05:23 PM	Helium MFC set to  0.000000
11/5/2011	3:05:23 PM	H2 MFC set to  0.000000
11/5/2011	3:05:23 PM	BCl3 MFC set to  0.000000
11/5/2011	3:05:23 PM	PHl3 MFC set to  0.000000
11/5/2011	3:05:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:05:23 PM	Tube furnace set to 0
11/5/2011	3:05:26 PM	Main Vac valve opened
11/5/2011	3:08:09 PM	Main Vac valve closed
11/5/2011	3:08:24 PM	Main Vac valve opened
11/5/2011	3:08:55 PM	Recipe started at 3:08 PM
11/5/2011	3:08:55 PM	H2 valve closed
11/5/2011	3:08:55 PM	BCl3 valve closed
11/5/2011	3:08:55 PM	PH3 valve closed
11/5/2011	3:08:55 PM	SiCl4 pre valve closed
11/5/2011	3:08:55 PM	SiCl4 post valve closed
11/5/2011	3:08:55 PM	Main Vac valve closed
11/5/2011	3:08:55 PM	Bypass valve closed
11/5/2011	3:08:55 PM	Bubbler valve closed
11/5/2011	3:08:55 PM	Helium valve opened
11/5/2011	3:08:55 PM	Helium MFC set to  0.000000
11/5/2011	3:08:55 PM	H2 MFC set to  0.000000
11/5/2011	3:08:55 PM	BCl3 MFC set to  0.000000
11/5/2011	3:08:55 PM	PHl3 MFC set to  0.000000
11/5/2011	3:08:55 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:08:55 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:08:55 PM	Tube furnace set to 0
11/5/2011	3:08:58 PM	Helium valve closed
11/5/2011	3:08:58 PM	BCl3 valve closed
11/5/2011	3:08:58 PM	PH3 valve closed
11/5/2011	3:08:58 PM	SiCl4 pre valve closed
11/5/2011	3:08:58 PM	SiCl4 post valve closed
11/5/2011	3:08:58 PM	Main Vac valve closed
11/5/2011	3:08:58 PM	Bypass valve closed
11/5/2011	3:08:58 PM	Bubbler valve closed
11/5/2011	3:08:58 PM	H2 valve opened
11/5/2011	3:08:58 PM	Helium MFC set to  0.000000
11/5/2011	3:08:58 PM	H2 MFC set to  500.000000
11/5/2011	3:08:58 PM	BCl3 MFC set to  0.000000
11/5/2011	3:08:58 PM	PHl3 MFC set to  0.000000
11/5/2011	3:08:58 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:08:58 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:08:58 PM	Tube furnace set to 100
11/5/2011	3:10:01 PM	Helium valve closed
11/5/2011	3:10:01 PM	BCl3 valve closed
11/5/2011	3:10:01 PM	PH3 valve closed
11/5/2011	3:10:01 PM	SiCl4 pre valve closed
11/5/2011	3:10:01 PM	SiCl4 post valve closed
11/5/2011	3:10:01 PM	Main Vac valve closed
11/5/2011	3:10:01 PM	Bypass valve closed
11/5/2011	3:10:01 PM	H2 valve opened
11/5/2011	3:10:01 PM	Bubbler valve opened
11/5/2011	3:10:01 PM	Helium MFC set to  0.000000
11/5/2011	3:10:01 PM	H2 MFC set to  500.000000
11/5/2011	3:10:01 PM	BCl3 MFC set to  0.000000
11/5/2011	3:10:01 PM	PHl3 MFC set to  0.000000
11/5/2011	3:10:01 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:10:01 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:10:01 PM	Tube furnace set to 1000
11/5/2011	3:10:02 PM	Helium valve closed
11/5/2011	3:10:02 PM	BCl3 valve closed
11/5/2011	3:10:02 PM	PH3 valve closed
11/5/2011	3:10:02 PM	SiCl4 pre valve closed
11/5/2011	3:10:02 PM	SiCl4 post valve closed
11/5/2011	3:10:02 PM	Main Vac valve closed
11/5/2011	3:10:02 PM	Bypass valve closed
11/5/2011	3:10:02 PM	H2 valve opened
11/5/2011	3:10:02 PM	Bubbler valve opened
11/5/2011	3:10:02 PM	Helium MFC set to  0.000000
11/5/2011	3:10:02 PM	H2 MFC set to  500.000000
11/5/2011	3:10:02 PM	BCl3 MFC set to  0.000000
11/5/2011	3:10:02 PM	PHl3 MFC set to  0.000000
11/5/2011	3:10:02 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:10:02 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:10:02 PM	Tube furnace set to 1000
11/5/2011	3:30:02 PM	Helium valve closed
11/5/2011	3:30:02 PM	BCl3 valve closed
11/5/2011	3:30:02 PM	PH3 valve closed
11/5/2011	3:30:02 PM	Main Vac valve closed
11/5/2011	3:30:02 PM	Bypass valve closed
11/5/2011	3:30:02 PM	H2 valve opened
11/5/2011	3:30:02 PM	SiCl4 pre valve opened
11/5/2011	3:30:02 PM	SiCl4 post valve opened
11/5/2011	3:30:02 PM	Bubbler valve opened
11/5/2011	3:30:02 PM	Helium MFC set to  0.000000
11/5/2011	3:30:02 PM	H2 MFC set to  500.000000
11/5/2011	3:30:02 PM	BCl3 MFC set to  0.000000
11/5/2011	3:30:02 PM	PHl3 MFC set to  0.000000
11/5/2011	3:30:02 PM	SiCl4 MFC set to  20.000000
11/5/2011	3:30:02 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:30:02 PM	Tube furnace set to 1000
11/5/2011	3:47:02 PM	Helium valve closed
11/5/2011	3:47:02 PM	BCl3 valve closed
11/5/2011	3:47:02 PM	PH3 valve closed
11/5/2011	3:47:02 PM	SiCl4 pre valve closed
11/5/2011	3:47:02 PM	SiCl4 post valve closed
11/5/2011	3:47:02 PM	Main Vac valve closed
11/5/2011	3:47:02 PM	Bypass valve closed
11/5/2011	3:47:02 PM	H2 valve opened
11/5/2011	3:47:02 PM	Bubbler valve opened
11/5/2011	3:47:02 PM	Helium MFC set to  0.000000
11/5/2011	3:47:02 PM	H2 MFC set to  500.000000
11/5/2011	3:47:02 PM	BCl3 MFC set to  0.000000
11/5/2011	3:47:02 PM	PHl3 MFC set to  0.000000
11/5/2011	3:47:02 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:47:02 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:47:03 PM	Tube furnace set to 750
11/5/2011	3:57:03 PM	H2 valve closed
11/5/2011	3:57:03 PM	BCl3 valve closed
11/5/2011	3:57:03 PM	PH3 valve closed
11/5/2011	3:57:03 PM	SiCl4 pre valve closed
11/5/2011	3:57:03 PM	SiCl4 post valve closed
11/5/2011	3:57:03 PM	Main Vac valve closed
11/5/2011	3:57:03 PM	Bypass valve closed
11/5/2011	3:57:03 PM	Helium valve opened
11/5/2011	3:57:03 PM	Bubbler valve opened
11/5/2011	3:57:03 PM	Helium MFC set to  400.000000
11/5/2011	3:57:03 PM	H2 MFC set to  0.000000
11/5/2011	3:57:03 PM	BCl3 MFC set to  0.000000
11/5/2011	3:57:03 PM	PHl3 MFC set to  0.000000
11/5/2011	3:57:03 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:57:03 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:57:03 PM	Tube furnace set to 0
11/5/2011	3:59:31 PM	Run aborted at 3:59 PM
11/5/2011	3:59:31 PM	Helium valve closed
11/5/2011	3:59:31 PM	H2 valve closed
11/5/2011	3:59:31 PM	BCl3 valve closed
11/5/2011	3:59:31 PM	PH3 valve closed
11/5/2011	3:59:31 PM	SiCl4 pre valve closed
11/5/2011	3:59:31 PM	SiCl4 post valve closed
11/5/2011	3:59:31 PM	Bypass valve closed
11/5/2011	3:59:31 PM	Main Vac valve closed
11/5/2011	3:59:31 PM	Bubbler valve closed
11/5/2011	3:59:31 PM	Helium MFC set to  0.000000
11/5/2011	3:59:31 PM	H2 MFC set to  0.000000
11/5/2011	3:59:31 PM	BCl3 MFC set to  0.000000
11/5/2011	3:59:31 PM	PHl3 MFC set to  0.000000
11/5/2011	3:59:31 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:59:31 PM	Tube furnace set to 0
11/5/2011	3:59:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	3:59:40 PM	Recipe started at 3:59 PM
11/5/2011	3:59:40 PM	Helium valve closed
11/5/2011	3:59:40 PM	H2 valve closed
11/5/2011	3:59:40 PM	BCl3 valve closed
11/5/2011	3:59:40 PM	PH3 valve closed
11/5/2011	3:59:40 PM	SiCl4 pre valve closed
11/5/2011	3:59:40 PM	SiCl4 post valve closed
11/5/2011	3:59:40 PM	Main Vac valve closed
11/5/2011	3:59:40 PM	Bypass valve closed
11/5/2011	3:59:40 PM	Bubbler valve closed
11/5/2011	3:59:40 PM	Helium MFC set to  0.000000
11/5/2011	3:59:40 PM	H2 MFC set to  0.000000
11/5/2011	3:59:40 PM	BCl3 MFC set to  0.000000
11/5/2011	3:59:40 PM	PHl3 MFC set to  0.000000
11/5/2011	3:59:40 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:59:40 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:59:40 PM	Tube furnace set to 0
11/5/2011	3:59:43 PM	H2 valve closed
11/5/2011	3:59:43 PM	BCl3 valve closed
11/5/2011	3:59:43 PM	PH3 valve closed
11/5/2011	3:59:43 PM	SiCl4 pre valve closed
11/5/2011	3:59:43 PM	SiCl4 post valve closed
11/5/2011	3:59:44 PM	Main Vac valve closed
11/5/2011	3:59:44 PM	Bypass valve closed
11/5/2011	3:59:44 PM	Bubbler valve closed
11/5/2011	3:59:44 PM	Helium valve opened
11/5/2011	3:59:44 PM	Helium MFC set to  500.000000
11/5/2011	3:59:44 PM	H2 MFC set to  0.000000
11/5/2011	3:59:44 PM	BCl3 MFC set to  0.000000
11/5/2011	3:59:44 PM	PHl3 MFC set to  0.000000
11/5/2011	3:59:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:59:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:59:44 PM	Tube furnace set to 0
11/5/2011	3:59:44 PM	Helium valve closed
11/5/2011	3:59:44 PM	H2 valve closed
11/5/2011	3:59:44 PM	BCl3 valve closed
11/5/2011	3:59:44 PM	PH3 valve closed
11/5/2011	3:59:44 PM	SiCl4 pre valve closed
11/5/2011	3:59:44 PM	SiCl4 post valve closed
11/5/2011	3:59:44 PM	Main Vac valve closed
11/5/2011	3:59:44 PM	Bypass valve closed
11/5/2011	3:59:44 PM	Bubbler valve closed
11/5/2011	3:59:44 PM	Helium MFC set to  0.000000
11/5/2011	3:59:44 PM	H2 MFC set to  0.000000
11/5/2011	3:59:44 PM	BCl3 MFC set to  0.000000
11/5/2011	3:59:44 PM	PHl3 MFC set to  0.000000
11/5/2011	3:59:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	3:59:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	3:59:44 PM	Tube furnace set to 0
11/5/2011	3:59:45 PM	Run finished at 3:59 PM
11/5/2011	3:59:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	4:04:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	4:04:36 PM	Recipe started at 4:04 PM
11/5/2011	4:04:36 PM	Helium valve closed
11/5/2011	4:04:36 PM	H2 valve closed
11/5/2011	4:04:36 PM	BCl3 valve closed
11/5/2011	4:04:36 PM	PH3 valve closed
11/5/2011	4:04:36 PM	SiCl4 pre valve closed
11/5/2011	4:04:36 PM	SiCl4 post valve closed
11/5/2011	4:04:36 PM	Main Vac valve closed
11/5/2011	4:04:36 PM	Bubbler valve closed
11/5/2011	4:04:36 PM	Bypass valve opened
11/5/2011	4:04:36 PM	Helium MFC set to  0.000000
11/5/2011	4:04:36 PM	H2 MFC set to  0.000000
11/5/2011	4:04:36 PM	BCl3 MFC set to  0.000000
11/5/2011	4:04:36 PM	PHl3 MFC set to  0.000000
11/5/2011	4:04:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:04:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:04:36 PM	Tube furnace set to 0
11/5/2011	4:05:39 PM	Helium valve closed
11/5/2011	4:05:39 PM	H2 valve closed
11/5/2011	4:05:39 PM	BCl3 valve closed
11/5/2011	4:05:39 PM	PH3 valve closed
11/5/2011	4:05:39 PM	SiCl4 pre valve closed
11/5/2011	4:05:39 PM	SiCl4 post valve closed
11/5/2011	4:05:39 PM	Main Vac valve closed
11/5/2011	4:05:39 PM	Bubbler valve closed
11/5/2011	4:05:39 PM	Bypass valve opened
11/5/2011	4:05:39 PM	Helium MFC set to  0.000000
11/5/2011	4:05:39 PM	H2 MFC set to  0.000000
11/5/2011	4:05:39 PM	BCl3 MFC set to  0.000000
11/5/2011	4:05:39 PM	PHl3 MFC set to  0.000000
11/5/2011	4:05:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:05:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:05:39 PM	Tube furnace set to 0
11/5/2011	4:06:39 PM	Helium valve closed
11/5/2011	4:06:39 PM	H2 valve closed
11/5/2011	4:06:39 PM	BCl3 valve closed
11/5/2011	4:06:39 PM	PH3 valve closed
11/5/2011	4:06:39 PM	SiCl4 pre valve closed
11/5/2011	4:06:39 PM	SiCl4 post valve closed
11/5/2011	4:06:39 PM	Bypass valve closed
11/5/2011	4:06:39 PM	Bubbler valve closed
11/5/2011	4:06:39 PM	Main Vac valve opened
11/5/2011	4:06:39 PM	Helium MFC set to  0.000000
11/5/2011	4:06:39 PM	H2 MFC set to  0.000000
11/5/2011	4:06:39 PM	BCl3 MFC set to  0.000000
11/5/2011	4:06:39 PM	PHl3 MFC set to  0.000000
11/5/2011	4:06:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:06:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:06:39 PM	Tube furnace set to 0
11/5/2011	4:06:40 PM	Run finished at 4:06 PM
11/5/2011	4:06:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	4:13:10 PM	Recipe started at 4:12 PM
11/5/2011	4:13:10 PM	Helium valve closed
11/5/2011	4:13:10 PM	H2 valve closed
11/5/2011	4:13:10 PM	BCl3 valve closed
11/5/2011	4:13:10 PM	PH3 valve closed
11/5/2011	4:13:10 PM	SiCl4 pre valve closed
11/5/2011	4:13:10 PM	SiCl4 post valve closed
11/5/2011	4:13:10 PM	Main Vac valve closed
11/5/2011	4:13:10 PM	Bubbler valve closed
11/5/2011	4:13:10 PM	Bypass valve opened
11/5/2011	4:13:10 PM	Helium MFC set to  0.000000
11/5/2011	4:13:10 PM	H2 MFC set to  0.000000
11/5/2011	4:13:10 PM	BCl3 MFC set to  0.000000
11/5/2011	4:13:10 PM	PHl3 MFC set to  0.000000
11/5/2011	4:13:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:13:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:13:10 PM	Tube furnace set to 180
11/5/2011	4:13:11 PM	Helium valve closed
11/5/2011	4:13:11 PM	H2 valve closed
11/5/2011	4:13:11 PM	BCl3 valve closed
11/5/2011	4:13:11 PM	PH3 valve closed
11/5/2011	4:13:11 PM	SiCl4 pre valve closed
11/5/2011	4:13:11 PM	SiCl4 post valve closed
11/5/2011	4:13:11 PM	Main Vac valve closed
11/5/2011	4:13:11 PM	Bubbler valve closed
11/5/2011	4:13:11 PM	Bypass valve opened
11/5/2011	4:13:11 PM	Helium MFC set to  0.000000
11/5/2011	4:13:11 PM	H2 MFC set to  0.000000
11/5/2011	4:13:11 PM	BCl3 MFC set to  0.000000
11/5/2011	4:13:11 PM	PHl3 MFC set to  0.000000
11/5/2011	4:13:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:13:11 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:13:11 PM	Tube furnace set to 150
11/5/2011	4:13:41 PM	Helium valve closed
11/5/2011	4:13:41 PM	H2 valve closed
11/5/2011	4:13:41 PM	BCl3 valve closed
11/5/2011	4:13:41 PM	PH3 valve closed
11/5/2011	4:13:41 PM	SiCl4 pre valve closed
11/5/2011	4:13:41 PM	SiCl4 post valve closed
11/5/2011	4:13:41 PM	Bypass valve closed
11/5/2011	4:13:41 PM	Bubbler valve closed
11/5/2011	4:13:41 PM	Main Vac valve opened
11/5/2011	4:13:41 PM	Helium MFC set to  0.000000
11/5/2011	4:13:41 PM	H2 MFC set to  0.000000
11/5/2011	4:13:41 PM	BCl3 MFC set to  0.000000
11/5/2011	4:13:41 PM	PHl3 MFC set to  0.000000
11/5/2011	4:13:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:13:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:13:41 PM	Tube furnace set to 180
11/5/2011	4:14:11 PM	H2 valve closed
11/5/2011	4:14:11 PM	BCl3 valve closed
11/5/2011	4:14:11 PM	PH3 valve closed
11/5/2011	4:14:11 PM	SiCl4 pre valve closed
11/5/2011	4:14:11 PM	SiCl4 post valve closed
11/5/2011	4:14:11 PM	Bypass valve closed
11/5/2011	4:14:11 PM	Bubbler valve closed
11/5/2011	4:14:11 PM	Helium valve opened
11/5/2011	4:14:11 PM	Main Vac valve opened
11/5/2011	4:14:11 PM	Helium MFC set to  20.000000
11/5/2011	4:14:11 PM	H2 MFC set to  0.000000
11/5/2011	4:14:11 PM	BCl3 MFC set to  0.000000
11/5/2011	4:14:11 PM	PHl3 MFC set to  0.000000
11/5/2011	4:14:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:14:11 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:14:11 PM	Tube furnace set to 180
11/5/2011	4:14:41 PM	Helium valve closed
11/5/2011	4:14:41 PM	H2 valve closed
11/5/2011	4:14:41 PM	BCl3 valve closed
11/5/2011	4:14:41 PM	PH3 valve closed
11/5/2011	4:14:41 PM	SiCl4 pre valve closed
11/5/2011	4:14:41 PM	SiCl4 post valve closed
11/5/2011	4:14:41 PM	Bypass valve closed
11/5/2011	4:14:41 PM	Bubbler valve closed
11/5/2011	4:14:41 PM	Main Vac valve opened
11/5/2011	4:14:41 PM	Helium MFC set to  0.000000
11/5/2011	4:14:41 PM	H2 MFC set to  0.000000
11/5/2011	4:14:41 PM	BCl3 MFC set to  0.000000
11/5/2011	4:14:41 PM	PHl3 MFC set to  0.000000
11/5/2011	4:14:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:14:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:14:41 PM	Tube furnace set to 150
11/5/2011	4:15:11 PM	H2 valve closed
11/5/2011	4:15:11 PM	BCl3 valve closed
11/5/2011	4:15:11 PM	PH3 valve closed
11/5/2011	4:15:11 PM	SiCl4 pre valve closed
11/5/2011	4:15:11 PM	SiCl4 post valve closed
11/5/2011	4:15:11 PM	Bypass valve closed
11/5/2011	4:15:11 PM	Bubbler valve closed
11/5/2011	4:15:11 PM	Helium valve opened
11/5/2011	4:15:11 PM	Main Vac valve opened
11/5/2011	4:15:11 PM	Helium MFC set to  20.000000
11/5/2011	4:15:11 PM	H2 MFC set to  0.000000
11/5/2011	4:15:12 PM	BCl3 MFC set to  0.000000
11/5/2011	4:15:12 PM	PHl3 MFC set to  0.000000
11/5/2011	4:15:12 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:15:12 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:15:12 PM	Tube furnace set to 180
11/5/2011	4:15:42 PM	Helium valve closed
11/5/2011	4:15:42 PM	H2 valve closed
11/5/2011	4:15:42 PM	BCl3 valve closed
11/5/2011	4:15:42 PM	PH3 valve closed
11/5/2011	4:15:42 PM	SiCl4 pre valve closed
11/5/2011	4:15:42 PM	SiCl4 post valve closed
11/5/2011	4:15:42 PM	Bypass valve closed
11/5/2011	4:15:42 PM	Bubbler valve closed
11/5/2011	4:15:42 PM	Main Vac valve opened
11/5/2011	4:15:42 PM	Helium MFC set to  0.000000
11/5/2011	4:15:42 PM	H2 MFC set to  0.000000
11/5/2011	4:15:42 PM	BCl3 MFC set to  0.000000
11/5/2011	4:15:42 PM	PHl3 MFC set to  0.000000
11/5/2011	4:15:42 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:15:42 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:15:42 PM	Tube furnace set to 150
11/5/2011	4:16:12 PM	H2 valve closed
11/5/2011	4:16:12 PM	BCl3 valve closed
11/5/2011	4:16:12 PM	PH3 valve closed
11/5/2011	4:16:12 PM	SiCl4 pre valve closed
11/5/2011	4:16:12 PM	SiCl4 post valve closed
11/5/2011	4:16:12 PM	Bypass valve closed
11/5/2011	4:16:12 PM	Bubbler valve closed
11/5/2011	4:16:12 PM	Helium valve opened
11/5/2011	4:16:12 PM	Main Vac valve opened
11/5/2011	4:16:12 PM	Helium MFC set to  20.000000
11/5/2011	4:16:12 PM	H2 MFC set to  0.000000
11/5/2011	4:16:12 PM	BCl3 MFC set to  0.000000
11/5/2011	4:16:12 PM	PHl3 MFC set to  0.000000
11/5/2011	4:16:12 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:16:12 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:16:12 PM	Tube furnace set to 150
11/5/2011	4:16:42 PM	Helium valve closed
11/5/2011	4:16:42 PM	H2 valve closed
11/5/2011	4:16:42 PM	BCl3 valve closed
11/5/2011	4:16:42 PM	PH3 valve closed
11/5/2011	4:16:42 PM	SiCl4 pre valve closed
11/5/2011	4:16:42 PM	SiCl4 post valve closed
11/5/2011	4:16:42 PM	Bypass valve closed
11/5/2011	4:16:42 PM	Bubbler valve closed
11/5/2011	4:16:42 PM	Main Vac valve opened
11/5/2011	4:16:42 PM	Helium MFC set to  0.000000
11/5/2011	4:16:42 PM	H2 MFC set to  0.000000
11/5/2011	4:16:42 PM	BCl3 MFC set to  0.000000
11/5/2011	4:16:42 PM	PHl3 MFC set to  0.000000
11/5/2011	4:16:42 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:16:42 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:16:42 PM	Tube furnace set to 150
11/5/2011	4:17:12 PM	H2 valve closed
11/5/2011	4:17:12 PM	BCl3 valve closed
11/5/2011	4:17:12 PM	PH3 valve closed
11/5/2011	4:17:12 PM	SiCl4 pre valve closed
11/5/2011	4:17:12 PM	SiCl4 post valve closed
11/5/2011	4:17:12 PM	Bypass valve closed
11/5/2011	4:17:12 PM	Bubbler valve closed
11/5/2011	4:17:12 PM	Helium valve opened
11/5/2011	4:17:12 PM	Main Vac valve opened
11/5/2011	4:17:12 PM	Helium MFC set to  20.000000
11/5/2011	4:17:12 PM	H2 MFC set to  0.000000
11/5/2011	4:17:12 PM	BCl3 MFC set to  0.000000
11/5/2011	4:17:12 PM	PHl3 MFC set to  0.000000
11/5/2011	4:17:12 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:17:12 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:17:12 PM	Tube furnace set to 180
11/5/2011	4:17:42 PM	Helium valve closed
11/5/2011	4:17:42 PM	H2 valve closed
11/5/2011	4:17:42 PM	BCl3 valve closed
11/5/2011	4:17:42 PM	PH3 valve closed
11/5/2011	4:17:42 PM	SiCl4 pre valve closed
11/5/2011	4:17:42 PM	SiCl4 post valve closed
11/5/2011	4:17:42 PM	Bypass valve closed
11/5/2011	4:17:42 PM	Bubbler valve closed
11/5/2011	4:17:42 PM	Main Vac valve opened
11/5/2011	4:17:42 PM	Helium MFC set to  0.000000
11/5/2011	4:17:42 PM	H2 MFC set to  0.000000
11/5/2011	4:17:42 PM	BCl3 MFC set to  0.000000
11/5/2011	4:17:42 PM	PHl3 MFC set to  0.000000
11/5/2011	4:17:42 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:17:42 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:17:43 PM	Tube furnace set to 150
11/5/2011	4:18:13 PM	H2 valve closed
11/5/2011	4:18:13 PM	BCl3 valve closed
11/5/2011	4:18:13 PM	PH3 valve closed
11/5/2011	4:18:13 PM	SiCl4 pre valve closed
11/5/2011	4:18:13 PM	SiCl4 post valve closed
11/5/2011	4:18:13 PM	Bypass valve closed
11/5/2011	4:18:13 PM	Bubbler valve closed
11/5/2011	4:18:13 PM	Helium valve opened
11/5/2011	4:18:13 PM	Main Vac valve opened
11/5/2011	4:18:13 PM	Helium MFC set to  20.000000
11/5/2011	4:18:13 PM	H2 MFC set to  0.000000
11/5/2011	4:18:13 PM	BCl3 MFC set to  0.000000
11/5/2011	4:18:13 PM	PHl3 MFC set to  0.000000
11/5/2011	4:18:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:18:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:18:13 PM	Tube furnace set to 150
11/5/2011	4:18:43 PM	Helium valve closed
11/5/2011	4:18:43 PM	H2 valve closed
11/5/2011	4:18:43 PM	BCl3 valve closed
11/5/2011	4:18:43 PM	PH3 valve closed
11/5/2011	4:18:43 PM	SiCl4 pre valve closed
11/5/2011	4:18:43 PM	SiCl4 post valve closed
11/5/2011	4:18:43 PM	Bypass valve closed
11/5/2011	4:18:43 PM	Bubbler valve closed
11/5/2011	4:18:43 PM	Main Vac valve opened
11/5/2011	4:18:43 PM	Helium MFC set to  0.000000
11/5/2011	4:18:43 PM	H2 MFC set to  0.000000
11/5/2011	4:18:43 PM	BCl3 MFC set to  0.000000
11/5/2011	4:18:43 PM	PHl3 MFC set to  0.000000
11/5/2011	4:18:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:18:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:18:43 PM	Tube furnace set to 150
11/5/2011	4:19:13 PM	H2 valve closed
11/5/2011	4:19:13 PM	BCl3 valve closed
11/5/2011	4:19:13 PM	PH3 valve closed
11/5/2011	4:19:13 PM	SiCl4 pre valve closed
11/5/2011	4:19:13 PM	SiCl4 post valve closed
11/5/2011	4:19:13 PM	Bypass valve closed
11/5/2011	4:19:13 PM	Bubbler valve closed
11/5/2011	4:19:13 PM	Helium valve opened
11/5/2011	4:19:13 PM	Main Vac valve opened
11/5/2011	4:19:13 PM	Helium MFC set to  20.000000
11/5/2011	4:19:13 PM	H2 MFC set to  0.000000
11/5/2011	4:19:13 PM	BCl3 MFC set to  0.000000
11/5/2011	4:19:13 PM	PHl3 MFC set to  0.000000
11/5/2011	4:19:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:19:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:19:13 PM	Tube furnace set to 150
11/5/2011	4:19:43 PM	Helium valve closed
11/5/2011	4:19:43 PM	H2 valve closed
11/5/2011	4:19:43 PM	BCl3 valve closed
11/5/2011	4:19:43 PM	PH3 valve closed
11/5/2011	4:19:43 PM	SiCl4 pre valve closed
11/5/2011	4:19:43 PM	SiCl4 post valve closed
11/5/2011	4:19:43 PM	Bypass valve closed
11/5/2011	4:19:43 PM	Bubbler valve closed
11/5/2011	4:19:43 PM	Main Vac valve opened
11/5/2011	4:19:43 PM	Helium MFC set to  0.000000
11/5/2011	4:19:43 PM	H2 MFC set to  0.000000
11/5/2011	4:19:43 PM	BCl3 MFC set to  0.000000
11/5/2011	4:19:43 PM	PHl3 MFC set to  0.000000
11/5/2011	4:19:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:19:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:19:43 PM	Tube furnace set to 150
11/5/2011	4:20:13 PM	H2 valve closed
11/5/2011	4:20:13 PM	BCl3 valve closed
11/5/2011	4:20:13 PM	PH3 valve closed
11/5/2011	4:20:13 PM	SiCl4 pre valve closed
11/5/2011	4:20:13 PM	SiCl4 post valve closed
11/5/2011	4:20:13 PM	Bypass valve closed
11/5/2011	4:20:13 PM	Bubbler valve closed
11/5/2011	4:20:13 PM	Helium valve opened
11/5/2011	4:20:13 PM	Main Vac valve opened
11/5/2011	4:20:13 PM	Helium MFC set to  20.000000
11/5/2011	4:20:13 PM	H2 MFC set to  0.000000
11/5/2011	4:20:13 PM	BCl3 MFC set to  0.000000
11/5/2011	4:20:13 PM	PHl3 MFC set to  0.000000
11/5/2011	4:20:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:20:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:20:14 PM	Tube furnace set to 150
11/5/2011	4:20:44 PM	Helium valve closed
11/5/2011	4:20:44 PM	H2 valve closed
11/5/2011	4:20:44 PM	BCl3 valve closed
11/5/2011	4:20:44 PM	PH3 valve closed
11/5/2011	4:20:44 PM	SiCl4 pre valve closed
11/5/2011	4:20:44 PM	SiCl4 post valve closed
11/5/2011	4:20:44 PM	Bypass valve closed
11/5/2011	4:20:44 PM	Bubbler valve closed
11/5/2011	4:20:44 PM	Main Vac valve opened
11/5/2011	4:20:44 PM	Helium MFC set to  0.000000
11/5/2011	4:20:44 PM	H2 MFC set to  0.000000
11/5/2011	4:20:44 PM	BCl3 MFC set to  0.000000
11/5/2011	4:20:44 PM	PHl3 MFC set to  0.000000
11/5/2011	4:20:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:20:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:20:44 PM	Tube furnace set to 150
11/5/2011	4:21:14 PM	H2 valve closed
11/5/2011	4:21:14 PM	BCl3 valve closed
11/5/2011	4:21:14 PM	PH3 valve closed
11/5/2011	4:21:14 PM	SiCl4 pre valve closed
11/5/2011	4:21:14 PM	SiCl4 post valve closed
11/5/2011	4:21:14 PM	Bypass valve closed
11/5/2011	4:21:14 PM	Bubbler valve closed
11/5/2011	4:21:14 PM	Helium valve opened
11/5/2011	4:21:14 PM	Main Vac valve opened
11/5/2011	4:21:14 PM	Helium MFC set to  20.000000
11/5/2011	4:21:14 PM	H2 MFC set to  0.000000
11/5/2011	4:21:14 PM	BCl3 MFC set to  0.000000
11/5/2011	4:21:14 PM	PHl3 MFC set to  0.000000
11/5/2011	4:21:14 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:21:14 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:21:14 PM	Tube furnace set to 150
11/5/2011	4:21:44 PM	Helium valve closed
11/5/2011	4:21:44 PM	H2 valve closed
11/5/2011	4:21:44 PM	BCl3 valve closed
11/5/2011	4:21:44 PM	PH3 valve closed
11/5/2011	4:21:44 PM	SiCl4 pre valve closed
11/5/2011	4:21:44 PM	SiCl4 post valve closed
11/5/2011	4:21:44 PM	Bypass valve closed
11/5/2011	4:21:44 PM	Bubbler valve closed
11/5/2011	4:21:44 PM	Main Vac valve opened
11/5/2011	4:21:44 PM	Helium MFC set to  0.000000
11/5/2011	4:21:44 PM	H2 MFC set to  0.000000
11/5/2011	4:21:44 PM	BCl3 MFC set to  0.000000
11/5/2011	4:21:44 PM	PHl3 MFC set to  0.000000
11/5/2011	4:21:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:21:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:21:44 PM	Tube furnace set to 150
11/5/2011	4:22:14 PM	H2 valve closed
11/5/2011	4:22:14 PM	BCl3 valve closed
11/5/2011	4:22:14 PM	PH3 valve closed
11/5/2011	4:22:14 PM	SiCl4 pre valve closed
11/5/2011	4:22:14 PM	SiCl4 post valve closed
11/5/2011	4:22:14 PM	Bypass valve closed
11/5/2011	4:22:14 PM	Bubbler valve closed
11/5/2011	4:22:14 PM	Helium valve opened
11/5/2011	4:22:14 PM	Main Vac valve opened
11/5/2011	4:22:14 PM	Helium MFC set to  20.000000
11/5/2011	4:22:14 PM	H2 MFC set to  0.000000
11/5/2011	4:22:14 PM	BCl3 MFC set to  0.000000
11/5/2011	4:22:14 PM	PHl3 MFC set to  0.000000
11/5/2011	4:22:14 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:22:14 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:22:14 PM	Tube furnace set to 150
11/5/2011	4:22:44 PM	Helium valve closed
11/5/2011	4:22:45 PM	H2 valve closed
11/5/2011	4:22:45 PM	BCl3 valve closed
11/5/2011	4:22:45 PM	PH3 valve closed
11/5/2011	4:22:45 PM	SiCl4 pre valve closed
11/5/2011	4:22:45 PM	SiCl4 post valve closed
11/5/2011	4:22:45 PM	Bypass valve closed
11/5/2011	4:22:45 PM	Bubbler valve closed
11/5/2011	4:22:45 PM	Main Vac valve opened
11/5/2011	4:22:45 PM	Helium MFC set to  0.000000
11/5/2011	4:22:45 PM	H2 MFC set to  0.000000
11/5/2011	4:22:45 PM	BCl3 MFC set to  0.000000
11/5/2011	4:22:45 PM	PHl3 MFC set to  0.000000
11/5/2011	4:22:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:22:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:22:45 PM	Tube furnace set to 150
11/5/2011	4:23:15 PM	H2 valve closed
11/5/2011	4:23:15 PM	BCl3 valve closed
11/5/2011	4:23:15 PM	PH3 valve closed
11/5/2011	4:23:15 PM	SiCl4 pre valve closed
11/5/2011	4:23:15 PM	SiCl4 post valve closed
11/5/2011	4:23:15 PM	Bypass valve closed
11/5/2011	4:23:15 PM	Bubbler valve closed
11/5/2011	4:23:15 PM	Helium valve opened
11/5/2011	4:23:15 PM	Main Vac valve opened
11/5/2011	4:23:15 PM	Helium MFC set to  20.000000
11/5/2011	4:23:15 PM	H2 MFC set to  0.000000
11/5/2011	4:23:15 PM	BCl3 MFC set to  0.000000
11/5/2011	4:23:15 PM	PHl3 MFC set to  0.000000
11/5/2011	4:23:15 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:23:15 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:23:15 PM	Tube furnace set to 150
11/5/2011	4:23:45 PM	Helium valve closed
11/5/2011	4:23:45 PM	H2 valve closed
11/5/2011	4:23:45 PM	BCl3 valve closed
11/5/2011	4:23:45 PM	PH3 valve closed
11/5/2011	4:23:45 PM	SiCl4 pre valve closed
11/5/2011	4:23:45 PM	SiCl4 post valve closed
11/5/2011	4:23:45 PM	Bypass valve closed
11/5/2011	4:23:45 PM	Bubbler valve closed
11/5/2011	4:23:45 PM	Main Vac valve opened
11/5/2011	4:23:45 PM	Helium MFC set to  0.000000
11/5/2011	4:23:45 PM	H2 MFC set to  0.000000
11/5/2011	4:23:45 PM	BCl3 MFC set to  0.000000
11/5/2011	4:23:45 PM	PHl3 MFC set to  0.000000
11/5/2011	4:23:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:23:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:23:45 PM	Tube furnace set to 150
11/5/2011	4:24:15 PM	H2 valve closed
11/5/2011	4:24:15 PM	BCl3 valve closed
11/5/2011	4:24:15 PM	PH3 valve closed
11/5/2011	4:24:15 PM	SiCl4 pre valve closed
11/5/2011	4:24:15 PM	SiCl4 post valve closed
11/5/2011	4:24:15 PM	Bypass valve closed
11/5/2011	4:24:15 PM	Bubbler valve closed
11/5/2011	4:24:15 PM	Helium valve opened
11/5/2011	4:24:15 PM	Main Vac valve opened
11/5/2011	4:24:15 PM	Helium MFC set to  20.000000
11/5/2011	4:24:15 PM	H2 MFC set to  0.000000
11/5/2011	4:24:15 PM	BCl3 MFC set to  0.000000
11/5/2011	4:24:15 PM	PHl3 MFC set to  0.000000
11/5/2011	4:24:15 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:24:15 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:24:15 PM	Tube furnace set to 150
11/5/2011	4:24:45 PM	Helium valve closed
11/5/2011	4:24:45 PM	H2 valve closed
11/5/2011	4:24:45 PM	BCl3 valve closed
11/5/2011	4:24:45 PM	PH3 valve closed
11/5/2011	4:24:45 PM	SiCl4 pre valve closed
11/5/2011	4:24:45 PM	SiCl4 post valve closed
11/5/2011	4:24:45 PM	Bypass valve closed
11/5/2011	4:24:45 PM	Bubbler valve closed
11/5/2011	4:24:45 PM	Main Vac valve opened
11/5/2011	4:24:45 PM	Helium MFC set to  0.000000
11/5/2011	4:24:45 PM	H2 MFC set to  0.000000
11/5/2011	4:24:45 PM	BCl3 MFC set to  0.000000
11/5/2011	4:24:45 PM	PHl3 MFC set to  0.000000
11/5/2011	4:24:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:24:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:24:46 PM	Tube furnace set to 150
11/5/2011	4:25:16 PM	H2 valve closed
11/5/2011	4:25:16 PM	BCl3 valve closed
11/5/2011	4:25:16 PM	PH3 valve closed
11/5/2011	4:25:16 PM	SiCl4 pre valve closed
11/5/2011	4:25:16 PM	SiCl4 post valve closed
11/5/2011	4:25:16 PM	Bypass valve closed
11/5/2011	4:25:16 PM	Bubbler valve closed
11/5/2011	4:25:16 PM	Helium valve opened
11/5/2011	4:25:16 PM	Main Vac valve opened
11/5/2011	4:25:16 PM	Helium MFC set to  20.000000
11/5/2011	4:25:16 PM	H2 MFC set to  0.000000
11/5/2011	4:25:16 PM	BCl3 MFC set to  0.000000
11/5/2011	4:25:16 PM	PHl3 MFC set to  0.000000
11/5/2011	4:25:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:25:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:25:16 PM	Tube furnace set to 150
11/5/2011	4:25:46 PM	Helium valve closed
11/5/2011	4:25:46 PM	H2 valve closed
11/5/2011	4:25:46 PM	BCl3 valve closed
11/5/2011	4:25:46 PM	PH3 valve closed
11/5/2011	4:25:46 PM	SiCl4 pre valve closed
11/5/2011	4:25:46 PM	SiCl4 post valve closed
11/5/2011	4:25:46 PM	Bypass valve closed
11/5/2011	4:25:46 PM	Bubbler valve closed
11/5/2011	4:25:46 PM	Main Vac valve opened
11/5/2011	4:25:46 PM	Helium MFC set to  0.000000
11/5/2011	4:25:46 PM	H2 MFC set to  0.000000
11/5/2011	4:25:46 PM	BCl3 MFC set to  0.000000
11/5/2011	4:25:46 PM	PHl3 MFC set to  0.000000
11/5/2011	4:25:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:25:46 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:25:46 PM	Tube furnace set to 150
11/5/2011	4:26:16 PM	H2 valve closed
11/5/2011	4:26:16 PM	BCl3 valve closed
11/5/2011	4:26:16 PM	PH3 valve closed
11/5/2011	4:26:16 PM	SiCl4 pre valve closed
11/5/2011	4:26:16 PM	SiCl4 post valve closed
11/5/2011	4:26:16 PM	Bypass valve closed
11/5/2011	4:26:16 PM	Bubbler valve closed
11/5/2011	4:26:16 PM	Helium valve opened
11/5/2011	4:26:16 PM	Main Vac valve opened
11/5/2011	4:26:16 PM	Helium MFC set to  20.000000
11/5/2011	4:26:16 PM	H2 MFC set to  0.000000
11/5/2011	4:26:16 PM	BCl3 MFC set to  0.000000
11/5/2011	4:26:16 PM	PHl3 MFC set to  0.000000
11/5/2011	4:26:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:26:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:26:16 PM	Tube furnace set to 150
11/5/2011	4:26:46 PM	Helium valve closed
11/5/2011	4:26:46 PM	H2 valve closed
11/5/2011	4:26:46 PM	BCl3 valve closed
11/5/2011	4:26:46 PM	PH3 valve closed
11/5/2011	4:26:46 PM	SiCl4 pre valve closed
11/5/2011	4:26:46 PM	SiCl4 post valve closed
11/5/2011	4:26:46 PM	Bypass valve closed
11/5/2011	4:26:46 PM	Bubbler valve closed
11/5/2011	4:26:46 PM	Main Vac valve opened
11/5/2011	4:26:46 PM	Helium MFC set to  0.000000
11/5/2011	4:26:46 PM	H2 MFC set to  0.000000
11/5/2011	4:26:46 PM	BCl3 MFC set to  0.000000
11/5/2011	4:26:46 PM	PHl3 MFC set to  0.000000
11/5/2011	4:26:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:26:46 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:26:46 PM	Tube furnace set to 150
11/5/2011	4:27:16 PM	H2 valve closed
11/5/2011	4:27:16 PM	BCl3 valve closed
11/5/2011	4:27:16 PM	PH3 valve closed
11/5/2011	4:27:16 PM	SiCl4 pre valve closed
11/5/2011	4:27:16 PM	SiCl4 post valve closed
11/5/2011	4:27:16 PM	Bypass valve closed
11/5/2011	4:27:16 PM	Bubbler valve closed
11/5/2011	4:27:16 PM	Helium valve opened
11/5/2011	4:27:16 PM	Main Vac valve opened
11/5/2011	4:27:16 PM	Helium MFC set to  20.000000
11/5/2011	4:27:16 PM	H2 MFC set to  0.000000
11/5/2011	4:27:16 PM	BCl3 MFC set to  0.000000
11/5/2011	4:27:16 PM	PHl3 MFC set to  0.000000
11/5/2011	4:27:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:27:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:27:17 PM	Tube furnace set to 150
11/5/2011	4:27:47 PM	Helium valve closed
11/5/2011	4:27:47 PM	H2 valve closed
11/5/2011	4:27:47 PM	BCl3 valve closed
11/5/2011	4:27:47 PM	PH3 valve closed
11/5/2011	4:27:47 PM	SiCl4 pre valve closed
11/5/2011	4:27:47 PM	SiCl4 post valve closed
11/5/2011	4:27:47 PM	Bypass valve closed
11/5/2011	4:27:47 PM	Bubbler valve closed
11/5/2011	4:27:47 PM	Main Vac valve opened
11/5/2011	4:27:47 PM	Helium MFC set to  0.000000
11/5/2011	4:27:47 PM	H2 MFC set to  0.000000
11/5/2011	4:27:47 PM	BCl3 MFC set to  0.000000
11/5/2011	4:27:47 PM	PHl3 MFC set to  0.000000
11/5/2011	4:27:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:27:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:27:47 PM	Tube furnace set to 150
11/5/2011	4:28:17 PM	H2 valve closed
11/5/2011	4:28:17 PM	BCl3 valve closed
11/5/2011	4:28:17 PM	PH3 valve closed
11/5/2011	4:28:17 PM	SiCl4 pre valve closed
11/5/2011	4:28:17 PM	SiCl4 post valve closed
11/5/2011	4:28:17 PM	Bypass valve closed
11/5/2011	4:28:17 PM	Bubbler valve closed
11/5/2011	4:28:17 PM	Helium valve opened
11/5/2011	4:28:17 PM	Main Vac valve opened
11/5/2011	4:28:17 PM	Helium MFC set to  20.000000
11/5/2011	4:28:17 PM	H2 MFC set to  0.000000
11/5/2011	4:28:17 PM	BCl3 MFC set to  0.000000
11/5/2011	4:28:17 PM	PHl3 MFC set to  0.000000
11/5/2011	4:28:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:28:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:28:17 PM	Tube furnace set to 150
11/5/2011	4:28:47 PM	Helium valve closed
11/5/2011	4:28:47 PM	H2 valve closed
11/5/2011	4:28:47 PM	BCl3 valve closed
11/5/2011	4:28:47 PM	PH3 valve closed
11/5/2011	4:28:47 PM	SiCl4 pre valve closed
11/5/2011	4:28:47 PM	SiCl4 post valve closed
11/5/2011	4:28:47 PM	Bypass valve closed
11/5/2011	4:28:47 PM	Bubbler valve closed
11/5/2011	4:28:47 PM	Main Vac valve opened
11/5/2011	4:28:47 PM	Helium MFC set to  0.000000
11/5/2011	4:28:47 PM	H2 MFC set to  0.000000
11/5/2011	4:28:47 PM	BCl3 MFC set to  0.000000
11/5/2011	4:28:47 PM	PHl3 MFC set to  0.000000
11/5/2011	4:28:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:28:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:28:47 PM	Tube furnace set to 150
11/5/2011	4:29:17 PM	H2 valve closed
11/5/2011	4:29:17 PM	BCl3 valve closed
11/5/2011	4:29:17 PM	PH3 valve closed
11/5/2011	4:29:17 PM	SiCl4 pre valve closed
11/5/2011	4:29:17 PM	SiCl4 post valve closed
11/5/2011	4:29:17 PM	Bypass valve closed
11/5/2011	4:29:17 PM	Bubbler valve closed
11/5/2011	4:29:17 PM	Helium valve opened
11/5/2011	4:29:17 PM	Main Vac valve opened
11/5/2011	4:29:17 PM	Helium MFC set to  20.000000
11/5/2011	4:29:17 PM	H2 MFC set to  0.000000
11/5/2011	4:29:17 PM	BCl3 MFC set to  0.000000
11/5/2011	4:29:17 PM	PHl3 MFC set to  0.000000
11/5/2011	4:29:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:29:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:29:17 PM	Tube furnace set to 150
11/5/2011	4:29:48 PM	Helium valve closed
11/5/2011	4:29:48 PM	H2 valve closed
11/5/2011	4:29:48 PM	BCl3 valve closed
11/5/2011	4:29:48 PM	PH3 valve closed
11/5/2011	4:29:48 PM	SiCl4 pre valve closed
11/5/2011	4:29:48 PM	SiCl4 post valve closed
11/5/2011	4:29:48 PM	Bypass valve closed
11/5/2011	4:29:48 PM	Bubbler valve closed
11/5/2011	4:29:48 PM	Main Vac valve opened
11/5/2011	4:29:48 PM	Helium MFC set to  0.000000
11/5/2011	4:29:48 PM	H2 MFC set to  0.000000
11/5/2011	4:29:48 PM	BCl3 MFC set to  0.000000
11/5/2011	4:29:48 PM	PHl3 MFC set to  0.000000
11/5/2011	4:29:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:29:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:29:48 PM	Tube furnace set to 150
11/5/2011	4:30:18 PM	H2 valve closed
11/5/2011	4:30:18 PM	BCl3 valve closed
11/5/2011	4:30:18 PM	PH3 valve closed
11/5/2011	4:30:18 PM	SiCl4 pre valve closed
11/5/2011	4:30:18 PM	SiCl4 post valve closed
11/5/2011	4:30:18 PM	Bypass valve closed
11/5/2011	4:30:18 PM	Bubbler valve closed
11/5/2011	4:30:18 PM	Helium valve opened
11/5/2011	4:30:18 PM	Main Vac valve opened
11/5/2011	4:30:18 PM	Helium MFC set to  20.000000
11/5/2011	4:30:18 PM	H2 MFC set to  0.000000
11/5/2011	4:30:18 PM	BCl3 MFC set to  0.000000
11/5/2011	4:30:18 PM	PHl3 MFC set to  0.000000
11/5/2011	4:30:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:30:18 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:30:18 PM	Tube furnace set to 150
11/5/2011	4:30:48 PM	Helium valve closed
11/5/2011	4:30:48 PM	H2 valve closed
11/5/2011	4:30:48 PM	BCl3 valve closed
11/5/2011	4:30:48 PM	PH3 valve closed
11/5/2011	4:30:48 PM	SiCl4 pre valve closed
11/5/2011	4:30:48 PM	SiCl4 post valve closed
11/5/2011	4:30:48 PM	Bypass valve closed
11/5/2011	4:30:48 PM	Bubbler valve closed
11/5/2011	4:30:48 PM	Main Vac valve opened
11/5/2011	4:30:48 PM	Helium MFC set to  0.000000
11/5/2011	4:30:48 PM	H2 MFC set to  0.000000
11/5/2011	4:30:48 PM	BCl3 MFC set to  0.000000
11/5/2011	4:30:48 PM	PHl3 MFC set to  0.000000
11/5/2011	4:30:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:30:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:30:48 PM	Tube furnace set to 150
11/5/2011	4:31:10 PM	Run aborted at 4:31 PM
11/5/2011	4:31:10 PM	Helium valve closed
11/5/2011	4:31:10 PM	H2 valve closed
11/5/2011	4:31:10 PM	BCl3 valve closed
11/5/2011	4:31:10 PM	PH3 valve closed
11/5/2011	4:31:10 PM	SiCl4 pre valve closed
11/5/2011	4:31:10 PM	SiCl4 post valve closed
11/5/2011	4:31:10 PM	Bypass valve closed
11/5/2011	4:31:10 PM	Main Vac valve closed
11/5/2011	4:31:10 PM	Bubbler valve closed
11/5/2011	4:31:10 PM	Helium MFC set to  0.000000
11/5/2011	4:31:10 PM	H2 MFC set to  0.000000
11/5/2011	4:31:10 PM	BCl3 MFC set to  0.000000
11/5/2011	4:31:10 PM	PHl3 MFC set to  0.000000
11/5/2011	4:31:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:31:10 PM	Tube furnace set to 0
11/5/2011	4:31:12 PM	Main Vac valve opened
11/5/2011	4:31:49 PM	Recipe started at 4:31 PM
11/5/2011	4:31:49 PM	Helium valve closed
11/5/2011	4:31:49 PM	H2 valve closed
11/5/2011	4:31:49 PM	BCl3 valve closed
11/5/2011	4:31:49 PM	PH3 valve closed
11/5/2011	4:31:49 PM	SiCl4 pre valve closed
11/5/2011	4:31:49 PM	SiCl4 post valve closed
11/5/2011	4:31:49 PM	Main Vac valve closed
11/5/2011	4:31:49 PM	Bubbler valve closed
11/5/2011	4:31:49 PM	Bypass valve opened
11/5/2011	4:31:49 PM	Helium MFC set to  0.000000
11/5/2011	4:31:49 PM	H2 MFC set to  0.000000
11/5/2011	4:31:49 PM	BCl3 MFC set to  0.000000
11/5/2011	4:31:49 PM	PHl3 MFC set to  0.000000
11/5/2011	4:31:49 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:31:49 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:31:49 PM	Tube furnace set to 180
11/5/2011	4:31:50 PM	Helium valve closed
11/5/2011	4:31:50 PM	H2 valve closed
11/5/2011	4:31:50 PM	BCl3 valve closed
11/5/2011	4:31:50 PM	PH3 valve closed
11/5/2011	4:31:50 PM	SiCl4 pre valve closed
11/5/2011	4:31:50 PM	SiCl4 post valve closed
11/5/2011	4:31:50 PM	Main Vac valve closed
11/5/2011	4:31:50 PM	Bubbler valve closed
11/5/2011	4:31:50 PM	Bypass valve opened
11/5/2011	4:31:50 PM	Helium MFC set to  0.000000
11/5/2011	4:31:50 PM	H2 MFC set to  0.000000
11/5/2011	4:31:50 PM	BCl3 MFC set to  0.000000
11/5/2011	4:31:50 PM	PHl3 MFC set to  0.000000
11/5/2011	4:31:50 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:31:50 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:31:50 PM	Tube furnace set to 150
11/5/2011	4:32:20 PM	Helium valve closed
11/5/2011	4:32:20 PM	H2 valve closed
11/5/2011	4:32:20 PM	BCl3 valve closed
11/5/2011	4:32:20 PM	PH3 valve closed
11/5/2011	4:32:20 PM	SiCl4 pre valve closed
11/5/2011	4:32:20 PM	SiCl4 post valve closed
11/5/2011	4:32:20 PM	Bypass valve closed
11/5/2011	4:32:20 PM	Bubbler valve closed
11/5/2011	4:32:20 PM	Main Vac valve opened
11/5/2011	4:32:20 PM	Helium MFC set to  0.000000
11/5/2011	4:32:20 PM	H2 MFC set to  0.000000
11/5/2011	4:32:20 PM	BCl3 MFC set to  0.000000
11/5/2011	4:32:20 PM	PHl3 MFC set to  0.000000
11/5/2011	4:32:20 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:32:20 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:32:20 PM	Tube furnace set to 180
11/5/2011	4:32:50 PM	H2 valve closed
11/5/2011	4:32:50 PM	BCl3 valve closed
11/5/2011	4:32:50 PM	PH3 valve closed
11/5/2011	4:32:50 PM	SiCl4 pre valve closed
11/5/2011	4:32:50 PM	SiCl4 post valve closed
11/5/2011	4:32:50 PM	Bypass valve closed
11/5/2011	4:32:50 PM	Bubbler valve closed
11/5/2011	4:32:50 PM	Helium valve opened
11/5/2011	4:32:50 PM	Main Vac valve opened
11/5/2011	4:32:50 PM	Helium MFC set to  20.000000
11/5/2011	4:32:50 PM	H2 MFC set to  0.000000
11/5/2011	4:32:50 PM	BCl3 MFC set to  0.000000
11/5/2011	4:32:50 PM	PHl3 MFC set to  0.000000
11/5/2011	4:32:50 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:32:50 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:32:50 PM	Tube furnace set to 180
11/5/2011	4:33:20 PM	Helium valve closed
11/5/2011	4:33:20 PM	H2 valve closed
11/5/2011	4:33:20 PM	BCl3 valve closed
11/5/2011	4:33:20 PM	PH3 valve closed
11/5/2011	4:33:20 PM	SiCl4 pre valve closed
11/5/2011	4:33:20 PM	SiCl4 post valve closed
11/5/2011	4:33:20 PM	Bypass valve closed
11/5/2011	4:33:20 PM	Bubbler valve closed
11/5/2011	4:33:20 PM	Main Vac valve opened
11/5/2011	4:33:20 PM	Helium MFC set to  0.000000
11/5/2011	4:33:20 PM	H2 MFC set to  0.000000
11/5/2011	4:33:20 PM	BCl3 MFC set to  0.000000
11/5/2011	4:33:20 PM	PHl3 MFC set to  0.000000
11/5/2011	4:33:20 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:33:20 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:33:20 PM	Tube furnace set to 150
11/5/2011	4:33:51 PM	H2 valve closed
11/5/2011	4:33:51 PM	BCl3 valve closed
11/5/2011	4:33:51 PM	PH3 valve closed
11/5/2011	4:33:51 PM	SiCl4 pre valve closed
11/5/2011	4:33:51 PM	SiCl4 post valve closed
11/5/2011	4:33:51 PM	Bypass valve closed
11/5/2011	4:33:51 PM	Bubbler valve closed
11/5/2011	4:33:51 PM	Helium valve opened
11/5/2011	4:33:51 PM	Main Vac valve opened
11/5/2011	4:33:51 PM	Helium MFC set to  20.000000
11/5/2011	4:33:51 PM	H2 MFC set to  0.000000
11/5/2011	4:33:51 PM	BCl3 MFC set to  0.000000
11/5/2011	4:33:51 PM	PHl3 MFC set to  0.000000
11/5/2011	4:33:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:33:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:33:51 PM	Tube furnace set to 180
11/5/2011	4:34:21 PM	Helium valve closed
11/5/2011	4:34:21 PM	H2 valve closed
11/5/2011	4:34:21 PM	BCl3 valve closed
11/5/2011	4:34:21 PM	PH3 valve closed
11/5/2011	4:34:21 PM	SiCl4 pre valve closed
11/5/2011	4:34:21 PM	SiCl4 post valve closed
11/5/2011	4:34:21 PM	Bypass valve closed
11/5/2011	4:34:21 PM	Bubbler valve closed
11/5/2011	4:34:21 PM	Main Vac valve opened
11/5/2011	4:34:21 PM	Helium MFC set to  0.000000
11/5/2011	4:34:21 PM	H2 MFC set to  0.000000
11/5/2011	4:34:21 PM	BCl3 MFC set to  0.000000
11/5/2011	4:34:21 PM	PHl3 MFC set to  0.000000
11/5/2011	4:34:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:34:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:34:21 PM	Tube furnace set to 150
11/5/2011	4:34:51 PM	H2 valve closed
11/5/2011	4:34:51 PM	BCl3 valve closed
11/5/2011	4:34:51 PM	PH3 valve closed
11/5/2011	4:34:51 PM	SiCl4 pre valve closed
11/5/2011	4:34:51 PM	SiCl4 post valve closed
11/5/2011	4:34:51 PM	Bypass valve closed
11/5/2011	4:34:51 PM	Bubbler valve closed
11/5/2011	4:34:51 PM	Helium valve opened
11/5/2011	4:34:51 PM	Main Vac valve opened
11/5/2011	4:34:51 PM	Helium MFC set to  20.000000
11/5/2011	4:34:51 PM	H2 MFC set to  0.000000
11/5/2011	4:34:51 PM	BCl3 MFC set to  0.000000
11/5/2011	4:34:51 PM	PHl3 MFC set to  0.000000
11/5/2011	4:34:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:34:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:34:51 PM	Tube furnace set to 150
11/5/2011	4:35:21 PM	Helium valve closed
11/5/2011	4:35:21 PM	H2 valve closed
11/5/2011	4:35:21 PM	BCl3 valve closed
11/5/2011	4:35:21 PM	PH3 valve closed
11/5/2011	4:35:21 PM	SiCl4 pre valve closed
11/5/2011	4:35:21 PM	SiCl4 post valve closed
11/5/2011	4:35:21 PM	Bypass valve closed
11/5/2011	4:35:21 PM	Bubbler valve closed
11/5/2011	4:35:21 PM	Main Vac valve opened
11/5/2011	4:35:21 PM	Helium MFC set to  0.000000
11/5/2011	4:35:21 PM	H2 MFC set to  0.000000
11/5/2011	4:35:21 PM	BCl3 MFC set to  0.000000
11/5/2011	4:35:21 PM	PHl3 MFC set to  0.000000
11/5/2011	4:35:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:35:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:35:21 PM	Tube furnace set to 150
11/5/2011	4:35:51 PM	H2 valve closed
11/5/2011	4:35:51 PM	BCl3 valve closed
11/5/2011	4:35:51 PM	PH3 valve closed
11/5/2011	4:35:51 PM	SiCl4 pre valve closed
11/5/2011	4:35:51 PM	SiCl4 post valve closed
11/5/2011	4:35:51 PM	Bypass valve closed
11/5/2011	4:35:51 PM	Bubbler valve closed
11/5/2011	4:35:51 PM	Helium valve opened
11/5/2011	4:35:51 PM	Main Vac valve opened
11/5/2011	4:35:51 PM	Helium MFC set to  20.000000
11/5/2011	4:35:51 PM	H2 MFC set to  0.000000
11/5/2011	4:35:51 PM	BCl3 MFC set to  0.000000
11/5/2011	4:35:51 PM	PHl3 MFC set to  0.000000
11/5/2011	4:35:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:35:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:35:51 PM	Tube furnace set to 180
11/5/2011	4:36:21 PM	Helium valve closed
11/5/2011	4:36:21 PM	H2 valve closed
11/5/2011	4:36:22 PM	BCl3 valve closed
11/5/2011	4:36:22 PM	PH3 valve closed
11/5/2011	4:36:22 PM	SiCl4 pre valve closed
11/5/2011	4:36:22 PM	SiCl4 post valve closed
11/5/2011	4:36:22 PM	Bypass valve closed
11/5/2011	4:36:22 PM	Bubbler valve closed
11/5/2011	4:36:22 PM	Main Vac valve opened
11/5/2011	4:36:22 PM	Helium MFC set to  0.000000
11/5/2011	4:36:22 PM	H2 MFC set to  0.000000
11/5/2011	4:36:22 PM	BCl3 MFC set to  0.000000
11/5/2011	4:36:22 PM	PHl3 MFC set to  0.000000
11/5/2011	4:36:22 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:36:22 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:36:22 PM	Tube furnace set to 150
11/5/2011	4:36:52 PM	H2 valve closed
11/5/2011	4:36:52 PM	BCl3 valve closed
11/5/2011	4:36:52 PM	PH3 valve closed
11/5/2011	4:36:52 PM	SiCl4 pre valve closed
11/5/2011	4:36:52 PM	SiCl4 post valve closed
11/5/2011	4:36:52 PM	Bypass valve closed
11/5/2011	4:36:52 PM	Bubbler valve closed
11/5/2011	4:36:52 PM	Helium valve opened
11/5/2011	4:36:52 PM	Main Vac valve opened
11/5/2011	4:36:52 PM	Helium MFC set to  20.000000
11/5/2011	4:36:52 PM	H2 MFC set to  0.000000
11/5/2011	4:36:52 PM	BCl3 MFC set to  0.000000
11/5/2011	4:36:52 PM	PHl3 MFC set to  0.000000
11/5/2011	4:36:52 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:36:52 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:36:52 PM	Tube furnace set to 150
11/5/2011	4:37:22 PM	Helium valve closed
11/5/2011	4:37:22 PM	H2 valve closed
11/5/2011	4:37:22 PM	BCl3 valve closed
11/5/2011	4:37:22 PM	PH3 valve closed
11/5/2011	4:37:22 PM	SiCl4 pre valve closed
11/5/2011	4:37:22 PM	SiCl4 post valve closed
11/5/2011	4:37:22 PM	Bypass valve closed
11/5/2011	4:37:22 PM	Bubbler valve closed
11/5/2011	4:37:22 PM	Main Vac valve opened
11/5/2011	4:37:22 PM	Helium MFC set to  0.000000
11/5/2011	4:37:22 PM	H2 MFC set to  0.000000
11/5/2011	4:37:22 PM	BCl3 MFC set to  0.000000
11/5/2011	4:37:22 PM	PHl3 MFC set to  0.000000
11/5/2011	4:37:22 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:37:22 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:37:22 PM	Tube furnace set to 150
11/5/2011	4:37:52 PM	H2 valve closed
11/5/2011	4:37:52 PM	BCl3 valve closed
11/5/2011	4:37:52 PM	PH3 valve closed
11/5/2011	4:37:52 PM	SiCl4 pre valve closed
11/5/2011	4:37:52 PM	SiCl4 post valve closed
11/5/2011	4:37:52 PM	Bypass valve closed
11/5/2011	4:37:52 PM	Bubbler valve closed
11/5/2011	4:37:52 PM	Helium valve opened
11/5/2011	4:37:52 PM	Main Vac valve opened
11/5/2011	4:37:52 PM	Helium MFC set to  20.000000
11/5/2011	4:37:52 PM	H2 MFC set to  0.000000
11/5/2011	4:37:52 PM	BCl3 MFC set to  0.000000
11/5/2011	4:37:52 PM	PHl3 MFC set to  0.000000
11/5/2011	4:37:52 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:37:52 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:37:52 PM	Tube furnace set to 150
11/5/2011	4:38:22 PM	Helium valve closed
11/5/2011	4:38:22 PM	H2 valve closed
11/5/2011	4:38:22 PM	BCl3 valve closed
11/5/2011	4:38:22 PM	PH3 valve closed
11/5/2011	4:38:22 PM	SiCl4 pre valve closed
11/5/2011	4:38:22 PM	SiCl4 post valve closed
11/5/2011	4:38:22 PM	Bypass valve closed
11/5/2011	4:38:22 PM	Bubbler valve closed
11/5/2011	4:38:22 PM	Main Vac valve opened
11/5/2011	4:38:22 PM	Helium MFC set to  0.000000
11/5/2011	4:38:22 PM	H2 MFC set to  0.000000
11/5/2011	4:38:22 PM	BCl3 MFC set to  0.000000
11/5/2011	4:38:22 PM	PHl3 MFC set to  0.000000
11/5/2011	4:38:22 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:38:22 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:38:22 PM	Tube furnace set to 150
11/5/2011	4:38:52 PM	H2 valve closed
11/5/2011	4:38:52 PM	BCl3 valve closed
11/5/2011	4:38:52 PM	PH3 valve closed
11/5/2011	4:38:52 PM	SiCl4 pre valve closed
11/5/2011	4:38:52 PM	SiCl4 post valve closed
11/5/2011	4:38:52 PM	Bypass valve closed
11/5/2011	4:38:52 PM	Bubbler valve closed
11/5/2011	4:38:52 PM	Helium valve opened
11/5/2011	4:38:52 PM	Main Vac valve opened
11/5/2011	4:38:52 PM	Helium MFC set to  20.000000
11/5/2011	4:38:52 PM	H2 MFC set to  0.000000
11/5/2011	4:38:52 PM	BCl3 MFC set to  0.000000
11/5/2011	4:38:52 PM	PHl3 MFC set to  0.000000
11/5/2011	4:38:53 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:38:53 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:38:53 PM	Tube furnace set to 150
11/5/2011	4:39:23 PM	Helium valve closed
11/5/2011	4:39:23 PM	H2 valve closed
11/5/2011	4:39:23 PM	BCl3 valve closed
11/5/2011	4:39:23 PM	PH3 valve closed
11/5/2011	4:39:23 PM	SiCl4 pre valve closed
11/5/2011	4:39:23 PM	SiCl4 post valve closed
11/5/2011	4:39:23 PM	Bypass valve closed
11/5/2011	4:39:23 PM	Bubbler valve closed
11/5/2011	4:39:23 PM	Main Vac valve opened
11/5/2011	4:39:23 PM	Helium MFC set to  0.000000
11/5/2011	4:39:23 PM	H2 MFC set to  0.000000
11/5/2011	4:39:23 PM	BCl3 MFC set to  0.000000
11/5/2011	4:39:23 PM	PHl3 MFC set to  0.000000
11/5/2011	4:39:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:39:23 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:39:23 PM	Tube furnace set to 150
11/5/2011	4:39:53 PM	H2 valve closed
11/5/2011	4:39:53 PM	BCl3 valve closed
11/5/2011	4:39:53 PM	PH3 valve closed
11/5/2011	4:39:53 PM	SiCl4 pre valve closed
11/5/2011	4:39:53 PM	SiCl4 post valve closed
11/5/2011	4:39:53 PM	Bypass valve closed
11/5/2011	4:39:53 PM	Bubbler valve closed
11/5/2011	4:39:53 PM	Helium valve opened
11/5/2011	4:39:53 PM	Main Vac valve opened
11/5/2011	4:39:53 PM	Helium MFC set to  20.000000
11/5/2011	4:39:53 PM	H2 MFC set to  0.000000
11/5/2011	4:39:53 PM	BCl3 MFC set to  0.000000
11/5/2011	4:39:53 PM	PHl3 MFC set to  0.000000
11/5/2011	4:39:53 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:39:53 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:39:53 PM	Tube furnace set to 150
11/5/2011	4:40:23 PM	Helium valve closed
11/5/2011	4:40:23 PM	H2 valve closed
11/5/2011	4:40:23 PM	BCl3 valve closed
11/5/2011	4:40:23 PM	PH3 valve closed
11/5/2011	4:40:23 PM	SiCl4 pre valve closed
11/5/2011	4:40:23 PM	SiCl4 post valve closed
11/5/2011	4:40:23 PM	Bypass valve closed
11/5/2011	4:40:23 PM	Bubbler valve closed
11/5/2011	4:40:23 PM	Main Vac valve opened
11/5/2011	4:40:23 PM	Helium MFC set to  0.000000
11/5/2011	4:40:23 PM	H2 MFC set to  0.000000
11/5/2011	4:40:23 PM	BCl3 MFC set to  0.000000
11/5/2011	4:40:23 PM	PHl3 MFC set to  0.000000
11/5/2011	4:40:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:40:23 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:40:23 PM	Tube furnace set to 150
11/5/2011	4:40:53 PM	H2 valve closed
11/5/2011	4:40:53 PM	BCl3 valve closed
11/5/2011	4:40:53 PM	PH3 valve closed
11/5/2011	4:40:53 PM	SiCl4 pre valve closed
11/5/2011	4:40:53 PM	SiCl4 post valve closed
11/5/2011	4:40:53 PM	Bypass valve closed
11/5/2011	4:40:53 PM	Bubbler valve closed
11/5/2011	4:40:53 PM	Helium valve opened
11/5/2011	4:40:53 PM	Main Vac valve opened
11/5/2011	4:40:53 PM	Helium MFC set to  20.000000
11/5/2011	4:40:53 PM	H2 MFC set to  0.000000
11/5/2011	4:40:53 PM	BCl3 MFC set to  0.000000
11/5/2011	4:40:53 PM	PHl3 MFC set to  0.000000
11/5/2011	4:40:53 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:40:53 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:40:53 PM	Tube furnace set to 150
11/5/2011	4:41:23 PM	Helium valve closed
11/5/2011	4:41:23 PM	H2 valve closed
11/5/2011	4:41:23 PM	BCl3 valve closed
11/5/2011	4:41:23 PM	PH3 valve closed
11/5/2011	4:41:23 PM	SiCl4 pre valve closed
11/5/2011	4:41:23 PM	SiCl4 post valve closed
11/5/2011	4:41:23 PM	Bypass valve closed
11/5/2011	4:41:23 PM	Bubbler valve closed
11/5/2011	4:41:23 PM	Main Vac valve opened
11/5/2011	4:41:23 PM	Helium MFC set to  0.000000
11/5/2011	4:41:23 PM	H2 MFC set to  0.000000
11/5/2011	4:41:23 PM	BCl3 MFC set to  0.000000
11/5/2011	4:41:23 PM	PHl3 MFC set to  0.000000
11/5/2011	4:41:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:41:23 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:41:24 PM	Tube furnace set to 150
11/5/2011	4:41:54 PM	H2 valve closed
11/5/2011	4:41:54 PM	BCl3 valve closed
11/5/2011	4:41:54 PM	PH3 valve closed
11/5/2011	4:41:54 PM	SiCl4 pre valve closed
11/5/2011	4:41:54 PM	SiCl4 post valve closed
11/5/2011	4:41:54 PM	Bypass valve closed
11/5/2011	4:41:54 PM	Bubbler valve closed
11/5/2011	4:41:54 PM	Helium valve opened
11/5/2011	4:41:54 PM	Main Vac valve opened
11/5/2011	4:41:54 PM	Helium MFC set to  20.000000
11/5/2011	4:41:54 PM	H2 MFC set to  0.000000
11/5/2011	4:41:54 PM	BCl3 MFC set to  0.000000
11/5/2011	4:41:54 PM	PHl3 MFC set to  0.000000
11/5/2011	4:41:54 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:41:54 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:41:54 PM	Tube furnace set to 150
11/5/2011	4:42:24 PM	Helium valve closed
11/5/2011	4:42:24 PM	H2 valve closed
11/5/2011	4:42:24 PM	BCl3 valve closed
11/5/2011	4:42:24 PM	PH3 valve closed
11/5/2011	4:42:24 PM	SiCl4 pre valve closed
11/5/2011	4:42:24 PM	SiCl4 post valve closed
11/5/2011	4:42:24 PM	Bypass valve closed
11/5/2011	4:42:24 PM	Bubbler valve closed
11/5/2011	4:42:24 PM	Main Vac valve opened
11/5/2011	4:42:24 PM	Helium MFC set to  0.000000
11/5/2011	4:42:24 PM	H2 MFC set to  0.000000
11/5/2011	4:42:24 PM	BCl3 MFC set to  0.000000
11/5/2011	4:42:24 PM	PHl3 MFC set to  0.000000
11/5/2011	4:42:24 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:42:24 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:42:24 PM	Tube furnace set to 150
11/5/2011	4:42:54 PM	H2 valve closed
11/5/2011	4:42:54 PM	BCl3 valve closed
11/5/2011	4:42:54 PM	PH3 valve closed
11/5/2011	4:42:54 PM	SiCl4 pre valve closed
11/5/2011	4:42:54 PM	SiCl4 post valve closed
11/5/2011	4:42:54 PM	Bypass valve closed
11/5/2011	4:42:54 PM	Bubbler valve closed
11/5/2011	4:42:54 PM	Helium valve opened
11/5/2011	4:42:54 PM	Main Vac valve opened
11/5/2011	4:42:54 PM	Helium MFC set to  20.000000
11/5/2011	4:42:54 PM	H2 MFC set to  0.000000
11/5/2011	4:42:54 PM	BCl3 MFC set to  0.000000
11/5/2011	4:42:54 PM	PHl3 MFC set to  0.000000
11/5/2011	4:42:54 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:42:54 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:42:54 PM	Tube furnace set to 150
11/5/2011	4:43:24 PM	Helium valve closed
11/5/2011	4:43:24 PM	H2 valve closed
11/5/2011	4:43:24 PM	BCl3 valve closed
11/5/2011	4:43:24 PM	PH3 valve closed
11/5/2011	4:43:24 PM	SiCl4 pre valve closed
11/5/2011	4:43:24 PM	SiCl4 post valve closed
11/5/2011	4:43:24 PM	Bypass valve closed
11/5/2011	4:43:24 PM	Bubbler valve closed
11/5/2011	4:43:24 PM	Main Vac valve opened
11/5/2011	4:43:24 PM	Helium MFC set to  0.000000
11/5/2011	4:43:24 PM	H2 MFC set to  0.000000
11/5/2011	4:43:24 PM	BCl3 MFC set to  0.000000
11/5/2011	4:43:24 PM	PHl3 MFC set to  0.000000
11/5/2011	4:43:24 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:43:24 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:43:25 PM	Tube furnace set to 150
11/5/2011	4:43:55 PM	H2 valve closed
11/5/2011	4:43:55 PM	BCl3 valve closed
11/5/2011	4:43:55 PM	PH3 valve closed
11/5/2011	4:43:55 PM	SiCl4 pre valve closed
11/5/2011	4:43:55 PM	SiCl4 post valve closed
11/5/2011	4:43:55 PM	Bypass valve closed
11/5/2011	4:43:55 PM	Bubbler valve closed
11/5/2011	4:43:55 PM	Helium valve opened
11/5/2011	4:43:55 PM	Main Vac valve opened
11/5/2011	4:43:55 PM	Helium MFC set to  20.000000
11/5/2011	4:43:55 PM	H2 MFC set to  0.000000
11/5/2011	4:43:55 PM	BCl3 MFC set to  0.000000
11/5/2011	4:43:55 PM	PHl3 MFC set to  0.000000
11/5/2011	4:43:55 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:43:55 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:43:55 PM	Tube furnace set to 150
11/5/2011	4:44:25 PM	Helium valve closed
11/5/2011	4:44:25 PM	H2 valve closed
11/5/2011	4:44:25 PM	BCl3 valve closed
11/5/2011	4:44:25 PM	PH3 valve closed
11/5/2011	4:44:25 PM	SiCl4 pre valve closed
11/5/2011	4:44:25 PM	SiCl4 post valve closed
11/5/2011	4:44:25 PM	Bypass valve closed
11/5/2011	4:44:25 PM	Bubbler valve closed
11/5/2011	4:44:25 PM	Main Vac valve opened
11/5/2011	4:44:25 PM	Helium MFC set to  0.000000
11/5/2011	4:44:25 PM	H2 MFC set to  0.000000
11/5/2011	4:44:25 PM	BCl3 MFC set to  0.000000
11/5/2011	4:44:25 PM	PHl3 MFC set to  0.000000
11/5/2011	4:44:25 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:44:25 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:44:25 PM	Tube furnace set to 150
11/5/2011	4:44:55 PM	H2 valve closed
11/5/2011	4:44:55 PM	BCl3 valve closed
11/5/2011	4:44:55 PM	PH3 valve closed
11/5/2011	4:44:55 PM	SiCl4 pre valve closed
11/5/2011	4:44:55 PM	SiCl4 post valve closed
11/5/2011	4:44:55 PM	Bypass valve closed
11/5/2011	4:44:55 PM	Bubbler valve closed
11/5/2011	4:44:55 PM	Helium valve opened
11/5/2011	4:44:55 PM	Main Vac valve opened
11/5/2011	4:44:55 PM	Helium MFC set to  20.000000
11/5/2011	4:44:55 PM	H2 MFC set to  0.000000
11/5/2011	4:44:55 PM	BCl3 MFC set to  0.000000
11/5/2011	4:44:55 PM	PHl3 MFC set to  0.000000
11/5/2011	4:44:55 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:44:55 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:44:55 PM	Tube furnace set to 150
11/5/2011	4:45:25 PM	Helium valve closed
11/5/2011	4:45:25 PM	H2 valve closed
11/5/2011	4:45:25 PM	BCl3 valve closed
11/5/2011	4:45:25 PM	PH3 valve closed
11/5/2011	4:45:25 PM	SiCl4 pre valve closed
11/5/2011	4:45:25 PM	SiCl4 post valve closed
11/5/2011	4:45:25 PM	Bypass valve closed
11/5/2011	4:45:25 PM	Bubbler valve closed
11/5/2011	4:45:25 PM	Main Vac valve opened
11/5/2011	4:45:25 PM	Helium MFC set to  0.000000
11/5/2011	4:45:25 PM	H2 MFC set to  0.000000
11/5/2011	4:45:25 PM	BCl3 MFC set to  0.000000
11/5/2011	4:45:25 PM	PHl3 MFC set to  0.000000
11/5/2011	4:45:25 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:45:25 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:45:25 PM	Tube furnace set to 150
11/5/2011	4:45:55 PM	H2 valve closed
11/5/2011	4:45:55 PM	BCl3 valve closed
11/5/2011	4:45:55 PM	PH3 valve closed
11/5/2011	4:45:55 PM	SiCl4 pre valve closed
11/5/2011	4:45:55 PM	SiCl4 post valve closed
11/5/2011	4:45:55 PM	Bypass valve closed
11/5/2011	4:45:55 PM	Bubbler valve closed
11/5/2011	4:45:55 PM	Helium valve opened
11/5/2011	4:45:55 PM	Main Vac valve opened
11/5/2011	4:45:55 PM	Helium MFC set to  20.000000
11/5/2011	4:45:55 PM	H2 MFC set to  0.000000
11/5/2011	4:45:55 PM	BCl3 MFC set to  0.000000
11/5/2011	4:45:55 PM	PHl3 MFC set to  0.000000
11/5/2011	4:45:55 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:45:55 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:45:56 PM	Tube furnace set to 150
11/5/2011	4:46:26 PM	Helium valve closed
11/5/2011	4:46:26 PM	H2 valve closed
11/5/2011	4:46:26 PM	BCl3 valve closed
11/5/2011	4:46:26 PM	PH3 valve closed
11/5/2011	4:46:26 PM	SiCl4 pre valve closed
11/5/2011	4:46:26 PM	SiCl4 post valve closed
11/5/2011	4:46:26 PM	Bypass valve closed
11/5/2011	4:46:26 PM	Bubbler valve closed
11/5/2011	4:46:26 PM	Main Vac valve opened
11/5/2011	4:46:26 PM	Helium MFC set to  0.000000
11/5/2011	4:46:26 PM	H2 MFC set to  0.000000
11/5/2011	4:46:26 PM	BCl3 MFC set to  0.000000
11/5/2011	4:46:26 PM	PHl3 MFC set to  0.000000
11/5/2011	4:46:26 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:46:26 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:46:26 PM	Tube furnace set to 150
11/5/2011	4:46:56 PM	H2 valve closed
11/5/2011	4:46:56 PM	BCl3 valve closed
11/5/2011	4:46:56 PM	PH3 valve closed
11/5/2011	4:46:56 PM	SiCl4 pre valve closed
11/5/2011	4:46:56 PM	SiCl4 post valve closed
11/5/2011	4:46:56 PM	Bypass valve closed
11/5/2011	4:46:56 PM	Bubbler valve closed
11/5/2011	4:46:56 PM	Helium valve opened
11/5/2011	4:46:56 PM	Main Vac valve opened
11/5/2011	4:46:56 PM	Helium MFC set to  20.000000
11/5/2011	4:46:56 PM	H2 MFC set to  0.000000
11/5/2011	4:46:56 PM	BCl3 MFC set to  0.000000
11/5/2011	4:46:56 PM	PHl3 MFC set to  0.000000
11/5/2011	4:46:56 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:46:56 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:46:56 PM	Tube furnace set to 150
11/5/2011	4:47:26 PM	Helium valve closed
11/5/2011	4:47:26 PM	H2 valve closed
11/5/2011	4:47:26 PM	BCl3 valve closed
11/5/2011	4:47:26 PM	PH3 valve closed
11/5/2011	4:47:26 PM	SiCl4 pre valve closed
11/5/2011	4:47:26 PM	SiCl4 post valve closed
11/5/2011	4:47:26 PM	Bypass valve closed
11/5/2011	4:47:26 PM	Bubbler valve closed
11/5/2011	4:47:26 PM	Main Vac valve opened
11/5/2011	4:47:26 PM	Helium MFC set to  0.000000
11/5/2011	4:47:26 PM	H2 MFC set to  0.000000
11/5/2011	4:47:26 PM	BCl3 MFC set to  0.000000
11/5/2011	4:47:26 PM	PHl3 MFC set to  0.000000
11/5/2011	4:47:26 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:47:26 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:47:26 PM	Tube furnace set to 150
11/5/2011	4:47:56 PM	H2 valve closed
11/5/2011	4:47:56 PM	BCl3 valve closed
11/5/2011	4:47:56 PM	PH3 valve closed
11/5/2011	4:47:56 PM	SiCl4 pre valve closed
11/5/2011	4:47:56 PM	SiCl4 post valve closed
11/5/2011	4:47:56 PM	Bypass valve closed
11/5/2011	4:47:56 PM	Bubbler valve closed
11/5/2011	4:47:56 PM	Helium valve opened
11/5/2011	4:47:56 PM	Main Vac valve opened
11/5/2011	4:47:56 PM	Helium MFC set to  20.000000
11/5/2011	4:47:56 PM	H2 MFC set to  0.000000
11/5/2011	4:47:56 PM	BCl3 MFC set to  0.000000
11/5/2011	4:47:56 PM	PHl3 MFC set to  0.000000
11/5/2011	4:47:56 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:47:56 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:47:56 PM	Tube furnace set to 150
11/5/2011	4:48:26 PM	Helium valve closed
11/5/2011	4:48:26 PM	H2 valve closed
11/5/2011	4:48:26 PM	BCl3 valve closed
11/5/2011	4:48:26 PM	PH3 valve closed
11/5/2011	4:48:26 PM	SiCl4 pre valve closed
11/5/2011	4:48:26 PM	SiCl4 post valve closed
11/5/2011	4:48:26 PM	Bypass valve closed
11/5/2011	4:48:26 PM	Bubbler valve closed
11/5/2011	4:48:26 PM	Main Vac valve opened
11/5/2011	4:48:26 PM	Helium MFC set to  0.000000
11/5/2011	4:48:26 PM	H2 MFC set to  0.000000
11/5/2011	4:48:26 PM	BCl3 MFC set to  0.000000
11/5/2011	4:48:26 PM	PHl3 MFC set to  0.000000
11/5/2011	4:48:26 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:48:26 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:48:27 PM	Tube furnace set to 150
11/5/2011	4:48:40 PM	Run aborted at 4:48 PM
11/5/2011	4:48:40 PM	Helium valve closed
11/5/2011	4:48:40 PM	H2 valve closed
11/5/2011	4:48:40 PM	BCl3 valve closed
11/5/2011	4:48:40 PM	PH3 valve closed
11/5/2011	4:48:40 PM	SiCl4 pre valve closed
11/5/2011	4:48:40 PM	SiCl4 post valve closed
11/5/2011	4:48:40 PM	Bypass valve closed
11/5/2011	4:48:40 PM	Main Vac valve closed
11/5/2011	4:48:40 PM	Bubbler valve closed
11/5/2011	4:48:40 PM	Helium MFC set to  0.000000
11/5/2011	4:48:40 PM	H2 MFC set to  0.000000
11/5/2011	4:48:40 PM	BCl3 MFC set to  0.000000
11/5/2011	4:48:40 PM	PHl3 MFC set to  0.000000
11/5/2011	4:48:40 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:48:41 PM	Tube furnace set to 0
11/5/2011	4:48:42 PM	Main Vac valve opened
11/5/2011	4:50:30 PM	Main Vac valve closed
11/5/2011	4:50:42 PM	Main Vac valve opened
11/5/2011	4:51:21 PM	Recipe started at 4:51 PM
11/5/2011	4:51:21 PM	H2 valve closed
11/5/2011	4:51:21 PM	BCl3 valve closed
11/5/2011	4:51:21 PM	PH3 valve closed
11/5/2011	4:51:21 PM	SiCl4 pre valve closed
11/5/2011	4:51:21 PM	SiCl4 post valve closed
11/5/2011	4:51:21 PM	Main Vac valve closed
11/5/2011	4:51:21 PM	Bypass valve closed
11/5/2011	4:51:21 PM	Bubbler valve closed
11/5/2011	4:51:21 PM	Helium valve opened
11/5/2011	4:51:21 PM	Helium MFC set to  0.000000
11/5/2011	4:51:21 PM	H2 MFC set to  0.000000
11/5/2011	4:51:21 PM	BCl3 MFC set to  0.000000
11/5/2011	4:51:21 PM	PHl3 MFC set to  0.000000
11/5/2011	4:51:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:51:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:51:21 PM	Tube furnace set to 0
11/5/2011	4:51:24 PM	Helium valve closed
11/5/2011	4:51:24 PM	BCl3 valve closed
11/5/2011	4:51:24 PM	PH3 valve closed
11/5/2011	4:51:24 PM	SiCl4 pre valve closed
11/5/2011	4:51:24 PM	SiCl4 post valve closed
11/5/2011	4:51:24 PM	Main Vac valve closed
11/5/2011	4:51:24 PM	Bypass valve closed
11/5/2011	4:51:24 PM	Bubbler valve closed
11/5/2011	4:51:24 PM	H2 valve opened
11/5/2011	4:51:24 PM	Helium MFC set to  0.000000
11/5/2011	4:51:24 PM	H2 MFC set to  500.000000
11/5/2011	4:51:24 PM	BCl3 MFC set to  0.000000
11/5/2011	4:51:24 PM	PHl3 MFC set to  0.000000
11/5/2011	4:51:24 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:51:24 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:51:25 PM	Tube furnace set to 100
11/5/2011	4:52:27 PM	Helium valve closed
11/5/2011	4:52:27 PM	BCl3 valve closed
11/5/2011	4:52:27 PM	PH3 valve closed
11/5/2011	4:52:27 PM	SiCl4 pre valve closed
11/5/2011	4:52:27 PM	SiCl4 post valve closed
11/5/2011	4:52:27 PM	Main Vac valve closed
11/5/2011	4:52:27 PM	Bypass valve closed
11/5/2011	4:52:27 PM	H2 valve opened
11/5/2011	4:52:27 PM	Bubbler valve opened
11/5/2011	4:52:27 PM	Helium MFC set to  0.000000
11/5/2011	4:52:27 PM	H2 MFC set to  500.000000
11/5/2011	4:52:27 PM	BCl3 MFC set to  0.000000
11/5/2011	4:52:27 PM	PHl3 MFC set to  0.000000
11/5/2011	4:52:27 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:52:27 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:52:27 PM	Tube furnace set to 1000
11/5/2011	4:52:28 PM	Helium valve closed
11/5/2011	4:52:28 PM	BCl3 valve closed
11/5/2011	4:52:28 PM	PH3 valve closed
11/5/2011	4:52:28 PM	SiCl4 pre valve closed
11/5/2011	4:52:28 PM	SiCl4 post valve closed
11/5/2011	4:52:28 PM	Main Vac valve closed
11/5/2011	4:52:28 PM	Bypass valve closed
11/5/2011	4:52:28 PM	H2 valve opened
11/5/2011	4:52:28 PM	Bubbler valve opened
11/5/2011	4:52:28 PM	Helium MFC set to  0.000000
11/5/2011	4:52:28 PM	H2 MFC set to  500.000000
11/5/2011	4:52:28 PM	BCl3 MFC set to  0.000000
11/5/2011	4:52:28 PM	PHl3 MFC set to  0.000000
11/5/2011	4:52:28 PM	SiCl4 MFC set to  0.000000
11/5/2011	4:52:28 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	4:52:29 PM	Tube furnace set to 1000
11/5/2011	5:12:28 PM	Helium valve closed
11/5/2011	5:12:28 PM	BCl3 valve closed
11/5/2011	5:12:28 PM	PH3 valve closed
11/5/2011	5:12:28 PM	Main Vac valve closed
11/5/2011	5:12:28 PM	Bypass valve closed
11/5/2011	5:12:28 PM	H2 valve opened
11/5/2011	5:12:28 PM	SiCl4 pre valve opened
11/5/2011	5:12:28 PM	SiCl4 post valve opened
11/5/2011	5:12:28 PM	Bubbler valve opened
11/5/2011	5:12:28 PM	Helium MFC set to  0.000000
11/5/2011	5:12:28 PM	H2 MFC set to  500.000000
11/5/2011	5:12:28 PM	BCl3 MFC set to  0.000000
11/5/2011	5:12:28 PM	PHl3 MFC set to  0.000000
11/5/2011	5:12:28 PM	SiCl4 MFC set to  18.000000
11/5/2011	5:12:28 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	5:12:29 PM	Tube furnace set to 1000
11/5/2011	5:30:29 PM	Helium valve closed
11/5/2011	5:30:29 PM	BCl3 valve closed
11/5/2011	5:30:29 PM	PH3 valve closed
11/5/2011	5:30:29 PM	SiCl4 pre valve closed
11/5/2011	5:30:29 PM	SiCl4 post valve closed
11/5/2011	5:30:29 PM	Main Vac valve closed
11/5/2011	5:30:29 PM	Bypass valve closed
11/5/2011	5:30:29 PM	H2 valve opened
11/5/2011	5:30:29 PM	Bubbler valve opened
11/5/2011	5:30:29 PM	Helium MFC set to  0.000000
11/5/2011	5:30:29 PM	H2 MFC set to  500.000000
11/5/2011	5:30:29 PM	BCl3 MFC set to  0.000000
11/5/2011	5:30:29 PM	PHl3 MFC set to  0.000000
11/5/2011	5:30:29 PM	SiCl4 MFC set to  0.000000
11/5/2011	5:30:29 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	5:30:29 PM	Tube furnace set to 750
11/5/2011	5:40:23 PM	H2 valve closed
11/5/2011	5:40:23 PM	BCl3 valve closed
11/5/2011	5:40:23 PM	PH3 valve closed
11/5/2011	5:40:23 PM	SiCl4 pre valve closed
11/5/2011	5:40:23 PM	SiCl4 post valve closed
11/5/2011	5:40:23 PM	Main Vac valve closed
11/5/2011	5:40:23 PM	Bypass valve closed
11/5/2011	5:40:23 PM	Helium valve opened
11/5/2011	5:40:23 PM	Bubbler valve opened
11/5/2011	5:40:23 PM	Helium MFC set to  400.000000
11/5/2011	5:40:23 PM	H2 MFC set to  0.000000
11/5/2011	5:40:23 PM	BCl3 MFC set to  0.000000
11/5/2011	5:40:23 PM	PHl3 MFC set to  0.000000
11/5/2011	5:40:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	5:40:23 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	5:40:23 PM	Tube furnace set to 0
11/5/2011	5:42:16 PM	Run aborted at 5:42 PM
11/5/2011	5:42:16 PM	Helium valve closed
11/5/2011	5:42:16 PM	H2 valve closed
11/5/2011	5:42:16 PM	BCl3 valve closed
11/5/2011	5:42:16 PM	PH3 valve closed
11/5/2011	5:42:16 PM	SiCl4 pre valve closed
11/5/2011	5:42:16 PM	SiCl4 post valve closed
11/5/2011	5:42:16 PM	Bypass valve closed
11/5/2011	5:42:16 PM	Main Vac valve closed
11/5/2011	5:42:16 PM	Bubbler valve closed
11/5/2011	5:42:16 PM	Helium MFC set to  0.000000
11/5/2011	5:42:16 PM	H2 MFC set to  0.000000
11/5/2011	5:42:16 PM	BCl3 MFC set to  0.000000
11/5/2011	5:42:16 PM	PHl3 MFC set to  0.000000
11/5/2011	5:42:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	5:42:17 PM	Tube furnace set to 0
11/5/2011	5:42:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	5:42:20 PM	Recipe started at 5:42 PM
11/5/2011	5:42:20 PM	Helium valve closed
11/5/2011	5:42:20 PM	H2 valve closed
11/5/2011	5:42:20 PM	BCl3 valve closed
11/5/2011	5:42:20 PM	PH3 valve closed
11/5/2011	5:42:20 PM	SiCl4 pre valve closed
11/5/2011	5:42:20 PM	SiCl4 post valve closed
11/5/2011	5:42:20 PM	Main Vac valve closed
11/5/2011	5:42:20 PM	Bypass valve closed
11/5/2011	5:42:20 PM	Bubbler valve closed
11/5/2011	5:42:20 PM	Helium MFC set to  0.000000
11/5/2011	5:42:20 PM	H2 MFC set to  0.000000
11/5/2011	5:42:20 PM	BCl3 MFC set to  0.000000
11/5/2011	5:42:20 PM	PHl3 MFC set to  0.000000
11/5/2011	5:42:20 PM	SiCl4 MFC set to  0.000000
11/5/2011	5:42:20 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	5:42:20 PM	Tube furnace set to 0
11/5/2011	5:42:23 PM	H2 valve closed
11/5/2011	5:42:23 PM	BCl3 valve closed
11/5/2011	5:42:23 PM	PH3 valve closed
11/5/2011	5:42:23 PM	SiCl4 pre valve closed
11/5/2011	5:42:24 PM	SiCl4 post valve closed
11/5/2011	5:42:24 PM	Main Vac valve closed
11/5/2011	5:42:24 PM	Bypass valve closed
11/5/2011	5:42:24 PM	Bubbler valve closed
11/5/2011	5:42:24 PM	Helium valve opened
11/5/2011	5:42:24 PM	Helium MFC set to  500.000000
11/5/2011	5:42:24 PM	H2 MFC set to  0.000000
11/5/2011	5:42:24 PM	BCl3 MFC set to  0.000000
11/5/2011	5:42:24 PM	PHl3 MFC set to  0.000000
11/5/2011	5:42:24 PM	SiCl4 MFC set to  0.000000
11/5/2011	5:42:24 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	5:42:24 PM	Tube furnace set to 0
11/5/2011	5:42:24 PM	Helium valve closed
11/5/2011	5:42:24 PM	H2 valve closed
11/5/2011	5:42:24 PM	BCl3 valve closed
11/5/2011	5:42:24 PM	PH3 valve closed
11/5/2011	5:42:24 PM	SiCl4 pre valve closed
11/5/2011	5:42:24 PM	SiCl4 post valve closed
11/5/2011	5:42:24 PM	Main Vac valve closed
11/5/2011	5:42:24 PM	Bypass valve closed
11/5/2011	5:42:24 PM	Bubbler valve closed
11/5/2011	5:42:24 PM	Helium MFC set to  0.000000
11/5/2011	5:42:24 PM	H2 MFC set to  0.000000
11/5/2011	5:42:24 PM	BCl3 MFC set to  0.000000
11/5/2011	5:42:24 PM	PHl3 MFC set to  0.000000
11/5/2011	5:42:24 PM	SiCl4 MFC set to  0.000000
11/5/2011	5:42:24 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	5:42:24 PM	Tube furnace set to 0
11/5/2011	5:42:25 PM	Run finished at 5:42 PM
11/5/2011	5:42:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	5:48:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	5:48:18 PM	Recipe started at 5:48 PM
11/5/2011	5:48:18 PM	Helium valve closed
11/5/2011	5:48:18 PM	H2 valve closed
11/5/2011	5:48:18 PM	BCl3 valve closed
11/5/2011	5:48:18 PM	PH3 valve closed
11/5/2011	5:48:18 PM	SiCl4 pre valve closed
11/5/2011	5:48:18 PM	SiCl4 post valve closed
11/5/2011	5:48:18 PM	Main Vac valve closed
11/5/2011	5:48:18 PM	Bubbler valve closed
11/5/2011	5:48:18 PM	Bypass valve opened
11/5/2011	5:48:18 PM	Helium MFC set to  0.000000
11/5/2011	5:48:18 PM	H2 MFC set to  0.000000
11/5/2011	5:48:18 PM	BCl3 MFC set to  0.000000
11/5/2011	5:48:18 PM	PHl3 MFC set to  0.000000
11/5/2011	5:48:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	5:48:18 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	5:48:18 PM	Tube furnace set to 0
11/5/2011	5:49:21 PM	Helium valve closed
11/5/2011	5:49:21 PM	H2 valve closed
11/5/2011	5:49:21 PM	BCl3 valve closed
11/5/2011	5:49:21 PM	PH3 valve closed
11/5/2011	5:49:21 PM	SiCl4 pre valve closed
11/5/2011	5:49:21 PM	SiCl4 post valve closed
11/5/2011	5:49:21 PM	Main Vac valve closed
11/5/2011	5:49:21 PM	Bubbler valve closed
11/5/2011	5:49:21 PM	Bypass valve opened
11/5/2011	5:49:21 PM	Helium MFC set to  0.000000
11/5/2011	5:49:21 PM	H2 MFC set to  0.000000
11/5/2011	5:49:21 PM	BCl3 MFC set to  0.000000
11/5/2011	5:49:21 PM	PHl3 MFC set to  0.000000
11/5/2011	5:49:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	5:49:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	5:49:21 PM	Tube furnace set to 0
11/5/2011	5:50:21 PM	Helium valve closed
11/5/2011	5:50:21 PM	H2 valve closed
11/5/2011	5:50:21 PM	BCl3 valve closed
11/5/2011	5:50:21 PM	PH3 valve closed
11/5/2011	5:50:21 PM	SiCl4 pre valve closed
11/5/2011	5:50:21 PM	SiCl4 post valve closed
11/5/2011	5:50:21 PM	Bypass valve closed
11/5/2011	5:50:21 PM	Bubbler valve closed
11/5/2011	5:50:21 PM	Main Vac valve opened
11/5/2011	5:50:21 PM	Helium MFC set to  0.000000
11/5/2011	5:50:21 PM	H2 MFC set to  0.000000
11/5/2011	5:50:21 PM	BCl3 MFC set to  0.000000
11/5/2011	5:50:21 PM	PHl3 MFC set to  0.000000
11/5/2011	5:50:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	5:50:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	5:50:22 PM	Tube furnace set to 0
11/5/2011	5:50:23 PM	Run finished at 5:50 PM
11/5/2011	5:50:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	6:00:34 PM	Recipe started at 6:00 PM
11/5/2011	6:00:34 PM	Helium valve closed
11/5/2011	6:00:34 PM	H2 valve closed
11/5/2011	6:00:34 PM	BCl3 valve closed
11/5/2011	6:00:34 PM	PH3 valve closed
11/5/2011	6:00:34 PM	SiCl4 pre valve closed
11/5/2011	6:00:34 PM	SiCl4 post valve closed
11/5/2011	6:00:34 PM	Main Vac valve closed
11/5/2011	6:00:34 PM	Bubbler valve closed
11/5/2011	6:00:34 PM	Bypass valve opened
11/5/2011	6:00:34 PM	Helium MFC set to  0.000000
11/5/2011	6:00:34 PM	H2 MFC set to  0.000000
11/5/2011	6:00:34 PM	BCl3 MFC set to  0.000000
11/5/2011	6:00:34 PM	PHl3 MFC set to  0.000000
11/5/2011	6:00:34 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:00:34 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:00:34 PM	Tube furnace set to 180
11/5/2011	6:00:34 PM	Helium valve closed
11/5/2011	6:00:34 PM	H2 valve closed
11/5/2011	6:00:34 PM	BCl3 valve closed
11/5/2011	6:00:34 PM	PH3 valve closed
11/5/2011	6:00:34 PM	SiCl4 pre valve closed
11/5/2011	6:00:34 PM	SiCl4 post valve closed
11/5/2011	6:00:34 PM	Main Vac valve closed
11/5/2011	6:00:34 PM	Bubbler valve closed
11/5/2011	6:00:34 PM	Bypass valve opened
11/5/2011	6:00:34 PM	Helium MFC set to  0.000000
11/5/2011	6:00:34 PM	H2 MFC set to  0.000000
11/5/2011	6:00:34 PM	BCl3 MFC set to  0.000000
11/5/2011	6:00:34 PM	PHl3 MFC set to  0.000000
11/5/2011	6:00:34 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:00:34 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:00:35 PM	Tube furnace set to 150
11/5/2011	6:01:05 PM	Helium valve closed
11/5/2011	6:01:05 PM	H2 valve closed
11/5/2011	6:01:05 PM	BCl3 valve closed
11/5/2011	6:01:05 PM	PH3 valve closed
11/5/2011	6:01:05 PM	SiCl4 pre valve closed
11/5/2011	6:01:05 PM	SiCl4 post valve closed
11/5/2011	6:01:05 PM	Bypass valve closed
11/5/2011	6:01:05 PM	Bubbler valve closed
11/5/2011	6:01:05 PM	Main Vac valve opened
11/5/2011	6:01:05 PM	Helium MFC set to  0.000000
11/5/2011	6:01:05 PM	H2 MFC set to  0.000000
11/5/2011	6:01:05 PM	BCl3 MFC set to  0.000000
11/5/2011	6:01:05 PM	PHl3 MFC set to  0.000000
11/5/2011	6:01:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:01:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:01:05 PM	Tube furnace set to 180
11/5/2011	6:01:35 PM	H2 valve closed
11/5/2011	6:01:35 PM	BCl3 valve closed
11/5/2011	6:01:35 PM	PH3 valve closed
11/5/2011	6:01:35 PM	SiCl4 pre valve closed
11/5/2011	6:01:35 PM	SiCl4 post valve closed
11/5/2011	6:01:35 PM	Bypass valve closed
11/5/2011	6:01:35 PM	Bubbler valve closed
11/5/2011	6:01:35 PM	Helium valve opened
11/5/2011	6:01:35 PM	Main Vac valve opened
11/5/2011	6:01:35 PM	Helium MFC set to  20.000000
11/5/2011	6:01:35 PM	H2 MFC set to  0.000000
11/5/2011	6:01:35 PM	BCl3 MFC set to  0.000000
11/5/2011	6:01:35 PM	PHl3 MFC set to  0.000000
11/5/2011	6:01:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:01:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:01:35 PM	Tube furnace set to 180
11/5/2011	6:02:05 PM	Helium valve closed
11/5/2011	6:02:05 PM	H2 valve closed
11/5/2011	6:02:05 PM	BCl3 valve closed
11/5/2011	6:02:05 PM	PH3 valve closed
11/5/2011	6:02:05 PM	SiCl4 pre valve closed
11/5/2011	6:02:05 PM	SiCl4 post valve closed
11/5/2011	6:02:05 PM	Bypass valve closed
11/5/2011	6:02:05 PM	Bubbler valve closed
11/5/2011	6:02:05 PM	Main Vac valve opened
11/5/2011	6:02:05 PM	Helium MFC set to  0.000000
11/5/2011	6:02:05 PM	H2 MFC set to  0.000000
11/5/2011	6:02:05 PM	BCl3 MFC set to  0.000000
11/5/2011	6:02:05 PM	PHl3 MFC set to  0.000000
11/5/2011	6:02:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:02:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:02:05 PM	Tube furnace set to 150
11/5/2011	6:02:35 PM	H2 valve closed
11/5/2011	6:02:35 PM	BCl3 valve closed
11/5/2011	6:02:35 PM	PH3 valve closed
11/5/2011	6:02:35 PM	SiCl4 pre valve closed
11/5/2011	6:02:35 PM	SiCl4 post valve closed
11/5/2011	6:02:35 PM	Bypass valve closed
11/5/2011	6:02:35 PM	Bubbler valve closed
11/5/2011	6:02:35 PM	Helium valve opened
11/5/2011	6:02:35 PM	Main Vac valve opened
11/5/2011	6:02:35 PM	Helium MFC set to  20.000000
11/5/2011	6:02:35 PM	H2 MFC set to  0.000000
11/5/2011	6:02:35 PM	BCl3 MFC set to  0.000000
11/5/2011	6:02:35 PM	PHl3 MFC set to  0.000000
11/5/2011	6:02:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:02:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:02:35 PM	Tube furnace set to 180
11/5/2011	6:03:05 PM	Helium valve closed
11/5/2011	6:03:05 PM	H2 valve closed
11/5/2011	6:03:05 PM	BCl3 valve closed
11/5/2011	6:03:05 PM	PH3 valve closed
11/5/2011	6:03:05 PM	SiCl4 pre valve closed
11/5/2011	6:03:05 PM	SiCl4 post valve closed
11/5/2011	6:03:05 PM	Bypass valve closed
11/5/2011	6:03:05 PM	Bubbler valve closed
11/5/2011	6:03:05 PM	Main Vac valve opened
11/5/2011	6:03:05 PM	Helium MFC set to  0.000000
11/5/2011	6:03:05 PM	H2 MFC set to  0.000000
11/5/2011	6:03:05 PM	BCl3 MFC set to  0.000000
11/5/2011	6:03:05 PM	PHl3 MFC set to  0.000000
11/5/2011	6:03:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:03:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:03:06 PM	Tube furnace set to 150
11/5/2011	6:03:36 PM	H2 valve closed
11/5/2011	6:03:36 PM	BCl3 valve closed
11/5/2011	6:03:36 PM	PH3 valve closed
11/5/2011	6:03:36 PM	SiCl4 pre valve closed
11/5/2011	6:03:36 PM	SiCl4 post valve closed
11/5/2011	6:03:36 PM	Bypass valve closed
11/5/2011	6:03:36 PM	Bubbler valve closed
11/5/2011	6:03:36 PM	Helium valve opened
11/5/2011	6:03:36 PM	Main Vac valve opened
11/5/2011	6:03:36 PM	Helium MFC set to  20.000000
11/5/2011	6:03:36 PM	H2 MFC set to  0.000000
11/5/2011	6:03:36 PM	BCl3 MFC set to  0.000000
11/5/2011	6:03:36 PM	PHl3 MFC set to  0.000000
11/5/2011	6:03:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:03:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:03:36 PM	Tube furnace set to 150
11/5/2011	6:04:06 PM	Helium valve closed
11/5/2011	6:04:06 PM	H2 valve closed
11/5/2011	6:04:06 PM	BCl3 valve closed
11/5/2011	6:04:06 PM	PH3 valve closed
11/5/2011	6:04:06 PM	SiCl4 pre valve closed
11/5/2011	6:04:06 PM	SiCl4 post valve closed
11/5/2011	6:04:06 PM	Bypass valve closed
11/5/2011	6:04:06 PM	Bubbler valve closed
11/5/2011	6:04:06 PM	Main Vac valve opened
11/5/2011	6:04:06 PM	Helium MFC set to  0.000000
11/5/2011	6:04:06 PM	H2 MFC set to  0.000000
11/5/2011	6:04:06 PM	BCl3 MFC set to  0.000000
11/5/2011	6:04:06 PM	PHl3 MFC set to  0.000000
11/5/2011	6:04:06 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:04:06 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:04:06 PM	Tube furnace set to 150
11/5/2011	6:04:36 PM	H2 valve closed
11/5/2011	6:04:36 PM	BCl3 valve closed
11/5/2011	6:04:36 PM	PH3 valve closed
11/5/2011	6:04:36 PM	SiCl4 pre valve closed
11/5/2011	6:04:36 PM	SiCl4 post valve closed
11/5/2011	6:04:36 PM	Bypass valve closed
11/5/2011	6:04:36 PM	Bubbler valve closed
11/5/2011	6:04:36 PM	Helium valve opened
11/5/2011	6:04:36 PM	Main Vac valve opened
11/5/2011	6:04:36 PM	Helium MFC set to  20.000000
11/5/2011	6:04:36 PM	H2 MFC set to  0.000000
11/5/2011	6:04:36 PM	BCl3 MFC set to  0.000000
11/5/2011	6:04:36 PM	PHl3 MFC set to  0.000000
11/5/2011	6:04:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:04:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:04:36 PM	Tube furnace set to 180
11/5/2011	6:05:06 PM	Helium valve closed
11/5/2011	6:05:06 PM	H2 valve closed
11/5/2011	6:05:06 PM	BCl3 valve closed
11/5/2011	6:05:06 PM	PH3 valve closed
11/5/2011	6:05:06 PM	SiCl4 pre valve closed
11/5/2011	6:05:06 PM	SiCl4 post valve closed
11/5/2011	6:05:06 PM	Bypass valve closed
11/5/2011	6:05:06 PM	Bubbler valve closed
11/5/2011	6:05:06 PM	Main Vac valve opened
11/5/2011	6:05:06 PM	Helium MFC set to  0.000000
11/5/2011	6:05:06 PM	H2 MFC set to  0.000000
11/5/2011	6:05:06 PM	BCl3 MFC set to  0.000000
11/5/2011	6:05:06 PM	PHl3 MFC set to  0.000000
11/5/2011	6:05:06 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:05:06 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:05:06 PM	Tube furnace set to 150
11/5/2011	6:05:36 PM	H2 valve closed
11/5/2011	6:05:36 PM	BCl3 valve closed
11/5/2011	6:05:36 PM	PH3 valve closed
11/5/2011	6:05:36 PM	SiCl4 pre valve closed
11/5/2011	6:05:36 PM	SiCl4 post valve closed
11/5/2011	6:05:36 PM	Bypass valve closed
11/5/2011	6:05:36 PM	Bubbler valve closed
11/5/2011	6:05:36 PM	Helium valve opened
11/5/2011	6:05:36 PM	Main Vac valve opened
11/5/2011	6:05:36 PM	Helium MFC set to  20.000000
11/5/2011	6:05:36 PM	H2 MFC set to  0.000000
11/5/2011	6:05:36 PM	BCl3 MFC set to  0.000000
11/5/2011	6:05:36 PM	PHl3 MFC set to  0.000000
11/5/2011	6:05:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:05:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:05:37 PM	Tube furnace set to 150
11/5/2011	6:06:07 PM	Helium valve closed
11/5/2011	6:06:07 PM	H2 valve closed
11/5/2011	6:06:07 PM	BCl3 valve closed
11/5/2011	6:06:07 PM	PH3 valve closed
11/5/2011	6:06:07 PM	SiCl4 pre valve closed
11/5/2011	6:06:07 PM	SiCl4 post valve closed
11/5/2011	6:06:07 PM	Bypass valve closed
11/5/2011	6:06:07 PM	Bubbler valve closed
11/5/2011	6:06:07 PM	Main Vac valve opened
11/5/2011	6:06:07 PM	Helium MFC set to  0.000000
11/5/2011	6:06:07 PM	H2 MFC set to  0.000000
11/5/2011	6:06:07 PM	BCl3 MFC set to  0.000000
11/5/2011	6:06:07 PM	PHl3 MFC set to  0.000000
11/5/2011	6:06:07 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:06:07 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:06:07 PM	Tube furnace set to 150
11/5/2011	6:06:37 PM	H2 valve closed
11/5/2011	6:06:37 PM	BCl3 valve closed
11/5/2011	6:06:37 PM	PH3 valve closed
11/5/2011	6:06:37 PM	SiCl4 pre valve closed
11/5/2011	6:06:37 PM	SiCl4 post valve closed
11/5/2011	6:06:37 PM	Bypass valve closed
11/5/2011	6:06:37 PM	Bubbler valve closed
11/5/2011	6:06:37 PM	Helium valve opened
11/5/2011	6:06:37 PM	Main Vac valve opened
11/5/2011	6:06:37 PM	Helium MFC set to  20.000000
11/5/2011	6:06:37 PM	H2 MFC set to  0.000000
11/5/2011	6:06:37 PM	BCl3 MFC set to  0.000000
11/5/2011	6:06:37 PM	PHl3 MFC set to  0.000000
11/5/2011	6:06:37 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:06:37 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:06:37 PM	Tube furnace set to 150
11/5/2011	6:07:07 PM	Helium valve closed
11/5/2011	6:07:07 PM	H2 valve closed
11/5/2011	6:07:07 PM	BCl3 valve closed
11/5/2011	6:07:07 PM	PH3 valve closed
11/5/2011	6:07:07 PM	SiCl4 pre valve closed
11/5/2011	6:07:07 PM	SiCl4 post valve closed
11/5/2011	6:07:07 PM	Bypass valve closed
11/5/2011	6:07:07 PM	Bubbler valve closed
11/5/2011	6:07:07 PM	Main Vac valve opened
11/5/2011	6:07:07 PM	Helium MFC set to  0.000000
11/5/2011	6:07:07 PM	H2 MFC set to  0.000000
11/5/2011	6:07:07 PM	BCl3 MFC set to  0.000000
11/5/2011	6:07:07 PM	PHl3 MFC set to  0.000000
11/5/2011	6:07:07 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:07:07 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:07:07 PM	Tube furnace set to 150
11/5/2011	6:07:37 PM	H2 valve closed
11/5/2011	6:07:37 PM	BCl3 valve closed
11/5/2011	6:07:37 PM	PH3 valve closed
11/5/2011	6:07:37 PM	SiCl4 pre valve closed
11/5/2011	6:07:37 PM	SiCl4 post valve closed
11/5/2011	6:07:37 PM	Bypass valve closed
11/5/2011	6:07:37 PM	Bubbler valve closed
11/5/2011	6:07:37 PM	Helium valve opened
11/5/2011	6:07:37 PM	Main Vac valve opened
11/5/2011	6:07:37 PM	Helium MFC set to  20.000000
11/5/2011	6:07:37 PM	H2 MFC set to  0.000000
11/5/2011	6:07:37 PM	BCl3 MFC set to  0.000000
11/5/2011	6:07:37 PM	PHl3 MFC set to  0.000000
11/5/2011	6:07:37 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:07:37 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:07:37 PM	Tube furnace set to 150
11/5/2011	6:08:07 PM	Helium valve closed
11/5/2011	6:08:07 PM	H2 valve closed
11/5/2011	6:08:07 PM	BCl3 valve closed
11/5/2011	6:08:07 PM	PH3 valve closed
11/5/2011	6:08:07 PM	SiCl4 pre valve closed
11/5/2011	6:08:07 PM	SiCl4 post valve closed
11/5/2011	6:08:07 PM	Bypass valve closed
11/5/2011	6:08:07 PM	Bubbler valve closed
11/5/2011	6:08:07 PM	Main Vac valve opened
11/5/2011	6:08:07 PM	Helium MFC set to  0.000000
11/5/2011	6:08:07 PM	H2 MFC set to  0.000000
11/5/2011	6:08:07 PM	BCl3 MFC set to  0.000000
11/5/2011	6:08:07 PM	PHl3 MFC set to  0.000000
11/5/2011	6:08:07 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:08:07 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:08:08 PM	Tube furnace set to 150
11/5/2011	6:08:38 PM	H2 valve closed
11/5/2011	6:08:38 PM	BCl3 valve closed
11/5/2011	6:08:38 PM	PH3 valve closed
11/5/2011	6:08:38 PM	SiCl4 pre valve closed
11/5/2011	6:08:38 PM	SiCl4 post valve closed
11/5/2011	6:08:38 PM	Bypass valve closed
11/5/2011	6:08:38 PM	Bubbler valve closed
11/5/2011	6:08:38 PM	Helium valve opened
11/5/2011	6:08:38 PM	Main Vac valve opened
11/5/2011	6:08:38 PM	Helium MFC set to  20.000000
11/5/2011	6:08:38 PM	H2 MFC set to  0.000000
11/5/2011	6:08:38 PM	BCl3 MFC set to  0.000000
11/5/2011	6:08:38 PM	PHl3 MFC set to  0.000000
11/5/2011	6:08:38 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:08:38 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:08:38 PM	Tube furnace set to 150
11/5/2011	6:09:08 PM	Helium valve closed
11/5/2011	6:09:08 PM	H2 valve closed
11/5/2011	6:09:08 PM	BCl3 valve closed
11/5/2011	6:09:08 PM	PH3 valve closed
11/5/2011	6:09:08 PM	SiCl4 pre valve closed
11/5/2011	6:09:08 PM	SiCl4 post valve closed
11/5/2011	6:09:08 PM	Bypass valve closed
11/5/2011	6:09:08 PM	Bubbler valve closed
11/5/2011	6:09:08 PM	Main Vac valve opened
11/5/2011	6:09:08 PM	Helium MFC set to  0.000000
11/5/2011	6:09:08 PM	H2 MFC set to  0.000000
11/5/2011	6:09:08 PM	BCl3 MFC set to  0.000000
11/5/2011	6:09:08 PM	PHl3 MFC set to  0.000000
11/5/2011	6:09:08 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:09:08 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:09:08 PM	Tube furnace set to 150
11/5/2011	6:09:38 PM	H2 valve closed
11/5/2011	6:09:38 PM	BCl3 valve closed
11/5/2011	6:09:38 PM	PH3 valve closed
11/5/2011	6:09:38 PM	SiCl4 pre valve closed
11/5/2011	6:09:38 PM	SiCl4 post valve closed
11/5/2011	6:09:38 PM	Bypass valve closed
11/5/2011	6:09:38 PM	Bubbler valve closed
11/5/2011	6:09:38 PM	Helium valve opened
11/5/2011	6:09:38 PM	Main Vac valve opened
11/5/2011	6:09:38 PM	Helium MFC set to  20.000000
11/5/2011	6:09:38 PM	H2 MFC set to  0.000000
11/5/2011	6:09:38 PM	BCl3 MFC set to  0.000000
11/5/2011	6:09:38 PM	PHl3 MFC set to  0.000000
11/5/2011	6:09:38 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:09:38 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:09:38 PM	Tube furnace set to 150
11/5/2011	6:10:08 PM	Helium valve closed
11/5/2011	6:10:08 PM	H2 valve closed
11/5/2011	6:10:08 PM	BCl3 valve closed
11/5/2011	6:10:08 PM	PH3 valve closed
11/5/2011	6:10:08 PM	SiCl4 pre valve closed
11/5/2011	6:10:08 PM	SiCl4 post valve closed
11/5/2011	6:10:08 PM	Bypass valve closed
11/5/2011	6:10:08 PM	Bubbler valve closed
11/5/2011	6:10:08 PM	Main Vac valve opened
11/5/2011	6:10:08 PM	Helium MFC set to  0.000000
11/5/2011	6:10:08 PM	H2 MFC set to  0.000000
11/5/2011	6:10:08 PM	BCl3 MFC set to  0.000000
11/5/2011	6:10:08 PM	PHl3 MFC set to  0.000000
11/5/2011	6:10:08 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:10:08 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:10:08 PM	Tube furnace set to 150
11/5/2011	6:10:38 PM	H2 valve closed
11/5/2011	6:10:38 PM	BCl3 valve closed
11/5/2011	6:10:38 PM	PH3 valve closed
11/5/2011	6:10:38 PM	SiCl4 pre valve closed
11/5/2011	6:10:38 PM	SiCl4 post valve closed
11/5/2011	6:10:38 PM	Bypass valve closed
11/5/2011	6:10:38 PM	Bubbler valve closed
11/5/2011	6:10:38 PM	Helium valve opened
11/5/2011	6:10:38 PM	Main Vac valve opened
11/5/2011	6:10:38 PM	Helium MFC set to  20.000000
11/5/2011	6:10:38 PM	H2 MFC set to  0.000000
11/5/2011	6:10:38 PM	BCl3 MFC set to  0.000000
11/5/2011	6:10:38 PM	PHl3 MFC set to  0.000000
11/5/2011	6:10:38 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:10:38 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:10:39 PM	Tube furnace set to 150
11/5/2011	6:11:09 PM	Helium valve closed
11/5/2011	6:11:09 PM	H2 valve closed
11/5/2011	6:11:09 PM	BCl3 valve closed
11/5/2011	6:11:09 PM	PH3 valve closed
11/5/2011	6:11:09 PM	SiCl4 pre valve closed
11/5/2011	6:11:09 PM	SiCl4 post valve closed
11/5/2011	6:11:09 PM	Bypass valve closed
11/5/2011	6:11:09 PM	Bubbler valve closed
11/5/2011	6:11:09 PM	Main Vac valve opened
11/5/2011	6:11:09 PM	Helium MFC set to  0.000000
11/5/2011	6:11:09 PM	H2 MFC set to  0.000000
11/5/2011	6:11:09 PM	BCl3 MFC set to  0.000000
11/5/2011	6:11:09 PM	PHl3 MFC set to  0.000000
11/5/2011	6:11:09 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:11:09 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:11:09 PM	Tube furnace set to 150
11/5/2011	6:11:39 PM	H2 valve closed
11/5/2011	6:11:39 PM	BCl3 valve closed
11/5/2011	6:11:39 PM	PH3 valve closed
11/5/2011	6:11:39 PM	SiCl4 pre valve closed
11/5/2011	6:11:39 PM	SiCl4 post valve closed
11/5/2011	6:11:39 PM	Bypass valve closed
11/5/2011	6:11:39 PM	Bubbler valve closed
11/5/2011	6:11:39 PM	Helium valve opened
11/5/2011	6:11:39 PM	Main Vac valve opened
11/5/2011	6:11:39 PM	Helium MFC set to  20.000000
11/5/2011	6:11:39 PM	H2 MFC set to  0.000000
11/5/2011	6:11:39 PM	BCl3 MFC set to  0.000000
11/5/2011	6:11:39 PM	PHl3 MFC set to  0.000000
11/5/2011	6:11:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:11:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:11:39 PM	Tube furnace set to 150
11/5/2011	6:12:09 PM	Helium valve closed
11/5/2011	6:12:09 PM	H2 valve closed
11/5/2011	6:12:09 PM	BCl3 valve closed
11/5/2011	6:12:09 PM	PH3 valve closed
11/5/2011	6:12:09 PM	SiCl4 pre valve closed
11/5/2011	6:12:09 PM	SiCl4 post valve closed
11/5/2011	6:12:09 PM	Bypass valve closed
11/5/2011	6:12:09 PM	Bubbler valve closed
11/5/2011	6:12:09 PM	Main Vac valve opened
11/5/2011	6:12:09 PM	Helium MFC set to  0.000000
11/5/2011	6:12:09 PM	H2 MFC set to  0.000000
11/5/2011	6:12:09 PM	BCl3 MFC set to  0.000000
11/5/2011	6:12:09 PM	PHl3 MFC set to  0.000000
11/5/2011	6:12:09 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:12:09 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:12:09 PM	Tube furnace set to 150
11/5/2011	6:12:39 PM	H2 valve closed
11/5/2011	6:12:39 PM	BCl3 valve closed
11/5/2011	6:12:39 PM	PH3 valve closed
11/5/2011	6:12:39 PM	SiCl4 pre valve closed
11/5/2011	6:12:39 PM	SiCl4 post valve closed
11/5/2011	6:12:39 PM	Bypass valve closed
11/5/2011	6:12:39 PM	Bubbler valve closed
11/5/2011	6:12:39 PM	Helium valve opened
11/5/2011	6:12:39 PM	Main Vac valve opened
11/5/2011	6:12:39 PM	Helium MFC set to  20.000000
11/5/2011	6:12:39 PM	H2 MFC set to  0.000000
11/5/2011	6:12:39 PM	BCl3 MFC set to  0.000000
11/5/2011	6:12:39 PM	PHl3 MFC set to  0.000000
11/5/2011	6:12:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:12:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:12:40 PM	Tube furnace set to 150
11/5/2011	6:13:04 PM	Run aborted at 6:13 PM
11/5/2011	6:13:04 PM	Helium valve closed
11/5/2011	6:13:04 PM	H2 valve closed
11/5/2011	6:13:04 PM	BCl3 valve closed
11/5/2011	6:13:04 PM	PH3 valve closed
11/5/2011	6:13:04 PM	SiCl4 pre valve closed
11/5/2011	6:13:04 PM	SiCl4 post valve closed
11/5/2011	6:13:04 PM	Bypass valve closed
11/5/2011	6:13:04 PM	Main Vac valve closed
11/5/2011	6:13:04 PM	Bubbler valve closed
11/5/2011	6:13:04 PM	Helium MFC set to  0.000000
11/5/2011	6:13:04 PM	H2 MFC set to  0.000000
11/5/2011	6:13:04 PM	BCl3 MFC set to  0.000000
11/5/2011	6:13:04 PM	PHl3 MFC set to  0.000000
11/5/2011	6:13:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:13:04 PM	Tube furnace set to 0
11/5/2011	6:13:06 PM	Main Vac valve opened
11/5/2011	6:13:26 PM	Recipe started at 6:13 PM
11/5/2011	6:13:26 PM	Helium valve closed
11/5/2011	6:13:26 PM	H2 valve closed
11/5/2011	6:13:26 PM	BCl3 valve closed
11/5/2011	6:13:26 PM	PH3 valve closed
11/5/2011	6:13:26 PM	SiCl4 pre valve closed
11/5/2011	6:13:26 PM	SiCl4 post valve closed
11/5/2011	6:13:26 PM	Main Vac valve closed
11/5/2011	6:13:26 PM	Bubbler valve closed
11/5/2011	6:13:26 PM	Bypass valve opened
11/5/2011	6:13:26 PM	Helium MFC set to  0.000000
11/5/2011	6:13:26 PM	H2 MFC set to  0.000000
11/5/2011	6:13:26 PM	BCl3 MFC set to  0.000000
11/5/2011	6:13:26 PM	PHl3 MFC set to  0.000000
11/5/2011	6:13:26 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:13:26 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:13:26 PM	Tube furnace set to 180
11/5/2011	6:13:26 PM	Helium valve closed
11/5/2011	6:13:26 PM	H2 valve closed
11/5/2011	6:13:26 PM	BCl3 valve closed
11/5/2011	6:13:26 PM	PH3 valve closed
11/5/2011	6:13:26 PM	SiCl4 pre valve closed
11/5/2011	6:13:26 PM	SiCl4 post valve closed
11/5/2011	6:13:26 PM	Main Vac valve closed
11/5/2011	6:13:26 PM	Bubbler valve closed
11/5/2011	6:13:26 PM	Bypass valve opened
11/5/2011	6:13:26 PM	Helium MFC set to  0.000000
11/5/2011	6:13:26 PM	H2 MFC set to  0.000000
11/5/2011	6:13:26 PM	BCl3 MFC set to  0.000000
11/5/2011	6:13:26 PM	PHl3 MFC set to  0.000000
11/5/2011	6:13:26 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:13:26 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:13:26 PM	Tube furnace set to 150
11/5/2011	6:13:56 PM	Helium valve closed
11/5/2011	6:13:56 PM	H2 valve closed
11/5/2011	6:13:56 PM	BCl3 valve closed
11/5/2011	6:13:56 PM	PH3 valve closed
11/5/2011	6:13:56 PM	SiCl4 pre valve closed
11/5/2011	6:13:56 PM	SiCl4 post valve closed
11/5/2011	6:13:56 PM	Bypass valve closed
11/5/2011	6:13:56 PM	Bubbler valve closed
11/5/2011	6:13:56 PM	Main Vac valve opened
11/5/2011	6:13:56 PM	Helium MFC set to  0.000000
11/5/2011	6:13:56 PM	H2 MFC set to  0.000000
11/5/2011	6:13:56 PM	BCl3 MFC set to  0.000000
11/5/2011	6:13:56 PM	PHl3 MFC set to  0.000000
11/5/2011	6:13:56 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:13:56 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:13:57 PM	Tube furnace set to 180
11/5/2011	6:14:27 PM	H2 valve closed
11/5/2011	6:14:27 PM	BCl3 valve closed
11/5/2011	6:14:27 PM	PH3 valve closed
11/5/2011	6:14:27 PM	SiCl4 pre valve closed
11/5/2011	6:14:27 PM	SiCl4 post valve closed
11/5/2011	6:14:27 PM	Bypass valve closed
11/5/2011	6:14:27 PM	Bubbler valve closed
11/5/2011	6:14:27 PM	Helium valve opened
11/5/2011	6:14:27 PM	Main Vac valve opened
11/5/2011	6:14:27 PM	Helium MFC set to  20.000000
11/5/2011	6:14:27 PM	H2 MFC set to  0.000000
11/5/2011	6:14:27 PM	BCl3 MFC set to  0.000000
11/5/2011	6:14:27 PM	PHl3 MFC set to  0.000000
11/5/2011	6:14:27 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:14:27 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:14:27 PM	Tube furnace set to 180
11/5/2011	6:14:57 PM	Helium valve closed
11/5/2011	6:14:57 PM	H2 valve closed
11/5/2011	6:14:57 PM	BCl3 valve closed
11/5/2011	6:14:57 PM	PH3 valve closed
11/5/2011	6:14:57 PM	SiCl4 pre valve closed
11/5/2011	6:14:57 PM	SiCl4 post valve closed
11/5/2011	6:14:57 PM	Bypass valve closed
11/5/2011	6:14:57 PM	Bubbler valve closed
11/5/2011	6:14:57 PM	Main Vac valve opened
11/5/2011	6:14:57 PM	Helium MFC set to  0.000000
11/5/2011	6:14:57 PM	H2 MFC set to  0.000000
11/5/2011	6:14:57 PM	BCl3 MFC set to  0.000000
11/5/2011	6:14:57 PM	PHl3 MFC set to  0.000000
11/5/2011	6:14:57 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:14:57 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:14:57 PM	Tube furnace set to 150
11/5/2011	6:15:27 PM	H2 valve closed
11/5/2011	6:15:27 PM	BCl3 valve closed
11/5/2011	6:15:27 PM	PH3 valve closed
11/5/2011	6:15:27 PM	SiCl4 pre valve closed
11/5/2011	6:15:27 PM	SiCl4 post valve closed
11/5/2011	6:15:27 PM	Bypass valve closed
11/5/2011	6:15:27 PM	Bubbler valve closed
11/5/2011	6:15:27 PM	Helium valve opened
11/5/2011	6:15:27 PM	Main Vac valve opened
11/5/2011	6:15:27 PM	Helium MFC set to  20.000000
11/5/2011	6:15:27 PM	H2 MFC set to  0.000000
11/5/2011	6:15:27 PM	BCl3 MFC set to  0.000000
11/5/2011	6:15:27 PM	PHl3 MFC set to  0.000000
11/5/2011	6:15:27 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:15:27 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:15:27 PM	Tube furnace set to 180
11/5/2011	6:15:57 PM	Helium valve closed
11/5/2011	6:15:57 PM	H2 valve closed
11/5/2011	6:15:57 PM	BCl3 valve closed
11/5/2011	6:15:57 PM	PH3 valve closed
11/5/2011	6:15:57 PM	SiCl4 pre valve closed
11/5/2011	6:15:57 PM	SiCl4 post valve closed
11/5/2011	6:15:57 PM	Bypass valve closed
11/5/2011	6:15:57 PM	Bubbler valve closed
11/5/2011	6:15:57 PM	Main Vac valve opened
11/5/2011	6:15:57 PM	Helium MFC set to  0.000000
11/5/2011	6:15:57 PM	H2 MFC set to  0.000000
11/5/2011	6:15:57 PM	BCl3 MFC set to  0.000000
11/5/2011	6:15:57 PM	PHl3 MFC set to  0.000000
11/5/2011	6:15:57 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:15:57 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:15:57 PM	Tube furnace set to 150
11/5/2011	6:16:27 PM	H2 valve closed
11/5/2011	6:16:27 PM	BCl3 valve closed
11/5/2011	6:16:27 PM	PH3 valve closed
11/5/2011	6:16:27 PM	SiCl4 pre valve closed
11/5/2011	6:16:27 PM	SiCl4 post valve closed
11/5/2011	6:16:27 PM	Bypass valve closed
11/5/2011	6:16:27 PM	Bubbler valve closed
11/5/2011	6:16:27 PM	Helium valve opened
11/5/2011	6:16:27 PM	Main Vac valve opened
11/5/2011	6:16:27 PM	Helium MFC set to  20.000000
11/5/2011	6:16:27 PM	H2 MFC set to  0.000000
11/5/2011	6:16:27 PM	BCl3 MFC set to  0.000000
11/5/2011	6:16:27 PM	PHl3 MFC set to  0.000000
11/5/2011	6:16:27 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:16:27 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:16:28 PM	Tube furnace set to 150
11/5/2011	6:16:58 PM	Helium valve closed
11/5/2011	6:16:58 PM	H2 valve closed
11/5/2011	6:16:58 PM	BCl3 valve closed
11/5/2011	6:16:58 PM	PH3 valve closed
11/5/2011	6:16:58 PM	SiCl4 pre valve closed
11/5/2011	6:16:58 PM	SiCl4 post valve closed
11/5/2011	6:16:58 PM	Bypass valve closed
11/5/2011	6:16:58 PM	Bubbler valve closed
11/5/2011	6:16:58 PM	Main Vac valve opened
11/5/2011	6:16:58 PM	Helium MFC set to  0.000000
11/5/2011	6:16:58 PM	H2 MFC set to  0.000000
11/5/2011	6:16:58 PM	BCl3 MFC set to  0.000000
11/5/2011	6:16:58 PM	PHl3 MFC set to  0.000000
11/5/2011	6:16:58 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:16:58 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:16:58 PM	Tube furnace set to 150
11/5/2011	6:17:28 PM	H2 valve closed
11/5/2011	6:17:28 PM	BCl3 valve closed
11/5/2011	6:17:28 PM	PH3 valve closed
11/5/2011	6:17:28 PM	SiCl4 pre valve closed
11/5/2011	6:17:28 PM	SiCl4 post valve closed
11/5/2011	6:17:28 PM	Bypass valve closed
11/5/2011	6:17:28 PM	Bubbler valve closed
11/5/2011	6:17:28 PM	Helium valve opened
11/5/2011	6:17:28 PM	Main Vac valve opened
11/5/2011	6:17:28 PM	Helium MFC set to  20.000000
11/5/2011	6:17:28 PM	H2 MFC set to  0.000000
11/5/2011	6:17:28 PM	BCl3 MFC set to  0.000000
11/5/2011	6:17:28 PM	PHl3 MFC set to  0.000000
11/5/2011	6:17:28 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:17:28 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:17:28 PM	Tube furnace set to 180
11/5/2011	6:17:58 PM	Helium valve closed
11/5/2011	6:17:58 PM	H2 valve closed
11/5/2011	6:17:58 PM	BCl3 valve closed
11/5/2011	6:17:58 PM	PH3 valve closed
11/5/2011	6:17:58 PM	SiCl4 pre valve closed
11/5/2011	6:17:58 PM	SiCl4 post valve closed
11/5/2011	6:17:58 PM	Bypass valve closed
11/5/2011	6:17:58 PM	Bubbler valve closed
11/5/2011	6:17:58 PM	Main Vac valve opened
11/5/2011	6:17:58 PM	Helium MFC set to  0.000000
11/5/2011	6:17:58 PM	H2 MFC set to  0.000000
11/5/2011	6:17:58 PM	BCl3 MFC set to  0.000000
11/5/2011	6:17:58 PM	PHl3 MFC set to  0.000000
11/5/2011	6:17:58 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:17:58 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:17:58 PM	Tube furnace set to 150
11/5/2011	6:18:28 PM	H2 valve closed
11/5/2011	6:18:28 PM	BCl3 valve closed
11/5/2011	6:18:28 PM	PH3 valve closed
11/5/2011	6:18:28 PM	SiCl4 pre valve closed
11/5/2011	6:18:28 PM	SiCl4 post valve closed
11/5/2011	6:18:28 PM	Bypass valve closed
11/5/2011	6:18:28 PM	Bubbler valve closed
11/5/2011	6:18:28 PM	Helium valve opened
11/5/2011	6:18:28 PM	Main Vac valve opened
11/5/2011	6:18:28 PM	Helium MFC set to  20.000000
11/5/2011	6:18:28 PM	H2 MFC set to  0.000000
11/5/2011	6:18:28 PM	BCl3 MFC set to  0.000000
11/5/2011	6:18:28 PM	PHl3 MFC set to  0.000000
11/5/2011	6:18:28 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:18:28 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:18:28 PM	Tube furnace set to 150
11/5/2011	6:18:58 PM	Helium valve closed
11/5/2011	6:18:58 PM	H2 valve closed
11/5/2011	6:18:58 PM	BCl3 valve closed
11/5/2011	6:18:58 PM	PH3 valve closed
11/5/2011	6:18:58 PM	SiCl4 pre valve closed
11/5/2011	6:18:58 PM	SiCl4 post valve closed
11/5/2011	6:18:58 PM	Bypass valve closed
11/5/2011	6:18:58 PM	Bubbler valve closed
11/5/2011	6:18:58 PM	Main Vac valve opened
11/5/2011	6:18:58 PM	Helium MFC set to  0.000000
11/5/2011	6:18:58 PM	H2 MFC set to  0.000000
11/5/2011	6:18:58 PM	BCl3 MFC set to  0.000000
11/5/2011	6:18:58 PM	PHl3 MFC set to  0.000000
11/5/2011	6:18:58 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:18:58 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:18:59 PM	Tube furnace set to 150
11/5/2011	6:19:29 PM	H2 valve closed
11/5/2011	6:19:29 PM	BCl3 valve closed
11/5/2011	6:19:29 PM	PH3 valve closed
11/5/2011	6:19:29 PM	SiCl4 pre valve closed
11/5/2011	6:19:29 PM	SiCl4 post valve closed
11/5/2011	6:19:29 PM	Bypass valve closed
11/5/2011	6:19:29 PM	Bubbler valve closed
11/5/2011	6:19:29 PM	Helium valve opened
11/5/2011	6:19:29 PM	Main Vac valve opened
11/5/2011	6:19:29 PM	Helium MFC set to  20.000000
11/5/2011	6:19:29 PM	H2 MFC set to  0.000000
11/5/2011	6:19:29 PM	BCl3 MFC set to  0.000000
11/5/2011	6:19:29 PM	PHl3 MFC set to  0.000000
11/5/2011	6:19:29 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:19:29 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:19:29 PM	Tube furnace set to 150
11/5/2011	6:19:59 PM	Helium valve closed
11/5/2011	6:19:59 PM	H2 valve closed
11/5/2011	6:19:59 PM	BCl3 valve closed
11/5/2011	6:19:59 PM	PH3 valve closed
11/5/2011	6:19:59 PM	SiCl4 pre valve closed
11/5/2011	6:19:59 PM	SiCl4 post valve closed
11/5/2011	6:19:59 PM	Bypass valve closed
11/5/2011	6:19:59 PM	Bubbler valve closed
11/5/2011	6:19:59 PM	Main Vac valve opened
11/5/2011	6:19:59 PM	Helium MFC set to  0.000000
11/5/2011	6:19:59 PM	H2 MFC set to  0.000000
11/5/2011	6:19:59 PM	BCl3 MFC set to  0.000000
11/5/2011	6:19:59 PM	PHl3 MFC set to  0.000000
11/5/2011	6:19:59 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:19:59 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:19:59 PM	Tube furnace set to 150
11/5/2011	6:20:29 PM	H2 valve closed
11/5/2011	6:20:29 PM	BCl3 valve closed
11/5/2011	6:20:29 PM	PH3 valve closed
11/5/2011	6:20:29 PM	SiCl4 pre valve closed
11/5/2011	6:20:29 PM	SiCl4 post valve closed
11/5/2011	6:20:29 PM	Bypass valve closed
11/5/2011	6:20:29 PM	Bubbler valve closed
11/5/2011	6:20:29 PM	Helium valve opened
11/5/2011	6:20:29 PM	Main Vac valve opened
11/5/2011	6:20:29 PM	Helium MFC set to  20.000000
11/5/2011	6:20:29 PM	H2 MFC set to  0.000000
11/5/2011	6:20:29 PM	BCl3 MFC set to  0.000000
11/5/2011	6:20:29 PM	PHl3 MFC set to  0.000000
11/5/2011	6:20:29 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:20:29 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:20:29 PM	Tube furnace set to 150
11/5/2011	6:20:59 PM	Helium valve closed
11/5/2011	6:20:59 PM	H2 valve closed
11/5/2011	6:20:59 PM	BCl3 valve closed
11/5/2011	6:20:59 PM	PH3 valve closed
11/5/2011	6:20:59 PM	SiCl4 pre valve closed
11/5/2011	6:20:59 PM	SiCl4 post valve closed
11/5/2011	6:20:59 PM	Bypass valve closed
11/5/2011	6:20:59 PM	Bubbler valve closed
11/5/2011	6:20:59 PM	Main Vac valve opened
11/5/2011	6:20:59 PM	Helium MFC set to  0.000000
11/5/2011	6:20:59 PM	H2 MFC set to  0.000000
11/5/2011	6:20:59 PM	BCl3 MFC set to  0.000000
11/5/2011	6:20:59 PM	PHl3 MFC set to  0.000000
11/5/2011	6:20:59 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:20:59 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:20:59 PM	Tube furnace set to 150
11/5/2011	6:21:29 PM	H2 valve closed
11/5/2011	6:21:29 PM	BCl3 valve closed
11/5/2011	6:21:29 PM	PH3 valve closed
11/5/2011	6:21:29 PM	SiCl4 pre valve closed
11/5/2011	6:21:29 PM	SiCl4 post valve closed
11/5/2011	6:21:29 PM	Bypass valve closed
11/5/2011	6:21:29 PM	Bubbler valve closed
11/5/2011	6:21:29 PM	Helium valve opened
11/5/2011	6:21:29 PM	Main Vac valve opened
11/5/2011	6:21:29 PM	Helium MFC set to  20.000000
11/5/2011	6:21:29 PM	H2 MFC set to  0.000000
11/5/2011	6:21:29 PM	BCl3 MFC set to  0.000000
11/5/2011	6:21:29 PM	PHl3 MFC set to  0.000000
11/5/2011	6:21:29 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:21:29 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:21:30 PM	Tube furnace set to 150
11/5/2011	6:22:00 PM	Helium valve closed
11/5/2011	6:22:00 PM	H2 valve closed
11/5/2011	6:22:00 PM	BCl3 valve closed
11/5/2011	6:22:00 PM	PH3 valve closed
11/5/2011	6:22:00 PM	SiCl4 pre valve closed
11/5/2011	6:22:00 PM	SiCl4 post valve closed
11/5/2011	6:22:00 PM	Bypass valve closed
11/5/2011	6:22:00 PM	Bubbler valve closed
11/5/2011	6:22:00 PM	Main Vac valve opened
11/5/2011	6:22:00 PM	Helium MFC set to  0.000000
11/5/2011	6:22:00 PM	H2 MFC set to  0.000000
11/5/2011	6:22:00 PM	BCl3 MFC set to  0.000000
11/5/2011	6:22:00 PM	PHl3 MFC set to  0.000000
11/5/2011	6:22:00 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:22:00 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:22:00 PM	Tube furnace set to 150
11/5/2011	6:22:30 PM	H2 valve closed
11/5/2011	6:22:30 PM	BCl3 valve closed
11/5/2011	6:22:30 PM	PH3 valve closed
11/5/2011	6:22:30 PM	SiCl4 pre valve closed
11/5/2011	6:22:30 PM	SiCl4 post valve closed
11/5/2011	6:22:30 PM	Bypass valve closed
11/5/2011	6:22:30 PM	Bubbler valve closed
11/5/2011	6:22:30 PM	Helium valve opened
11/5/2011	6:22:30 PM	Main Vac valve opened
11/5/2011	6:22:30 PM	Helium MFC set to  20.000000
11/5/2011	6:22:30 PM	H2 MFC set to  0.000000
11/5/2011	6:22:30 PM	BCl3 MFC set to  0.000000
11/5/2011	6:22:30 PM	PHl3 MFC set to  0.000000
11/5/2011	6:22:30 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:22:30 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:22:30 PM	Tube furnace set to 150
11/5/2011	6:23:00 PM	Helium valve closed
11/5/2011	6:23:00 PM	H2 valve closed
11/5/2011	6:23:00 PM	BCl3 valve closed
11/5/2011	6:23:00 PM	PH3 valve closed
11/5/2011	6:23:00 PM	SiCl4 pre valve closed
11/5/2011	6:23:00 PM	SiCl4 post valve closed
11/5/2011	6:23:00 PM	Bypass valve closed
11/5/2011	6:23:00 PM	Bubbler valve closed
11/5/2011	6:23:00 PM	Main Vac valve opened
11/5/2011	6:23:00 PM	Helium MFC set to  0.000000
11/5/2011	6:23:00 PM	H2 MFC set to  0.000000
11/5/2011	6:23:00 PM	BCl3 MFC set to  0.000000
11/5/2011	6:23:00 PM	PHl3 MFC set to  0.000000
11/5/2011	6:23:00 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:23:00 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:23:00 PM	Tube furnace set to 150
11/5/2011	6:23:30 PM	H2 valve closed
11/5/2011	6:23:30 PM	BCl3 valve closed
11/5/2011	6:23:30 PM	PH3 valve closed
11/5/2011	6:23:30 PM	SiCl4 pre valve closed
11/5/2011	6:23:30 PM	SiCl4 post valve closed
11/5/2011	6:23:30 PM	Bypass valve closed
11/5/2011	6:23:30 PM	Bubbler valve closed
11/5/2011	6:23:30 PM	Helium valve opened
11/5/2011	6:23:30 PM	Main Vac valve opened
11/5/2011	6:23:30 PM	Helium MFC set to  20.000000
11/5/2011	6:23:30 PM	H2 MFC set to  0.000000
11/5/2011	6:23:30 PM	BCl3 MFC set to  0.000000
11/5/2011	6:23:30 PM	PHl3 MFC set to  0.000000
11/5/2011	6:23:30 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:23:30 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:23:30 PM	Tube furnace set to 150
11/5/2011	6:24:00 PM	Helium valve closed
11/5/2011	6:24:00 PM	H2 valve closed
11/5/2011	6:24:00 PM	BCl3 valve closed
11/5/2011	6:24:00 PM	PH3 valve closed
11/5/2011	6:24:00 PM	SiCl4 pre valve closed
11/5/2011	6:24:00 PM	SiCl4 post valve closed
11/5/2011	6:24:00 PM	Bypass valve closed
11/5/2011	6:24:00 PM	Bubbler valve closed
11/5/2011	6:24:00 PM	Main Vac valve opened
11/5/2011	6:24:00 PM	Helium MFC set to  0.000000
11/5/2011	6:24:00 PM	H2 MFC set to  0.000000
11/5/2011	6:24:00 PM	BCl3 MFC set to  0.000000
11/5/2011	6:24:00 PM	PHl3 MFC set to  0.000000
11/5/2011	6:24:00 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:24:00 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:24:01 PM	Tube furnace set to 150
11/5/2011	6:24:31 PM	H2 valve closed
11/5/2011	6:24:31 PM	BCl3 valve closed
11/5/2011	6:24:31 PM	PH3 valve closed
11/5/2011	6:24:31 PM	SiCl4 pre valve closed
11/5/2011	6:24:31 PM	SiCl4 post valve closed
11/5/2011	6:24:31 PM	Bypass valve closed
11/5/2011	6:24:31 PM	Bubbler valve closed
11/5/2011	6:24:31 PM	Helium valve opened
11/5/2011	6:24:31 PM	Main Vac valve opened
11/5/2011	6:24:31 PM	Helium MFC set to  20.000000
11/5/2011	6:24:31 PM	H2 MFC set to  0.000000
11/5/2011	6:24:31 PM	BCl3 MFC set to  0.000000
11/5/2011	6:24:31 PM	PHl3 MFC set to  0.000000
11/5/2011	6:24:31 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:24:31 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:24:31 PM	Tube furnace set to 150
11/5/2011	6:25:01 PM	Helium valve closed
11/5/2011	6:25:01 PM	H2 valve closed
11/5/2011	6:25:01 PM	BCl3 valve closed
11/5/2011	6:25:01 PM	PH3 valve closed
11/5/2011	6:25:01 PM	SiCl4 pre valve closed
11/5/2011	6:25:01 PM	SiCl4 post valve closed
11/5/2011	6:25:01 PM	Bypass valve closed
11/5/2011	6:25:01 PM	Bubbler valve closed
11/5/2011	6:25:01 PM	Main Vac valve opened
11/5/2011	6:25:01 PM	Helium MFC set to  0.000000
11/5/2011	6:25:01 PM	H2 MFC set to  0.000000
11/5/2011	6:25:01 PM	BCl3 MFC set to  0.000000
11/5/2011	6:25:01 PM	PHl3 MFC set to  0.000000
11/5/2011	6:25:01 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:25:01 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:25:01 PM	Tube furnace set to 150
11/5/2011	6:25:31 PM	H2 valve closed
11/5/2011	6:25:31 PM	BCl3 valve closed
11/5/2011	6:25:31 PM	PH3 valve closed
11/5/2011	6:25:31 PM	SiCl4 pre valve closed
11/5/2011	6:25:31 PM	SiCl4 post valve closed
11/5/2011	6:25:31 PM	Bypass valve closed
11/5/2011	6:25:31 PM	Bubbler valve closed
11/5/2011	6:25:31 PM	Helium valve opened
11/5/2011	6:25:31 PM	Main Vac valve opened
11/5/2011	6:25:31 PM	Helium MFC set to  20.000000
11/5/2011	6:25:31 PM	H2 MFC set to  0.000000
11/5/2011	6:25:31 PM	BCl3 MFC set to  0.000000
11/5/2011	6:25:31 PM	PHl3 MFC set to  0.000000
11/5/2011	6:25:31 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:25:31 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:25:31 PM	Tube furnace set to 150
11/5/2011	6:26:01 PM	Helium valve closed
11/5/2011	6:26:01 PM	H2 valve closed
11/5/2011	6:26:01 PM	BCl3 valve closed
11/5/2011	6:26:01 PM	PH3 valve closed
11/5/2011	6:26:01 PM	SiCl4 pre valve closed
11/5/2011	6:26:01 PM	SiCl4 post valve closed
11/5/2011	6:26:01 PM	Bypass valve closed
11/5/2011	6:26:01 PM	Bubbler valve closed
11/5/2011	6:26:01 PM	Main Vac valve opened
11/5/2011	6:26:01 PM	Helium MFC set to  0.000000
11/5/2011	6:26:01 PM	H2 MFC set to  0.000000
11/5/2011	6:26:01 PM	BCl3 MFC set to  0.000000
11/5/2011	6:26:01 PM	PHl3 MFC set to  0.000000
11/5/2011	6:26:01 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:26:01 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:26:01 PM	Tube furnace set to 150
11/5/2011	6:26:31 PM	H2 valve closed
11/5/2011	6:26:31 PM	BCl3 valve closed
11/5/2011	6:26:31 PM	PH3 valve closed
11/5/2011	6:26:31 PM	SiCl4 pre valve closed
11/5/2011	6:26:31 PM	SiCl4 post valve closed
11/5/2011	6:26:31 PM	Bypass valve closed
11/5/2011	6:26:31 PM	Bubbler valve closed
11/5/2011	6:26:31 PM	Helium valve opened
11/5/2011	6:26:31 PM	Main Vac valve opened
11/5/2011	6:26:31 PM	Helium MFC set to  20.000000
11/5/2011	6:26:31 PM	H2 MFC set to  0.000000
11/5/2011	6:26:31 PM	BCl3 MFC set to  0.000000
11/5/2011	6:26:31 PM	PHl3 MFC set to  0.000000
11/5/2011	6:26:31 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:26:31 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:26:32 PM	Tube furnace set to 150
11/5/2011	6:27:02 PM	Helium valve closed
11/5/2011	6:27:02 PM	H2 valve closed
11/5/2011	6:27:02 PM	BCl3 valve closed
11/5/2011	6:27:02 PM	PH3 valve closed
11/5/2011	6:27:02 PM	SiCl4 pre valve closed
11/5/2011	6:27:02 PM	SiCl4 post valve closed
11/5/2011	6:27:02 PM	Bypass valve closed
11/5/2011	6:27:02 PM	Bubbler valve closed
11/5/2011	6:27:02 PM	Main Vac valve opened
11/5/2011	6:27:02 PM	Helium MFC set to  0.000000
11/5/2011	6:27:02 PM	H2 MFC set to  0.000000
11/5/2011	6:27:02 PM	BCl3 MFC set to  0.000000
11/5/2011	6:27:02 PM	PHl3 MFC set to  0.000000
11/5/2011	6:27:02 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:27:02 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:27:02 PM	Tube furnace set to 150
11/5/2011	6:27:32 PM	H2 valve closed
11/5/2011	6:27:32 PM	BCl3 valve closed
11/5/2011	6:27:32 PM	PH3 valve closed
11/5/2011	6:27:32 PM	SiCl4 pre valve closed
11/5/2011	6:27:32 PM	SiCl4 post valve closed
11/5/2011	6:27:32 PM	Bypass valve closed
11/5/2011	6:27:32 PM	Bubbler valve closed
11/5/2011	6:27:32 PM	Helium valve opened
11/5/2011	6:27:32 PM	Main Vac valve opened
11/5/2011	6:27:32 PM	Helium MFC set to  20.000000
11/5/2011	6:27:32 PM	H2 MFC set to  0.000000
11/5/2011	6:27:32 PM	BCl3 MFC set to  0.000000
11/5/2011	6:27:32 PM	PHl3 MFC set to  0.000000
11/5/2011	6:27:32 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:27:32 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:27:32 PM	Tube furnace set to 150
11/5/2011	6:28:02 PM	Helium valve closed
11/5/2011	6:28:02 PM	H2 valve closed
11/5/2011	6:28:02 PM	BCl3 valve closed
11/5/2011	6:28:02 PM	PH3 valve closed
11/5/2011	6:28:02 PM	SiCl4 pre valve closed
11/5/2011	6:28:02 PM	SiCl4 post valve closed
11/5/2011	6:28:02 PM	Bypass valve closed
11/5/2011	6:28:02 PM	Bubbler valve closed
11/5/2011	6:28:02 PM	Main Vac valve opened
11/5/2011	6:28:02 PM	Helium MFC set to  0.000000
11/5/2011	6:28:02 PM	H2 MFC set to  0.000000
11/5/2011	6:28:02 PM	BCl3 MFC set to  0.000000
11/5/2011	6:28:02 PM	PHl3 MFC set to  0.000000
11/5/2011	6:28:02 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:28:02 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:28:02 PM	Tube furnace set to 150
11/5/2011	6:28:32 PM	H2 valve closed
11/5/2011	6:28:32 PM	BCl3 valve closed
11/5/2011	6:28:32 PM	PH3 valve closed
11/5/2011	6:28:32 PM	SiCl4 pre valve closed
11/5/2011	6:28:32 PM	SiCl4 post valve closed
11/5/2011	6:28:32 PM	Bypass valve closed
11/5/2011	6:28:32 PM	Bubbler valve closed
11/5/2011	6:28:32 PM	Helium valve opened
11/5/2011	6:28:32 PM	Main Vac valve opened
11/5/2011	6:28:32 PM	Helium MFC set to  20.000000
11/5/2011	6:28:32 PM	H2 MFC set to  0.000000
11/5/2011	6:28:32 PM	BCl3 MFC set to  0.000000
11/5/2011	6:28:32 PM	PHl3 MFC set to  0.000000
11/5/2011	6:28:32 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:28:32 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:28:33 PM	Tube furnace set to 150
11/5/2011	6:29:03 PM	Helium valve closed
11/5/2011	6:29:03 PM	H2 valve closed
11/5/2011	6:29:03 PM	BCl3 valve closed
11/5/2011	6:29:03 PM	PH3 valve closed
11/5/2011	6:29:03 PM	SiCl4 pre valve closed
11/5/2011	6:29:03 PM	SiCl4 post valve closed
11/5/2011	6:29:03 PM	Bypass valve closed
11/5/2011	6:29:03 PM	Bubbler valve closed
11/5/2011	6:29:03 PM	Main Vac valve opened
11/5/2011	6:29:03 PM	Helium MFC set to  0.000000
11/5/2011	6:29:03 PM	H2 MFC set to  0.000000
11/5/2011	6:29:03 PM	BCl3 MFC set to  0.000000
11/5/2011	6:29:03 PM	PHl3 MFC set to  0.000000
11/5/2011	6:29:03 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:29:03 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:29:03 PM	Tube furnace set to 150
11/5/2011	6:29:33 PM	H2 valve closed
11/5/2011	6:29:33 PM	BCl3 valve closed
11/5/2011	6:29:33 PM	PH3 valve closed
11/5/2011	6:29:33 PM	SiCl4 pre valve closed
11/5/2011	6:29:33 PM	SiCl4 post valve closed
11/5/2011	6:29:33 PM	Bypass valve closed
11/5/2011	6:29:33 PM	Bubbler valve closed
11/5/2011	6:29:33 PM	Helium valve opened
11/5/2011	6:29:33 PM	Main Vac valve opened
11/5/2011	6:29:33 PM	Helium MFC set to  20.000000
11/5/2011	6:29:33 PM	H2 MFC set to  0.000000
11/5/2011	6:29:33 PM	BCl3 MFC set to  0.000000
11/5/2011	6:29:33 PM	PHl3 MFC set to  0.000000
11/5/2011	6:29:33 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:29:33 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:29:33 PM	Tube furnace set to 150
11/5/2011	6:30:03 PM	Helium valve closed
11/5/2011	6:30:03 PM	H2 valve closed
11/5/2011	6:30:03 PM	BCl3 valve closed
11/5/2011	6:30:03 PM	PH3 valve closed
11/5/2011	6:30:03 PM	SiCl4 pre valve closed
11/5/2011	6:30:03 PM	SiCl4 post valve closed
11/5/2011	6:30:03 PM	Bypass valve closed
11/5/2011	6:30:03 PM	Bubbler valve closed
11/5/2011	6:30:03 PM	Main Vac valve opened
11/5/2011	6:30:03 PM	Helium MFC set to  0.000000
11/5/2011	6:30:03 PM	H2 MFC set to  0.000000
11/5/2011	6:30:03 PM	BCl3 MFC set to  0.000000
11/5/2011	6:30:03 PM	PHl3 MFC set to  0.000000
11/5/2011	6:30:03 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:30:03 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:30:03 PM	Tube furnace set to 150
11/5/2011	6:30:33 PM	H2 valve closed
11/5/2011	6:30:33 PM	BCl3 valve closed
11/5/2011	6:30:33 PM	PH3 valve closed
11/5/2011	6:30:33 PM	SiCl4 pre valve closed
11/5/2011	6:30:33 PM	SiCl4 post valve closed
11/5/2011	6:30:33 PM	Bypass valve closed
11/5/2011	6:30:33 PM	Bubbler valve closed
11/5/2011	6:30:33 PM	Helium valve opened
11/5/2011	6:30:33 PM	Main Vac valve opened
11/5/2011	6:30:33 PM	Helium MFC set to  20.000000
11/5/2011	6:30:33 PM	H2 MFC set to  0.000000
11/5/2011	6:30:33 PM	BCl3 MFC set to  0.000000
11/5/2011	6:30:33 PM	PHl3 MFC set to  0.000000
11/5/2011	6:30:33 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:30:33 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:30:33 PM	Tube furnace set to 150
11/5/2011	6:31:03 PM	Helium valve closed
11/5/2011	6:31:03 PM	H2 valve closed
11/5/2011	6:31:03 PM	BCl3 valve closed
11/5/2011	6:31:03 PM	PH3 valve closed
11/5/2011	6:31:03 PM	SiCl4 pre valve closed
11/5/2011	6:31:03 PM	SiCl4 post valve closed
11/5/2011	6:31:03 PM	Bypass valve closed
11/5/2011	6:31:03 PM	Bubbler valve closed
11/5/2011	6:31:03 PM	Main Vac valve opened
11/5/2011	6:31:03 PM	Helium MFC set to  0.000000
11/5/2011	6:31:03 PM	H2 MFC set to  0.000000
11/5/2011	6:31:03 PM	BCl3 MFC set to  0.000000
11/5/2011	6:31:03 PM	PHl3 MFC set to  0.000000
11/5/2011	6:31:03 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:31:03 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:31:04 PM	Tube furnace set to 150
11/5/2011	6:31:34 PM	H2 valve closed
11/5/2011	6:31:34 PM	BCl3 valve closed
11/5/2011	6:31:34 PM	PH3 valve closed
11/5/2011	6:31:34 PM	SiCl4 pre valve closed
11/5/2011	6:31:34 PM	SiCl4 post valve closed
11/5/2011	6:31:34 PM	Bypass valve closed
11/5/2011	6:31:34 PM	Bubbler valve closed
11/5/2011	6:31:34 PM	Helium valve opened
11/5/2011	6:31:34 PM	Main Vac valve opened
11/5/2011	6:31:34 PM	Helium MFC set to  20.000000
11/5/2011	6:31:34 PM	H2 MFC set to  0.000000
11/5/2011	6:31:34 PM	BCl3 MFC set to  0.000000
11/5/2011	6:31:34 PM	PHl3 MFC set to  0.000000
11/5/2011	6:31:34 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:31:34 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:31:34 PM	Tube furnace set to 150
11/5/2011	6:32:04 PM	Helium valve closed
11/5/2011	6:32:04 PM	H2 valve closed
11/5/2011	6:32:04 PM	BCl3 valve closed
11/5/2011	6:32:04 PM	PH3 valve closed
11/5/2011	6:32:04 PM	SiCl4 pre valve closed
11/5/2011	6:32:04 PM	SiCl4 post valve closed
11/5/2011	6:32:04 PM	Bypass valve closed
11/5/2011	6:32:04 PM	Bubbler valve closed
11/5/2011	6:32:04 PM	Main Vac valve opened
11/5/2011	6:32:04 PM	Helium MFC set to  0.000000
11/5/2011	6:32:04 PM	H2 MFC set to  0.000000
11/5/2011	6:32:04 PM	BCl3 MFC set to  0.000000
11/5/2011	6:32:04 PM	PHl3 MFC set to  0.000000
11/5/2011	6:32:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:32:04 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:32:04 PM	Tube furnace set to 150
11/5/2011	6:32:34 PM	H2 valve closed
11/5/2011	6:32:34 PM	BCl3 valve closed
11/5/2011	6:32:34 PM	PH3 valve closed
11/5/2011	6:32:34 PM	SiCl4 pre valve closed
11/5/2011	6:32:34 PM	SiCl4 post valve closed
11/5/2011	6:32:34 PM	Bypass valve closed
11/5/2011	6:32:34 PM	Bubbler valve closed
11/5/2011	6:32:34 PM	Helium valve opened
11/5/2011	6:32:34 PM	Main Vac valve opened
11/5/2011	6:32:34 PM	Helium MFC set to  20.000000
11/5/2011	6:32:34 PM	H2 MFC set to  0.000000
11/5/2011	6:32:34 PM	BCl3 MFC set to  0.000000
11/5/2011	6:32:34 PM	PHl3 MFC set to  0.000000
11/5/2011	6:32:34 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:32:34 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:32:34 PM	Tube furnace set to 150
11/5/2011	6:33:04 PM	Helium valve closed
11/5/2011	6:33:04 PM	H2 valve closed
11/5/2011	6:33:04 PM	BCl3 valve closed
11/5/2011	6:33:04 PM	PH3 valve closed
11/5/2011	6:33:04 PM	SiCl4 pre valve closed
11/5/2011	6:33:04 PM	SiCl4 post valve closed
11/5/2011	6:33:04 PM	Bypass valve closed
11/5/2011	6:33:04 PM	Bubbler valve closed
11/5/2011	6:33:04 PM	Main Vac valve opened
11/5/2011	6:33:04 PM	Helium MFC set to  0.000000
11/5/2011	6:33:04 PM	H2 MFC set to  0.000000
11/5/2011	6:33:04 PM	BCl3 MFC set to  0.000000
11/5/2011	6:33:04 PM	PHl3 MFC set to  0.000000
11/5/2011	6:33:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:33:04 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:33:04 PM	Tube furnace set to 150
11/5/2011	6:33:34 PM	H2 valve closed
11/5/2011	6:33:34 PM	BCl3 valve closed
11/5/2011	6:33:34 PM	PH3 valve closed
11/5/2011	6:33:34 PM	SiCl4 pre valve closed
11/5/2011	6:33:34 PM	SiCl4 post valve closed
11/5/2011	6:33:34 PM	Bypass valve closed
11/5/2011	6:33:34 PM	Bubbler valve closed
11/5/2011	6:33:34 PM	Helium valve opened
11/5/2011	6:33:34 PM	Main Vac valve opened
11/5/2011	6:33:34 PM	Helium MFC set to  20.000000
11/5/2011	6:33:34 PM	H2 MFC set to  0.000000
11/5/2011	6:33:34 PM	BCl3 MFC set to  0.000000
11/5/2011	6:33:34 PM	PHl3 MFC set to  0.000000
11/5/2011	6:33:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:33:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:33:35 PM	Tube furnace set to 150
11/5/2011	6:34:05 PM	Helium valve closed
11/5/2011	6:34:05 PM	H2 valve closed
11/5/2011	6:34:05 PM	BCl3 valve closed
11/5/2011	6:34:05 PM	PH3 valve closed
11/5/2011	6:34:05 PM	SiCl4 pre valve closed
11/5/2011	6:34:05 PM	SiCl4 post valve closed
11/5/2011	6:34:05 PM	Bypass valve closed
11/5/2011	6:34:05 PM	Bubbler valve closed
11/5/2011	6:34:05 PM	Main Vac valve opened
11/5/2011	6:34:05 PM	Helium MFC set to  0.000000
11/5/2011	6:34:05 PM	H2 MFC set to  0.000000
11/5/2011	6:34:05 PM	BCl3 MFC set to  0.000000
11/5/2011	6:34:05 PM	PHl3 MFC set to  0.000000
11/5/2011	6:34:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:34:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:34:05 PM	Tube furnace set to 180
11/5/2011	6:34:10 PM	Run finished at 6:34 PM
11/5/2011	6:46:32 PM	Main Vac valve closed
11/5/2011	6:46:46 PM	Main Vac valve opened
11/5/2011	6:48:27 PM	Recipe started at 6:48 PM
11/5/2011	6:48:28 PM	H2 valve closed
11/5/2011	6:48:28 PM	BCl3 valve closed
11/5/2011	6:48:28 PM	PH3 valve closed
11/5/2011	6:48:28 PM	SiCl4 pre valve closed
11/5/2011	6:48:28 PM	SiCl4 post valve closed
11/5/2011	6:48:28 PM	Main Vac valve closed
11/5/2011	6:48:28 PM	Bypass valve closed
11/5/2011	6:48:28 PM	Bubbler valve closed
11/5/2011	6:48:28 PM	Helium valve opened
11/5/2011	6:48:28 PM	Helium MFC set to  0.000000
11/5/2011	6:48:28 PM	H2 MFC set to  0.000000
11/5/2011	6:48:28 PM	BCl3 MFC set to  0.000000
11/5/2011	6:48:28 PM	PHl3 MFC set to  0.000000
11/5/2011	6:48:28 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:48:28 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:48:28 PM	Tube furnace set to 0
11/5/2011	6:48:31 PM	Helium valve closed
11/5/2011	6:48:31 PM	BCl3 valve closed
11/5/2011	6:48:31 PM	PH3 valve closed
11/5/2011	6:48:31 PM	SiCl4 pre valve closed
11/5/2011	6:48:31 PM	SiCl4 post valve closed
11/5/2011	6:48:31 PM	Main Vac valve closed
11/5/2011	6:48:31 PM	Bypass valve closed
11/5/2011	6:48:31 PM	Bubbler valve closed
11/5/2011	6:48:31 PM	H2 valve opened
11/5/2011	6:48:31 PM	Helium MFC set to  0.000000
11/5/2011	6:48:31 PM	H2 MFC set to  500.000000
11/5/2011	6:48:31 PM	BCl3 MFC set to  0.000000
11/5/2011	6:48:31 PM	PHl3 MFC set to  0.000000
11/5/2011	6:48:31 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:48:31 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:48:31 PM	Tube furnace set to 100
11/5/2011	6:49:34 PM	Helium valve closed
11/5/2011	6:49:34 PM	BCl3 valve closed
11/5/2011	6:49:34 PM	PH3 valve closed
11/5/2011	6:49:34 PM	SiCl4 pre valve closed
11/5/2011	6:49:34 PM	SiCl4 post valve closed
11/5/2011	6:49:34 PM	Main Vac valve closed
11/5/2011	6:49:34 PM	Bypass valve closed
11/5/2011	6:49:34 PM	H2 valve opened
11/5/2011	6:49:34 PM	Bubbler valve opened
11/5/2011	6:49:34 PM	Helium MFC set to  0.000000
11/5/2011	6:49:34 PM	H2 MFC set to  500.000000
11/5/2011	6:49:34 PM	BCl3 MFC set to  0.000000
11/5/2011	6:49:34 PM	PHl3 MFC set to  0.000000
11/5/2011	6:49:34 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:49:34 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:49:34 PM	Tube furnace set to 1000
11/5/2011	6:49:35 PM	Helium valve closed
11/5/2011	6:49:35 PM	BCl3 valve closed
11/5/2011	6:49:35 PM	PH3 valve closed
11/5/2011	6:49:35 PM	SiCl4 pre valve closed
11/5/2011	6:49:35 PM	SiCl4 post valve closed
11/5/2011	6:49:35 PM	Main Vac valve closed
11/5/2011	6:49:35 PM	Bypass valve closed
11/5/2011	6:49:35 PM	H2 valve opened
11/5/2011	6:49:35 PM	Bubbler valve opened
11/5/2011	6:49:35 PM	Helium MFC set to  0.000000
11/5/2011	6:49:35 PM	H2 MFC set to  500.000000
11/5/2011	6:49:35 PM	BCl3 MFC set to  0.000000
11/5/2011	6:49:35 PM	PHl3 MFC set to  0.000000
11/5/2011	6:49:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	6:49:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	6:49:36 PM	Tube furnace set to 1000
11/5/2011	7:09:35 PM	Helium valve closed
11/5/2011	7:09:35 PM	BCl3 valve closed
11/5/2011	7:09:36 PM	PH3 valve closed
11/5/2011	7:09:36 PM	Main Vac valve closed
11/5/2011	7:09:36 PM	Bypass valve closed
11/5/2011	7:09:36 PM	H2 valve opened
11/5/2011	7:09:36 PM	SiCl4 pre valve opened
11/5/2011	7:09:36 PM	SiCl4 post valve opened
11/5/2011	7:09:36 PM	Bubbler valve opened
11/5/2011	7:09:36 PM	Helium MFC set to  0.000000
11/5/2011	7:09:36 PM	H2 MFC set to  500.000000
11/5/2011	7:09:36 PM	BCl3 MFC set to  0.000000
11/5/2011	7:09:36 PM	PHl3 MFC set to  0.000000
11/5/2011	7:09:36 PM	SiCl4 MFC set to  16.000000
11/5/2011	7:09:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	7:09:36 PM	Tube furnace set to 1000
11/5/2011	7:34:36 PM	Helium valve closed
11/5/2011	7:34:36 PM	BCl3 valve closed
11/5/2011	7:34:36 PM	PH3 valve closed
11/5/2011	7:34:36 PM	SiCl4 pre valve closed
11/5/2011	7:34:36 PM	SiCl4 post valve closed
11/5/2011	7:34:36 PM	Main Vac valve closed
11/5/2011	7:34:36 PM	Bypass valve closed
11/5/2011	7:34:36 PM	H2 valve opened
11/5/2011	7:34:36 PM	Bubbler valve opened
11/5/2011	7:34:36 PM	Helium MFC set to  0.000000
11/5/2011	7:34:36 PM	H2 MFC set to  500.000000
11/5/2011	7:34:36 PM	BCl3 MFC set to  0.000000
11/5/2011	7:34:36 PM	PHl3 MFC set to  0.000000
11/5/2011	7:34:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	7:34:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	7:34:36 PM	Tube furnace set to 750
11/5/2011	7:44:36 PM	H2 valve closed
11/5/2011	7:44:36 PM	BCl3 valve closed
11/5/2011	7:44:36 PM	PH3 valve closed
11/5/2011	7:44:36 PM	SiCl4 pre valve closed
11/5/2011	7:44:36 PM	SiCl4 post valve closed
11/5/2011	7:44:36 PM	Main Vac valve closed
11/5/2011	7:44:36 PM	Bypass valve closed
11/5/2011	7:44:36 PM	Helium valve opened
11/5/2011	7:44:36 PM	Bubbler valve opened
11/5/2011	7:44:36 PM	Helium MFC set to  400.000000
11/5/2011	7:44:36 PM	H2 MFC set to  0.000000
11/5/2011	7:44:36 PM	BCl3 MFC set to  0.000000
11/5/2011	7:44:36 PM	PHl3 MFC set to  0.000000
11/5/2011	7:44:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	7:44:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	7:44:36 PM	Tube furnace set to 0
11/5/2011	7:53:18 PM	Run aborted at 7:53 PM
11/5/2011	7:53:18 PM	Helium valve closed
11/5/2011	7:53:18 PM	H2 valve closed
11/5/2011	7:53:18 PM	BCl3 valve closed
11/5/2011	7:53:18 PM	PH3 valve closed
11/5/2011	7:53:18 PM	SiCl4 pre valve closed
11/5/2011	7:53:18 PM	SiCl4 post valve closed
11/5/2011	7:53:18 PM	Bypass valve closed
11/5/2011	7:53:18 PM	Main Vac valve closed
11/5/2011	7:53:18 PM	Bubbler valve closed
11/5/2011	7:53:18 PM	Helium MFC set to  0.000000
11/5/2011	7:53:18 PM	H2 MFC set to  0.000000
11/5/2011	7:53:18 PM	BCl3 MFC set to  0.000000
11/5/2011	7:53:18 PM	PHl3 MFC set to  0.000000
11/5/2011	7:53:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	7:53:19 PM	Tube furnace set to 0
11/5/2011	7:53:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	7:53:21 PM	Recipe started at 7:53 PM
11/5/2011	7:53:21 PM	Helium valve closed
11/5/2011	7:53:21 PM	H2 valve closed
11/5/2011	7:53:21 PM	BCl3 valve closed
11/5/2011	7:53:21 PM	PH3 valve closed
11/5/2011	7:53:21 PM	SiCl4 pre valve closed
11/5/2011	7:53:21 PM	SiCl4 post valve closed
11/5/2011	7:53:21 PM	Main Vac valve closed
11/5/2011	7:53:21 PM	Bypass valve closed
11/5/2011	7:53:21 PM	Bubbler valve closed
11/5/2011	7:53:21 PM	Helium MFC set to  0.000000
11/5/2011	7:53:21 PM	H2 MFC set to  0.000000
11/5/2011	7:53:21 PM	BCl3 MFC set to  0.000000
11/5/2011	7:53:21 PM	PHl3 MFC set to  0.000000
11/5/2011	7:53:21 PM	SiCl4 MFC set to  0.000000
11/5/2011	7:53:21 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	7:53:21 PM	Tube furnace set to 0
11/5/2011	7:53:24 PM	H2 valve closed
11/5/2011	7:53:24 PM	BCl3 valve closed
11/5/2011	7:53:24 PM	PH3 valve closed
11/5/2011	7:53:24 PM	SiCl4 pre valve closed
11/5/2011	7:53:24 PM	SiCl4 post valve closed
11/5/2011	7:53:24 PM	Main Vac valve closed
11/5/2011	7:53:24 PM	Bypass valve closed
11/5/2011	7:53:24 PM	Bubbler valve closed
11/5/2011	7:53:24 PM	Helium valve opened
11/5/2011	7:53:24 PM	Helium MFC set to  500.000000
11/5/2011	7:53:24 PM	H2 MFC set to  0.000000
11/5/2011	7:53:24 PM	BCl3 MFC set to  0.000000
11/5/2011	7:53:24 PM	PHl3 MFC set to  0.000000
11/5/2011	7:53:24 PM	SiCl4 MFC set to  0.000000
11/5/2011	7:53:24 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	7:53:24 PM	Tube furnace set to 0
11/5/2011	7:53:25 PM	Helium valve closed
11/5/2011	7:53:25 PM	H2 valve closed
11/5/2011	7:53:25 PM	BCl3 valve closed
11/5/2011	7:53:25 PM	PH3 valve closed
11/5/2011	7:53:25 PM	SiCl4 pre valve closed
11/5/2011	7:53:25 PM	SiCl4 post valve closed
11/5/2011	7:53:25 PM	Main Vac valve closed
11/5/2011	7:53:25 PM	Bypass valve closed
11/5/2011	7:53:25 PM	Bubbler valve closed
11/5/2011	7:53:25 PM	Helium MFC set to  0.000000
11/5/2011	7:53:25 PM	H2 MFC set to  0.000000
11/5/2011	7:53:25 PM	BCl3 MFC set to  0.000000
11/5/2011	7:53:25 PM	PHl3 MFC set to  0.000000
11/5/2011	7:53:25 PM	SiCl4 MFC set to  0.000000
11/5/2011	7:53:25 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	7:53:25 PM	Tube furnace set to 0
11/5/2011	7:53:26 PM	Run finished at 7:53 PM
11/5/2011	7:53:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	7:58:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	7:58:23 PM	Recipe started at 7:58 PM
11/5/2011	7:58:23 PM	Helium valve closed
11/5/2011	7:58:23 PM	H2 valve closed
11/5/2011	7:58:23 PM	BCl3 valve closed
11/5/2011	7:58:23 PM	PH3 valve closed
11/5/2011	7:58:23 PM	SiCl4 pre valve closed
11/5/2011	7:58:23 PM	SiCl4 post valve closed
11/5/2011	7:58:23 PM	Main Vac valve closed
11/5/2011	7:58:23 PM	Bubbler valve closed
11/5/2011	7:58:23 PM	Bypass valve opened
11/5/2011	7:58:23 PM	Helium MFC set to  0.000000
11/5/2011	7:58:23 PM	H2 MFC set to  0.000000
11/5/2011	7:58:23 PM	BCl3 MFC set to  0.000000
11/5/2011	7:58:23 PM	PHl3 MFC set to  0.000000
11/5/2011	7:58:23 PM	SiCl4 MFC set to  0.000000
11/5/2011	7:58:23 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	7:58:23 PM	Tube furnace set to 0
11/5/2011	7:59:25 PM	Helium valve closed
11/5/2011	7:59:25 PM	H2 valve closed
11/5/2011	7:59:25 PM	BCl3 valve closed
11/5/2011	7:59:25 PM	PH3 valve closed
11/5/2011	7:59:25 PM	SiCl4 pre valve closed
11/5/2011	7:59:25 PM	SiCl4 post valve closed
11/5/2011	7:59:25 PM	Main Vac valve closed
11/5/2011	7:59:25 PM	Bubbler valve closed
11/5/2011	7:59:25 PM	Bypass valve opened
11/5/2011	7:59:25 PM	Helium MFC set to  0.000000
11/5/2011	7:59:25 PM	H2 MFC set to  0.000000
11/5/2011	7:59:25 PM	BCl3 MFC set to  0.000000
11/5/2011	7:59:25 PM	PHl3 MFC set to  0.000000
11/5/2011	7:59:25 PM	SiCl4 MFC set to  0.000000
11/5/2011	7:59:25 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	7:59:25 PM	Tube furnace set to 0
11/5/2011	8:00:25 PM	Helium valve closed
11/5/2011	8:00:25 PM	H2 valve closed
11/5/2011	8:00:25 PM	BCl3 valve closed
11/5/2011	8:00:25 PM	PH3 valve closed
11/5/2011	8:00:25 PM	SiCl4 pre valve closed
11/5/2011	8:00:25 PM	SiCl4 post valve closed
11/5/2011	8:00:25 PM	Bypass valve closed
11/5/2011	8:00:25 PM	Bubbler valve closed
11/5/2011	8:00:25 PM	Main Vac valve opened
11/5/2011	8:00:25 PM	Helium MFC set to  0.000000
11/5/2011	8:00:25 PM	H2 MFC set to  0.000000
11/5/2011	8:00:25 PM	BCl3 MFC set to  0.000000
11/5/2011	8:00:25 PM	PHl3 MFC set to  0.000000
11/5/2011	8:00:25 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:00:25 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:00:25 PM	Tube furnace set to 0
11/5/2011	8:00:26 PM	Run finished at 8:00 PM
11/5/2011	8:00:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	8:11:42 PM	Recipe started at 8:11 PM
11/5/2011	8:11:42 PM	Helium valve closed
11/5/2011	8:11:42 PM	H2 valve closed
11/5/2011	8:11:42 PM	BCl3 valve closed
11/5/2011	8:11:42 PM	PH3 valve closed
11/5/2011	8:11:42 PM	SiCl4 pre valve closed
11/5/2011	8:11:42 PM	SiCl4 post valve closed
11/5/2011	8:11:42 PM	Main Vac valve closed
11/5/2011	8:11:42 PM	Bubbler valve closed
11/5/2011	8:11:42 PM	Bypass valve opened
11/5/2011	8:11:42 PM	Helium MFC set to  0.000000
11/5/2011	8:11:42 PM	H2 MFC set to  0.000000
11/5/2011	8:11:42 PM	BCl3 MFC set to  0.000000
11/5/2011	8:11:42 PM	PHl3 MFC set to  0.000000
11/5/2011	8:11:42 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:11:42 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:11:42 PM	Tube furnace set to 180
11/5/2011	8:11:42 PM	Helium valve closed
11/5/2011	8:11:42 PM	H2 valve closed
11/5/2011	8:11:42 PM	BCl3 valve closed
11/5/2011	8:11:42 PM	PH3 valve closed
11/5/2011	8:11:42 PM	SiCl4 pre valve closed
11/5/2011	8:11:42 PM	SiCl4 post valve closed
11/5/2011	8:11:42 PM	Main Vac valve closed
11/5/2011	8:11:42 PM	Bubbler valve closed
11/5/2011	8:11:42 PM	Bypass valve opened
11/5/2011	8:11:43 PM	Helium MFC set to  0.000000
11/5/2011	8:11:43 PM	H2 MFC set to  0.000000
11/5/2011	8:11:43 PM	BCl3 MFC set to  0.000000
11/5/2011	8:11:43 PM	PHl3 MFC set to  0.000000
11/5/2011	8:11:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:11:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:11:43 PM	Tube furnace set to 150
11/5/2011	8:12:13 PM	Helium valve closed
11/5/2011	8:12:13 PM	H2 valve closed
11/5/2011	8:12:13 PM	BCl3 valve closed
11/5/2011	8:12:13 PM	PH3 valve closed
11/5/2011	8:12:13 PM	SiCl4 pre valve closed
11/5/2011	8:12:13 PM	SiCl4 post valve closed
11/5/2011	8:12:13 PM	Bypass valve closed
11/5/2011	8:12:13 PM	Bubbler valve closed
11/5/2011	8:12:13 PM	Main Vac valve opened
11/5/2011	8:12:13 PM	Helium MFC set to  0.000000
11/5/2011	8:12:13 PM	H2 MFC set to  0.000000
11/5/2011	8:12:13 PM	BCl3 MFC set to  0.000000
11/5/2011	8:12:13 PM	PHl3 MFC set to  0.000000
11/5/2011	8:12:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:12:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:12:13 PM	Tube furnace set to 180
11/5/2011	8:12:43 PM	H2 valve closed
11/5/2011	8:12:43 PM	BCl3 valve closed
11/5/2011	8:12:43 PM	PH3 valve closed
11/5/2011	8:12:43 PM	SiCl4 pre valve closed
11/5/2011	8:12:43 PM	SiCl4 post valve closed
11/5/2011	8:12:43 PM	Bypass valve closed
11/5/2011	8:12:43 PM	Bubbler valve closed
11/5/2011	8:12:43 PM	Helium valve opened
11/5/2011	8:12:43 PM	Main Vac valve opened
11/5/2011	8:12:43 PM	Helium MFC set to  20.000000
11/5/2011	8:12:43 PM	H2 MFC set to  0.000000
11/5/2011	8:12:43 PM	BCl3 MFC set to  0.000000
11/5/2011	8:12:43 PM	PHl3 MFC set to  0.000000
11/5/2011	8:12:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:12:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:12:43 PM	Tube furnace set to 180
11/5/2011	8:13:13 PM	Helium valve closed
11/5/2011	8:13:13 PM	H2 valve closed
11/5/2011	8:13:13 PM	BCl3 valve closed
11/5/2011	8:13:13 PM	PH3 valve closed
11/5/2011	8:13:13 PM	SiCl4 pre valve closed
11/5/2011	8:13:13 PM	SiCl4 post valve closed
11/5/2011	8:13:13 PM	Bypass valve closed
11/5/2011	8:13:13 PM	Bubbler valve closed
11/5/2011	8:13:13 PM	Main Vac valve opened
11/5/2011	8:13:13 PM	Helium MFC set to  0.000000
11/5/2011	8:13:13 PM	H2 MFC set to  0.000000
11/5/2011	8:13:13 PM	BCl3 MFC set to  0.000000
11/5/2011	8:13:13 PM	PHl3 MFC set to  0.000000
11/5/2011	8:13:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:13:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:13:13 PM	Tube furnace set to 150
11/5/2011	8:13:43 PM	H2 valve closed
11/5/2011	8:13:43 PM	BCl3 valve closed
11/5/2011	8:13:43 PM	PH3 valve closed
11/5/2011	8:13:43 PM	SiCl4 pre valve closed
11/5/2011	8:13:43 PM	SiCl4 post valve closed
11/5/2011	8:13:43 PM	Bypass valve closed
11/5/2011	8:13:43 PM	Bubbler valve closed
11/5/2011	8:13:43 PM	Helium valve opened
11/5/2011	8:13:43 PM	Main Vac valve opened
11/5/2011	8:13:43 PM	Helium MFC set to  20.000000
11/5/2011	8:13:43 PM	H2 MFC set to  0.000000
11/5/2011	8:13:43 PM	BCl3 MFC set to  0.000000
11/5/2011	8:13:43 PM	PHl3 MFC set to  0.000000
11/5/2011	8:13:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:13:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:13:43 PM	Tube furnace set to 180
11/5/2011	8:14:14 PM	Helium valve closed
11/5/2011	8:14:14 PM	H2 valve closed
11/5/2011	8:14:14 PM	BCl3 valve closed
11/5/2011	8:14:14 PM	PH3 valve closed
11/5/2011	8:14:14 PM	SiCl4 pre valve closed
11/5/2011	8:14:14 PM	SiCl4 post valve closed
11/5/2011	8:14:14 PM	Bypass valve closed
11/5/2011	8:14:14 PM	Bubbler valve closed
11/5/2011	8:14:14 PM	Main Vac valve opened
11/5/2011	8:14:14 PM	Helium MFC set to  0.000000
11/5/2011	8:14:14 PM	H2 MFC set to  0.000000
11/5/2011	8:14:14 PM	BCl3 MFC set to  0.000000
11/5/2011	8:14:14 PM	PHl3 MFC set to  0.000000
11/5/2011	8:14:14 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:14:14 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:14:14 PM	Tube furnace set to 150
11/5/2011	8:14:44 PM	H2 valve closed
11/5/2011	8:14:44 PM	BCl3 valve closed
11/5/2011	8:14:44 PM	PH3 valve closed
11/5/2011	8:14:44 PM	SiCl4 pre valve closed
11/5/2011	8:14:44 PM	SiCl4 post valve closed
11/5/2011	8:14:44 PM	Bypass valve closed
11/5/2011	8:14:44 PM	Bubbler valve closed
11/5/2011	8:14:44 PM	Helium valve opened
11/5/2011	8:14:44 PM	Main Vac valve opened
11/5/2011	8:14:44 PM	Helium MFC set to  20.000000
11/5/2011	8:14:44 PM	H2 MFC set to  0.000000
11/5/2011	8:14:44 PM	BCl3 MFC set to  0.000000
11/5/2011	8:14:44 PM	PHl3 MFC set to  0.000000
11/5/2011	8:14:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:14:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:14:44 PM	Tube furnace set to 150
11/5/2011	8:15:14 PM	Helium valve closed
11/5/2011	8:15:14 PM	H2 valve closed
11/5/2011	8:15:14 PM	BCl3 valve closed
11/5/2011	8:15:14 PM	PH3 valve closed
11/5/2011	8:15:14 PM	SiCl4 pre valve closed
11/5/2011	8:15:14 PM	SiCl4 post valve closed
11/5/2011	8:15:14 PM	Bypass valve closed
11/5/2011	8:15:14 PM	Bubbler valve closed
11/5/2011	8:15:14 PM	Main Vac valve opened
11/5/2011	8:15:14 PM	Helium MFC set to  0.000000
11/5/2011	8:15:14 PM	H2 MFC set to  0.000000
11/5/2011	8:15:14 PM	BCl3 MFC set to  0.000000
11/5/2011	8:15:14 PM	PHl3 MFC set to  0.000000
11/5/2011	8:15:14 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:15:14 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:15:14 PM	Tube furnace set to 150
11/5/2011	8:15:44 PM	H2 valve closed
11/5/2011	8:15:44 PM	BCl3 valve closed
11/5/2011	8:15:44 PM	PH3 valve closed
11/5/2011	8:15:44 PM	SiCl4 pre valve closed
11/5/2011	8:15:44 PM	SiCl4 post valve closed
11/5/2011	8:15:44 PM	Bypass valve closed
11/5/2011	8:15:44 PM	Bubbler valve closed
11/5/2011	8:15:44 PM	Helium valve opened
11/5/2011	8:15:44 PM	Main Vac valve opened
11/5/2011	8:15:44 PM	Helium MFC set to  20.000000
11/5/2011	8:15:44 PM	H2 MFC set to  0.000000
11/5/2011	8:15:44 PM	BCl3 MFC set to  0.000000
11/5/2011	8:15:44 PM	PHl3 MFC set to  0.000000
11/5/2011	8:15:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:15:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:15:44 PM	Tube furnace set to 180
11/5/2011	8:16:14 PM	Helium valve closed
11/5/2011	8:16:14 PM	H2 valve closed
11/5/2011	8:16:14 PM	BCl3 valve closed
11/5/2011	8:16:14 PM	PH3 valve closed
11/5/2011	8:16:14 PM	SiCl4 pre valve closed
11/5/2011	8:16:14 PM	SiCl4 post valve closed
11/5/2011	8:16:14 PM	Bypass valve closed
11/5/2011	8:16:14 PM	Bubbler valve closed
11/5/2011	8:16:14 PM	Main Vac valve opened
11/5/2011	8:16:14 PM	Helium MFC set to  0.000000
11/5/2011	8:16:14 PM	H2 MFC set to  0.000000
11/5/2011	8:16:14 PM	BCl3 MFC set to  0.000000
11/5/2011	8:16:14 PM	PHl3 MFC set to  0.000000
11/5/2011	8:16:14 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:16:14 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:16:15 PM	Tube furnace set to 150
11/5/2011	8:16:45 PM	H2 valve closed
11/5/2011	8:16:45 PM	BCl3 valve closed
11/5/2011	8:16:45 PM	PH3 valve closed
11/5/2011	8:16:45 PM	SiCl4 pre valve closed
11/5/2011	8:16:45 PM	SiCl4 post valve closed
11/5/2011	8:16:45 PM	Bypass valve closed
11/5/2011	8:16:45 PM	Bubbler valve closed
11/5/2011	8:16:45 PM	Helium valve opened
11/5/2011	8:16:45 PM	Main Vac valve opened
11/5/2011	8:16:45 PM	Helium MFC set to  20.000000
11/5/2011	8:16:45 PM	H2 MFC set to  0.000000
11/5/2011	8:16:45 PM	BCl3 MFC set to  0.000000
11/5/2011	8:16:45 PM	PHl3 MFC set to  0.000000
11/5/2011	8:16:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:16:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:16:45 PM	Tube furnace set to 150
11/5/2011	8:17:15 PM	Helium valve closed
11/5/2011	8:17:15 PM	H2 valve closed
11/5/2011	8:17:15 PM	BCl3 valve closed
11/5/2011	8:17:15 PM	PH3 valve closed
11/5/2011	8:17:15 PM	SiCl4 pre valve closed
11/5/2011	8:17:15 PM	SiCl4 post valve closed
11/5/2011	8:17:15 PM	Bypass valve closed
11/5/2011	8:17:15 PM	Bubbler valve closed
11/5/2011	8:17:15 PM	Main Vac valve opened
11/5/2011	8:17:15 PM	Helium MFC set to  0.000000
11/5/2011	8:17:15 PM	H2 MFC set to  0.000000
11/5/2011	8:17:15 PM	BCl3 MFC set to  0.000000
11/5/2011	8:17:15 PM	PHl3 MFC set to  0.000000
11/5/2011	8:17:15 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:17:15 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:17:15 PM	Tube furnace set to 150
11/5/2011	8:17:45 PM	H2 valve closed
11/5/2011	8:17:45 PM	BCl3 valve closed
11/5/2011	8:17:45 PM	PH3 valve closed
11/5/2011	8:17:45 PM	SiCl4 pre valve closed
11/5/2011	8:17:45 PM	SiCl4 post valve closed
11/5/2011	8:17:45 PM	Bypass valve closed
11/5/2011	8:17:45 PM	Bubbler valve closed
11/5/2011	8:17:45 PM	Helium valve opened
11/5/2011	8:17:45 PM	Main Vac valve opened
11/5/2011	8:17:45 PM	Helium MFC set to  20.000000
11/5/2011	8:17:45 PM	H2 MFC set to  0.000000
11/5/2011	8:17:45 PM	BCl3 MFC set to  0.000000
11/5/2011	8:17:45 PM	PHl3 MFC set to  0.000000
11/5/2011	8:17:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:17:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:17:45 PM	Tube furnace set to 150
11/5/2011	8:18:15 PM	Helium valve closed
11/5/2011	8:18:15 PM	H2 valve closed
11/5/2011	8:18:15 PM	BCl3 valve closed
11/5/2011	8:18:15 PM	PH3 valve closed
11/5/2011	8:18:15 PM	SiCl4 pre valve closed
11/5/2011	8:18:15 PM	SiCl4 post valve closed
11/5/2011	8:18:15 PM	Bypass valve closed
11/5/2011	8:18:15 PM	Bubbler valve closed
11/5/2011	8:18:15 PM	Main Vac valve opened
11/5/2011	8:18:15 PM	Helium MFC set to  0.000000
11/5/2011	8:18:15 PM	H2 MFC set to  0.000000
11/5/2011	8:18:15 PM	BCl3 MFC set to  0.000000
11/5/2011	8:18:15 PM	PHl3 MFC set to  0.000000
11/5/2011	8:18:15 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:18:15 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:18:15 PM	Tube furnace set to 150
11/5/2011	8:18:45 PM	H2 valve closed
11/5/2011	8:18:45 PM	BCl3 valve closed
11/5/2011	8:18:45 PM	PH3 valve closed
11/5/2011	8:18:45 PM	SiCl4 pre valve closed
11/5/2011	8:18:45 PM	SiCl4 post valve closed
11/5/2011	8:18:45 PM	Bypass valve closed
11/5/2011	8:18:45 PM	Bubbler valve closed
11/5/2011	8:18:45 PM	Helium valve opened
11/5/2011	8:18:45 PM	Main Vac valve opened
11/5/2011	8:18:45 PM	Helium MFC set to  20.000000
11/5/2011	8:18:45 PM	H2 MFC set to  0.000000
11/5/2011	8:18:45 PM	BCl3 MFC set to  0.000000
11/5/2011	8:18:45 PM	PHl3 MFC set to  0.000000
11/5/2011	8:18:45 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:18:45 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:18:46 PM	Tube furnace set to 150
11/5/2011	8:19:16 PM	Helium valve closed
11/5/2011	8:19:16 PM	H2 valve closed
11/5/2011	8:19:16 PM	BCl3 valve closed
11/5/2011	8:19:16 PM	PH3 valve closed
11/5/2011	8:19:16 PM	SiCl4 pre valve closed
11/5/2011	8:19:16 PM	SiCl4 post valve closed
11/5/2011	8:19:16 PM	Bypass valve closed
11/5/2011	8:19:16 PM	Bubbler valve closed
11/5/2011	8:19:16 PM	Main Vac valve opened
11/5/2011	8:19:16 PM	Helium MFC set to  0.000000
11/5/2011	8:19:16 PM	H2 MFC set to  0.000000
11/5/2011	8:19:16 PM	BCl3 MFC set to  0.000000
11/5/2011	8:19:16 PM	PHl3 MFC set to  0.000000
11/5/2011	8:19:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:19:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:19:16 PM	Tube furnace set to 150
11/5/2011	8:19:46 PM	H2 valve closed
11/5/2011	8:19:46 PM	BCl3 valve closed
11/5/2011	8:19:46 PM	PH3 valve closed
11/5/2011	8:19:46 PM	SiCl4 pre valve closed
11/5/2011	8:19:46 PM	SiCl4 post valve closed
11/5/2011	8:19:46 PM	Bypass valve closed
11/5/2011	8:19:46 PM	Bubbler valve closed
11/5/2011	8:19:46 PM	Helium valve opened
11/5/2011	8:19:46 PM	Main Vac valve opened
11/5/2011	8:19:46 PM	Helium MFC set to  20.000000
11/5/2011	8:19:46 PM	H2 MFC set to  0.000000
11/5/2011	8:19:46 PM	BCl3 MFC set to  0.000000
11/5/2011	8:19:46 PM	PHl3 MFC set to  0.000000
11/5/2011	8:19:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:19:46 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:19:46 PM	Tube furnace set to 150
11/5/2011	8:20:16 PM	Helium valve closed
11/5/2011	8:20:16 PM	H2 valve closed
11/5/2011	8:20:16 PM	BCl3 valve closed
11/5/2011	8:20:16 PM	PH3 valve closed
11/5/2011	8:20:16 PM	SiCl4 pre valve closed
11/5/2011	8:20:16 PM	SiCl4 post valve closed
11/5/2011	8:20:16 PM	Bypass valve closed
11/5/2011	8:20:16 PM	Bubbler valve closed
11/5/2011	8:20:16 PM	Main Vac valve opened
11/5/2011	8:20:16 PM	Helium MFC set to  0.000000
11/5/2011	8:20:16 PM	H2 MFC set to  0.000000
11/5/2011	8:20:16 PM	BCl3 MFC set to  0.000000
11/5/2011	8:20:16 PM	PHl3 MFC set to  0.000000
11/5/2011	8:20:16 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:20:16 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:20:16 PM	Tube furnace set to 150
11/5/2011	8:20:46 PM	H2 valve closed
11/5/2011	8:20:46 PM	BCl3 valve closed
11/5/2011	8:20:46 PM	PH3 valve closed
11/5/2011	8:20:46 PM	SiCl4 pre valve closed
11/5/2011	8:20:46 PM	SiCl4 post valve closed
11/5/2011	8:20:46 PM	Bypass valve closed
11/5/2011	8:20:46 PM	Bubbler valve closed
11/5/2011	8:20:46 PM	Helium valve opened
11/5/2011	8:20:46 PM	Main Vac valve opened
11/5/2011	8:20:46 PM	Helium MFC set to  20.000000
11/5/2011	8:20:46 PM	H2 MFC set to  0.000000
11/5/2011	8:20:46 PM	BCl3 MFC set to  0.000000
11/5/2011	8:20:46 PM	PHl3 MFC set to  0.000000
11/5/2011	8:20:46 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:20:46 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:20:47 PM	Tube furnace set to 150
11/5/2011	8:21:17 PM	Helium valve closed
11/5/2011	8:21:17 PM	H2 valve closed
11/5/2011	8:21:17 PM	BCl3 valve closed
11/5/2011	8:21:17 PM	PH3 valve closed
11/5/2011	8:21:17 PM	SiCl4 pre valve closed
11/5/2011	8:21:17 PM	SiCl4 post valve closed
11/5/2011	8:21:17 PM	Bypass valve closed
11/5/2011	8:21:17 PM	Bubbler valve closed
11/5/2011	8:21:17 PM	Main Vac valve opened
11/5/2011	8:21:17 PM	Helium MFC set to  0.000000
11/5/2011	8:21:17 PM	H2 MFC set to  0.000000
11/5/2011	8:21:17 PM	BCl3 MFC set to  0.000000
11/5/2011	8:21:17 PM	PHl3 MFC set to  0.000000
11/5/2011	8:21:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:21:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:21:17 PM	Tube furnace set to 150
11/5/2011	8:21:47 PM	H2 valve closed
11/5/2011	8:21:47 PM	BCl3 valve closed
11/5/2011	8:21:47 PM	PH3 valve closed
11/5/2011	8:21:47 PM	SiCl4 pre valve closed
11/5/2011	8:21:47 PM	SiCl4 post valve closed
11/5/2011	8:21:47 PM	Bypass valve closed
11/5/2011	8:21:47 PM	Bubbler valve closed
11/5/2011	8:21:47 PM	Helium valve opened
11/5/2011	8:21:47 PM	Main Vac valve opened
11/5/2011	8:21:47 PM	Helium MFC set to  20.000000
11/5/2011	8:21:47 PM	H2 MFC set to  0.000000
11/5/2011	8:21:47 PM	BCl3 MFC set to  0.000000
11/5/2011	8:21:47 PM	PHl3 MFC set to  0.000000
11/5/2011	8:21:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:21:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:21:47 PM	Tube furnace set to 150
11/5/2011	8:22:17 PM	Helium valve closed
11/5/2011	8:22:17 PM	H2 valve closed
11/5/2011	8:22:17 PM	BCl3 valve closed
11/5/2011	8:22:17 PM	PH3 valve closed
11/5/2011	8:22:17 PM	SiCl4 pre valve closed
11/5/2011	8:22:17 PM	SiCl4 post valve closed
11/5/2011	8:22:17 PM	Bypass valve closed
11/5/2011	8:22:17 PM	Bubbler valve closed
11/5/2011	8:22:17 PM	Main Vac valve opened
11/5/2011	8:22:17 PM	Helium MFC set to  0.000000
11/5/2011	8:22:17 PM	H2 MFC set to  0.000000
11/5/2011	8:22:17 PM	BCl3 MFC set to  0.000000
11/5/2011	8:22:17 PM	PHl3 MFC set to  0.000000
11/5/2011	8:22:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:22:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:22:17 PM	Tube furnace set to 150
11/5/2011	8:22:47 PM	H2 valve closed
11/5/2011	8:22:47 PM	BCl3 valve closed
11/5/2011	8:22:47 PM	PH3 valve closed
11/5/2011	8:22:47 PM	SiCl4 pre valve closed
11/5/2011	8:22:47 PM	SiCl4 post valve closed
11/5/2011	8:22:47 PM	Bypass valve closed
11/5/2011	8:22:47 PM	Bubbler valve closed
11/5/2011	8:22:47 PM	Helium valve opened
11/5/2011	8:22:47 PM	Main Vac valve opened
11/5/2011	8:22:47 PM	Helium MFC set to  20.000000
11/5/2011	8:22:47 PM	H2 MFC set to  0.000000
11/5/2011	8:22:47 PM	BCl3 MFC set to  0.000000
11/5/2011	8:22:47 PM	PHl3 MFC set to  0.000000
11/5/2011	8:22:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:22:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:22:47 PM	Tube furnace set to 150
11/5/2011	8:23:17 PM	Helium valve closed
11/5/2011	8:23:17 PM	H2 valve closed
11/5/2011	8:23:17 PM	BCl3 valve closed
11/5/2011	8:23:17 PM	PH3 valve closed
11/5/2011	8:23:17 PM	SiCl4 pre valve closed
11/5/2011	8:23:17 PM	SiCl4 post valve closed
11/5/2011	8:23:17 PM	Bypass valve closed
11/5/2011	8:23:17 PM	Bubbler valve closed
11/5/2011	8:23:17 PM	Main Vac valve opened
11/5/2011	8:23:17 PM	Helium MFC set to  0.000000
11/5/2011	8:23:17 PM	H2 MFC set to  0.000000
11/5/2011	8:23:17 PM	BCl3 MFC set to  0.000000
11/5/2011	8:23:17 PM	PHl3 MFC set to  0.000000
11/5/2011	8:23:17 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:23:17 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:23:18 PM	Tube furnace set to 150
11/5/2011	8:23:48 PM	H2 valve closed
11/5/2011	8:23:48 PM	BCl3 valve closed
11/5/2011	8:23:48 PM	PH3 valve closed
11/5/2011	8:23:48 PM	SiCl4 pre valve closed
11/5/2011	8:23:48 PM	SiCl4 post valve closed
11/5/2011	8:23:48 PM	Bypass valve closed
11/5/2011	8:23:48 PM	Bubbler valve closed
11/5/2011	8:23:48 PM	Helium valve opened
11/5/2011	8:23:48 PM	Main Vac valve opened
11/5/2011	8:23:48 PM	Helium MFC set to  20.000000
11/5/2011	8:23:48 PM	H2 MFC set to  0.000000
11/5/2011	8:23:48 PM	BCl3 MFC set to  0.000000
11/5/2011	8:23:48 PM	PHl3 MFC set to  0.000000
11/5/2011	8:23:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:23:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:23:48 PM	Tube furnace set to 150
11/5/2011	8:24:18 PM	Helium valve closed
11/5/2011	8:24:18 PM	H2 valve closed
11/5/2011	8:24:18 PM	BCl3 valve closed
11/5/2011	8:24:18 PM	PH3 valve closed
11/5/2011	8:24:18 PM	SiCl4 pre valve closed
11/5/2011	8:24:18 PM	SiCl4 post valve closed
11/5/2011	8:24:18 PM	Bypass valve closed
11/5/2011	8:24:18 PM	Bubbler valve closed
11/5/2011	8:24:18 PM	Main Vac valve opened
11/5/2011	8:24:18 PM	Helium MFC set to  0.000000
11/5/2011	8:24:18 PM	H2 MFC set to  0.000000
11/5/2011	8:24:18 PM	BCl3 MFC set to  0.000000
11/5/2011	8:24:18 PM	PHl3 MFC set to  0.000000
11/5/2011	8:24:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:24:18 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:24:18 PM	Tube furnace set to 150
11/5/2011	8:24:48 PM	H2 valve closed
11/5/2011	8:24:48 PM	BCl3 valve closed
11/5/2011	8:24:48 PM	PH3 valve closed
11/5/2011	8:24:48 PM	SiCl4 pre valve closed
11/5/2011	8:24:48 PM	SiCl4 post valve closed
11/5/2011	8:24:48 PM	Bypass valve closed
11/5/2011	8:24:48 PM	Bubbler valve closed
11/5/2011	8:24:48 PM	Helium valve opened
11/5/2011	8:24:48 PM	Main Vac valve opened
11/5/2011	8:24:48 PM	Helium MFC set to  20.000000
11/5/2011	8:24:48 PM	H2 MFC set to  0.000000
11/5/2011	8:24:48 PM	BCl3 MFC set to  0.000000
11/5/2011	8:24:48 PM	PHl3 MFC set to  0.000000
11/5/2011	8:24:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:24:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:24:48 PM	Tube furnace set to 150
11/5/2011	8:25:18 PM	Helium valve closed
11/5/2011	8:25:18 PM	H2 valve closed
11/5/2011	8:25:18 PM	BCl3 valve closed
11/5/2011	8:25:18 PM	PH3 valve closed
11/5/2011	8:25:18 PM	SiCl4 pre valve closed
11/5/2011	8:25:18 PM	SiCl4 post valve closed
11/5/2011	8:25:18 PM	Bypass valve closed
11/5/2011	8:25:18 PM	Bubbler valve closed
11/5/2011	8:25:18 PM	Main Vac valve opened
11/5/2011	8:25:18 PM	Helium MFC set to  0.000000
11/5/2011	8:25:18 PM	H2 MFC set to  0.000000
11/5/2011	8:25:18 PM	BCl3 MFC set to  0.000000
11/5/2011	8:25:18 PM	PHl3 MFC set to  0.000000
11/5/2011	8:25:18 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:25:18 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:25:18 PM	Tube furnace set to 150
11/5/2011	8:25:48 PM	H2 valve closed
11/5/2011	8:25:48 PM	BCl3 valve closed
11/5/2011	8:25:48 PM	PH3 valve closed
11/5/2011	8:25:48 PM	SiCl4 pre valve closed
11/5/2011	8:25:48 PM	SiCl4 post valve closed
11/5/2011	8:25:48 PM	Bypass valve closed
11/5/2011	8:25:48 PM	Bubbler valve closed
11/5/2011	8:25:48 PM	Helium valve opened
11/5/2011	8:25:48 PM	Main Vac valve opened
11/5/2011	8:25:48 PM	Helium MFC set to  20.000000
11/5/2011	8:25:48 PM	H2 MFC set to  0.000000
11/5/2011	8:25:48 PM	BCl3 MFC set to  0.000000
11/5/2011	8:25:48 PM	PHl3 MFC set to  0.000000
11/5/2011	8:25:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:25:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:25:49 PM	Tube furnace set to 150
11/5/2011	8:26:19 PM	Helium valve closed
11/5/2011	8:26:19 PM	H2 valve closed
11/5/2011	8:26:19 PM	BCl3 valve closed
11/5/2011	8:26:19 PM	PH3 valve closed
11/5/2011	8:26:19 PM	SiCl4 pre valve closed
11/5/2011	8:26:19 PM	SiCl4 post valve closed
11/5/2011	8:26:19 PM	Bypass valve closed
11/5/2011	8:26:19 PM	Bubbler valve closed
11/5/2011	8:26:19 PM	Main Vac valve opened
11/5/2011	8:26:19 PM	Helium MFC set to  0.000000
11/5/2011	8:26:19 PM	H2 MFC set to  0.000000
11/5/2011	8:26:19 PM	BCl3 MFC set to  0.000000
11/5/2011	8:26:19 PM	PHl3 MFC set to  0.000000
11/5/2011	8:26:19 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:26:19 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:26:19 PM	Tube furnace set to 150
11/5/2011	8:26:49 PM	H2 valve closed
11/5/2011	8:26:49 PM	BCl3 valve closed
11/5/2011	8:26:49 PM	PH3 valve closed
11/5/2011	8:26:49 PM	SiCl4 pre valve closed
11/5/2011	8:26:49 PM	SiCl4 post valve closed
11/5/2011	8:26:49 PM	Bypass valve closed
11/5/2011	8:26:49 PM	Bubbler valve closed
11/5/2011	8:26:49 PM	Helium valve opened
11/5/2011	8:26:49 PM	Main Vac valve opened
11/5/2011	8:26:49 PM	Helium MFC set to  20.000000
11/5/2011	8:26:49 PM	H2 MFC set to  0.000000
11/5/2011	8:26:49 PM	BCl3 MFC set to  0.000000
11/5/2011	8:26:49 PM	PHl3 MFC set to  0.000000
11/5/2011	8:26:49 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:26:49 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:26:49 PM	Tube furnace set to 150
11/5/2011	8:27:19 PM	Helium valve closed
11/5/2011	8:27:19 PM	H2 valve closed
11/5/2011	8:27:19 PM	BCl3 valve closed
11/5/2011	8:27:19 PM	PH3 valve closed
11/5/2011	8:27:19 PM	SiCl4 pre valve closed
11/5/2011	8:27:19 PM	SiCl4 post valve closed
11/5/2011	8:27:19 PM	Bypass valve closed
11/5/2011	8:27:19 PM	Bubbler valve closed
11/5/2011	8:27:19 PM	Main Vac valve opened
11/5/2011	8:27:19 PM	Helium MFC set to  0.000000
11/5/2011	8:27:19 PM	H2 MFC set to  0.000000
11/5/2011	8:27:19 PM	BCl3 MFC set to  0.000000
11/5/2011	8:27:19 PM	PHl3 MFC set to  0.000000
11/5/2011	8:27:19 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:27:19 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:27:19 PM	Tube furnace set to 150
11/5/2011	8:27:30 PM	Run aborted at 8:27 PM
11/5/2011	8:27:30 PM	Helium valve closed
11/5/2011	8:27:30 PM	H2 valve closed
11/5/2011	8:27:30 PM	BCl3 valve closed
11/5/2011	8:27:30 PM	PH3 valve closed
11/5/2011	8:27:30 PM	SiCl4 pre valve closed
11/5/2011	8:27:30 PM	SiCl4 post valve closed
11/5/2011	8:27:30 PM	Bypass valve closed
11/5/2011	8:27:30 PM	Main Vac valve closed
11/5/2011	8:27:30 PM	Bubbler valve closed
11/5/2011	8:27:30 PM	Helium MFC set to  0.000000
11/5/2011	8:27:30 PM	H2 MFC set to  0.000000
11/5/2011	8:27:30 PM	BCl3 MFC set to  0.000000
11/5/2011	8:27:30 PM	PHl3 MFC set to  0.000000
11/5/2011	8:27:30 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:27:30 PM	Tube furnace set to 0
11/5/2011	8:27:31 PM	Main Vac valve opened
11/5/2011	8:27:56 PM	Recipe started at 8:27 PM
11/5/2011	8:27:56 PM	Helium valve closed
11/5/2011	8:27:56 PM	H2 valve closed
11/5/2011	8:27:56 PM	BCl3 valve closed
11/5/2011	8:27:56 PM	PH3 valve closed
11/5/2011	8:27:56 PM	SiCl4 pre valve closed
11/5/2011	8:27:56 PM	SiCl4 post valve closed
11/5/2011	8:27:56 PM	Main Vac valve closed
11/5/2011	8:27:56 PM	Bubbler valve closed
11/5/2011	8:27:56 PM	Bypass valve opened
11/5/2011	8:27:56 PM	Helium MFC set to  0.000000
11/5/2011	8:27:56 PM	H2 MFC set to  0.000000
11/5/2011	8:27:56 PM	BCl3 MFC set to  0.000000
11/5/2011	8:27:56 PM	PHl3 MFC set to  0.000000
11/5/2011	8:27:56 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:27:56 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:27:57 PM	Tube furnace set to 180
11/5/2011	8:27:57 PM	Helium valve closed
11/5/2011	8:27:57 PM	H2 valve closed
11/5/2011	8:27:57 PM	BCl3 valve closed
11/5/2011	8:27:57 PM	PH3 valve closed
11/5/2011	8:27:57 PM	SiCl4 pre valve closed
11/5/2011	8:27:57 PM	SiCl4 post valve closed
11/5/2011	8:27:57 PM	Main Vac valve closed
11/5/2011	8:27:57 PM	Bubbler valve closed
11/5/2011	8:27:57 PM	Bypass valve opened
11/5/2011	8:27:57 PM	Helium MFC set to  0.000000
11/5/2011	8:27:57 PM	H2 MFC set to  0.000000
11/5/2011	8:27:57 PM	BCl3 MFC set to  0.000000
11/5/2011	8:27:57 PM	PHl3 MFC set to  0.000000
11/5/2011	8:27:57 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:27:57 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:27:57 PM	Tube furnace set to 150
11/5/2011	8:28:09 PM	Helium valve closed
11/5/2011	8:28:09 PM	H2 valve closed
11/5/2011	8:28:09 PM	BCl3 valve closed
11/5/2011	8:28:09 PM	PH3 valve closed
11/5/2011	8:28:09 PM	SiCl4 pre valve closed
11/5/2011	8:28:09 PM	SiCl4 post valve closed
11/5/2011	8:28:09 PM	Bypass valve closed
11/5/2011	8:28:09 PM	Bubbler valve closed
11/5/2011	8:28:09 PM	Main Vac valve opened
11/5/2011	8:28:09 PM	Helium MFC set to  0.000000
11/5/2011	8:28:09 PM	H2 MFC set to  0.000000
11/5/2011	8:28:09 PM	BCl3 MFC set to  0.000000
11/5/2011	8:28:09 PM	PHl3 MFC set to  0.000000
11/5/2011	8:28:09 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:28:09 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:28:09 PM	Tube furnace set to 180
11/5/2011	8:28:39 PM	H2 valve closed
11/5/2011	8:28:39 PM	BCl3 valve closed
11/5/2011	8:28:39 PM	PH3 valve closed
11/5/2011	8:28:39 PM	SiCl4 pre valve closed
11/5/2011	8:28:39 PM	SiCl4 post valve closed
11/5/2011	8:28:39 PM	Bypass valve closed
11/5/2011	8:28:39 PM	Bubbler valve closed
11/5/2011	8:28:39 PM	Helium valve opened
11/5/2011	8:28:39 PM	Main Vac valve opened
11/5/2011	8:28:39 PM	Helium MFC set to  20.000000
11/5/2011	8:28:39 PM	H2 MFC set to  0.000000
11/5/2011	8:28:39 PM	BCl3 MFC set to  0.000000
11/5/2011	8:28:39 PM	PHl3 MFC set to  0.000000
11/5/2011	8:28:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:28:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:28:39 PM	Tube furnace set to 180
11/5/2011	8:29:09 PM	Helium valve closed
11/5/2011	8:29:09 PM	H2 valve closed
11/5/2011	8:29:09 PM	BCl3 valve closed
11/5/2011	8:29:09 PM	PH3 valve closed
11/5/2011	8:29:09 PM	SiCl4 pre valve closed
11/5/2011	8:29:09 PM	SiCl4 post valve closed
11/5/2011	8:29:09 PM	Bypass valve closed
11/5/2011	8:29:09 PM	Bubbler valve closed
11/5/2011	8:29:09 PM	Main Vac valve opened
11/5/2011	8:29:09 PM	Helium MFC set to  0.000000
11/5/2011	8:29:09 PM	H2 MFC set to  0.000000
11/5/2011	8:29:09 PM	BCl3 MFC set to  0.000000
11/5/2011	8:29:09 PM	PHl3 MFC set to  0.000000
11/5/2011	8:29:09 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:29:09 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:29:09 PM	Tube furnace set to 150
11/5/2011	8:29:39 PM	H2 valve closed
11/5/2011	8:29:39 PM	BCl3 valve closed
11/5/2011	8:29:39 PM	PH3 valve closed
11/5/2011	8:29:39 PM	SiCl4 pre valve closed
11/5/2011	8:29:39 PM	SiCl4 post valve closed
11/5/2011	8:29:39 PM	Bypass valve closed
11/5/2011	8:29:39 PM	Bubbler valve closed
11/5/2011	8:29:39 PM	Helium valve opened
11/5/2011	8:29:39 PM	Main Vac valve opened
11/5/2011	8:29:39 PM	Helium MFC set to  20.000000
11/5/2011	8:29:39 PM	H2 MFC set to  0.000000
11/5/2011	8:29:39 PM	BCl3 MFC set to  0.000000
11/5/2011	8:29:39 PM	PHl3 MFC set to  0.000000
11/5/2011	8:29:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:29:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:29:40 PM	Tube furnace set to 180
11/5/2011	8:30:10 PM	Helium valve closed
11/5/2011	8:30:10 PM	H2 valve closed
11/5/2011	8:30:10 PM	BCl3 valve closed
11/5/2011	8:30:10 PM	PH3 valve closed
11/5/2011	8:30:10 PM	SiCl4 pre valve closed
11/5/2011	8:30:10 PM	SiCl4 post valve closed
11/5/2011	8:30:10 PM	Bypass valve closed
11/5/2011	8:30:10 PM	Bubbler valve closed
11/5/2011	8:30:10 PM	Main Vac valve opened
11/5/2011	8:30:10 PM	Helium MFC set to  0.000000
11/5/2011	8:30:10 PM	H2 MFC set to  0.000000
11/5/2011	8:30:10 PM	BCl3 MFC set to  0.000000
11/5/2011	8:30:10 PM	PHl3 MFC set to  0.000000
11/5/2011	8:30:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:30:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:30:10 PM	Tube furnace set to 150
11/5/2011	8:30:40 PM	H2 valve closed
11/5/2011	8:30:40 PM	BCl3 valve closed
11/5/2011	8:30:40 PM	PH3 valve closed
11/5/2011	8:30:40 PM	SiCl4 pre valve closed
11/5/2011	8:30:40 PM	SiCl4 post valve closed
11/5/2011	8:30:40 PM	Bypass valve closed
11/5/2011	8:30:40 PM	Bubbler valve closed
11/5/2011	8:30:40 PM	Helium valve opened
11/5/2011	8:30:40 PM	Main Vac valve opened
11/5/2011	8:30:40 PM	Helium MFC set to  20.000000
11/5/2011	8:30:40 PM	H2 MFC set to  0.000000
11/5/2011	8:30:40 PM	BCl3 MFC set to  0.000000
11/5/2011	8:30:40 PM	PHl3 MFC set to  0.000000
11/5/2011	8:30:40 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:30:40 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:30:40 PM	Tube furnace set to 150
11/5/2011	8:31:10 PM	Helium valve closed
11/5/2011	8:31:10 PM	H2 valve closed
11/5/2011	8:31:10 PM	BCl3 valve closed
11/5/2011	8:31:10 PM	PH3 valve closed
11/5/2011	8:31:10 PM	SiCl4 pre valve closed
11/5/2011	8:31:10 PM	SiCl4 post valve closed
11/5/2011	8:31:10 PM	Bypass valve closed
11/5/2011	8:31:10 PM	Bubbler valve closed
11/5/2011	8:31:10 PM	Main Vac valve opened
11/5/2011	8:31:10 PM	Helium MFC set to  0.000000
11/5/2011	8:31:10 PM	H2 MFC set to  0.000000
11/5/2011	8:31:10 PM	BCl3 MFC set to  0.000000
11/5/2011	8:31:10 PM	PHl3 MFC set to  0.000000
11/5/2011	8:31:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:31:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:31:10 PM	Tube furnace set to 150
11/5/2011	8:31:40 PM	H2 valve closed
11/5/2011	8:31:40 PM	BCl3 valve closed
11/5/2011	8:31:40 PM	PH3 valve closed
11/5/2011	8:31:40 PM	SiCl4 pre valve closed
11/5/2011	8:31:40 PM	SiCl4 post valve closed
11/5/2011	8:31:40 PM	Bypass valve closed
11/5/2011	8:31:40 PM	Bubbler valve closed
11/5/2011	8:31:40 PM	Helium valve opened
11/5/2011	8:31:40 PM	Main Vac valve opened
11/5/2011	8:31:40 PM	Helium MFC set to  20.000000
11/5/2011	8:31:40 PM	H2 MFC set to  0.000000
11/5/2011	8:31:40 PM	BCl3 MFC set to  0.000000
11/5/2011	8:31:40 PM	PHl3 MFC set to  0.000000
11/5/2011	8:31:40 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:31:40 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:31:40 PM	Tube furnace set to 180
11/5/2011	8:32:10 PM	Helium valve closed
11/5/2011	8:32:10 PM	H2 valve closed
11/5/2011	8:32:10 PM	BCl3 valve closed
11/5/2011	8:32:10 PM	PH3 valve closed
11/5/2011	8:32:10 PM	SiCl4 pre valve closed
11/5/2011	8:32:10 PM	SiCl4 post valve closed
11/5/2011	8:32:10 PM	Bypass valve closed
11/5/2011	8:32:10 PM	Bubbler valve closed
11/5/2011	8:32:10 PM	Main Vac valve opened
11/5/2011	8:32:10 PM	Helium MFC set to  0.000000
11/5/2011	8:32:10 PM	H2 MFC set to  0.000000
11/5/2011	8:32:10 PM	BCl3 MFC set to  0.000000
11/5/2011	8:32:10 PM	PHl3 MFC set to  0.000000
11/5/2011	8:32:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:32:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:32:11 PM	Tube furnace set to 150
11/5/2011	8:32:41 PM	H2 valve closed
11/5/2011	8:32:41 PM	BCl3 valve closed
11/5/2011	8:32:41 PM	PH3 valve closed
11/5/2011	8:32:41 PM	SiCl4 pre valve closed
11/5/2011	8:32:41 PM	SiCl4 post valve closed
11/5/2011	8:32:41 PM	Bypass valve closed
11/5/2011	8:32:41 PM	Bubbler valve closed
11/5/2011	8:32:41 PM	Helium valve opened
11/5/2011	8:32:41 PM	Main Vac valve opened
11/5/2011	8:32:41 PM	Helium MFC set to  20.000000
11/5/2011	8:32:41 PM	H2 MFC set to  0.000000
11/5/2011	8:32:41 PM	BCl3 MFC set to  0.000000
11/5/2011	8:32:41 PM	PHl3 MFC set to  0.000000
11/5/2011	8:32:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:32:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:32:41 PM	Tube furnace set to 150
11/5/2011	8:33:11 PM	Helium valve closed
11/5/2011	8:33:11 PM	H2 valve closed
11/5/2011	8:33:11 PM	BCl3 valve closed
11/5/2011	8:33:11 PM	PH3 valve closed
11/5/2011	8:33:11 PM	SiCl4 pre valve closed
11/5/2011	8:33:11 PM	SiCl4 post valve closed
11/5/2011	8:33:11 PM	Bypass valve closed
11/5/2011	8:33:11 PM	Bubbler valve closed
11/5/2011	8:33:11 PM	Main Vac valve opened
11/5/2011	8:33:11 PM	Helium MFC set to  0.000000
11/5/2011	8:33:11 PM	H2 MFC set to  0.000000
11/5/2011	8:33:11 PM	BCl3 MFC set to  0.000000
11/5/2011	8:33:11 PM	PHl3 MFC set to  0.000000
11/5/2011	8:33:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:33:11 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:33:11 PM	Tube furnace set to 150
11/5/2011	8:33:41 PM	H2 valve closed
11/5/2011	8:33:41 PM	BCl3 valve closed
11/5/2011	8:33:41 PM	PH3 valve closed
11/5/2011	8:33:41 PM	SiCl4 pre valve closed
11/5/2011	8:33:41 PM	SiCl4 post valve closed
11/5/2011	8:33:41 PM	Bypass valve closed
11/5/2011	8:33:41 PM	Bubbler valve closed
11/5/2011	8:33:41 PM	Helium valve opened
11/5/2011	8:33:41 PM	Main Vac valve opened
11/5/2011	8:33:41 PM	Helium MFC set to  20.000000
11/5/2011	8:33:41 PM	H2 MFC set to  0.000000
11/5/2011	8:33:41 PM	BCl3 MFC set to  0.000000
11/5/2011	8:33:41 PM	PHl3 MFC set to  0.000000
11/5/2011	8:33:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:33:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:33:41 PM	Tube furnace set to 150
11/5/2011	8:34:11 PM	Helium valve closed
11/5/2011	8:34:11 PM	H2 valve closed
11/5/2011	8:34:11 PM	BCl3 valve closed
11/5/2011	8:34:11 PM	PH3 valve closed
11/5/2011	8:34:11 PM	SiCl4 pre valve closed
11/5/2011	8:34:11 PM	SiCl4 post valve closed
11/5/2011	8:34:11 PM	Bypass valve closed
11/5/2011	8:34:11 PM	Bubbler valve closed
11/5/2011	8:34:11 PM	Main Vac valve opened
11/5/2011	8:34:11 PM	Helium MFC set to  0.000000
11/5/2011	8:34:11 PM	H2 MFC set to  0.000000
11/5/2011	8:34:11 PM	BCl3 MFC set to  0.000000
11/5/2011	8:34:11 PM	PHl3 MFC set to  0.000000
11/5/2011	8:34:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:34:11 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:34:11 PM	Tube furnace set to 150
11/5/2011	8:34:41 PM	H2 valve closed
11/5/2011	8:34:41 PM	BCl3 valve closed
11/5/2011	8:34:41 PM	PH3 valve closed
11/5/2011	8:34:41 PM	SiCl4 pre valve closed
11/5/2011	8:34:41 PM	SiCl4 post valve closed
11/5/2011	8:34:41 PM	Bypass valve closed
11/5/2011	8:34:41 PM	Bubbler valve closed
11/5/2011	8:34:41 PM	Helium valve opened
11/5/2011	8:34:41 PM	Main Vac valve opened
11/5/2011	8:34:41 PM	Helium MFC set to  20.000000
11/5/2011	8:34:41 PM	H2 MFC set to  0.000000
11/5/2011	8:34:41 PM	BCl3 MFC set to  0.000000
11/5/2011	8:34:41 PM	PHl3 MFC set to  0.000000
11/5/2011	8:34:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:34:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:34:42 PM	Tube furnace set to 150
11/5/2011	8:35:12 PM	Helium valve closed
11/5/2011	8:35:12 PM	H2 valve closed
11/5/2011	8:35:12 PM	BCl3 valve closed
11/5/2011	8:35:12 PM	PH3 valve closed
11/5/2011	8:35:12 PM	SiCl4 pre valve closed
11/5/2011	8:35:12 PM	SiCl4 post valve closed
11/5/2011	8:35:12 PM	Bypass valve closed
11/5/2011	8:35:12 PM	Bubbler valve closed
11/5/2011	8:35:12 PM	Main Vac valve opened
11/5/2011	8:35:12 PM	Helium MFC set to  0.000000
11/5/2011	8:35:12 PM	H2 MFC set to  0.000000
11/5/2011	8:35:12 PM	BCl3 MFC set to  0.000000
11/5/2011	8:35:12 PM	PHl3 MFC set to  0.000000
11/5/2011	8:35:12 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:35:12 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:35:12 PM	Tube furnace set to 150
11/5/2011	8:35:42 PM	H2 valve closed
11/5/2011	8:35:42 PM	BCl3 valve closed
11/5/2011	8:35:42 PM	PH3 valve closed
11/5/2011	8:35:42 PM	SiCl4 pre valve closed
11/5/2011	8:35:42 PM	SiCl4 post valve closed
11/5/2011	8:35:42 PM	Bypass valve closed
11/5/2011	8:35:42 PM	Bubbler valve closed
11/5/2011	8:35:42 PM	Helium valve opened
11/5/2011	8:35:42 PM	Main Vac valve opened
11/5/2011	8:35:42 PM	Helium MFC set to  20.000000
11/5/2011	8:35:42 PM	H2 MFC set to  0.000000
11/5/2011	8:35:42 PM	BCl3 MFC set to  0.000000
11/5/2011	8:35:42 PM	PHl3 MFC set to  0.000000
11/5/2011	8:35:42 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:35:42 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:35:42 PM	Tube furnace set to 150
11/5/2011	8:36:12 PM	Helium valve closed
11/5/2011	8:36:12 PM	H2 valve closed
11/5/2011	8:36:12 PM	BCl3 valve closed
11/5/2011	8:36:12 PM	PH3 valve closed
11/5/2011	8:36:12 PM	SiCl4 pre valve closed
11/5/2011	8:36:12 PM	SiCl4 post valve closed
11/5/2011	8:36:12 PM	Bypass valve closed
11/5/2011	8:36:12 PM	Bubbler valve closed
11/5/2011	8:36:12 PM	Main Vac valve opened
11/5/2011	8:36:12 PM	Helium MFC set to  0.000000
11/5/2011	8:36:12 PM	H2 MFC set to  0.000000
11/5/2011	8:36:12 PM	BCl3 MFC set to  0.000000
11/5/2011	8:36:12 PM	PHl3 MFC set to  0.000000
11/5/2011	8:36:12 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:36:12 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:36:12 PM	Tube furnace set to 150
11/5/2011	8:36:42 PM	H2 valve closed
11/5/2011	8:36:42 PM	BCl3 valve closed
11/5/2011	8:36:42 PM	PH3 valve closed
11/5/2011	8:36:42 PM	SiCl4 pre valve closed
11/5/2011	8:36:42 PM	SiCl4 post valve closed
11/5/2011	8:36:42 PM	Bypass valve closed
11/5/2011	8:36:42 PM	Bubbler valve closed
11/5/2011	8:36:42 PM	Helium valve opened
11/5/2011	8:36:42 PM	Main Vac valve opened
11/5/2011	8:36:42 PM	Helium MFC set to  20.000000
11/5/2011	8:36:42 PM	H2 MFC set to  0.000000
11/5/2011	8:36:42 PM	BCl3 MFC set to  0.000000
11/5/2011	8:36:42 PM	PHl3 MFC set to  0.000000
11/5/2011	8:36:42 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:36:42 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:36:42 PM	Tube furnace set to 150
11/5/2011	8:37:13 PM	Helium valve closed
11/5/2011	8:37:13 PM	H2 valve closed
11/5/2011	8:37:13 PM	BCl3 valve closed
11/5/2011	8:37:13 PM	PH3 valve closed
11/5/2011	8:37:13 PM	SiCl4 pre valve closed
11/5/2011	8:37:13 PM	SiCl4 post valve closed
11/5/2011	8:37:13 PM	Bypass valve closed
11/5/2011	8:37:13 PM	Bubbler valve closed
11/5/2011	8:37:13 PM	Main Vac valve opened
11/5/2011	8:37:13 PM	Helium MFC set to  0.000000
11/5/2011	8:37:13 PM	H2 MFC set to  0.000000
11/5/2011	8:37:13 PM	BCl3 MFC set to  0.000000
11/5/2011	8:37:13 PM	PHl3 MFC set to  0.000000
11/5/2011	8:37:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:37:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:37:13 PM	Tube furnace set to 150
11/5/2011	8:37:43 PM	H2 valve closed
11/5/2011	8:37:43 PM	BCl3 valve closed
11/5/2011	8:37:43 PM	PH3 valve closed
11/5/2011	8:37:43 PM	SiCl4 pre valve closed
11/5/2011	8:37:43 PM	SiCl4 post valve closed
11/5/2011	8:37:43 PM	Bypass valve closed
11/5/2011	8:37:43 PM	Bubbler valve closed
11/5/2011	8:37:43 PM	Helium valve opened
11/5/2011	8:37:43 PM	Main Vac valve opened
11/5/2011	8:37:43 PM	Helium MFC set to  20.000000
11/5/2011	8:37:43 PM	H2 MFC set to  0.000000
11/5/2011	8:37:43 PM	BCl3 MFC set to  0.000000
11/5/2011	8:37:43 PM	PHl3 MFC set to  0.000000
11/5/2011	8:37:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:37:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:37:43 PM	Tube furnace set to 150
11/5/2011	8:38:13 PM	Helium valve closed
11/5/2011	8:38:13 PM	H2 valve closed
11/5/2011	8:38:13 PM	BCl3 valve closed
11/5/2011	8:38:13 PM	PH3 valve closed
11/5/2011	8:38:13 PM	SiCl4 pre valve closed
11/5/2011	8:38:13 PM	SiCl4 post valve closed
11/5/2011	8:38:13 PM	Bypass valve closed
11/5/2011	8:38:13 PM	Bubbler valve closed
11/5/2011	8:38:13 PM	Main Vac valve opened
11/5/2011	8:38:13 PM	Helium MFC set to  0.000000
11/5/2011	8:38:13 PM	H2 MFC set to  0.000000
11/5/2011	8:38:13 PM	BCl3 MFC set to  0.000000
11/5/2011	8:38:13 PM	PHl3 MFC set to  0.000000
11/5/2011	8:38:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:38:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:38:13 PM	Tube furnace set to 150
11/5/2011	8:38:43 PM	H2 valve closed
11/5/2011	8:38:43 PM	BCl3 valve closed
11/5/2011	8:38:43 PM	PH3 valve closed
11/5/2011	8:38:43 PM	SiCl4 pre valve closed
11/5/2011	8:38:43 PM	SiCl4 post valve closed
11/5/2011	8:38:43 PM	Bypass valve closed
11/5/2011	8:38:43 PM	Bubbler valve closed
11/5/2011	8:38:43 PM	Helium valve opened
11/5/2011	8:38:43 PM	Main Vac valve opened
11/5/2011	8:38:43 PM	Helium MFC set to  20.000000
11/5/2011	8:38:43 PM	H2 MFC set to  0.000000
11/5/2011	8:38:43 PM	BCl3 MFC set to  0.000000
11/5/2011	8:38:43 PM	PHl3 MFC set to  0.000000
11/5/2011	8:38:43 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:38:43 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:38:43 PM	Tube furnace set to 150
11/5/2011	8:39:13 PM	Helium valve closed
11/5/2011	8:39:13 PM	H2 valve closed
11/5/2011	8:39:13 PM	BCl3 valve closed
11/5/2011	8:39:13 PM	PH3 valve closed
11/5/2011	8:39:13 PM	SiCl4 pre valve closed
11/5/2011	8:39:13 PM	SiCl4 post valve closed
11/5/2011	8:39:13 PM	Bypass valve closed
11/5/2011	8:39:13 PM	Bubbler valve closed
11/5/2011	8:39:13 PM	Main Vac valve opened
11/5/2011	8:39:13 PM	Helium MFC set to  0.000000
11/5/2011	8:39:13 PM	H2 MFC set to  0.000000
11/5/2011	8:39:13 PM	BCl3 MFC set to  0.000000
11/5/2011	8:39:13 PM	PHl3 MFC set to  0.000000
11/5/2011	8:39:13 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:39:13 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:39:14 PM	Tube furnace set to 150
11/5/2011	8:39:44 PM	H2 valve closed
11/5/2011	8:39:44 PM	BCl3 valve closed
11/5/2011	8:39:44 PM	PH3 valve closed
11/5/2011	8:39:44 PM	SiCl4 pre valve closed
11/5/2011	8:39:44 PM	SiCl4 post valve closed
11/5/2011	8:39:44 PM	Bypass valve closed
11/5/2011	8:39:44 PM	Bubbler valve closed
11/5/2011	8:39:44 PM	Helium valve opened
11/5/2011	8:39:44 PM	Main Vac valve opened
11/5/2011	8:39:44 PM	Helium MFC set to  20.000000
11/5/2011	8:39:44 PM	H2 MFC set to  0.000000
11/5/2011	8:39:44 PM	BCl3 MFC set to  0.000000
11/5/2011	8:39:44 PM	PHl3 MFC set to  0.000000
11/5/2011	8:39:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:39:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:39:44 PM	Tube furnace set to 150
11/5/2011	8:40:14 PM	Helium valve closed
11/5/2011	8:40:14 PM	H2 valve closed
11/5/2011	8:40:14 PM	BCl3 valve closed
11/5/2011	8:40:14 PM	PH3 valve closed
11/5/2011	8:40:14 PM	SiCl4 pre valve closed
11/5/2011	8:40:14 PM	SiCl4 post valve closed
11/5/2011	8:40:14 PM	Bypass valve closed
11/5/2011	8:40:14 PM	Bubbler valve closed
11/5/2011	8:40:14 PM	Main Vac valve opened
11/5/2011	8:40:14 PM	Helium MFC set to  0.000000
11/5/2011	8:40:14 PM	H2 MFC set to  0.000000
11/5/2011	8:40:14 PM	BCl3 MFC set to  0.000000
11/5/2011	8:40:14 PM	PHl3 MFC set to  0.000000
11/5/2011	8:40:14 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:40:14 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:40:14 PM	Tube furnace set to 150
11/5/2011	8:40:44 PM	H2 valve closed
11/5/2011	8:40:44 PM	BCl3 valve closed
11/5/2011	8:40:44 PM	PH3 valve closed
11/5/2011	8:40:44 PM	SiCl4 pre valve closed
11/5/2011	8:40:44 PM	SiCl4 post valve closed
11/5/2011	8:40:44 PM	Bypass valve closed
11/5/2011	8:40:44 PM	Bubbler valve closed
11/5/2011	8:40:44 PM	Helium valve opened
11/5/2011	8:40:44 PM	Main Vac valve opened
11/5/2011	8:40:44 PM	Helium MFC set to  20.000000
11/5/2011	8:40:44 PM	H2 MFC set to  0.000000
11/5/2011	8:40:44 PM	BCl3 MFC set to  0.000000
11/5/2011	8:40:44 PM	PHl3 MFC set to  0.000000
11/5/2011	8:40:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:40:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:40:44 PM	Tube furnace set to 150
11/5/2011	8:40:53 PM	Run aborted at 8:40 PM
11/5/2011	8:40:53 PM	Helium valve closed
11/5/2011	8:40:53 PM	H2 valve closed
11/5/2011	8:40:53 PM	BCl3 valve closed
11/5/2011	8:40:53 PM	PH3 valve closed
11/5/2011	8:40:53 PM	SiCl4 pre valve closed
11/5/2011	8:40:53 PM	SiCl4 post valve closed
11/5/2011	8:40:53 PM	Bypass valve closed
11/5/2011	8:40:53 PM	Main Vac valve closed
11/5/2011	8:40:53 PM	Bubbler valve closed
11/5/2011	8:40:53 PM	Helium MFC set to  0.000000
11/5/2011	8:40:53 PM	H2 MFC set to  0.000000
11/5/2011	8:40:53 PM	BCl3 MFC set to  0.000000
11/5/2011	8:40:53 PM	PHl3 MFC set to  0.000000
11/5/2011	8:40:53 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:40:53 PM	Tube furnace set to 0
11/5/2011	8:40:56 PM	Main Vac valve opened
11/5/2011	8:43:23 PM	Main Vac valve closed
11/5/2011	8:43:35 PM	Main Vac valve opened
11/5/2011	8:44:27 PM	Recipe started at 8:44 PM
11/5/2011	8:44:27 PM	H2 valve closed
11/5/2011	8:44:27 PM	BCl3 valve closed
11/5/2011	8:44:27 PM	PH3 valve closed
11/5/2011	8:44:27 PM	SiCl4 pre valve closed
11/5/2011	8:44:27 PM	SiCl4 post valve closed
11/5/2011	8:44:27 PM	Main Vac valve closed
11/5/2011	8:44:27 PM	Bypass valve closed
11/5/2011	8:44:27 PM	Bubbler valve closed
11/5/2011	8:44:27 PM	Helium valve opened
11/5/2011	8:44:27 PM	Helium MFC set to  0.000000
11/5/2011	8:44:27 PM	H2 MFC set to  0.000000
11/5/2011	8:44:27 PM	BCl3 MFC set to  0.000000
11/5/2011	8:44:27 PM	PHl3 MFC set to  0.000000
11/5/2011	8:44:27 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:44:27 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:44:28 PM	Tube furnace set to 0
11/5/2011	8:44:31 PM	Helium valve closed
11/5/2011	8:44:31 PM	BCl3 valve closed
11/5/2011	8:44:31 PM	PH3 valve closed
11/5/2011	8:44:31 PM	SiCl4 pre valve closed
11/5/2011	8:44:31 PM	SiCl4 post valve closed
11/5/2011	8:44:31 PM	Main Vac valve closed
11/5/2011	8:44:31 PM	Bypass valve closed
11/5/2011	8:44:31 PM	Bubbler valve closed
11/5/2011	8:44:31 PM	H2 valve opened
11/5/2011	8:44:31 PM	Helium MFC set to  0.000000
11/5/2011	8:44:31 PM	H2 MFC set to  500.000000
11/5/2011	8:44:31 PM	BCl3 MFC set to  0.000000
11/5/2011	8:44:31 PM	PHl3 MFC set to  0.000000
11/5/2011	8:44:31 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:44:31 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:44:31 PM	Tube furnace set to 100
11/5/2011	8:45:33 PM	Helium valve closed
11/5/2011	8:45:33 PM	BCl3 valve closed
11/5/2011	8:45:33 PM	PH3 valve closed
11/5/2011	8:45:33 PM	SiCl4 pre valve closed
11/5/2011	8:45:33 PM	SiCl4 post valve closed
11/5/2011	8:45:33 PM	Main Vac valve closed
11/5/2011	8:45:33 PM	Bypass valve closed
11/5/2011	8:45:33 PM	H2 valve opened
11/5/2011	8:45:33 PM	Bubbler valve opened
11/5/2011	8:45:33 PM	Helium MFC set to  0.000000
11/5/2011	8:45:33 PM	H2 MFC set to  500.000000
11/5/2011	8:45:33 PM	BCl3 MFC set to  0.000000
11/5/2011	8:45:33 PM	PHl3 MFC set to  0.000000
11/5/2011	8:45:33 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:45:33 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:45:33 PM	Tube furnace set to 1000
11/5/2011	8:45:35 PM	Helium valve closed
11/5/2011	8:45:35 PM	BCl3 valve closed
11/5/2011	8:45:35 PM	PH3 valve closed
11/5/2011	8:45:35 PM	SiCl4 pre valve closed
11/5/2011	8:45:35 PM	SiCl4 post valve closed
11/5/2011	8:45:35 PM	Main Vac valve closed
11/5/2011	8:45:35 PM	Bypass valve closed
11/5/2011	8:45:35 PM	H2 valve opened
11/5/2011	8:45:35 PM	Bubbler valve opened
11/5/2011	8:45:35 PM	Helium MFC set to  0.000000
11/5/2011	8:45:35 PM	H2 MFC set to  500.000000
11/5/2011	8:45:35 PM	BCl3 MFC set to  0.000000
11/5/2011	8:45:35 PM	PHl3 MFC set to  0.000000
11/5/2011	8:45:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	8:45:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	8:45:35 PM	Tube furnace set to 1000
11/5/2011	9:05:35 PM	Helium valve closed
11/5/2011	9:05:35 PM	BCl3 valve closed
11/5/2011	9:05:35 PM	PH3 valve closed
11/5/2011	9:05:35 PM	Main Vac valve closed
11/5/2011	9:05:35 PM	Bypass valve closed
11/5/2011	9:05:35 PM	H2 valve opened
11/5/2011	9:05:35 PM	SiCl4 pre valve opened
11/5/2011	9:05:35 PM	SiCl4 post valve opened
11/5/2011	9:05:35 PM	Bubbler valve opened
11/5/2011	9:05:35 PM	Helium MFC set to  0.000000
11/5/2011	9:05:35 PM	H2 MFC set to  500.000000
11/5/2011	9:05:35 PM	BCl3 MFC set to  0.000000
11/5/2011	9:05:35 PM	PHl3 MFC set to  0.000000
11/5/2011	9:05:35 PM	SiCl4 MFC set to  17.000000
11/5/2011	9:05:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	9:05:35 PM	Tube furnace set to 1000
11/5/2011	9:50:35 PM	Helium valve closed
11/5/2011	9:50:35 PM	BCl3 valve closed
11/5/2011	9:50:35 PM	PH3 valve closed
11/5/2011	9:50:35 PM	SiCl4 pre valve closed
11/5/2011	9:50:35 PM	SiCl4 post valve closed
11/5/2011	9:50:35 PM	Main Vac valve closed
11/5/2011	9:50:35 PM	Bypass valve closed
11/5/2011	9:50:35 PM	H2 valve opened
11/5/2011	9:50:35 PM	Bubbler valve opened
11/5/2011	9:50:35 PM	Helium MFC set to  0.000000
11/5/2011	9:50:35 PM	H2 MFC set to  500.000000
11/5/2011	9:50:35 PM	BCl3 MFC set to  0.000000
11/5/2011	9:50:35 PM	PHl3 MFC set to  0.000000
11/5/2011	9:50:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	9:50:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	9:50:35 PM	Tube furnace set to 750
11/5/2011	10:00:35 PM	H2 valve closed
11/5/2011	10:00:35 PM	BCl3 valve closed
11/5/2011	10:00:35 PM	PH3 valve closed
11/5/2011	10:00:35 PM	SiCl4 pre valve closed
11/5/2011	10:00:35 PM	SiCl4 post valve closed
11/5/2011	10:00:35 PM	Main Vac valve closed
11/5/2011	10:00:35 PM	Bypass valve closed
11/5/2011	10:00:35 PM	Helium valve opened
11/5/2011	10:00:35 PM	Bubbler valve opened
11/5/2011	10:00:35 PM	Helium MFC set to  400.000000
11/5/2011	10:00:35 PM	H2 MFC set to  0.000000
11/5/2011	10:00:35 PM	BCl3 MFC set to  0.000000
11/5/2011	10:00:35 PM	PHl3 MFC set to  0.000000
11/5/2011	10:00:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:00:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:00:35 PM	Tube furnace set to 0
11/5/2011	10:05:03 PM	Run aborted at 10:05 PM
11/5/2011	10:05:03 PM	Helium valve closed
11/5/2011	10:05:03 PM	H2 valve closed
11/5/2011	10:05:03 PM	BCl3 valve closed
11/5/2011	10:05:03 PM	PH3 valve closed
11/5/2011	10:05:03 PM	SiCl4 pre valve closed
11/5/2011	10:05:03 PM	SiCl4 post valve closed
11/5/2011	10:05:03 PM	Bypass valve closed
11/5/2011	10:05:03 PM	Main Vac valve closed
11/5/2011	10:05:03 PM	Bubbler valve closed
11/5/2011	10:05:03 PM	Helium MFC set to  0.000000
11/5/2011	10:05:03 PM	H2 MFC set to  0.000000
11/5/2011	10:05:03 PM	BCl3 MFC set to  0.000000
11/5/2011	10:05:03 PM	PHl3 MFC set to  0.000000
11/5/2011	10:05:03 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:05:03 PM	Tube furnace set to 0
11/5/2011	10:06:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	10:06:44 PM	Recipe started at 10:06 PM
11/5/2011	10:06:44 PM	Helium valve closed
11/5/2011	10:06:44 PM	H2 valve closed
11/5/2011	10:06:44 PM	BCl3 valve closed
11/5/2011	10:06:44 PM	PH3 valve closed
11/5/2011	10:06:44 PM	SiCl4 pre valve closed
11/5/2011	10:06:44 PM	SiCl4 post valve closed
11/5/2011	10:06:44 PM	Main Vac valve closed
11/5/2011	10:06:44 PM	Bypass valve closed
11/5/2011	10:06:44 PM	Bubbler valve closed
11/5/2011	10:06:44 PM	Helium MFC set to  0.000000
11/5/2011	10:06:44 PM	H2 MFC set to  0.000000
11/5/2011	10:06:44 PM	BCl3 MFC set to  0.000000
11/5/2011	10:06:44 PM	PHl3 MFC set to  0.000000
11/5/2011	10:06:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:06:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:06:45 PM	Tube furnace set to 0
11/5/2011	10:06:48 PM	H2 valve closed
11/5/2011	10:06:48 PM	BCl3 valve closed
11/5/2011	10:06:48 PM	PH3 valve closed
11/5/2011	10:06:48 PM	SiCl4 pre valve closed
11/5/2011	10:06:48 PM	SiCl4 post valve closed
11/5/2011	10:06:48 PM	Main Vac valve closed
11/5/2011	10:06:48 PM	Bypass valve closed
11/5/2011	10:06:48 PM	Bubbler valve closed
11/5/2011	10:06:48 PM	Helium valve opened
11/5/2011	10:06:48 PM	Helium MFC set to  500.000000
11/5/2011	10:06:48 PM	H2 MFC set to  0.000000
11/5/2011	10:06:48 PM	BCl3 MFC set to  0.000000
11/5/2011	10:06:48 PM	PHl3 MFC set to  0.000000
11/5/2011	10:06:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:06:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:06:48 PM	Tube furnace set to 0
11/5/2011	10:06:48 PM	Helium valve closed
11/5/2011	10:06:48 PM	H2 valve closed
11/5/2011	10:06:48 PM	BCl3 valve closed
11/5/2011	10:06:48 PM	PH3 valve closed
11/5/2011	10:06:48 PM	SiCl4 pre valve closed
11/5/2011	10:06:48 PM	SiCl4 post valve closed
11/5/2011	10:06:48 PM	Main Vac valve closed
11/5/2011	10:06:48 PM	Bypass valve closed
11/5/2011	10:06:48 PM	Bubbler valve closed
11/5/2011	10:06:48 PM	Helium MFC set to  0.000000
11/5/2011	10:06:48 PM	H2 MFC set to  0.000000
11/5/2011	10:06:48 PM	BCl3 MFC set to  0.000000
11/5/2011	10:06:48 PM	PHl3 MFC set to  0.000000
11/5/2011	10:06:48 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:06:48 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:06:48 PM	Tube furnace set to 0
11/5/2011	10:06:49 PM	Run finished at 10:06 PM
11/5/2011	10:06:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	10:11:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	10:11:05 PM	Recipe started at 10:11 PM
11/5/2011	10:11:05 PM	Helium valve closed
11/5/2011	10:11:05 PM	H2 valve closed
11/5/2011	10:11:05 PM	BCl3 valve closed
11/5/2011	10:11:05 PM	PH3 valve closed
11/5/2011	10:11:05 PM	SiCl4 pre valve closed
11/5/2011	10:11:05 PM	SiCl4 post valve closed
11/5/2011	10:11:05 PM	Main Vac valve closed
11/5/2011	10:11:05 PM	Bubbler valve closed
11/5/2011	10:11:05 PM	Bypass valve opened
11/5/2011	10:11:05 PM	Helium MFC set to  0.000000
11/5/2011	10:11:05 PM	H2 MFC set to  0.000000
11/5/2011	10:11:05 PM	BCl3 MFC set to  0.000000
11/5/2011	10:11:05 PM	PHl3 MFC set to  0.000000
11/5/2011	10:11:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:11:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:11:05 PM	Tube furnace set to 0
11/5/2011	10:12:09 PM	Helium valve closed
11/5/2011	10:12:09 PM	H2 valve closed
11/5/2011	10:12:09 PM	BCl3 valve closed
11/5/2011	10:12:09 PM	PH3 valve closed
11/5/2011	10:12:09 PM	SiCl4 pre valve closed
11/5/2011	10:12:09 PM	SiCl4 post valve closed
11/5/2011	10:12:09 PM	Main Vac valve closed
11/5/2011	10:12:09 PM	Bubbler valve closed
11/5/2011	10:12:09 PM	Bypass valve opened
11/5/2011	10:12:09 PM	Helium MFC set to  0.000000
11/5/2011	10:12:09 PM	H2 MFC set to  0.000000
11/5/2011	10:12:09 PM	BCl3 MFC set to  0.000000
11/5/2011	10:12:09 PM	PHl3 MFC set to  0.000000
11/5/2011	10:12:09 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:12:09 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:12:09 PM	Tube furnace set to 0
11/5/2011	10:13:09 PM	Helium valve closed
11/5/2011	10:13:09 PM	H2 valve closed
11/5/2011	10:13:09 PM	BCl3 valve closed
11/5/2011	10:13:09 PM	PH3 valve closed
11/5/2011	10:13:09 PM	SiCl4 pre valve closed
11/5/2011	10:13:09 PM	SiCl4 post valve closed
11/5/2011	10:13:09 PM	Bypass valve closed
11/5/2011	10:13:09 PM	Bubbler valve closed
11/5/2011	10:13:09 PM	Main Vac valve opened
11/5/2011	10:13:09 PM	Helium MFC set to  0.000000
11/5/2011	10:13:09 PM	H2 MFC set to  0.000000
11/5/2011	10:13:09 PM	BCl3 MFC set to  0.000000
11/5/2011	10:13:09 PM	PHl3 MFC set to  0.000000
11/5/2011	10:13:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:13:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:13:10 PM	Tube furnace set to 0
11/5/2011	10:13:11 PM	Run finished at 10:13 PM
11/5/2011	10:13:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/5/2011	10:22:33 PM	Recipe started at 10:22 PM
11/5/2011	10:22:33 PM	Helium valve closed
11/5/2011	10:22:33 PM	H2 valve closed
11/5/2011	10:22:33 PM	BCl3 valve closed
11/5/2011	10:22:33 PM	PH3 valve closed
11/5/2011	10:22:33 PM	SiCl4 pre valve closed
11/5/2011	10:22:33 PM	SiCl4 post valve closed
11/5/2011	10:22:33 PM	Main Vac valve closed
11/5/2011	10:22:33 PM	Bubbler valve closed
11/5/2011	10:22:33 PM	Bypass valve opened
11/5/2011	10:22:33 PM	Helium MFC set to  0.000000
11/5/2011	10:22:33 PM	H2 MFC set to  0.000000
11/5/2011	10:22:33 PM	BCl3 MFC set to  0.000000
11/5/2011	10:22:33 PM	PHl3 MFC set to  0.000000
11/5/2011	10:22:33 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:22:33 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:22:33 PM	Tube furnace set to 180
11/5/2011	10:22:33 PM	Helium valve closed
11/5/2011	10:22:33 PM	H2 valve closed
11/5/2011	10:22:33 PM	BCl3 valve closed
11/5/2011	10:22:33 PM	PH3 valve closed
11/5/2011	10:22:33 PM	SiCl4 pre valve closed
11/5/2011	10:22:33 PM	SiCl4 post valve closed
11/5/2011	10:22:33 PM	Main Vac valve closed
11/5/2011	10:22:33 PM	Bubbler valve closed
11/5/2011	10:22:33 PM	Bypass valve opened
11/5/2011	10:22:33 PM	Helium MFC set to  0.000000
11/5/2011	10:22:33 PM	H2 MFC set to  0.000000
11/5/2011	10:22:33 PM	BCl3 MFC set to  0.000000
11/5/2011	10:22:33 PM	PHl3 MFC set to  0.000000
11/5/2011	10:22:33 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:22:33 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:22:33 PM	Tube furnace set to 150
11/5/2011	10:23:04 PM	Helium valve closed
11/5/2011	10:23:04 PM	H2 valve closed
11/5/2011	10:23:04 PM	BCl3 valve closed
11/5/2011	10:23:04 PM	PH3 valve closed
11/5/2011	10:23:04 PM	SiCl4 pre valve closed
11/5/2011	10:23:04 PM	SiCl4 post valve closed
11/5/2011	10:23:04 PM	Bypass valve closed
11/5/2011	10:23:04 PM	Bubbler valve closed
11/5/2011	10:23:04 PM	Main Vac valve opened
11/5/2011	10:23:04 PM	Helium MFC set to  0.000000
11/5/2011	10:23:04 PM	H2 MFC set to  0.000000
11/5/2011	10:23:04 PM	BCl3 MFC set to  0.000000
11/5/2011	10:23:04 PM	PHl3 MFC set to  0.000000
11/5/2011	10:23:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:23:04 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:23:04 PM	Tube furnace set to 180
11/5/2011	10:23:34 PM	H2 valve closed
11/5/2011	10:23:34 PM	BCl3 valve closed
11/5/2011	10:23:34 PM	PH3 valve closed
11/5/2011	10:23:34 PM	SiCl4 pre valve closed
11/5/2011	10:23:34 PM	SiCl4 post valve closed
11/5/2011	10:23:34 PM	Bypass valve closed
11/5/2011	10:23:34 PM	Bubbler valve closed
11/5/2011	10:23:34 PM	Helium valve opened
11/5/2011	10:23:34 PM	Main Vac valve opened
11/5/2011	10:23:34 PM	Helium MFC set to  20.000000
11/5/2011	10:23:34 PM	H2 MFC set to  0.000000
11/5/2011	10:23:34 PM	BCl3 MFC set to  0.000000
11/5/2011	10:23:34 PM	PHl3 MFC set to  0.000000
11/5/2011	10:23:34 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:23:34 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:23:34 PM	Tube furnace set to 180
11/5/2011	10:24:04 PM	Helium valve closed
11/5/2011	10:24:04 PM	H2 valve closed
11/5/2011	10:24:04 PM	BCl3 valve closed
11/5/2011	10:24:04 PM	PH3 valve closed
11/5/2011	10:24:04 PM	SiCl4 pre valve closed
11/5/2011	10:24:04 PM	SiCl4 post valve closed
11/5/2011	10:24:04 PM	Bypass valve closed
11/5/2011	10:24:04 PM	Bubbler valve closed
11/5/2011	10:24:04 PM	Main Vac valve opened
11/5/2011	10:24:04 PM	Helium MFC set to  0.000000
11/5/2011	10:24:04 PM	H2 MFC set to  0.000000
11/5/2011	10:24:04 PM	BCl3 MFC set to  0.000000
11/5/2011	10:24:04 PM	PHl3 MFC set to  0.000000
11/5/2011	10:24:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:24:04 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:24:04 PM	Tube furnace set to 150
11/5/2011	10:24:34 PM	H2 valve closed
11/5/2011	10:24:34 PM	BCl3 valve closed
11/5/2011	10:24:34 PM	PH3 valve closed
11/5/2011	10:24:34 PM	SiCl4 pre valve closed
11/5/2011	10:24:34 PM	SiCl4 post valve closed
11/5/2011	10:24:34 PM	Bypass valve closed
11/5/2011	10:24:34 PM	Bubbler valve closed
11/5/2011	10:24:34 PM	Helium valve opened
11/5/2011	10:24:34 PM	Main Vac valve opened
11/5/2011	10:24:34 PM	Helium MFC set to  20.000000
11/5/2011	10:24:34 PM	H2 MFC set to  0.000000
11/5/2011	10:24:34 PM	BCl3 MFC set to  0.000000
11/5/2011	10:24:34 PM	PHl3 MFC set to  0.000000
11/5/2011	10:24:34 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:24:34 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:24:34 PM	Tube furnace set to 180
11/5/2011	10:25:04 PM	Helium valve closed
11/5/2011	10:25:04 PM	H2 valve closed
11/5/2011	10:25:04 PM	BCl3 valve closed
11/5/2011	10:25:04 PM	PH3 valve closed
11/5/2011	10:25:04 PM	SiCl4 pre valve closed
11/5/2011	10:25:04 PM	SiCl4 post valve closed
11/5/2011	10:25:04 PM	Bypass valve closed
11/5/2011	10:25:04 PM	Bubbler valve closed
11/5/2011	10:25:04 PM	Main Vac valve opened
11/5/2011	10:25:04 PM	Helium MFC set to  0.000000
11/5/2011	10:25:04 PM	H2 MFC set to  0.000000
11/5/2011	10:25:04 PM	BCl3 MFC set to  0.000000
11/5/2011	10:25:04 PM	PHl3 MFC set to  0.000000
11/5/2011	10:25:04 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:25:04 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:25:04 PM	Tube furnace set to 150
11/5/2011	10:25:35 PM	H2 valve closed
11/5/2011	10:25:35 PM	BCl3 valve closed
11/5/2011	10:25:35 PM	PH3 valve closed
11/5/2011	10:25:35 PM	SiCl4 pre valve closed
11/5/2011	10:25:35 PM	SiCl4 post valve closed
11/5/2011	10:25:35 PM	Bypass valve closed
11/5/2011	10:25:35 PM	Bubbler valve closed
11/5/2011	10:25:35 PM	Helium valve opened
11/5/2011	10:25:35 PM	Main Vac valve opened
11/5/2011	10:25:35 PM	Helium MFC set to  20.000000
11/5/2011	10:25:35 PM	H2 MFC set to  0.000000
11/5/2011	10:25:35 PM	BCl3 MFC set to  0.000000
11/5/2011	10:25:35 PM	PHl3 MFC set to  0.000000
11/5/2011	10:25:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:25:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:25:35 PM	Tube furnace set to 150
11/5/2011	10:26:05 PM	Helium valve closed
11/5/2011	10:26:05 PM	H2 valve closed
11/5/2011	10:26:05 PM	BCl3 valve closed
11/5/2011	10:26:05 PM	PH3 valve closed
11/5/2011	10:26:05 PM	SiCl4 pre valve closed
11/5/2011	10:26:05 PM	SiCl4 post valve closed
11/5/2011	10:26:05 PM	Bypass valve closed
11/5/2011	10:26:05 PM	Bubbler valve closed
11/5/2011	10:26:05 PM	Main Vac valve opened
11/5/2011	10:26:05 PM	Helium MFC set to  0.000000
11/5/2011	10:26:05 PM	H2 MFC set to  0.000000
11/5/2011	10:26:05 PM	BCl3 MFC set to  0.000000
11/5/2011	10:26:05 PM	PHl3 MFC set to  0.000000
11/5/2011	10:26:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:26:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:26:05 PM	Tube furnace set to 150
11/5/2011	10:26:35 PM	H2 valve closed
11/5/2011	10:26:35 PM	BCl3 valve closed
11/5/2011	10:26:35 PM	PH3 valve closed
11/5/2011	10:26:35 PM	SiCl4 pre valve closed
11/5/2011	10:26:35 PM	SiCl4 post valve closed
11/5/2011	10:26:35 PM	Bypass valve closed
11/5/2011	10:26:35 PM	Bubbler valve closed
11/5/2011	10:26:35 PM	Helium valve opened
11/5/2011	10:26:35 PM	Main Vac valve opened
11/5/2011	10:26:35 PM	Helium MFC set to  20.000000
11/5/2011	10:26:35 PM	H2 MFC set to  0.000000
11/5/2011	10:26:35 PM	BCl3 MFC set to  0.000000
11/5/2011	10:26:35 PM	PHl3 MFC set to  0.000000
11/5/2011	10:26:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:26:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:26:35 PM	Tube furnace set to 180
11/5/2011	10:27:05 PM	Helium valve closed
11/5/2011	10:27:05 PM	H2 valve closed
11/5/2011	10:27:05 PM	BCl3 valve closed
11/5/2011	10:27:05 PM	PH3 valve closed
11/5/2011	10:27:05 PM	SiCl4 pre valve closed
11/5/2011	10:27:05 PM	SiCl4 post valve closed
11/5/2011	10:27:05 PM	Bypass valve closed
11/5/2011	10:27:05 PM	Bubbler valve closed
11/5/2011	10:27:05 PM	Main Vac valve opened
11/5/2011	10:27:05 PM	Helium MFC set to  0.000000
11/5/2011	10:27:05 PM	H2 MFC set to  0.000000
11/5/2011	10:27:05 PM	BCl3 MFC set to  0.000000
11/5/2011	10:27:05 PM	PHl3 MFC set to  0.000000
11/5/2011	10:27:05 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:27:05 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:27:05 PM	Tube furnace set to 150
11/5/2011	10:27:35 PM	H2 valve closed
11/5/2011	10:27:35 PM	BCl3 valve closed
11/5/2011	10:27:35 PM	PH3 valve closed
11/5/2011	10:27:35 PM	SiCl4 pre valve closed
11/5/2011	10:27:35 PM	SiCl4 post valve closed
11/5/2011	10:27:35 PM	Bypass valve closed
11/5/2011	10:27:35 PM	Bubbler valve closed
11/5/2011	10:27:35 PM	Helium valve opened
11/5/2011	10:27:35 PM	Main Vac valve opened
11/5/2011	10:27:35 PM	Helium MFC set to  20.000000
11/5/2011	10:27:35 PM	H2 MFC set to  0.000000
11/5/2011	10:27:35 PM	BCl3 MFC set to  0.000000
11/5/2011	10:27:35 PM	PHl3 MFC set to  0.000000
11/5/2011	10:27:35 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:27:35 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:27:35 PM	Tube furnace set to 150
11/5/2011	10:28:06 PM	Helium valve closed
11/5/2011	10:28:06 PM	H2 valve closed
11/5/2011	10:28:06 PM	BCl3 valve closed
11/5/2011	10:28:06 PM	PH3 valve closed
11/5/2011	10:28:06 PM	SiCl4 pre valve closed
11/5/2011	10:28:06 PM	SiCl4 post valve closed
11/5/2011	10:28:06 PM	Bypass valve closed
11/5/2011	10:28:06 PM	Bubbler valve closed
11/5/2011	10:28:06 PM	Main Vac valve opened
11/5/2011	10:28:06 PM	Helium MFC set to  0.000000
11/5/2011	10:28:06 PM	H2 MFC set to  0.000000
11/5/2011	10:28:06 PM	BCl3 MFC set to  0.000000
11/5/2011	10:28:06 PM	PHl3 MFC set to  0.000000
11/5/2011	10:28:06 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:28:06 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:28:06 PM	Tube furnace set to 150
11/5/2011	10:28:36 PM	H2 valve closed
11/5/2011	10:28:36 PM	BCl3 valve closed
11/5/2011	10:28:36 PM	PH3 valve closed
11/5/2011	10:28:36 PM	SiCl4 pre valve closed
11/5/2011	10:28:36 PM	SiCl4 post valve closed
11/5/2011	10:28:36 PM	Bypass valve closed
11/5/2011	10:28:36 PM	Bubbler valve closed
11/5/2011	10:28:36 PM	Helium valve opened
11/5/2011	10:28:36 PM	Main Vac valve opened
11/5/2011	10:28:36 PM	Helium MFC set to  20.000000
11/5/2011	10:28:36 PM	H2 MFC set to  0.000000
11/5/2011	10:28:36 PM	BCl3 MFC set to  0.000000
11/5/2011	10:28:36 PM	PHl3 MFC set to  0.000000
11/5/2011	10:28:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:28:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:28:36 PM	Tube furnace set to 150
11/5/2011	10:29:06 PM	Helium valve closed
11/5/2011	10:29:06 PM	H2 valve closed
11/5/2011	10:29:06 PM	BCl3 valve closed
11/5/2011	10:29:06 PM	PH3 valve closed
11/5/2011	10:29:06 PM	SiCl4 pre valve closed
11/5/2011	10:29:06 PM	SiCl4 post valve closed
11/5/2011	10:29:06 PM	Bypass valve closed
11/5/2011	10:29:06 PM	Bubbler valve closed
11/5/2011	10:29:06 PM	Main Vac valve opened
11/5/2011	10:29:06 PM	Helium MFC set to  0.000000
11/5/2011	10:29:06 PM	H2 MFC set to  0.000000
11/5/2011	10:29:06 PM	BCl3 MFC set to  0.000000
11/5/2011	10:29:06 PM	PHl3 MFC set to  0.000000
11/5/2011	10:29:06 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:29:06 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:29:06 PM	Tube furnace set to 150
11/5/2011	10:29:36 PM	H2 valve closed
11/5/2011	10:29:36 PM	BCl3 valve closed
11/5/2011	10:29:36 PM	PH3 valve closed
11/5/2011	10:29:36 PM	SiCl4 pre valve closed
11/5/2011	10:29:36 PM	SiCl4 post valve closed
11/5/2011	10:29:36 PM	Bypass valve closed
11/5/2011	10:29:36 PM	Bubbler valve closed
11/5/2011	10:29:36 PM	Helium valve opened
11/5/2011	10:29:36 PM	Main Vac valve opened
11/5/2011	10:29:36 PM	Helium MFC set to  20.000000
11/5/2011	10:29:36 PM	H2 MFC set to  0.000000
11/5/2011	10:29:36 PM	BCl3 MFC set to  0.000000
11/5/2011	10:29:36 PM	PHl3 MFC set to  0.000000
11/5/2011	10:29:36 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:29:36 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:29:36 PM	Tube furnace set to 150
11/5/2011	10:30:06 PM	Helium valve closed
11/5/2011	10:30:06 PM	H2 valve closed
11/5/2011	10:30:06 PM	BCl3 valve closed
11/5/2011	10:30:06 PM	PH3 valve closed
11/5/2011	10:30:06 PM	SiCl4 pre valve closed
11/5/2011	10:30:06 PM	SiCl4 post valve closed
11/5/2011	10:30:06 PM	Bypass valve closed
11/5/2011	10:30:06 PM	Bubbler valve closed
11/5/2011	10:30:06 PM	Main Vac valve opened
11/5/2011	10:30:06 PM	Helium MFC set to  0.000000
11/5/2011	10:30:06 PM	H2 MFC set to  0.000000
11/5/2011	10:30:06 PM	BCl3 MFC set to  0.000000
11/5/2011	10:30:06 PM	PHl3 MFC set to  0.000000
11/5/2011	10:30:06 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:30:06 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:30:06 PM	Tube furnace set to 150
11/5/2011	10:30:36 PM	H2 valve closed
11/5/2011	10:30:36 PM	BCl3 valve closed
11/5/2011	10:30:36 PM	PH3 valve closed
11/5/2011	10:30:36 PM	SiCl4 pre valve closed
11/5/2011	10:30:36 PM	SiCl4 post valve closed
11/5/2011	10:30:36 PM	Bypass valve closed
11/5/2011	10:30:36 PM	Bubbler valve closed
11/5/2011	10:30:37 PM	Helium valve opened
11/5/2011	10:30:37 PM	Main Vac valve opened
11/5/2011	10:30:37 PM	Helium MFC set to  20.000000
11/5/2011	10:30:37 PM	H2 MFC set to  0.000000
11/5/2011	10:30:37 PM	BCl3 MFC set to  0.000000
11/5/2011	10:30:37 PM	PHl3 MFC set to  0.000000
11/5/2011	10:30:37 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:30:37 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:30:37 PM	Tube furnace set to 150
11/5/2011	10:31:07 PM	Helium valve closed
11/5/2011	10:31:07 PM	H2 valve closed
11/5/2011	10:31:07 PM	BCl3 valve closed
11/5/2011	10:31:07 PM	PH3 valve closed
11/5/2011	10:31:07 PM	SiCl4 pre valve closed
11/5/2011	10:31:07 PM	SiCl4 post valve closed
11/5/2011	10:31:07 PM	Bypass valve closed
11/5/2011	10:31:07 PM	Bubbler valve closed
11/5/2011	10:31:07 PM	Main Vac valve opened
11/5/2011	10:31:07 PM	Helium MFC set to  0.000000
11/5/2011	10:31:07 PM	H2 MFC set to  0.000000
11/5/2011	10:31:07 PM	BCl3 MFC set to  0.000000
11/5/2011	10:31:07 PM	PHl3 MFC set to  0.000000
11/5/2011	10:31:07 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:31:07 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:31:07 PM	Tube furnace set to 150
11/5/2011	10:31:37 PM	H2 valve closed
11/5/2011	10:31:37 PM	BCl3 valve closed
11/5/2011	10:31:37 PM	PH3 valve closed
11/5/2011	10:31:37 PM	SiCl4 pre valve closed
11/5/2011	10:31:37 PM	SiCl4 post valve closed
11/5/2011	10:31:37 PM	Bypass valve closed
11/5/2011	10:31:37 PM	Bubbler valve closed
11/5/2011	10:31:37 PM	Helium valve opened
11/5/2011	10:31:37 PM	Main Vac valve opened
11/5/2011	10:31:37 PM	Helium MFC set to  20.000000
11/5/2011	10:31:37 PM	H2 MFC set to  0.000000
11/5/2011	10:31:37 PM	BCl3 MFC set to  0.000000
11/5/2011	10:31:37 PM	PHl3 MFC set to  0.000000
11/5/2011	10:31:37 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:31:37 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:31:37 PM	Tube furnace set to 150
11/5/2011	10:32:07 PM	Helium valve closed
11/5/2011	10:32:07 PM	H2 valve closed
11/5/2011	10:32:07 PM	BCl3 valve closed
11/5/2011	10:32:07 PM	PH3 valve closed
11/5/2011	10:32:07 PM	SiCl4 pre valve closed
11/5/2011	10:32:07 PM	SiCl4 post valve closed
11/5/2011	10:32:07 PM	Bypass valve closed
11/5/2011	10:32:07 PM	Bubbler valve closed
11/5/2011	10:32:07 PM	Main Vac valve opened
11/5/2011	10:32:07 PM	Helium MFC set to  0.000000
11/5/2011	10:32:07 PM	H2 MFC set to  0.000000
11/5/2011	10:32:07 PM	BCl3 MFC set to  0.000000
11/5/2011	10:32:07 PM	PHl3 MFC set to  0.000000
11/5/2011	10:32:07 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:32:07 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:32:07 PM	Tube furnace set to 150
11/5/2011	10:32:37 PM	H2 valve closed
11/5/2011	10:32:37 PM	BCl3 valve closed
11/5/2011	10:32:37 PM	PH3 valve closed
11/5/2011	10:32:37 PM	SiCl4 pre valve closed
11/5/2011	10:32:37 PM	SiCl4 post valve closed
11/5/2011	10:32:37 PM	Bypass valve closed
11/5/2011	10:32:37 PM	Bubbler valve closed
11/5/2011	10:32:37 PM	Helium valve opened
11/5/2011	10:32:37 PM	Main Vac valve opened
11/5/2011	10:32:37 PM	Helium MFC set to  20.000000
11/5/2011	10:32:37 PM	H2 MFC set to  0.000000
11/5/2011	10:32:37 PM	BCl3 MFC set to  0.000000
11/5/2011	10:32:37 PM	PHl3 MFC set to  0.000000
11/5/2011	10:32:37 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:32:37 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:32:37 PM	Tube furnace set to 150
11/5/2011	10:33:07 PM	Helium valve closed
11/5/2011	10:33:07 PM	H2 valve closed
11/5/2011	10:33:07 PM	BCl3 valve closed
11/5/2011	10:33:07 PM	PH3 valve closed
11/5/2011	10:33:07 PM	SiCl4 pre valve closed
11/5/2011	10:33:07 PM	SiCl4 post valve closed
11/5/2011	10:33:07 PM	Bypass valve closed
11/5/2011	10:33:07 PM	Bubbler valve closed
11/5/2011	10:33:07 PM	Main Vac valve opened
11/5/2011	10:33:07 PM	Helium MFC set to  0.000000
11/5/2011	10:33:07 PM	H2 MFC set to  0.000000
11/5/2011	10:33:07 PM	BCl3 MFC set to  0.000000
11/5/2011	10:33:08 PM	PHl3 MFC set to  0.000000
11/5/2011	10:33:08 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:33:08 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:33:08 PM	Tube furnace set to 150
11/5/2011	10:33:38 PM	H2 valve closed
11/5/2011	10:33:38 PM	BCl3 valve closed
11/5/2011	10:33:38 PM	PH3 valve closed
11/5/2011	10:33:38 PM	SiCl4 pre valve closed
11/5/2011	10:33:38 PM	SiCl4 post valve closed
11/5/2011	10:33:38 PM	Bypass valve closed
11/5/2011	10:33:38 PM	Bubbler valve closed
11/5/2011	10:33:38 PM	Helium valve opened
11/5/2011	10:33:38 PM	Main Vac valve opened
11/5/2011	10:33:38 PM	Helium MFC set to  20.000000
11/5/2011	10:33:38 PM	H2 MFC set to  0.000000
11/5/2011	10:33:38 PM	BCl3 MFC set to  0.000000
11/5/2011	10:33:38 PM	PHl3 MFC set to  0.000000
11/5/2011	10:33:38 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:33:38 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:33:38 PM	Tube furnace set to 150
11/5/2011	10:34:08 PM	Helium valve closed
11/5/2011	10:34:08 PM	H2 valve closed
11/5/2011	10:34:08 PM	BCl3 valve closed
11/5/2011	10:34:08 PM	PH3 valve closed
11/5/2011	10:34:08 PM	SiCl4 pre valve closed
11/5/2011	10:34:08 PM	SiCl4 post valve closed
11/5/2011	10:34:08 PM	Bypass valve closed
11/5/2011	10:34:08 PM	Bubbler valve closed
11/5/2011	10:34:08 PM	Main Vac valve opened
11/5/2011	10:34:08 PM	Helium MFC set to  0.000000
11/5/2011	10:34:08 PM	H2 MFC set to  0.000000
11/5/2011	10:34:08 PM	BCl3 MFC set to  0.000000
11/5/2011	10:34:08 PM	PHl3 MFC set to  0.000000
11/5/2011	10:34:08 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:34:08 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:34:08 PM	Tube furnace set to 150
11/5/2011	10:34:38 PM	H2 valve closed
11/5/2011	10:34:38 PM	BCl3 valve closed
11/5/2011	10:34:38 PM	PH3 valve closed
11/5/2011	10:34:38 PM	SiCl4 pre valve closed
11/5/2011	10:34:38 PM	SiCl4 post valve closed
11/5/2011	10:34:38 PM	Bypass valve closed
11/5/2011	10:34:38 PM	Bubbler valve closed
11/5/2011	10:34:38 PM	Helium valve opened
11/5/2011	10:34:38 PM	Main Vac valve opened
11/5/2011	10:34:38 PM	Helium MFC set to  20.000000
11/5/2011	10:34:38 PM	H2 MFC set to  0.000000
11/5/2011	10:34:38 PM	BCl3 MFC set to  0.000000
11/5/2011	10:34:38 PM	PHl3 MFC set to  0.000000
11/5/2011	10:34:38 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:34:38 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:34:38 PM	Tube furnace set to 150
11/5/2011	10:35:08 PM	Helium valve closed
11/5/2011	10:35:08 PM	H2 valve closed
11/5/2011	10:35:08 PM	BCl3 valve closed
11/5/2011	10:35:08 PM	PH3 valve closed
11/5/2011	10:35:08 PM	SiCl4 pre valve closed
11/5/2011	10:35:08 PM	SiCl4 post valve closed
11/5/2011	10:35:08 PM	Bypass valve closed
11/5/2011	10:35:08 PM	Bubbler valve closed
11/5/2011	10:35:08 PM	Main Vac valve opened
11/5/2011	10:35:08 PM	Helium MFC set to  0.000000
11/5/2011	10:35:08 PM	H2 MFC set to  0.000000
11/5/2011	10:35:08 PM	BCl3 MFC set to  0.000000
11/5/2011	10:35:08 PM	PHl3 MFC set to  0.000000
11/5/2011	10:35:08 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:35:08 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:35:08 PM	Tube furnace set to 150
11/5/2011	10:35:38 PM	H2 valve closed
11/5/2011	10:35:38 PM	BCl3 valve closed
11/5/2011	10:35:39 PM	PH3 valve closed
11/5/2011	10:35:39 PM	SiCl4 pre valve closed
11/5/2011	10:35:39 PM	SiCl4 post valve closed
11/5/2011	10:35:39 PM	Bypass valve closed
11/5/2011	10:35:39 PM	Bubbler valve closed
11/5/2011	10:35:39 PM	Helium valve opened
11/5/2011	10:35:39 PM	Main Vac valve opened
11/5/2011	10:35:39 PM	Helium MFC set to  20.000000
11/5/2011	10:35:39 PM	H2 MFC set to  0.000000
11/5/2011	10:35:39 PM	BCl3 MFC set to  0.000000
11/5/2011	10:35:39 PM	PHl3 MFC set to  0.000000
11/5/2011	10:35:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:35:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:35:39 PM	Tube furnace set to 150
11/5/2011	10:36:09 PM	Helium valve closed
11/5/2011	10:36:09 PM	H2 valve closed
11/5/2011	10:36:09 PM	BCl3 valve closed
11/5/2011	10:36:09 PM	PH3 valve closed
11/5/2011	10:36:09 PM	SiCl4 pre valve closed
11/5/2011	10:36:09 PM	SiCl4 post valve closed
11/5/2011	10:36:09 PM	Bypass valve closed
11/5/2011	10:36:09 PM	Bubbler valve closed
11/5/2011	10:36:09 PM	Main Vac valve opened
11/5/2011	10:36:09 PM	Helium MFC set to  0.000000
11/5/2011	10:36:09 PM	H2 MFC set to  0.000000
11/5/2011	10:36:09 PM	BCl3 MFC set to  0.000000
11/5/2011	10:36:09 PM	PHl3 MFC set to  0.000000
11/5/2011	10:36:09 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:36:09 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:36:09 PM	Tube furnace set to 150
11/5/2011	10:36:39 PM	H2 valve closed
11/5/2011	10:36:39 PM	BCl3 valve closed
11/5/2011	10:36:39 PM	PH3 valve closed
11/5/2011	10:36:39 PM	SiCl4 pre valve closed
11/5/2011	10:36:39 PM	SiCl4 post valve closed
11/5/2011	10:36:39 PM	Bypass valve closed
11/5/2011	10:36:39 PM	Bubbler valve closed
11/5/2011	10:36:39 PM	Helium valve opened
11/5/2011	10:36:39 PM	Main Vac valve opened
11/5/2011	10:36:39 PM	Helium MFC set to  20.000000
11/5/2011	10:36:39 PM	H2 MFC set to  0.000000
11/5/2011	10:36:39 PM	BCl3 MFC set to  0.000000
11/5/2011	10:36:39 PM	PHl3 MFC set to  0.000000
11/5/2011	10:36:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:36:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:36:39 PM	Tube furnace set to 150
11/5/2011	10:37:09 PM	Helium valve closed
11/5/2011	10:37:09 PM	H2 valve closed
11/5/2011	10:37:09 PM	BCl3 valve closed
11/5/2011	10:37:09 PM	PH3 valve closed
11/5/2011	10:37:09 PM	SiCl4 pre valve closed
11/5/2011	10:37:09 PM	SiCl4 post valve closed
11/5/2011	10:37:09 PM	Bypass valve closed
11/5/2011	10:37:09 PM	Bubbler valve closed
11/5/2011	10:37:09 PM	Main Vac valve opened
11/5/2011	10:37:09 PM	Helium MFC set to  0.000000
11/5/2011	10:37:09 PM	H2 MFC set to  0.000000
11/5/2011	10:37:09 PM	BCl3 MFC set to  0.000000
11/5/2011	10:37:09 PM	PHl3 MFC set to  0.000000
11/5/2011	10:37:09 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:37:09 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:37:09 PM	Tube furnace set to 150
11/5/2011	10:37:39 PM	H2 valve closed
11/5/2011	10:37:39 PM	BCl3 valve closed
11/5/2011	10:37:39 PM	PH3 valve closed
11/5/2011	10:37:39 PM	SiCl4 pre valve closed
11/5/2011	10:37:39 PM	SiCl4 post valve closed
11/5/2011	10:37:39 PM	Bypass valve closed
11/5/2011	10:37:39 PM	Bubbler valve closed
11/5/2011	10:37:39 PM	Helium valve opened
11/5/2011	10:37:39 PM	Main Vac valve opened
11/5/2011	10:37:39 PM	Helium MFC set to  20.000000
11/5/2011	10:37:39 PM	H2 MFC set to  0.000000
11/5/2011	10:37:39 PM	BCl3 MFC set to  0.000000
11/5/2011	10:37:39 PM	PHl3 MFC set to  0.000000
11/5/2011	10:37:39 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:37:39 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:37:40 PM	Tube furnace set to 150
11/5/2011	10:38:10 PM	Helium valve closed
11/5/2011	10:38:10 PM	H2 valve closed
11/5/2011	10:38:10 PM	BCl3 valve closed
11/5/2011	10:38:10 PM	PH3 valve closed
11/5/2011	10:38:10 PM	SiCl4 pre valve closed
11/5/2011	10:38:10 PM	SiCl4 post valve closed
11/5/2011	10:38:10 PM	Bypass valve closed
11/5/2011	10:38:10 PM	Bubbler valve closed
11/5/2011	10:38:10 PM	Main Vac valve opened
11/5/2011	10:38:10 PM	Helium MFC set to  0.000000
11/5/2011	10:38:10 PM	H2 MFC set to  0.000000
11/5/2011	10:38:10 PM	BCl3 MFC set to  0.000000
11/5/2011	10:38:10 PM	PHl3 MFC set to  0.000000
11/5/2011	10:38:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:38:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:38:10 PM	Tube furnace set to 150
11/5/2011	10:38:40 PM	H2 valve closed
11/5/2011	10:38:40 PM	BCl3 valve closed
11/5/2011	10:38:40 PM	PH3 valve closed
11/5/2011	10:38:40 PM	SiCl4 pre valve closed
11/5/2011	10:38:40 PM	SiCl4 post valve closed
11/5/2011	10:38:40 PM	Bypass valve closed
11/5/2011	10:38:40 PM	Bubbler valve closed
11/5/2011	10:38:40 PM	Helium valve opened
11/5/2011	10:38:40 PM	Main Vac valve opened
11/5/2011	10:38:40 PM	Helium MFC set to  20.000000
11/5/2011	10:38:40 PM	H2 MFC set to  0.000000
11/5/2011	10:38:40 PM	BCl3 MFC set to  0.000000
11/5/2011	10:38:40 PM	PHl3 MFC set to  0.000000
11/5/2011	10:38:40 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:38:40 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:38:40 PM	Tube furnace set to 150
11/5/2011	10:39:10 PM	Helium valve closed
11/5/2011	10:39:10 PM	H2 valve closed
11/5/2011	10:39:10 PM	BCl3 valve closed
11/5/2011	10:39:10 PM	PH3 valve closed
11/5/2011	10:39:10 PM	SiCl4 pre valve closed
11/5/2011	10:39:10 PM	SiCl4 post valve closed
11/5/2011	10:39:10 PM	Bypass valve closed
11/5/2011	10:39:10 PM	Bubbler valve closed
11/5/2011	10:39:10 PM	Main Vac valve opened
11/5/2011	10:39:10 PM	Helium MFC set to  0.000000
11/5/2011	10:39:10 PM	H2 MFC set to  0.000000
11/5/2011	10:39:10 PM	BCl3 MFC set to  0.000000
11/5/2011	10:39:10 PM	PHl3 MFC set to  0.000000
11/5/2011	10:39:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:39:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:39:10 PM	Tube furnace set to 150
11/5/2011	10:39:40 PM	H2 valve closed
11/5/2011	10:39:40 PM	BCl3 valve closed
11/5/2011	10:39:40 PM	PH3 valve closed
11/5/2011	10:39:40 PM	SiCl4 pre valve closed
11/5/2011	10:39:40 PM	SiCl4 post valve closed
11/5/2011	10:39:40 PM	Bypass valve closed
11/5/2011	10:39:40 PM	Bubbler valve closed
11/5/2011	10:39:40 PM	Helium valve opened
11/5/2011	10:39:40 PM	Main Vac valve opened
11/5/2011	10:39:40 PM	Helium MFC set to  20.000000
11/5/2011	10:39:40 PM	H2 MFC set to  0.000000
11/5/2011	10:39:40 PM	BCl3 MFC set to  0.000000
11/5/2011	10:39:40 PM	PHl3 MFC set to  0.000000
11/5/2011	10:39:40 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:39:40 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:39:40 PM	Tube furnace set to 150
11/5/2011	10:40:10 PM	Helium valve closed
11/5/2011	10:40:10 PM	H2 valve closed
11/5/2011	10:40:10 PM	BCl3 valve closed
11/5/2011	10:40:10 PM	PH3 valve closed
11/5/2011	10:40:10 PM	SiCl4 pre valve closed
11/5/2011	10:40:10 PM	SiCl4 post valve closed
11/5/2011	10:40:10 PM	Bypass valve closed
11/5/2011	10:40:10 PM	Bubbler valve closed
11/5/2011	10:40:10 PM	Main Vac valve opened
11/5/2011	10:40:10 PM	Helium MFC set to  0.000000
11/5/2011	10:40:10 PM	H2 MFC set to  0.000000
11/5/2011	10:40:10 PM	BCl3 MFC set to  0.000000
11/5/2011	10:40:10 PM	PHl3 MFC set to  0.000000
11/5/2011	10:40:10 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:40:10 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:40:11 PM	Tube furnace set to 150
11/5/2011	10:40:41 PM	H2 valve closed
11/5/2011	10:40:41 PM	BCl3 valve closed
11/5/2011	10:40:41 PM	PH3 valve closed
11/5/2011	10:40:41 PM	SiCl4 pre valve closed
11/5/2011	10:40:41 PM	SiCl4 post valve closed
11/5/2011	10:40:41 PM	Bypass valve closed
11/5/2011	10:40:41 PM	Bubbler valve closed
11/5/2011	10:40:41 PM	Helium valve opened
11/5/2011	10:40:41 PM	Main Vac valve opened
11/5/2011	10:40:41 PM	Helium MFC set to  20.000000
11/5/2011	10:40:41 PM	H2 MFC set to  0.000000
11/5/2011	10:40:41 PM	BCl3 MFC set to  0.000000
11/5/2011	10:40:41 PM	PHl3 MFC set to  0.000000
11/5/2011	10:40:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:40:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:40:41 PM	Tube furnace set to 150
11/5/2011	10:41:11 PM	Helium valve closed
11/5/2011	10:41:11 PM	H2 valve closed
11/5/2011	10:41:11 PM	BCl3 valve closed
11/5/2011	10:41:11 PM	PH3 valve closed
11/5/2011	10:41:11 PM	SiCl4 pre valve closed
11/5/2011	10:41:11 PM	SiCl4 post valve closed
11/5/2011	10:41:11 PM	Bypass valve closed
11/5/2011	10:41:11 PM	Bubbler valve closed
11/5/2011	10:41:11 PM	Main Vac valve opened
11/5/2011	10:41:11 PM	Helium MFC set to  0.000000
11/5/2011	10:41:11 PM	H2 MFC set to  0.000000
11/5/2011	10:41:11 PM	BCl3 MFC set to  0.000000
11/5/2011	10:41:11 PM	PHl3 MFC set to  0.000000
11/5/2011	10:41:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:41:11 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:41:11 PM	Tube furnace set to 150
11/5/2011	10:41:41 PM	H2 valve closed
11/5/2011	10:41:41 PM	BCl3 valve closed
11/5/2011	10:41:41 PM	PH3 valve closed
11/5/2011	10:41:41 PM	SiCl4 pre valve closed
11/5/2011	10:41:41 PM	SiCl4 post valve closed
11/5/2011	10:41:41 PM	Bypass valve closed
11/5/2011	10:41:41 PM	Bubbler valve closed
11/5/2011	10:41:41 PM	Helium valve opened
11/5/2011	10:41:41 PM	Main Vac valve opened
11/5/2011	10:41:41 PM	Helium MFC set to  20.000000
11/5/2011	10:41:41 PM	H2 MFC set to  0.000000
11/5/2011	10:41:41 PM	BCl3 MFC set to  0.000000
11/5/2011	10:41:41 PM	PHl3 MFC set to  0.000000
11/5/2011	10:41:41 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:41:41 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:41:41 PM	Tube furnace set to 150
11/5/2011	10:42:11 PM	Helium valve closed
11/5/2011	10:42:11 PM	H2 valve closed
11/5/2011	10:42:11 PM	BCl3 valve closed
11/5/2011	10:42:11 PM	PH3 valve closed
11/5/2011	10:42:11 PM	SiCl4 pre valve closed
11/5/2011	10:42:11 PM	SiCl4 post valve closed
11/5/2011	10:42:11 PM	Bypass valve closed
11/5/2011	10:42:11 PM	Bubbler valve closed
11/5/2011	10:42:11 PM	Main Vac valve opened
11/5/2011	10:42:11 PM	Helium MFC set to  0.000000
11/5/2011	10:42:11 PM	H2 MFC set to  0.000000
11/5/2011	10:42:11 PM	BCl3 MFC set to  0.000000
11/5/2011	10:42:11 PM	PHl3 MFC set to  0.000000
11/5/2011	10:42:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:42:11 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:42:11 PM	Tube furnace set to 150
11/5/2011	10:42:42 PM	H2 valve closed
11/5/2011	10:42:42 PM	BCl3 valve closed
11/5/2011	10:42:42 PM	PH3 valve closed
11/5/2011	10:42:42 PM	SiCl4 pre valve closed
11/5/2011	10:42:42 PM	SiCl4 post valve closed
11/5/2011	10:42:42 PM	Bypass valve closed
11/5/2011	10:42:42 PM	Bubbler valve closed
11/5/2011	10:42:42 PM	Helium valve opened
11/5/2011	10:42:42 PM	Main Vac valve opened
11/5/2011	10:42:42 PM	Helium MFC set to  20.000000
11/5/2011	10:42:42 PM	H2 MFC set to  0.000000
11/5/2011	10:42:42 PM	BCl3 MFC set to  0.000000
11/5/2011	10:42:42 PM	PHl3 MFC set to  0.000000
11/5/2011	10:42:42 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:42:42 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:42:42 PM	Tube furnace set to 150
11/5/2011	10:43:12 PM	Helium valve closed
11/5/2011	10:43:12 PM	H2 valve closed
11/5/2011	10:43:12 PM	BCl3 valve closed
11/5/2011	10:43:12 PM	PH3 valve closed
11/5/2011	10:43:12 PM	SiCl4 pre valve closed
11/5/2011	10:43:12 PM	SiCl4 post valve closed
11/5/2011	10:43:12 PM	Bypass valve closed
11/5/2011	10:43:12 PM	Bubbler valve closed
11/5/2011	10:43:12 PM	Main Vac valve opened
11/5/2011	10:43:12 PM	Helium MFC set to  0.000000
11/5/2011	10:43:12 PM	H2 MFC set to  0.000000
11/5/2011	10:43:12 PM	BCl3 MFC set to  0.000000
11/5/2011	10:43:12 PM	PHl3 MFC set to  0.000000
11/5/2011	10:43:12 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:43:12 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:43:12 PM	Tube furnace set to 180
11/5/2011	10:43:17 PM	Run finished at 10:43 PM
11/5/2011	10:49:11 PM	Recipe started at 10:48 PM
11/5/2011	10:49:11 PM	Helium valve closed
11/5/2011	10:49:11 PM	H2 valve closed
11/5/2011	10:49:11 PM	BCl3 valve closed
11/5/2011	10:49:11 PM	PH3 valve closed
11/5/2011	10:49:11 PM	SiCl4 pre valve closed
11/5/2011	10:49:11 PM	SiCl4 post valve closed
11/5/2011	10:49:11 PM	Main Vac valve closed
11/5/2011	10:49:11 PM	Bubbler valve closed
11/5/2011	10:49:11 PM	Bypass valve opened
11/5/2011	10:49:11 PM	Helium MFC set to  0.000000
11/5/2011	10:49:11 PM	H2 MFC set to  0.000000
11/5/2011	10:49:11 PM	BCl3 MFC set to  0.000000
11/5/2011	10:49:11 PM	PHl3 MFC set to  0.000000
11/5/2011	10:49:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:49:11 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:49:11 PM	Tube furnace set to 180
11/5/2011	10:49:11 PM	Run aborted at 10:49 PM
11/5/2011	10:49:11 PM	Helium valve closed
11/5/2011	10:49:11 PM	H2 valve closed
11/5/2011	10:49:11 PM	BCl3 valve closed
11/5/2011	10:49:11 PM	PH3 valve closed
11/5/2011	10:49:11 PM	SiCl4 pre valve closed
11/5/2011	10:49:11 PM	SiCl4 post valve closed
11/5/2011	10:49:11 PM	Bypass valve closed
11/5/2011	10:49:11 PM	Main Vac valve closed
11/5/2011	10:49:11 PM	Bubbler valve closed
11/5/2011	10:49:11 PM	Helium MFC set to  0.000000
11/5/2011	10:49:11 PM	H2 MFC set to  0.000000
11/5/2011	10:49:11 PM	BCl3 MFC set to  0.000000
11/5/2011	10:49:11 PM	PHl3 MFC set to  0.000000
11/5/2011	10:49:11 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:49:11 PM	Tube furnace set to 0
11/5/2011	10:49:13 PM	Main Vac valve opened
11/5/2011	10:51:51 PM	Main Vac valve closed
11/5/2011	10:52:01 PM	Main Vac valve opened
11/5/2011	10:52:44 PM	Recipe started at 10:52 PM
11/5/2011	10:52:44 PM	H2 valve closed
11/5/2011	10:52:44 PM	BCl3 valve closed
11/5/2011	10:52:44 PM	PH3 valve closed
11/5/2011	10:52:44 PM	SiCl4 pre valve closed
11/5/2011	10:52:44 PM	SiCl4 post valve closed
11/5/2011	10:52:44 PM	Main Vac valve closed
11/5/2011	10:52:44 PM	Bypass valve closed
11/5/2011	10:52:44 PM	Bubbler valve closed
11/5/2011	10:52:44 PM	Helium valve opened
11/5/2011	10:52:44 PM	Helium MFC set to  0.000000
11/5/2011	10:52:44 PM	H2 MFC set to  0.000000
11/5/2011	10:52:44 PM	BCl3 MFC set to  0.000000
11/5/2011	10:52:44 PM	PHl3 MFC set to  0.000000
11/5/2011	10:52:44 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:52:44 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:52:44 PM	Tube furnace set to 0
11/5/2011	10:52:47 PM	Helium valve closed
11/5/2011	10:52:47 PM	BCl3 valve closed
11/5/2011	10:52:47 PM	PH3 valve closed
11/5/2011	10:52:47 PM	SiCl4 pre valve closed
11/5/2011	10:52:47 PM	SiCl4 post valve closed
11/5/2011	10:52:47 PM	Main Vac valve closed
11/5/2011	10:52:47 PM	Bypass valve closed
11/5/2011	10:52:47 PM	Bubbler valve closed
11/5/2011	10:52:47 PM	H2 valve opened
11/5/2011	10:52:47 PM	Helium MFC set to  0.000000
11/5/2011	10:52:47 PM	H2 MFC set to  500.000000
11/5/2011	10:52:47 PM	BCl3 MFC set to  0.000000
11/5/2011	10:52:47 PM	PHl3 MFC set to  0.000000
11/5/2011	10:52:47 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:52:47 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:52:47 PM	Tube furnace set to 100
11/5/2011	10:53:50 PM	Helium valve closed
11/5/2011	10:53:50 PM	BCl3 valve closed
11/5/2011	10:53:50 PM	PH3 valve closed
11/5/2011	10:53:50 PM	SiCl4 pre valve closed
11/5/2011	10:53:50 PM	SiCl4 post valve closed
11/5/2011	10:53:50 PM	Main Vac valve closed
11/5/2011	10:53:50 PM	Bypass valve closed
11/5/2011	10:53:50 PM	H2 valve opened
11/5/2011	10:53:50 PM	Bubbler valve opened
11/5/2011	10:53:50 PM	Helium MFC set to  0.000000
11/5/2011	10:53:50 PM	H2 MFC set to  500.000000
11/5/2011	10:53:50 PM	BCl3 MFC set to  0.000000
11/5/2011	10:53:50 PM	PHl3 MFC set to  0.000000
11/5/2011	10:53:50 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:53:50 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:53:50 PM	Tube furnace set to 1000
11/5/2011	10:53:51 PM	Helium valve closed
11/5/2011	10:53:51 PM	BCl3 valve closed
11/5/2011	10:53:51 PM	PH3 valve closed
11/5/2011	10:53:51 PM	SiCl4 pre valve closed
11/5/2011	10:53:51 PM	SiCl4 post valve closed
11/5/2011	10:53:51 PM	Main Vac valve closed
11/5/2011	10:53:51 PM	Bypass valve closed
11/5/2011	10:53:51 PM	H2 valve opened
11/5/2011	10:53:51 PM	Bubbler valve opened
11/5/2011	10:53:51 PM	Helium MFC set to  0.000000
11/5/2011	10:53:51 PM	H2 MFC set to  500.000000
11/5/2011	10:53:51 PM	BCl3 MFC set to  0.000000
11/5/2011	10:53:51 PM	PHl3 MFC set to  0.000000
11/5/2011	10:53:51 PM	SiCl4 MFC set to  0.000000
11/5/2011	10:53:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	10:53:51 PM	Tube furnace set to 1000
11/5/2011	11:13:51 PM	Helium valve closed
11/5/2011	11:13:51 PM	BCl3 valve closed
11/5/2011	11:13:51 PM	PH3 valve closed
11/5/2011	11:13:51 PM	Main Vac valve closed
11/5/2011	11:13:51 PM	Bypass valve closed
11/5/2011	11:13:51 PM	H2 valve opened
11/5/2011	11:13:51 PM	SiCl4 pre valve opened
11/5/2011	11:13:51 PM	SiCl4 post valve opened
11/5/2011	11:13:51 PM	Bubbler valve opened
11/5/2011	11:13:51 PM	Helium MFC set to  0.000000
11/5/2011	11:13:51 PM	H2 MFC set to  500.000000
11/5/2011	11:13:51 PM	BCl3 MFC set to  0.000000
11/5/2011	11:13:51 PM	PHl3 MFC set to  0.000000
11/5/2011	11:13:51 PM	SiCl4 MFC set to  17.000000
11/5/2011	11:13:51 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:13:52 PM	Tube furnace set to 1000
11/5/2011	11:38:52 PM	Helium valve closed
11/5/2011	11:38:52 PM	BCl3 valve closed
11/5/2011	11:38:52 PM	PH3 valve closed
11/5/2011	11:38:52 PM	SiCl4 pre valve closed
11/5/2011	11:38:52 PM	SiCl4 post valve closed
11/5/2011	11:38:52 PM	Main Vac valve closed
11/5/2011	11:38:52 PM	Bypass valve closed
11/5/2011	11:38:52 PM	H2 valve opened
11/5/2011	11:38:52 PM	Bubbler valve opened
11/5/2011	11:38:52 PM	Helium MFC set to  0.000000
11/5/2011	11:38:52 PM	H2 MFC set to  500.000000
11/5/2011	11:38:52 PM	BCl3 MFC set to  0.000000
11/5/2011	11:38:52 PM	PHl3 MFC set to  0.000000
11/5/2011	11:38:52 PM	SiCl4 MFC set to  0.000000
11/5/2011	11:38:52 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:38:52 PM	Tube furnace set to 750
11/5/2011	11:48:52 PM	H2 valve closed
11/5/2011	11:48:52 PM	BCl3 valve closed
11/5/2011	11:48:52 PM	PH3 valve closed
11/5/2011	11:48:52 PM	SiCl4 pre valve closed
11/5/2011	11:48:52 PM	SiCl4 post valve closed
11/5/2011	11:48:52 PM	Main Vac valve closed
11/5/2011	11:48:52 PM	Bypass valve closed
11/5/2011	11:48:52 PM	Helium valve opened
11/5/2011	11:48:52 PM	Bubbler valve opened
11/5/2011	11:48:52 PM	Helium MFC set to  400.000000
11/5/2011	11:48:52 PM	H2 MFC set to  0.000000
11/5/2011	11:48:52 PM	BCl3 MFC set to  0.000000
11/5/2011	11:48:52 PM	PHl3 MFC set to  0.000000
11/5/2011	11:48:52 PM	SiCl4 MFC set to  0.000000
11/5/2011	11:48:52 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:48:52 PM	Tube furnace set to 0
11/5/2011	11:59:50 PM	Run aborted at 11:59 PM
11/5/2011	11:59:50 PM	Helium valve closed
11/5/2011	11:59:50 PM	H2 valve closed
11/5/2011	11:59:50 PM	BCl3 valve closed
11/5/2011	11:59:50 PM	PH3 valve closed
11/5/2011	11:59:50 PM	SiCl4 pre valve closed
11/5/2011	11:59:50 PM	SiCl4 post valve closed
11/5/2011	11:59:50 PM	Bypass valve closed
11/5/2011	11:59:50 PM	Main Vac valve closed
11/5/2011	11:59:50 PM	Bubbler valve closed
11/5/2011	11:59:50 PM	Helium MFC set to  0.000000
11/5/2011	11:59:50 PM	H2 MFC set to  0.000000
11/5/2011	11:59:50 PM	BCl3 MFC set to  0.000000
11/5/2011	11:59:50 PM	PHl3 MFC set to  0.000000
11/5/2011	11:59:50 PM	SiCl4 MFC set to  0.000000
11/5/2011	11:59:51 PM	Tube furnace set to 0
11/5/2011	11:59:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/5/2011	11:59:54 PM	Recipe started at 11:59 PM
11/5/2011	11:59:54 PM	Helium valve closed
11/5/2011	11:59:54 PM	H2 valve closed
11/5/2011	11:59:54 PM	BCl3 valve closed
11/5/2011	11:59:54 PM	PH3 valve closed
11/5/2011	11:59:54 PM	SiCl4 pre valve closed
11/5/2011	11:59:54 PM	SiCl4 post valve closed
11/5/2011	11:59:54 PM	Main Vac valve closed
11/5/2011	11:59:54 PM	Bypass valve closed
11/5/2011	11:59:54 PM	Bubbler valve closed
11/5/2011	11:59:54 PM	Helium MFC set to  0.000000
11/5/2011	11:59:54 PM	H2 MFC set to  0.000000
11/5/2011	11:59:54 PM	BCl3 MFC set to  0.000000
11/5/2011	11:59:54 PM	PHl3 MFC set to  0.000000
11/5/2011	11:59:54 PM	SiCl4 MFC set to  0.000000
11/5/2011	11:59:54 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:59:54 PM	Tube furnace set to 0
11/5/2011	11:59:57 PM	H2 valve closed
11/5/2011	11:59:57 PM	BCl3 valve closed
11/5/2011	11:59:57 PM	PH3 valve closed
11/5/2011	11:59:57 PM	SiCl4 pre valve closed
11/5/2011	11:59:57 PM	SiCl4 post valve closed
11/5/2011	11:59:57 PM	Main Vac valve closed
11/5/2011	11:59:57 PM	Bypass valve closed
11/5/2011	11:59:57 PM	Bubbler valve closed
11/5/2011	11:59:58 PM	Helium valve opened
11/5/2011	11:59:58 PM	Helium MFC set to  500.000000
11/5/2011	11:59:58 PM	H2 MFC set to  0.000000
11/5/2011	11:59:58 PM	BCl3 MFC set to  0.000000
11/5/2011	11:59:58 PM	PHl3 MFC set to  0.000000
11/5/2011	11:59:58 PM	SiCl4 MFC set to  0.000000
11/5/2011	11:59:58 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:59:58 PM	Tube furnace set to 0
11/5/2011	11:59:58 PM	Helium valve closed
11/5/2011	11:59:58 PM	H2 valve closed
11/5/2011	11:59:58 PM	BCl3 valve closed
11/5/2011	11:59:58 PM	PH3 valve closed
11/5/2011	11:59:58 PM	SiCl4 pre valve closed
11/5/2011	11:59:58 PM	SiCl4 post valve closed
11/5/2011	11:59:58 PM	Main Vac valve closed
11/5/2011	11:59:58 PM	Bypass valve closed
11/5/2011	11:59:58 PM	Bubbler valve closed
11/5/2011	11:59:58 PM	Helium MFC set to  0.000000
11/5/2011	11:59:58 PM	H2 MFC set to  0.000000
11/5/2011	11:59:58 PM	BCl3 MFC set to  0.000000
11/5/2011	11:59:58 PM	PHl3 MFC set to  0.000000
11/5/2011	11:59:58 PM	SiCl4 MFC set to  0.000000
11/5/2011	11:59:58 PM	Bypass solenoid MFC set to  0.000000
11/5/2011	11:59:58 PM	Tube furnace set to 0
11/5/2011	11:59:59 PM	Run finished at 11:59 PM
11/5/2011	11:59:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
